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公开(公告)号：US10060861B2
公开(公告)日：2018-08-28
申请号：US15854497
申请日：2017-12-26
IPC分类号： G01N21/00 , G01N21/952 , G01N21/88
CPC分类号： G01N21/952 , G01N21/8806 , G01N2021/8809 , G01N2201/06113
摘要： A method comprises: directing a laser beam onto a side of a tube, wherein the side includes a defect; moving the tube with respect to the laser beam such that the laser beam beams onto the defect; sensing a reflection of the laser beam from the side based on the defect; computationally identifying a change between the laser beam and the reflection; computationally acting based on the change. The side can be internal or external. In other implementations, the laser beam is moved with respect to the tube such that the laser beam beams onto the defect.
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公开(公告)号：US20180114309A1
公开(公告)日：2018-04-26
申请号：US15794848
申请日：2017-10-26
发明人： Kenji KASAHARA , Shuhei SEGAWA , Osamu OHJI , Yuuki HANAWA , Shogo KOJIMA
CPC分类号： G06T7/0004 , G01N21/8806 , G01N21/8851 , G01N2021/8809 , G01N2021/8874 , G01N2021/8887 , G06T7/0006 , G06T7/12 , G06T7/64 , G06T2207/20168 , G06T2207/30164 , G06T2207/30242 , H04N5/2256
摘要： A circular scratch inspection apparatus includes: a camera capturing an image of a workpiece surface around a hole; illumination device emitting light to the workpiece surface around the hole, the light being reflected on the workpiece surface is not directly incident on the camera; and image processor. The image processor: generates a second-derivative image by performing secondary differentiation on luminance values in an actual image obtained by the camera; generates a second-derivative curve for each of a plurality of ruler lines, extending radially from the hole center and are set in an inspection target region on the workpiece surface; counts a first reference number of times for each ruler line; calculates a first reference total number of times; and determines presence or absence of a circular scratch by using the first reference total number of times.
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公开(公告)号：US09494422B2
公开(公告)日：2016-11-15
申请号：US14362874
申请日：2012-11-27
申请人： CCS Inc.
发明人： Shigeki Masumura
CPC分类号： G01B11/30 , G01N21/8806 , G01N2021/8809 , G01N2021/8835 , G01N2201/068
摘要： In order to make it possible for a difference between a defect and a normal part, such as contrast, to appear, a lighting device for inspection is provided with: a surface light source that emits inspection light; a lens that is provided on a light axis of the inspection light emitted from the surface light source, and between an inspection object and the surface light source; and a first diaphragm that is provided between the lens and the surface light source or the inspection object, wherein: the surface light source and the lens are set such that an image plane on which the surface light source is imaged is present near the inspection object; and the first diaphragm is set such that the central axis of an irradiation solid angle determined by a part of the inspection light is parallel to the light axis.
摘要翻译： 为了使缺陷和诸如对比度的正常部分之间的差异可能出现，用于检查的照明装置设置有：发射检查光的表面光源; 设置在从所述面光源发射的检查光的光轴上以及检查对象与所述面光源之间的透镜; 以及设置在所述透镜和所述表面光源或所述检查对象之间的第一光阑，其中：所述面光源和所述透镜被设定为使得在所述检查对象附近存在表面光源成像的像平面 ; 并且第一光阑被设定为使得由检查光的一部分确定的照射立体角的中心轴平行于光轴。
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公开(公告)号：US20150360271A1
公开(公告)日：2015-12-17
申请号：US14302562
申请日：2014-06-12
CPC分类号： G01N21/8803 , G01N21/8806 , G01N2021/8809 , G01N2201/062
摘要： A curved light emitting diode fixture. Particularly, the application provides a curved light emitting diode (LED) fixture for paint less dent repair (PDR) in automobiles. More particularly, the present application provides a curved light emitting diode (LED) fixture for providing multi directional light to illuminate dents on automotive vehicles while repairing such dents.
摘要翻译： 弧形发光二极管夹具。 特别地，该应用提供了一种用于汽车中较少凹陷修复（PDR）的弯曲发光二极管（LED）固定装置。 更具体地，本申请提供了一种弯曲发光二极管（LED）固定装置，用于在修理这种凹痕的同时提供多方向光以照亮机动车辆上的凹痕。
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公开(公告)号：US09110033B2
公开(公告)日：2015-08-18
申请号：US12570527
申请日：2009-09-30
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.
摘要翻译： 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 光学收集和检测系统在前四分之一区域中具有用于收集从工件表面反射的光的光通道组件，以及用于收集从表面散射的光的前收集器和翼收集器，以大大提高测量能力 系统。 光通道组件具有可切换的边缘排除掩模和用于改进反射光检测的反射光检测系统。
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公开(公告)号：US08638429B2
公开(公告)日：2014-01-28
申请号：US13146428
申请日：2009-12-15
CPC分类号： G01N21/9501 , G01N21/8806 , G01N2021/8809 , G01N2021/8848 , H01L22/12
摘要： Provided are a defect inspecting method and a defect inspecting apparatus, wherein defect detecting sensitivity is improved and also haze measurement is performed using polarization detection, while suppressing damages to samples. The defect inspecting apparatus is provided with a light source which oscillates to a sample a laser beam having a wavelength band wherein a small energy is absorbed, and two independent detecting optical systems, i.e., a defect detecting optical system which detects defect scattered light generated by a defect, by radiating the laser beams oscillated by the light source, and a haze detecting optical system which detects roughness scattered light generated due to roughness of the wafer surface. Polarization detection is independently performed with respect to the scattered light detected by the two detecting optical systems, and based on the two different detection signals, defect determination and haze measurement are performed.
摘要翻译： 提供了一种缺陷检查方法和缺陷检查装置，其中提高了缺陷检测灵敏度，并且在抑制对样本的损害的同时使用偏振检测进行雾度测量。 缺陷检查装置具有向样品振荡的光源，其具有吸收小能量的波长带的激光束，以及两个独立的检测光学系统，即检测由 通过照射由光源振荡的激光束的缺陷，以及检测由于晶片表面的粗糙度而产生的粗糙度散射光的雾度检测光学系统。 相对于由两个检测光学系统检测的散射光独立地进行极化检测，并且基于两个不同的检测信号，执行缺陷确定和雾度测量。
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公开(公告)号：US20120207381A1
公开(公告)日：2012-08-16
申请号：US13025709
申请日：2011-02-11
申请人： Biow-Hiem Ong , Chien-Hung Lai , Chih-Chiang Tu , Jong-Yuh Chang , Kuang-Yu Liu
发明人： Biow-Hiem Ong , Chien-Hung Lai , Chih-Chiang Tu , Jong-Yuh Chang , Kuang-Yu Liu
IPC分类号： G06K9/00
CPC分类号： G01N21/8806 , G01N21/55 , G01N21/59 , G01N21/9501 , G01N21/956 , G01N2021/558 , G01N2021/8809 , H01L22/12 , H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： A method for inspecting a manufactured product includes applying a first test regimen to the manufactured product to identify product defects. The first test regimen produces a first set of defect candidates. The method further includes applying a second test regimen to the manufactured product to identify product defects. The second test regimen produces a second set of defect candidates, and the second test regimen is different from the first test regimen. The method also includes generating a first filtered defect set by eliminating ones of the first set of defect candidates that are not indentified in the second set of defect candidates.
摘要翻译： 用于检查制造产品的方法包括将第一测试方案应用于所制造的产品以识别产品缺陷。 第一个测试方案产生第一组缺陷候选物。 该方法还包括将第二测试方案应用于所制造的产品以鉴定产品缺陷。 第二个测试方案产生第二组缺陷候选物，第二个测试方案与第一个测试方案不同。 该方法还包括通过消除在第二组缺陷候选中未识别的第一组缺陷候选中的一个产生第一过滤缺陷集。
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公开(公告)号：US20100110420A1
公开(公告)日：2010-05-06
申请号：US12604052
申请日：2009-10-22
申请人： Neil Judell , Ian Thomas Kohl , Songping Gao , Richard Earl Bills
发明人： Neil Judell , Ian Thomas Kohl , Songping Gao , Richard Earl Bills
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.
摘要翻译： 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有可变极化，偏振继电器组件被布置成选择性地允许具有选定的偏振取向的散射光沿着检测器光轴传递到检测子系统中的光检测单元。 它们还具有收集器输出宽度变化子系统，用于响应于在工件上扫描的位置的位置的变化来改变输出狭缝的宽度。
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公开(公告)号：US20100110419A1
公开(公告)日：2010-05-06
申请号：US12570527
申请日：2009-09-30
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.
摘要翻译： 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 光学收集和检测系统在前四分之一区域中具有用于收集从工件表面反射的光的光通道组件，以及用于收集从表面散射的光的前收集器和翼收集器，以大大提高测量能力 系统。 光通道组件具有可切换的边缘排除掩模和用于改进反射光检测的反射光检测系统。
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10.发明申请SYSTEM AND METHOD FOR CONTROLLING LIGHT SCATTERED FROM A WORKPIECE SURFACE IN A SURFACE INSPECTION SYSTEM 有权用于控制表面检查系统中工件表面散射的光的系统和方法公开(公告)号：US20080304057A1
公开(公告)日：2008-12-11
申请号：US12142850
申请日：2008-06-20
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： In one embodiment, a surface analyzer system comprises a radiation targeting assembly to target a radiation beam onto a surface; and a scattered radiation collecting assembly that collects radiation scattered from the surface. The radiation targeting assembly generates primary and secondary beams. Data collected from the reflections of the primary and secondary beams may be used in a dynamic range extension routine, alone or in combination with a power attenuation routine.
摘要翻译： 在一个实施例中，表面分析器系统包括将辐射束对准到表面上的辐射瞄准组件; 以及收集从表面散射的辐射的散射的辐射收集组件。 辐射瞄准组件产生主光束和次光束。 从主波束和次波束的反射中收集的数据可以单独使用或者与功率衰减程序组合在动态范围扩展程序中使用。
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