公开(公告)号：US20030235389A1

公开(公告)日：2003-12-25

申请号：US10453006

申请日：2003-06-03

发明人： Gu-Young Kang

IPC分类号： G02B006/00

CPC分类号： C23C16/4482 ,  C03B19/1415 ,  C03B37/01413 ,  C03B37/01807 ,  C03B2207/86 ,  C03B2207/88 ,  C03B2207/89 ,  Y02P40/57 ,  Y10S261/65

摘要： Disclosed is a raw material-providing device for a chemical-vapor deposition process and includes: a bubbler for vaporizing liquid raw material and providing the vaporized raw material to a deposition unit; and a raw material tank for providing liquid raw material to the bubbler, wherein the raw material tank preserves liquid raw material to be provided to the bubbler in advance and preheats the liquid raw material, and the raw material inside the raw material tank is provided to the bubbler through a plurality of hallow micro tubes, and wherein as the raw material inside the bubbler is gradually consumed, the internal pressure of the raw material tank is adjusted to change the amount of the raw material to be provided to the bubbler, thereby adjusting the amount of the raw material inside the bubbler and the vapor pressure inside the bubbler.

摘要翻译： 公开了一种用于化学气相沉积工艺的原料提供装置，包括：用于蒸发液体原料并将蒸发的原料提供给沉积单元的起泡器; 以及用于将液体原料提供到起泡器的原料罐，其中原料罐预先提供待提供给起泡器的液体原料，并预热液体原料，并将原料罐内的原料提供给 起泡器通过多个中空微管，并且其中当起泡器内部的原料逐渐消耗时，调节原料罐的内部压力以改变要提供给起泡器的原料的量，由此调节 起泡器内的原料的量和起泡器内的蒸气压。

公开(公告)号：US5078092A

公开(公告)日：1992-01-07

申请号：US456118

申请日：1989-12-22

申请人： A. Joseph Antos ,  Michael S. Dobbins ,  Victor E. Olson, III ,  Dale R. Powers ,  Francis W. Voorhees

发明人： A. Joseph Antos ,  Michael S. Dobbins ,  Victor E. Olson, III ,  Dale R. Powers ,  Francis W. Voorhees

IPC分类号： B01D1/22 ,  C03B37/014 ,  C03B37/018 ,  C23C14/24 ,  C23C16/44 ,  C23C16/448

CPC分类号： C03B37/01413 ,  C23C16/4402 ,  C23C16/4481 ,  C03B2201/42 ,  C03B2207/85 ,  C03B2207/88

摘要： A system for delivering a liquid reactant at high flow rates to an oxidation/flame hydrolysis glass soot deposition site. A first liquid only reactant is delivered to a flash vaporization chamber to form a thin film and mixed with oxygen after vaporization. Additional vaporized reactants are thereafter mixed with the vaporized first liquid prior to delivery to an oxidation/flame hydrolysis burner to form a glass soot outer cladding layer on a soot preform. The soot preform is subsequently fused to form a high quality glass blank for drawing into optical fiber.

公开(公告)号：US07730747B2

公开(公告)日：2010-06-08

申请号：US10516170

申请日：2002-06-28

申请人： Marco Galante ,  Marco Arimondi ,  Giacomo Stefano Roba ,  Ilenia Santi

发明人： Marco Galante ,  Marco Arimondi ,  Giacomo Stefano Roba ,  Ilenia Santi

IPC分类号： C03B37/016

CPC分类号： C03B19/1415 ,  C03B37/01413 ,  C03B2207/85 ,  C03B2207/87 ,  C03B2207/88

摘要： A method and device for vaporizing a liquid reactant. A vaporizing plate having a top surface defines a liquid flow channel, the channel being laterally delimited by edges having a height greater than a minimum thickness of liquid reactant required to generate vapor under film or nucleate boiling regime. A heating system is associated to the vaporizing plate for heating the liquid reactant over a minimum temperature required to generate vapor under nucleate or, preferably, film boiling regime. A cap covers the vaporizing plate to collect the vapor at a predetermined pressure and provided with a vapor exit and a liquid feeder feeds the liquid reactant onto the vaporizing plate.

摘要翻译： 一种用于蒸发液体反应物的方法和装置。 具有顶表面的蒸发板限定液体流动通道，该通道由边缘侧向限定，该边缘的高度大于在膜或成核沸腾状态下产生蒸气所需的液体反应物的最小厚度。 加热系统与蒸发板相关联，用于在成核或优选薄膜沸腾状态下在产生蒸气所需的最低温度下加热液体反应物。 盖子覆盖蒸发板以在预定压力下收集蒸气，并且设置有蒸气出口，液体进料器将液体反应物供给到蒸发板上。

公开(公告)号：US20060010922A1

公开(公告)日：2006-01-19

申请号：US10516170

申请日：2002-06-28

申请人： Marco Galante ,  Marco Arimondi ,  Giacomo Roba ,  Ilenia Santi

发明人： Marco Galante ,  Marco Arimondi ,  Giacomo Roba ,  Ilenia Santi

IPC分类号： C03B37/018

CPC分类号： C03B19/1415 ,  C03B37/01413 ,  C03B2207/85 ,  C03B2207/87 ,  C03B2207/88

摘要： A method and device for vaporizing a liquid reactant. A vaporizing plate having a top surface defines a liquid flow channel, the channel being laterally delimited by edges having a height greater than a minimum thickness of liquid reactant required to generate vapor under film or nucleate boiling regime. A heating system is associated to the vaporizing plate for heating the liquid reactant over a minimum temperature required to generate vapor under nucleate or, preferably, film boiling regime. A cap covers the vaporizing plate to collect the vapor at a predetermined pressure and provided with a vapor exit and a liquid feeder feeds the liquid reactant onto the vaporizing plate.

摘要翻译： 一种用于蒸发液体反应物的方法和装置。 具有顶表面的蒸发板限定液体流动通道，该通道由边缘侧向限定，该边缘的高度大于在膜或成核沸腾状态下产生蒸气所需的液体反应物的最小厚度。 加热系统与蒸发板相关联，用于在成核或优选薄膜沸腾状态下在产生蒸气所需的最低温度下加热液体反应物。 盖子覆盖蒸发板以在预定压力下收集蒸气，并且设置有蒸气出口，液体进料器将液体反应物供给到蒸发板上。

公开(公告)号：US5879649A

公开(公告)日：1999-03-09

申请号：US926254

申请日：1997-09-05

申请人： Danny L. Henderson ,  Dale R. Powers

发明人： Danny L. Henderson ,  Dale R. Powers

IPC分类号： C03B19/14 ,  C03B37/014 ,  C03C3/06 ,  C07F7/20 ,  C07F7/21 ,  C01B33/12

CPC分类号： C03B37/01413 ,  C03B19/1415 ,  C03C3/06 ,  C07F7/20 ,  C07F7/21 ,  C03B2201/02 ,  C03B2207/32 ,  C03B2207/81 ,  C03B2207/87 ,  C03B2207/88 ,  C03B2207/89 ,  C03B2207/90 ,  C03C2201/02 ,  C03C2203/27

摘要： The present invention is directed to a purified polyalkylsiloxane composition having a boiling point, under atmospheric conditions, of less than about 250.degree. C. and containing high boiling impurities, including siloxanes and silanol-terminated siloxanes, that have boiling points, under atmospheric conditions, of greater than about 250.degree. C. in a total concentration of less than 14 ppm. The present invention is further directed to a method of producing a purified polyalkylsiloxane composition, having a boiling point, under atmospheric conditions, of less than about 250.degree. C., by distilling a polyalkylsiloxane starting material containing high boiling impurities having boiling points, under atmospheric conditions, of greater than about 250.degree. C. in a total concentration of at least 14 ppm, under conditions effective to produce a purified polyalkylsiloxane composition having a boiling point under atmospheric conditions of less than about 250.degree. C., and containing high boiling impurities, having boiling points, under atmospheric conditions, of greater than about 250.degree. C., in a total concentration of less than 14 ppm. In preferred embodiments, low boiling components (including silanols and preferably also hexamethylcyclotrisiloxane) are reduced to less than about 100 ppm. The present invention is further directed to a method of producing fused silica glass by conversion of the purified polyalkylsiloxane composition.

摘要翻译： 本发明涉及一种纯化的聚烷基硅氧烷组合物，其在大气条件下沸点低于约250℃，并且在大气条件下含有沸点高的沸点杂质，包括硅氧烷和硅烷醇封端的硅氧烷， 大于约250℃，总浓度小于14ppm。 本发明还涉及通过在大气压下蒸馏含有沸点高沸点杂质的聚烷基硅氧烷起始材料，在大气条件下制备小于约250℃沸点的纯化聚烷基硅氧烷组合物的方法 条件，大于约250℃，总浓度为至少14ppm，在有效产生在大气条件下沸点小于约250℃的纯化聚烷基硅氧烷组合物的条件下，并含有高沸点杂质 在大气条件下具有大于约250℃的沸点，总浓度小于14ppm。 在优选的实施方案中，低沸点组分（包括硅烷醇，优选六甲基环三硅氧烷）降低至小于约100ppm。 本发明还涉及通过纯化的聚烷基硅氧烷组合物的转化生产熔融石英玻璃的方法。

公开(公告)号：US4661140A

公开(公告)日：1987-04-28

申请号：US826209

申请日：1986-02-05

申请人： Hiroaki Takimoto ,  Ichiro Tsuchiya

发明人： Hiroaki Takimoto ,  Ichiro Tsuchiya

IPC分类号： C03B37/014 ,  C23C16/453 ,  C03C25/02 ,  C03B37/027

CPC分类号： C03B37/01413 ,  C03B37/0142 ,  C23C16/453 ,  C03B2201/31 ,  C03B2207/06 ,  C03B2207/42 ,  C03B2207/46 ,  C03B2207/81 ,  C03B2207/87 ,  C03B2207/88

摘要： A gas reaction apparatus for manufacturing base material of optical fiber and a multi-wall pipe type burner for the gas reaction apparatus. The gas reaction apparatus includes a mechanism which heats or heat insulates at least one of gas passages of the burner for gaseous raw material of optical fiber so as to set a saturated vapor pressure of whole kinds of the gaseous raw material higher than a partial pressure of raw material of optical fiber in the gaseous raw material when the gaseous raw material is fed through the one of the gas passages.

摘要翻译： 一种用于制造光纤基材的气体反应装置和用于气体反应装置的多壁管式燃烧器。 气体反应装置包括：将用于气体原料的燃烧器的至少一个气体通道加热或隔热的机构，以使整个气态原料的饱和蒸气压高于 当气态原料通过一个气体通道进料时气态原料中的光纤原料。

公开(公告)号：US20120276291A1

公开(公告)日：2012-11-01

申请号：US13096264

申请日：2011-04-28

申请人： Chester D. Bird ,  Dale Robert Powers ,  Pushkar Tandon ,  Srinivas Vemury

发明人： Chester D. Bird ,  Dale Robert Powers ,  Pushkar Tandon ,  Srinivas Vemury

IPC分类号： C23C16/448 ,  C23C16/52

CPC分类号： C03B37/01413 ,  C03B37/01807 ,  C03B2207/32 ,  C03B2207/34 ,  C03B2207/85 ,  C03B2207/87 ,  C03B2207/88

摘要： Methods and apparatuses for vaporizing liquid precursor material for use in a vapor deposition process are disclosed. The method for vaporizing liquid precursor material includes introducing a flow of liquid precursor material into an expansion chamber and directing the flow of liquid precursor material towards a wall of the chamber. The wall of the chamber is heated to a temperature sufficient to vaporize a first portion of the flow of liquid precursor material while a second portion of the flow of liquid precursor material remains in a liquid state and a third portion of the liquid precursor material is formed into gel. The expansion chamber is continuously drained as the flow of liquid precursor material is introduced into the expansion chamber. The chamber is heated to a temperature to produce a sufficient amount of the second portion of the liquid precursor material to flush the gel from the chamber.

摘要翻译： 公开了用于蒸发用于气相沉积工艺的液体前体材料的方法和装置。 用于蒸发液体前体材料的方法包括将液体前体材料流引入膨胀室并将液体前体材料流引向腔室的壁。 将室的壁加热到足以蒸发液体前体材料流的第一部分的温度，同时液体前体材料流的第二部分保持液体状态，并且形成第三部分液体前体材料 变成凝胶。 随着液体前体材料的流动被引入到膨胀室中，膨胀室被连续地排出。 将该室加热到一定温度以产生足够量的液体前体材料的第二部分以从该室冲洗凝胶。

公开(公告)号：US06978984B2

公开(公告)日：2005-12-27

申请号：US10453006

申请日：2003-06-03

申请人： Gu-Young Kang

发明人： Gu-Young Kang

IPC分类号： C03B37/018 ,  C23C16/448 ,  B01F3/04

CPC分类号： C23C16/4482 ,  C03B19/1415 ,  C03B37/01413 ,  C03B37/01807 ,  C03B2207/86 ,  C03B2207/88 ,  C03B2207/89 ,  Y02P40/57 ,  Y10S261/65

摘要： Disclosed is a raw material-providing device for a chemical-vapor deposition process and includes: a bubbler for vaporizing liquid raw material and providing the vaporized raw material to a deposition unit; and a raw material tank for providing liquid raw material to the bubbler, wherein the raw material tank preserves liquid raw material to be provided to the bubbler in advance and preheats the liquid raw material, and the raw material inside the raw material tank is provided to the bubbler through a plurality of hollow micro tubes, and wherein as the raw material inside the bubbler is gradually consumed, the internal pressure of the raw material tank is adjusted to change the amount of the raw material to be provided to the bubbler, thereby adjusting the amount of the raw material inside the bubbler and the vapor pressure inside the bubbler.

摘要翻译： 公开了一种用于化学气相沉积工艺的原料提供装置，包括：用于蒸发液体原料并将蒸发的原料提供给沉积单元的起泡器; 以及用于将液体原料提供到起泡器的原料罐，其中原料罐预先提供待提供给起泡器的液体原料，并预热液体原料，并将原料罐内的原料提供给 所述起泡器通过多个中空微管，并且其中当所述起泡器内的原料逐渐消耗时，调节所述原料罐的内部压力以改变要提供给所述起泡器的原料的量，由此调节 起泡器内的原料的量和起泡器内的蒸气压。

公开(公告)号：US5540059A

公开(公告)日：1996-07-30

申请号：US378380

申请日：1995-01-25

申请人： Kiyoshi Yokokawa

发明人： Kiyoshi Yokokawa

IPC分类号： F17D1/04 ,  B01J4/00 ,  B01J7/00 ,  C03B8/04 ,  C03B37/014 ,  C03B37/018 ,  C23C16/44 ,  C30B25/14 ,  H01L21/205 ,  F17C3/10

CPC分类号： C23C16/44 ,  C03B37/01413 ,  C03B2207/81 ,  C03B2207/85 ,  C03B2207/88

摘要： Method and apparatus for supplying a gaseous raw material to plural users. A liquid raw material is evaporated by a single evaporation means and supplied to a gaseous raw material takeout portion provided with a plurality of takeout ports. The gas pressure is varied according to amounts of the gaseous raw material taken out of the takeout ports. The pressure variations are regulated by a main pressure-adjusting means mounted downstream of the gaseous raw material takeout portion. Extra gaseous raw material is sent to a gaseous raw material-condensing means, where the material is liquified. Then, the liquified material is fed back to the evaporation means. Thus, a closed circulatory loop circuit is formed. The gas pressure in the gaseous raw material takeout portion is regulated. The gaseous raw material is distributed to plural users at any desired time at their respective flow rates such that supply of the raw material to each individual user is carried out independent of supply to other users.

摘要翻译： 向多个用户供应气态原料的方法和装置。 液体原料通过单个蒸发装置蒸发并供给到设有多个取出口的气态原料取出部分。 气体压力根据从取出口取出的气态原料的量而变化。 压力变化由安装在气态原料取出部分下游的主压力调节装置调节。 额外的气态原料被送到气态原料冷凝装置，在那里材料液化。 然后，将液化材料反馈回蒸发装置。 因此，形成封闭的循环回路电路。 调节气态原料取出部分中的气体压力。 气态原料以各自的流量在任何期望的时间分配给多个用户，从而独立于对其他用户的供应来执行向每个个体用户的原材料供应。