公开(公告)号：US12025502B2

公开(公告)日：2024-07-02

申请号：US17729082

申请日：2022-04-26

Applicant: MGEN.CO,.LTD

Inventor： Min Young Park

IPC: G01J9/02 ,  G01J9/00 ,  G02B7/182 ,  G02B27/28

CPC classification number: G01J9/02 ,  G02B7/182 ,  G02B27/283 ,  G01J2009/006 ,  G01J2009/0261

Abstract: A spectropolarimetric apparatus according to an embodiment of the present invention includes a light source attachment/detachment unit to which a light source is detachably coupled, a polarization interferometer configured to split light emitted from the light source coupled to the light source attachment/detachment unit into a plurality of polarized light beams using a polarization beam splitter and irradiate at least some of the split polarized light beams to a reflective sample to output the reflected light, and a spectrometer configured to measure physical properties of the reflective sample by analyzing the output light, wherein a wavelength of the light source coupled to the light source attachment/detachment unit varies depending on the reflective sample.

公开(公告)号：US09939249B1

公开(公告)日：2018-04-10

申请号：US15418956

申请日：2017-01-30

Applicant: Scott E. Spence

Inventor： Scott E. Spence

IPC: G01B9/02 ,  G02B27/10

CPC classification number: G01B9/02 ,  G01J9/02 ,  G01J2009/0261 ,  G01J2009/0288 ,  G01N21/45 ,  G02B27/10 ,  G02B27/283

Abstract: A birefringent Mach-Zehnder interferometer (MZI) is provided for optically sensing a small fluctuation from an un-polarized light beam. The birefringent MZI includes first and second birefringent crystals arranged coaxially, the first crystal to receive the beam; and first and second 45° polarizers positioned behind respective the first and second crystals. The first crystal divides the beam into first ordinary and extraordinary rays. The first polarizer converts the first rays into first 45° rays. The second crystal divides the first 45° rays into second ordinary, extraordinary and recombination rays. The second polarizer converts the second rays into second 45° rays.

公开(公告)号：US08953169B2

公开(公告)日：2015-02-10

申请号：US13882800

申请日：2011-11-02

Applicant: Herve Lefevre ,  Cedric Molucon ,  Jean-Jacques Bonnefois ,  Karl Aubry

Inventor： Herve Lefevre ,  Cedric Molucon ,  Jean-Jacques Bonnefois ,  Karl Aubry

IPC: G01B9/02 ,  G01J9/02

CPC classification number: G01B9/02055 ,  G01J9/0246 ,  G01J2009/023 ,  G01J2009/0261 ,  G01J2009/0288

Abstract: An interferometric system includes a polarization separation element (10), a first polarization conversion element (11), a Mach-Zehnder interferometer (2) including a first (4) and second (5) arms connected to one another by a first (6) and second (7) ends in order for a first and second beams (20, 21) having the same polarization to pass through the interferometer in a reciprocal manner in opposite directions of propagation, respectively, so as to form a first and second interferometric beam (22, 23), a second polarization conversion element (11) for obtaining an interferometric beam (24), the polarization of which is converted, a polarization-combining element (10), and a detection element (8) suitable for detecting an output beam (25).

Abstract translation: 干涉测量系统包括偏振分离元件（10），第一偏振转换元件（11），马赫曾德尔干涉仪（2），其包括通过第一（6）和第二（6）彼此连接的第一（4）和第二（5） ）和第二（7）端部，以使具有相同偏振的第一和第二光束（20,21）分别以相反的传播方向以相互的方式穿过干涉仪，以便形成第一和第二干涉仪 光束（22,23），用于获得其偏振变换的干涉光束（24）的第二偏振转换元件（11），偏振组合元件（10）和适于检测的检测元件（8） 输出光束（25）。

公开(公告)号：US08416387B2

公开(公告)日：2013-04-09

申请号：US12605017

申请日：2009-10-23

Applicant: Ko Ishizuka

Inventor： Ko Ishizuka

IPC: G03B27/42 ,  G03B27/32 ,  G03B27/68 ,  G03B27/58 ,  G03B27/62 ,  G01B9/02

CPC classification number: G01J9/0246 ,  G01J2009/0219 ,  G01J2009/0261 ,  G03F7/70775

Abstract: A wavelength shift measuring apparatus of the present invention is a wavelength shift detection sensor (WLCD1) which measures a shift of a wavelength of a light beam emitted from a light source, and includes a beam splitter (BS2) splitting the light beam emitted from the light source into a plurality of light beams and to synthesize two light beams among the plurality of light beams to generate an interference light, a spacer member (SP) provided so that an optical path length difference of the two light beams split by the beam splitter (PBS2) is constant, and a plurality of photoelectric sensors (PD) detecting the interference light generated by the beam splitter (BS2). The plurality of photoelectric sensors (PD) output a plurality of interference signals having phases shifted from one another based on the interference light to calculate a wavelength shift using the plurality of interference signals.

Abstract translation: 本发明的波长偏移测量装置是一种波长偏移检测传感器（WLCD1），其测量从光源发射的光束的波长偏移，并且包括分束器（BS2），其将从 光源分割为多个光束，并且在多个光束中合成两个光束以产生干涉光;间隔部件（SP），其设置成使得由分束器分离的两个光束的光路长度差异 （PBS2）是恒定的，并且多个光电传感器（PD）检测由分束器（BS2）产生的干涉光。 多个光电传感器（PD）基于干涉光输出具有相位偏移的多个干涉信号，以使用多个干涉信号计算波长偏移。

公开(公告)号：US07304746B2

公开(公告)日：2007-12-04

申请号：US11501413

申请日：2006-08-09

Applicant: William J. Cottrell

Inventor： William J. Cottrell

IPC: G01B9/02

CPC classification number: G01J9/02 ,  G01J2009/0223 ,  G01J2009/0261 ,  G01M11/005 ,  G01M11/331 ,  G01M11/333

Abstract: A common-path, point-diffraction, phase-shifting interferometer uses a half wave plate having a diffractive element, such as pin hole. A coherent, polarized light source simultaneously generates a reference beam from the diffractive element and an object beam from remaining portions of the light going through the half wave plate. The reference beam has a nearly spherical wavefront. Each of the two beams possesses a different polarization state. The object and reference beams are then independently phase modulated by a polarization sensitive phase modulator that shifts phase an amount depending on applied voltage and depending on polarization state of the incident light. A polarizer is then used to provide the object and reference beams in the same polarization state with equal intensities so they can interfere to create an interferogram with near unity contrast.

Abstract translation: 公共路径，点衍射，相移干涉仪使用具有诸如针孔的衍射元件的半波片。 相干偏振光源同时从衍射元件产生参考光束，并且从通过半波片的光的剩余部分产生物体光束。 参考光束具有近似球面的波前。 两个光束中的每一个具有不同的偏振状态。 物体和参考光束然后通过偏振敏感相位调制器独立相位调制，偏振相位调制器根据施加的电压和取决于入射光的偏振状态移相量。 然后使用偏振器以相同的强度在相同的极化状态下提供物体和参考光束，因此它们可以干扰以产生具有近乎一致的对比度的干涉图。

公开(公告)号：US20060238770A1

公开(公告)日：2006-10-26

申请号：US11112457

申请日：2005-04-22

Applicant: Bogdan Szafraniec

Inventor： Bogdan Szafraniec

IPC: G01B9/02

CPC classification number: G01M11/337 ,  G01J9/04 ,  G01J2009/0261

Abstract: A method for characterizing a device under test includes propagating multiple optical signals through the device under test and combining the multiple optical signals with a reference optical signal. The multiple optical signals are mixed with the reference optical signal and a relative perturbation between the multiple optical signals from the mixing of the multiple optical signals with the reference optical signal is determined. In another embodiment a modulated optical signal is provided from a local oscillator and the modulated optical signal is combined with the input optical signal. The modulated optical signal is mixed with the input signal to provide a mixed signal and at least one polarization-resolved parameter of the input optical signal is extracted from the mixed signal.

Abstract translation: 用于表征被测器件的方法包括通过被测器件传播多个光信号，并将多个光信号与参考光信号组合。 多个光信号与参考光信号混合，并且确定来自多个光信号与参考光信号的混合的多个光信号之间的相对扰动。 在另一个实施例中，调制的光信号由本地振荡器提供，并且调制的光信号与输入的光信号组合。 调制的光信号与输入信号混合以提供混合信号，并且从混合信号中提取输入光信号的至少一个偏振解析参数。

公开(公告)号：US20060119857A1

公开(公告)日：2006-06-08

申请号：US10530934

申请日：2002-10-11

Applicant: Wolf Steffens ,  Ulrich Kallmann ,  Bernd Nebendahl ,  Emmerich Mueller ,  Ralf Haeussler

Inventor： Wolf Steffens ,  Ulrich Kallmann ,  Bernd Nebendahl ,  Emmerich Mueller ,  Ralf Haeussler

IPC: G01B9/02

CPC classification number: G01J9/0246 ,  G01B9/02004 ,  G01B9/02007 ,  G01B9/0207 ,  G01B2290/45 ,  G01B2290/60 ,  G01B2290/70 ,  G01J2009/0261

Abstract: An apparatus and to a method of monitoring an interferometer, comprising the steps of: coupling a first optical signal into the interferometer and into a wavelength reference element, detecting a first resulting interference signal being a result of interference of parts of the first optical signal in the interferometer, detecting a resulting reference signal of the wavelength reference element, the resulting reference signal being a result of interaction of the first optical signal with the wavelength reference element, and comparing the first resulting interference signal with the resulting reference signal to detect a drift of the interferometer, if any.

Abstract translation: 一种监测干涉仪的装置和方法，包括以下步骤：将第一光信号耦合到干涉仪中并进入波长参考元件，检测作为第一光信号部分干扰的结果的第一结果干扰信号 所述干涉仪检测所述波长参考元件的参考信号，所得到的参考信号是所述第一光信号与所述波长参考元件相互作用的结果，以及将所述第一结果干扰信号与所得到的参考信号进行比较以检测漂移 的干涉仪，如果有的话。

公开(公告)号：US4950074A

公开(公告)日：1990-08-21

申请号：US346523

申请日：1989-05-02

Applicant: Norbert Fabricius ,  Helmut Oeste ,  Helga Gotz ,  Ludwig Ro.beta. ,  Hans-Jurgen Guttmann ,  Jurgen Kluge ,  Jorg Baumgart ,  Charitos Efstathiou

Inventor： Norbert Fabricius ,  Helmut Oeste ,  Helga Gotz ,  Ludwig Ro.beta. ,  Hans-Jurgen Guttmann ,  Jurgen Kluge ,  Jorg Baumgart ,  Charitos Efstathiou

IPC: G01J9/02 ,  G01N21/43 ,  G01N21/45

CPC classification number: G01N21/45 ,  G01J2009/023 ,  G01J2009/0261 ,  G01N2021/1748 ,  G01N21/431

Abstract: The invention is directed to a method for determining the refractive index (n) of a substance wherein monochromatic light is conducted to a single-mode wave guide integrated into a substrate. The wave guide is brought into contact with the substance to be measured along a segment of predetermined length. In this way, the effective refractive index in this segment of the wave guide is changed. This effect is utilized for measuring the refractive index of the measured substance. The change of the effective refractive index causes a phase displacement of the light travelling through this measuring segment. This phase displacement is measured as a phase difference to a light component not influenced by the measuring substance. This measurement is preferably made interferometrically.

Abstract translation: 本发明涉及一种用于确定物质的折射率（n）的方法，其中单色光被传导到集成到衬底中的单模式波导。 使波导沿着预定长度的段与所测量的物质接触。 以这种方式，波导的该段中的有效折射率改变。 该效果用于测量被测物质的折射率。 有效折射率的变化导致穿过该测量段的光的相位偏移。 该相位位移被测量为不受测量物质影响的光分量的相位差。 该测量优选是干涉测量的。

公开(公告)号：US4929080A

公开(公告)日：1990-05-29

申请号：US194391

申请日：1988-05-16

Applicant: Herschel Burstyn

Inventor： Herschel Burstyn

IPC: G01J1/44 ,  G01J3/44 ,  G01J3/45 ,  G01J9/02

CPC classification number: G01J3/4412 ,  G01J9/02 ,  G01J2001/442 ,  G01J2009/0261 ,  G01J3/45

Abstract: An optical double-balanced quadrature mixer for analysis of optical spectra, particularly asymmetric optical spectra. Beam splitting means are used in conjunction with a quarter wavelength retardation plate to enable highly stable, accurate and precise spectral analysis. The invention is illustrated in the context of a generic light scattering test setup.

Abstract translation: 一种光学双平衡正交混频器，用于分析光谱，特别是不对称光谱。 光束分束装置与四分之一波长延迟板一起使用，以实现高度稳定，精确和精确的光谱分析。 在通用光散射测试装置的上下文中说明本发明。

公开(公告)号：US4762417A

公开(公告)日：1988-08-09

申请号：US879000

申请日：1986-06-26

Applicant: Shudong Wu ,  Xiangzhen Chen ,  Xiou Tao

Inventor： Shudong Wu ,  Xiangzhen Chen ,  Xiou Tao

IPC: G01J9/02 ,  G01M11/00 ,  G01M11/02 ,  G01B9/02

CPC classification number: G01M11/0271 ,  G01J9/02 ,  G01M11/005 ,  G01J2009/0261

Abstract: A polarization fringe scanning digital interferometer includes an encoder r performing a phase polarization encoding on the wavefront coming from the optical component under test as it passes through the encoder. The encoded wavefront then passes through an analyzer into a video camera to produce electrical signals representing the interference pattern. The encoder includes in sequence, a polarizer having an adjustable polarization axis, a polarization film providing a polarization pinhole through the film and a quarter wave plate that preferably is a Fresnel plate.

Abstract translation: 偏振边缘扫描数字干涉仪包括编码器，用于在通过编码器的被测光学部件的波前对相位偏振编码进行相位偏振编码。 编码波阵面然后通过分析仪进入摄像机，以产生表示干扰图案的电信号。 编码器依次包括具有可调偏振轴的偏振器，通过该膜提供偏振针孔的偏振膜和优选为菲涅耳板的四分之一波片。