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公开(公告)号：US20240343558A1
公开(公告)日：2024-10-17
申请号：US18632684
申请日：2024-04-11
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Petteri KILPINEN , Marko PEUSSA , Antti IIHOLA , Altti TORKKELI
CPC classification number: B81B3/0072 , B81B3/001 , B81C1/00666 , B81C1/00968 , B81B2201/0235 , B81B2201/0242 , B81B2201/0264 , B81B2203/0307 , B81B2203/04 , B81B2207/096 , B81C2201/0109 , B81C2201/0132 , B81C2201/0133 , B81C2203/0109 , B81C2203/036
Abstract: A device is provided that includes a handle layer with at least one cavity and suspension structure, a patterned polycrystalline silicon (poly-Si) first device layer, where at least one structural element is suspended by the structure, and may include a seismic element. A second electrically insulating layer is present, followed by a second device layer of patterned single-crystal silicon (mono-Si) with at least one moveably suspended seismic element above the first layer. A cap layer finalizes the structure, with the handle layer, device layers, and the cap layer forming an enclosure's walls. The first and second insulating layers bond the handle and device layers. The enclosure includes at least one seismic element from the second device layer, and at least one static and moveable electrode for motion detection or causation, with the static electrode in the first device layer.
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公开(公告)号：US20240300808A1
公开(公告)日：2024-09-12
申请号：US18596223
申请日：2024-03-05
Applicant: Analog Devices, Inc.
Inventor： Kemiao Jia , Gaurav Vohra , Xin Zhang , Christine H. Tsau , Chen Yang , Andrew Proudman , Matthew Kent Emsley , George M. Molnar, II , Nikolay Pokrovskiy , Ali Mohammed Shakir , Michael Judy
CPC classification number: B81C1/00666 , B81B3/0072 , B81B2203/0118 , B81B2203/0307 , B81B2203/0315 , B81C2201/0111 , B81C2201/019
Abstract: Described herein are manufacturing techniques for achieving stress isolation in microelectromechanical systems (MEMS) devices that involve isolation trenches formed from the backside of the substrate. The techniques described herein involve etching a trench in the bottom side of the substrate subsequent to forming a MEMS platform, and processing the MEMS platform to form a MEMS device on the top side of the substrate subsequent to etching the trench.
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公开(公告)号：US12060261B2
公开(公告)日：2024-08-13
申请号：US16676293
申请日：2019-11-06
Applicant: BVW Holding AG
Inventor： Lukas Bluecher , Michael Milbocker
IPC: B81B1/00
CPC classification number: B81B1/002 , B81B2201/058 , B81B2203/0307 , B81B2203/0353 , B81B2203/0361
Abstract: The present application relates to multifunctional hierarchically microstructured surfaces and three-dimensional anchored interfacial domain structures. The multifunctional properties are extremal. In one aspect the microstructured surfaces may be super-adhesive. Examples of super-adhesive mechanisms may include gas trapping, fluid trapping, and solid wrinkle trapping. In another aspect the micro structured surfaces may be nearly adhesive-less. Examples of adhesive-less mechanisms may include inter-solid surface lubrication, energy conserving fluid flows, and super-low drag phase-phase lateral displacement. The extremal structures may be obtained by anchoring mechanisms. Examples of anchoring mechanisms may include Wenzel-Cassie formation, contact angle confusion, and capillary effects.
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公开(公告)号：US20240182291A1
公开(公告)日：2024-06-06
申请号：US18437338
申请日：2024-02-09
Applicant: HITACHI, LTD.
Inventor： Shun Kumano , Hideki Hasegawa , Masuyuki Suguyama
CPC classification number: B81B3/0072 , B81C1/00666 , H04N23/54 , H04N23/687 , B81B2203/0118 , B81B2203/019 , B81B2203/0307 , B81C2201/0105 , B81C2201/0178 , G02B7/021
Abstract: The present invention is characterized by involving a light source irradiating the inside of an ion source with light, a camera acquiring intensity as information of scattered light by droplets generated by electrospraying, and a processing device storing, in a storage unit, determination reference information indicating a relationship between a parameter of a channel system of a liquid chromatography device and the intensity, in which the processing device executes: acquiring the intensity from the camera; comparing the acquired intensity with the determination reference information; and determining a failure of a channel system in the liquid chromatography device by detecting a change in the scattered light relative to a value of the determination reference information based on the acquired intensity by comparing the acquired intensity with the determination reference information.
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公开(公告)号：US20240034618A1
公开(公告)日：2024-02-01
申请号：US18487561
申请日：2023-10-16
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico GIUSTI , Fabio QUAGLIA
CPC classification number: B81B7/0016 , B81C1/00825 , F16F15/007 , B81B2203/0118 , B81B2203/0127 , B81B2203/0307 , B81B2207/03 , B81C2203/032 , F16F2226/042
Abstract: A microelectromechanical membrane transducer includes: a supporting structure; a cavity formed in the supporting structure; a membrane coupled to the supporting structure so as to cover the cavity on one side; a cantilever damper, which is fixed to the supporting structure around the perimeter of the membrane and extends towards the inside of the membrane at a distance from the membrane; and a damper piezoelectric actuator set on the cantilever damper and configured so as to bend the cantilever damper towards the membrane in response to an electrical actuation signal.
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公开(公告)号：US20240017987A1
公开(公告)日：2024-01-18
申请号：US18129911
申请日：2023-04-03
Applicant: SENSORTEK TECHNOLOGY CORP.
Inventor： Shih-Wei Lee , Kuan-Ju Tseng , Chao-Shiun Wang
CPC classification number: B81B3/0072 , B81C3/001 , B81B2203/0307 , B81C2203/054
Abstract: The present application discloses an anchor structure for application to a microelectromechanical system device comprising a cap layer, a device layer and a substrate layer. Such an anchor structure enhances the stress tolerance of the microelectromechanical system device. The anchor structure comprises a first anchor portion, a second anchor portion and a flexible member located in the device layer. The first anchor portion and the second anchor portion are connected to two sides of the flexible member, respectively. The first anchor is secured to the cap layer by a first bonding portion, and the second anchor is secured to the substrate layer by a second bonding portion.
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公开(公告)号：US20240002216A1
公开(公告)日：2024-01-04
申请号：US17854457
申请日：2022-06-30
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Hakhamanesh MANSOORZARE , Ting-Ta YEN , Yao YU
CPC classification number: B81B3/0021 , B81B7/02 , B81B3/0051 , B81B2201/0271 , B81B2203/0109 , B81B2203/0163 , B81B2203/0307 , B81B2203/0315 , B81B2203/033
Abstract: A circuit includes: integrated circuit (IC) layers; a cavity formed in at least one of the IC layers; and a micro-acoustic resonator suspended in the cavity by an anchor. The anchor includes: a bridge portion coupled to the micro-acoustic resonator and extending over the cavity; a first acoustic reflector portion adjacent the bridge portion, extending over the cavity, and oriented differently than the bridge portion; and a second acoustic reflector portion adjacent the first acoustic reflector portion, extending over the cavity, and oriented differently than the first acoustic reflector portion.
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公开(公告)号：US20230416079A1
公开(公告)日：2023-12-28
申请号：US18337942
申请日：2023-06-20
Applicant: Robert Bosch GmbH
Inventor： Heribert Weber , Peter Schmollngruber
CPC classification number: B81B7/02 , B81C1/00166 , G01L1/2262 , B81B2201/0257 , B81B2203/0127 , B81B2203/0307 , B81B2203/0315 , B81B2203/04 , B81C2201/014
Abstract: A micromechanical component for a sensor and/or microphone device. The component has an adjustable first actuator electrode suspended on a regionally deformable first layer, a first stator electrode fastened so that a first measuring signal is able to be tapped with regard to a first voltage or capacitance applied between the first actuator electrode and the first stator electrode, and a second actuator electrode, so that a second measuring signal is able to be tapped with regard to a second voltage or capacitance applied between the second actuator electrode and the first stator electrode or between the second actuator electrode and the second stator electrode. The second actuator electrode is situated in an adjustable manner on a side of the first actuator electrode facing away from the first layer in that the second actuator electrode is suspended on the first actuator electrode and/or an at least regionally deformable second layer.
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公开(公告)号：US20230365397A1
公开(公告)日：2023-11-16
申请号：US17740832
申请日：2022-05-10
Applicant: InvenSense, Inc.
Inventor： Mrigank Sharma , Varun Subramaniam Kumar , Luca Coronato , Giacomo Laghi , Matthew Julian Thompson
IPC: B81B3/00
CPC classification number: B81B3/0054 , B81B2201/0235 , B81B2203/0307
Abstract: A MEMS sensor includes at least one anchor that extends into a MEMS layer and a proof mass suspended from the at least one anchor. Each anchor is coupled to the proof mass via two compliant springs that are oriented perpendicular to each other and attached to a respective anchor. The compliant springs absorb non-measured external forces such as shear forces that are applied to the sensor packaging, preventing these forces from modifying the relative location and operation of the proof mass.
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公开(公告)号：US11807519B2
公开(公告)日：2023-11-07
申请号：US17337296
申请日：2021-06-02
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico Giusti , Fabio Quaglia
CPC classification number: B81B7/0016 , B81C1/00825 , F16F15/007 , B81B2203/0118 , B81B2203/0127 , B81B2203/0307 , B81B2207/03 , B81C2203/032 , F16F2226/042
Abstract: A microelectromechanical membrane transducer includes: a supporting structure; a cavity formed in the supporting structure; a membrane coupled to the supporting structure so as to cover the cavity on one side; a cantilever damper, which is fixed to the supporting structure around the perimeter of the membrane and extends towards the inside of the membrane at a distance from the membrane; and a damper piezoelectric actuator set on the cantilever damper and configured so as to bend the cantilever damper towards the membrane in response to an electrical actuation signal.
