公开(公告)号：US09889655B2

公开(公告)日：2018-02-13

申请号：US15006756

申请日：2016-01-26

Applicant: SEIKO EPSON CORPORATION

Inventor： Shuichi Tanaka

IPC: B41J2/14 ,  B41J2/16

CPC classification number: B41J2/1433 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/162 ,  B41J2/1623 ,  B41J2/1625 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1646 ,  B41J2002/1425 ,  B41J2002/14362 ,  B41J2002/14491 ,  B41J2202/18

Abstract: A liquid ejecting head and a method of manufacturing the liquid ejecting head are provided. The liquid ejecting head has a pressure chamber forming substrate that includes a plurality of piezoelectric elements and that is connected to a first surface of a sealing plate, a driver IC that outputs signals that drive the piezoelectric elements and that is provided on a second surface of the sealing plate that is on the opposite side to the first surface, and a power supply wire that supplies electrical power to the piezoelectric elements, that is formed in the second surface of the sealing plate, and that has at least one portion thereof embedded in the sealing plate and a surface thereof exposed on the second surface side.

公开(公告)号：US20170087843A1

公开(公告)日：2017-03-30

申请号：US15273420

申请日：2016-09-22

Applicant: SEIKO EPSON CORPORATION

Inventor： Masanori MIKOSHIBA ,  Yasuyuki MATSUMOTO

IPC: B41J2/14

CPC classification number: B41J2/14209 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2002/14241 ,  B41J2002/1425

Abstract: An electronic device includes a plurality of substrates joined together in a stacked state, a space formed in one substrate out of the plurality of substrates, and a movable region configured by one face out of faces bounding the space. The movable region includes a recess indented from a space side to partway along a thickness direction of the movable region. An internal dimension of the recess in a direction perpendicular to a substrate stacking direction is larger than an internal dimension of the space in the direction perpendicular to the substrate stacking direction, and a wall bounding the space in the one substrate, and at least a portion of a bottom face of the recess, are adhered together by an adhesive.

公开(公告)号：US20170040523A1

公开(公告)日：2017-02-09

申请号：US15227324

申请日：2016-08-03

Applicant: Seiko Epson Corporation

Inventor： Tomohiro SAKAI

IPC: H01L41/08 ,  B41J2/14 ,  H01L41/047 ,  H01L41/297 ,  H01L41/187 ,  H01L41/27

CPC classification number: H01L41/0805 ,  B41J2/14201 ,  B41J2/14233 ,  B41J2002/14241 ,  B41J2002/1425 ,  B41J2202/03 ,  H01L41/0477 ,  H01L41/0478 ,  H01L41/0815 ,  H01L41/0973 ,  H01L41/1878 ,  H01L41/27 ,  H01L41/29 ,  H01L41/297 ,  H01L41/318

Abstract: A piezoelectric element includes a first electrode, a piezoelectric layer which is provided on the first electrode and which is formed of crystals of a composite oxide with a perovskite structure which is preferentially oriented in a plane, and a second electrode which is provided on the piezoelectric layer and which is formed of platinum which is preferentially oriented in a plane, in which, in the piezoelectric layer, plane intervals L1 of the crystals on the first electrode side are larger than plane intervals L2 of the crystals on the second electrode side.

Abstract translation: 压电元件包括​​第一电极，压电层，其设置在第一电极上，并且由具有优选取向于平面的钙钛矿结构的复合氧化物的晶体形成;以及第二电极，其设置在压电体 层，其由在平面中优先取向的铂形成，其中在压电层中，第一电极侧上的晶体的平面间隔L1大于第二电极侧的晶体的平面间隔L2。

公开(公告)号：US09401471B2

公开(公告)日：2016-07-26

申请号：US13821378

申请日：2011-09-05

Applicant: Satoshi Mizukami ,  Yoshikazu Akiyama ,  Masaru Shinkai ,  Osamu Machida

Inventor： Satoshi Mizukami ,  Yoshikazu Akiyama ,  Masaru Shinkai ,  Osamu Machida

IPC: H01L41/047 ,  H01L41/09 ,  H01L41/08 ,  B41J2/045 ,  B41J2/14 ,  B41J2/16 ,  H01L27/20 ,  H01L41/29

CPC classification number: H01L41/0973 ,  B41J2/045 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/1425 ,  B41J2002/14491 ,  H01L27/20 ,  H01L41/0477 ,  H01L41/0478 ,  H01L41/0805 ,  H01L41/29

Abstract: A manufacturing method of an electromechanical transducing device includes forming a vibration plate on a substrate; forming a first electrode made of a metal on the vibration plate; forming a second electrode made of an electrically conductive oxide on the first electrode; coating a surface modification material and carrying out surface modification of only the first electrode; forming an electromechanical transducing film on the second electrode; and forming a third electrode made of an electrically conductive oxide on the electromechanical transducing film.

Abstract translation: 机电换能装置的制造方法包括在基板上形成振动板; 在振动板上形成由金属制成的第一电极; 在所述第一电极上形成由导电氧化物制成的第二电极; 涂覆表面改性材料并进行仅第一电极的表面改性; 在所述第二电极上形成机电换向膜; 以及在机电转换膜上形成由导电氧化物制成的第三电极。

公开(公告)号：US20160082735A1

公开(公告)日：2016-03-24

申请号：US14858382

申请日：2015-09-18

Applicant: Seiko Epson Corporation

Inventor： Noboru FURUYA ,  Masao NAKAYAMA ,  Hideki HAHIRO

IPC: B41J2/14 ,  H01L41/25 ,  H01L41/23 ,  H01L41/09

CPC classification number: B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/1425 ,  B41J2002/14419 ,  B41J2002/14491 ,  B41J2202/11 ,  H01L41/0536 ,  H01L41/0805 ,  H01L41/09 ,  H01L41/098 ,  H01L41/23 ,  H01L41/25 ,  H01L41/332

Abstract: A piezoelectric device comprising a substrate having two surface sides; a vibration plate on one of the two surface side, a piezoelectric element including a first electrode provided on the vibration plate, a piezoelectric body layer provided on the first electrode, the piezoelectric body layer having a groove section on a side surface, the groove section including a first surface facing to the vibration plate, and a second electrode provided on the piezoelectric body layer, and a stress application film having tensile stress and provided on an inner surface of the groove section.

Abstract translation: 一种压电装置，包括具有两个表面侧的基板; 在两个表面侧的一个上的振动板，设置在振动板上的第一电极的压电元件，设置在第一电极上的压电体层，压电体层在侧面具有槽部，槽部 包括面对所述振动板的第一表面和设置在所述压电体层上的第二电极，以及在所述槽部的内表面上设置有拉伸应力的应力施加膜。

公开(公告)号：US09227403B2

公开(公告)日：2016-01-05

申请号：US14201338

申请日：2014-03-07

Applicant: TOSHIBA TEC KABUSHIKI KAISHA

Inventor： Shuhei Yokoyama ,  Ryutaro Kusunoki ,  Ryuichi Arai

IPC: B41J2/165 ,  B41J2/045 ,  B41J2/14

CPC classification number: B41J2/14233 ,  B41J2002/1425 ,  B41J2002/1437 ,  B41J2002/14491 ,  B41J2202/11 ,  B41J2202/15

Abstract: An ink jet head includes a chamber unit including a pressure chamber formed to hold ink, and a nozzle plate unit. The nozzle plate includes a vibrating plate forming a bottom wall of the pressure chamber, a driving element that is provided on a bottom surface of the vibrating plate and configured to cause a volume of the pressure chamber to be changed by deforming the vibrating plate upon application of voltage to the driving element, and a protective layer disposed on a bottom surface of the vibrating plate and a bottom surface of the driving element. The protective layer has a first thickness between a bottom surface thereof and the bottom surface of the vibrating plate and second thickness between a bottom surface thereof and the bottom surface of the driving element, and the first thickness is greater than the second thickness.

Abstract translation: 喷墨头包括：腔单元，包括形成为保持墨的压力室和喷嘴板单元。 喷嘴板包括形成压力室的底壁的振动板，驱动元件，其设置在振动板的底表面上，并且构造成通过在施加时使振动板变形而使压力室的体积变化 的驱动元件的电压，以及设置在振动板的底面和驱动元件的底面的保护层。 保护层在其底面和振动板的底面之间具有第一厚度，在其底表面与驱动元件的底表面之间具有第二厚度，并且第一厚度大于第二厚度。

公开(公告)号：US09221255B2

公开(公告)日：2015-12-29

申请号：US14201185

申请日：2014-03-07

Applicant: TOSHIBA TEC KABUSHIKI KAISHA

Inventor： Shuhei Yokoyama ,  Ryutaro Kusunoki ,  Ryuichi Arai ,  Masayuki Satomi

IPC: B41J2/045 ,  B41J2/14

CPC classification number: B41J2/14233 ,  B41J2002/1425 ,  B41J2002/1437 ,  B41J2002/14491 ,  B41J2202/11 ,  B41J2202/15

Abstract: An ink jet head includes a pressure chamber formed to hold ink, and a nozzle plate including a vibrating plate forming a bottom wall of the pressure chamber, a driving element that is provided on a surface of the vibrating plate and configured to cause a volume of the pressure chamber to be changed by deforming the vibrating plate upon application of voltage to the driving element, an opening through which the ink held in the pressure chamber is discharged in response to the change of the volume of the pressure chamber, and an insulating layer disposed between the driving element and the opening.

Abstract translation: 喷墨头包括形成为保持墨的压力室和包括形成压力室的底壁的振动板的喷嘴板，驱动元件，其设置在振动板的表面上并且构造成使得 通过在对驱动元件施加电压的情况下使振动板变形来改变压力室，响应于压力室的体积的变化而将保持在压力室中的墨排出的开口，以及绝缘层 设置在驱动元件和开口之间。

公开(公告)号：US20140292947A1

公开(公告)日：2014-10-02

申请号：US14306397

申请日：2014-06-17

Applicant: Yoshihiro NORIKANE ,  Haruo NAKAMURA ,  Masaru OHGAKI ,  Yuko SEKIGUCHI

Inventor： Yoshihiro NORIKANE ,  Haruo NAKAMURA ,  Masaru OHGAKI ,  Yuko SEKIGUCHI

IPC: B41J2/14

CPC classification number: B41J2/14233 ,  B01J2/02 ,  B41J2/14008 ,  B41J2002/1425 ,  B41J2002/14475 ,  B41J2202/02

Abstract: A liquid droplet ejecting method for ejecting a liquid from at least one ejection hole to form the liquid into liquid droplets, the method including: applying a vibration to the liquid in a liquid column resonance-generating liquid chamber, in which the ejection hole is formed, to form a standing wave through liquid column resonance, and ejecting the liquid from the ejection hole, which is formed in a region corresponding to an antinode of the standing wave, to form the liquid into liquid droplets.

Abstract translation: 一种用于从至少一个喷射孔喷射液体以将液体形成液滴的液滴喷射方法，所述液滴喷射方法包括：在形成喷射孔的液柱共振产生液体室中对液体施加振动 通过液柱共振形成驻波，并且从形成在与驻波的波腹对应的区域的喷射孔喷出液体，形成液滴。

公开(公告)号：US20100073435A1

公开(公告)日：2010-03-25

申请号：US12562306

申请日：2009-09-18

Applicant: Hiromu MIYAZAWA ,  Hiroshi ITO ,  Koichi MOROZUMI ,  Jiro KATO

Inventor： Hiromu MIYAZAWA ,  Hiroshi ITO ,  Koichi MOROZUMI ,  Jiro KATO

IPC: B41J2/045

CPC classification number: B41J2/14233 ,  B41J2/04581 ,  B41J2/04588 ,  B41J2/055 ,  B41J2002/14241 ,  B41J2002/1425 ,  B41J2002/14266 ,  B41J2002/14419 ,  H01L41/0973

Abstract: A liquid ejecting head including a fluid channel forming substrate including a pressure generating chamber communicating with a nozzle opening that ejects a liquid droplet and a piezoelectric element. The piezoelectric element has a first electrode, a piezoelectric material layer that is provided on the first electrode and has a perovskite monoclinic structure, and a second electrode formed on the piezoelectric material layer opposite to the first electrode. An angle formed between a direction of an electric field generated between the first and second electrodes and an orientation of a polarization moment of the piezoelectric material layer is greater than an angle formed between the direction of the electric field at a time when the piezoelectric constant of the piezoelectric material layer reaches a maximum level and the orientation of the polarization moment.

Abstract translation: 一种液体喷射头，包括：流体通道形成基板，包括与喷射液滴的喷嘴开口连通的压力产生室和压电元件。 压电元件具有第一电极，设置在第一电极上并具有钙钛矿单斜晶体结构的压电材料层，和形成在与第一电极相对的压电体层上的第二电极。 在第一和第二电极之间产生的电场的方向与压电材料层的极化力矩的方向之间形成的角度大于在压电材料层的压电常数 压电材料层达到最大水平和极化力矩的方向。

公开(公告)号：US07607764B2

公开(公告)日：2009-10-27

申请号：US11896844

申请日：2007-09-06

Applicant: Yoshiaki Sakamoto ,  Shuji Koike ,  Tomohisa Shingai

Inventor： Yoshiaki Sakamoto ,  Shuji Koike ,  Tomohisa Shingai

IPC: B41J2/045

CPC classification number: B41J2/161 ,  B41J2/14233 ,  B41J2/1606 ,  B41J2/1626 ,  B41J2/1646 ,  B41J2002/1425 ,  B41J2202/11 ,  Y10T29/42 ,  Y10T29/49401

Abstract: A multi-nozzle ink jet head using piezoelectric elements and a manufacturing method thereof are disclosed. A head (1) has a nozzle member (10) in which a plurality of nozzles (12) are formed, a pressure chamber wall member (14) in which a plurality of pressure chambers (15) are formed, and piezoelectric type actuators that have a diaphragm (18) and a plurality of piezo elements (19) and apply pressure to each of the plurality of pressure chambers for ejecting ink from the nozzles. A rigid coating member (23, 25) is provided on inner surfaces of the pressure chamber walls or on parts of the diaphragm in contact with the pressure chamber wall member, thus increasing the rigidity of the pressure chamber walls.