公开(公告)号：US08827275B2

公开(公告)日：2014-09-09

申请号：US13561875

申请日：2012-07-30

申请人： Hans-Juergen Heinrich ,  Ulf Seyfert ,  Peter Botzler

发明人： Hans-Juergen Heinrich ,  Ulf Seyfert ,  Peter Botzler

IPC分类号： F16J15/02 ,  F16J15/46 ,  F16J15/00 ,  F16J15/32

CPC分类号： F16J15/004 ,  F16J15/002 ,  F16J15/006 ,  F16J15/3208 ,  F16J15/3228 ,  F16J15/46

摘要： A sealing device for a rotary feedthrough for receiving a rotating machine element whose outer side can be applied to another machine element, includes at least two sealing elements disposed in tandem in the axial direction of the machine element. Inner sides of the sealing elements are configured for forming an active sealing connection with the rotating machine element. At least one of the sealing elements can be pressurized with an additional force acting in the radial direction so that the force of compression acting on the rotating machine element for the at least one of the sealing elements can be adjusted relative to the force of compression acting on the rotating machine element due to at least one other sealing element.

摘要翻译： 一种用于接收旋转机械元件的旋转馈通用密封装置，其外侧可以施加到另一个机器元件上，包括沿机器元件的轴向串联布置的至少两个密封元件。 密封元件的内侧被构造成用于与旋转的机器元件形成主动的密封连接。 密封元件中的至少一个可以以在径向方向上作用的附加力加压，使得作用在用于至少一个密封元件的旋转机械元件上的压缩力可相对于压缩作用力 由于至少一个其它密封元件在旋转的机器元件上。

公开(公告)号：US08716726B2

公开(公告)日：2014-05-06

申请号：US13992370

申请日：2011-12-07

申请人： Carsten Deus ,  Joerk Richter ,  Ruben Seifert

发明人： Carsten Deus ,  Joerk Richter ,  Ruben Seifert

IPC分类号： H01L29/20

CPC分类号： H01L51/56 ,  H01L27/3211 ,  H01L51/5265

摘要： A coating device for producing an organic light-emitting illuminant comprising mutually adjacent regions having in each case different emission colors, includes a vacuum chamber, a device for linearly transporting a substrate, and a plurality of coating sources and diaphragms, provides OLED structures which have an improved intensity of the light emission. The thicknesses of the hole transport, emission and electron transport layers in the mutually adjacent regions differ and are in each case set such that an optimum coupling-out for the light color emitted in the corresponding region is achievable.

摘要翻译： 一种用于制造有机发光光源的涂覆装置，其包括在各种情况下具有不同发光颜色的相互相邻的区域，包括真空室，用于线性运输基板的装置以及多个涂料源和隔膜，提供了OLED结构，其具有 改善了发光强度。 相邻区域中的空穴传输，发射和电子传输层的厚度不同，并且在每种情况下设置为使得可以实现在相应区域中发射的光色的最佳耦合输出。

公开(公告)号：US20140070689A1

公开(公告)日：2014-03-13

申请号：US14113472

申请日：2012-04-27

申请人： Harald Gross ,  Erwin Zschieschang

发明人： Harald Gross ,  Erwin Zschieschang

IPC分类号： H01J37/32 ,  H01J7/26

CPC分类号： H01J37/32522 ,  H01J7/26 ,  H01L21/67115

摘要： A substrate treatment installation includes an installation chamber and a light source for the exposure of substrates to light. The light source is arranged in the interior of the substrate treatment installation and includes at least one discharge lamp arranged in a housing, which is permeable to light at least in sections and has a vacuum-tight cavity for accommodating the lamp, and also at least one reflector element arranged in spatial proximity to the at least one lamp and having an electrical connection.

摘要翻译： 基板处理装置包括安装室和用于将基板曝光的光源。 光源布置在基板处理设备的内部，并且包括布置在壳体中的至少一个放电灯，其至少部分地透光，并且具有用于容纳灯的真空密封腔，并且还至少 一个反射器元件布置成与所述至少一个灯空间接近且具有电连接。

公开(公告)号：US08563084B2

公开(公告)日：2013-10-22

申请号：US12862290

申请日：2010-08-24

申请人： Harald Gross ,  Carsten Deus

发明人： Harald Gross ,  Carsten Deus

IPC分类号： C23C14/24

CPC分类号： C23C14/00 ,  C23C14/12 ,  C23C14/24 ,  C23C14/548

摘要： A process and a device for coating substrates with a stoichiometric gradient in an in-line coating system include at least two evaporation devices, each with an evaporator tube. The evaporator tubes are implemented so as to be tiltable independently of one another, whereby the transition area of the two vapor lobes can be adapted to the requirements of the gradient profile. Furthermore, the spacing of the evaporator tubes from the substrate and each other can be set.

摘要翻译： 在线涂布系统中用于涂覆化学计量梯度的基材的方法和装置包括至少两个蒸发装置，每个具有蒸发器管。 蒸发器管被实现为可彼此独立地倾斜，由此两个蒸气波瓣的过渡区域可以适应于梯度轮廓的要求。 此外，可以设置蒸发器管与基板和彼此的间隔。

公开(公告)号：US08377578B2

公开(公告)日：2013-02-19

申请号：US13349007

申请日：2012-01-12

申请人： Christoph Koeckert ,  Holger Proehl ,  Falk Milde

发明人： Christoph Koeckert ,  Holger Proehl ,  Falk Milde

IPC分类号： B32B15/04

CPC分类号： G02B5/281 ,  C03C17/36 ,  C03C17/3618 ,  C03C17/3626 ,  C03C17/3652 ,  C03C17/366 ,  C03C2217/734 ,  Y10T428/24942

摘要： An infrared radiation reflecting transparent layer system on a transparent substrate and a method for producing same is provided. The infrared radiation reflecting layer system comprises an infrared radiation reflecting layer sequence which includes a selective function usually consisting of a noble metal, mostly silver, or an alloy thereof and having a good selective reflectivity in the infrared range. The layer sequence is supplemented by at least one transparent dielectric layer of an oxynitride of a metal, a semiconductor or a semiconductor alloy having a low to moderate refractive index arranged directly on the substrate or above the infrared radiation reflecting layer sequence.

摘要翻译： 提供了在透明基板上的红外线反射透明层系统及其制造方法。 红外线辐射反射层系统包括红外辐射反射层序列，其包括通常由贵金属（大部分为银）或其合金组成的选择性功能，并且在红外范围具有良好的选择性反射率。 该层序列由至少一个金属氧化物的透明介电层，半导体或半导体合金的半导体或半导体合金补充，该半导体或半导体合金直接布置在基板上或红外线辐射反射层序列上。

公开(公告)号：US20120263885A1

公开(公告)日：2012-10-18

申请号：US13444298

申请日：2012-04-11

申请人： Christoph KOECKERT ,  Markus BERENDT

发明人： Christoph KOECKERT ,  Markus BERENDT

IPC分类号： C23C28/00

CPC分类号： G02B5/0858 ,  C23C14/10 ,  C23C28/04 ,  F24S23/82 ,  G02B5/0875 ,  Y02E10/40

摘要： In method for the manufacture of a reflective layer system on a substrate with at least one metallic reflective layer, a dielectric, transparent layer is deposited on the substrate as a silicon oxide containing layer using a suitable PVD process. The coated substrate subsequently is transferred out of the vacuum and at least one metallic reflective layer is deposited via a wet-chemical process.

摘要翻译： 在具有至少一个金属反射层的衬底上制造反射层系统的方法中，使用合适的PVD工艺将电介质透明层作为含氧化硅的层沉积在衬底上。 随后将涂覆的基底转移出真空，并通过湿化学方法沉积至少一个金属反射层。

公开(公告)号：US08197222B2

公开(公告)日：2012-06-12

申请号：US12306956

申请日：2007-07-04

申请人： Falk Milde ,  Hans-Christian Hecht ,  Joern Brueckner

发明人： Falk Milde ,  Hans-Christian Hecht ,  Joern Brueckner

IPC分类号： F04B37/02

CPC分类号： C23C14/56 ,  F04B37/02

摘要： A highly efficient getter pump with low maintenance requirements is applied to a vacuum coating installation, allowing a substrate to be coated to remain uncontaminated by a dusting of getter material. The getter pump comprises a pump housing with an exposure opening. The housing has a getter body, of getter material that essentially closes the exposure opening and can move in relation to the exposure opening. An inner sub-section of the surface of the getter body points towards the interior of the pump housing and an outer sub-section points towards the exterior of the pump housing through the exposure opening. The positions of the inner and outer sub-sections are interchangeable by movement of the getter body. The getter pump is equipped with a device for removing getter material from the inner sub-section.

摘要翻译： 将具有低维护要求的高效吸气泵应用于真空涂布设备，使得可以通过吸气剂材料的除尘来涂覆基材以保持未被污染。 吸气泵包括具有曝光开口的泵壳体。 壳体具有吸气体，吸气剂材料基本上封闭曝光开口并且可以相对于曝光开口移动。 吸气体表面的内部子部分指向泵壳体的内部，并且外部子部分通过曝光开口指向泵壳体的外部。 内部和外部子部分的位置可以通过吸气体的移动而互换。 吸气泵配备有用于从内部子部分去除吸气剂材料的装置。

公开(公告)号：US08192598B2

公开(公告)日：2012-06-05

申请号：US12504700

申请日：2009-07-17

申请人： Hans-Juergen Heinrich ,  Goetz Grosser ,  Sven Haehne ,  Ulf Seyfert

发明人： Hans-Juergen Heinrich ,  Goetz Grosser ,  Sven Haehne ,  Ulf Seyfert

IPC分类号： C23C14/35

CPC分类号： H01J37/3405 ,  H01J37/3435

摘要： An end block for a magnetron device having a rotatable target comprises an end block housing having a pivot bearing. The end block housing is adapted on its outer side for attachment on a support unit, and the pivot bearing is adapted on an end that is accessible from outside the end block housing, for connection to the rotatable target. The end block housing is movably attached on the support unit. A vacuum coating apparatus has a vacuum chamber, a magnetron device situated in the vacuum chamber, and a rotatable target rotatably mounted on at least one such end block.

摘要翻译： 用于具有可旋转靶的磁控管装置的端块包括具有枢转轴承的端块壳体。 端块壳体在其外侧适于附接在支撑单元上，并且枢转轴承适于在端部壳体外部可接近的端部上，用于连接到可旋转靶。 端块壳体可移动地附接在支撑单元上。 真空镀膜装置具有真空室，位于真空室中的磁控管装置，以及可旋转地安装在至少一个这样的端块上的可旋转靶。

公开(公告)号：US08127712B2

公开(公告)日：2012-03-06

申请号：US12280931

申请日：2007-07-09

申请人： Reinhardt Bauer ,  Frank Hupka ,  Andreas Heisig ,  Johannes Struempfel ,  Hans-Christian Hecht ,  Wolfgang Erbkamm

发明人： Reinhardt Bauer ,  Frank Hupka ,  Andreas Heisig ,  Johannes Struempfel ,  Hans-Christian Hecht ,  Wolfgang Erbkamm

IPC分类号： B65G37/00 ,  B65G15/24 ,  B05C13/00

CPC分类号： B65G37/005 ,  B65G15/24 ,  C23C14/568

摘要： A vacuum coating unit having a pair of side by side transport devices for transporting substrates in a transport direction. Each transport device includes at least one first endless conveyor running in the transport direction and having a conveying element guided around at least two guide rollers or pulleys. The conveying element is located at a distance from a guide device extending in the transport direction parallel to the conveying element in such a way that the ends of the substrates can be introduced into the gap between the conveying element and the guide device of the transport devices and can be moved in the transport direction by the displacement of the conveying elements.

摘要翻译： 一种真空镀膜装置，具有一对并排运送装置，用于在输送方向上输送基材。 每个输送装置包括至少一个在输送方向上运行的第一环形输送机，并具有围绕至少两个导辊或滑轮引导的输送元件。 输送元件位于与沿输送方向平行于输送元件延伸的引导装置一定距离处，使得基板的端部能够被引入到输送元件和输送装置的引导装置之间的间隙中 并且可以通过输送元件的位移在输送方向上移动。

公开(公告)号：US08033781B2

公开(公告)日：2011-10-11

申请号：US12730683

申请日：2010-03-24

申请人： Johannes Struempfel ,  Reinhardt Bauer ,  Andrewas Heisig ,  Hans-Christian Hecht ,  Hartmut Freitag ,  Heiko Richter ,  Andre Ulbricht ,  Falk Schwerdtfeger

发明人： Johannes Struempfel ,  Reinhardt Bauer ,  Andrewas Heisig ,  Hans-Christian Hecht ,  Hartmut Freitag ,  Heiko Richter ,  Andre Ulbricht ,  Falk Schwerdtfeger

IPC分类号： B65G47/34

CPC分类号： C23C14/56 ,  Y10S414/123

摘要： A transport device for transporting elongated substrates through a vacuum coating system comprises an essentially rectangular frame and two groups of holding elements, which are rotatably mounted on opposite sides of the frame in such a manner that any pair of opposite holding elements can be connected to both ends of a substrate. Furthermore, at least one retainer bar is provided that is operatively connected to a group of holding elements in such a manner that the holding elements of this group are moveable in order to increase or decrease by choice their distance from the holding elements of the other group. Also provided are a loading and unloading device for loading and unloading the transport device, and a method for loading and unloading the transport device.

摘要翻译： 用于通过真空涂覆系统传送细长基材的输送装置包括基本上矩形的框架和两组保持元件，这些保持元件可旋转地安装在框架的相对侧上，使得任何一对相对的保持元件可以连接到两个 底物的末端。 此外，提供了至少一个保持杆，其以这样的方式可操作地连接到一组保持元件，使得该组的保持元件可移动，以便通过选择它们与另一组的保持元件的距离来增加或减少 。 还提供了用于装载和卸载运输装置的装载和卸载装置，以及用于装载和卸载运输装置的方法。