公开(公告)号：US09594128B2

公开(公告)日：2017-03-14

申请号：US14228090

申请日：2014-03-27

申请人： IMEC ,  King Abdulaziz City for Science and Technology

发明人： Mahmoud A. Farghaly ,  Veronique Rochus ,  Xavier Rottenberg ,  Hendrikus Tilmans

IPC分类号： G01R33/02 ,  G01R33/028 ,  G01R15/24 ,  G01R33/00 ,  G06F17/50 ,  G01V3/08 ,  G01V3/40

CPC分类号： G01R33/0286 ,  G01R15/245 ,  G01R33/0005 ,  G01R33/028 ,  G01R33/0283 ,  G01V3/087 ,  G01V3/40 ,  G06F17/5086

摘要： A two-axes MEMS magnetometer includes, in one plane, a freestanding rectangular frame having inner walls and four torsion springs, wherein opposing inner walls of the frame are contacted by one end of only two torsion springs, each torsion spring being anchored by its other end, towards the center of the frame, to a substrate. In operation, the magnetometer measures the magnetic field in two orthogonal sensing modes using differential capacitance measurements.

摘要翻译： 双轴MEMS磁力仪在一个平面中包括具有内壁和四个扭转弹簧的独立的矩形框架，其中框架的相对的内壁与仅两个扭转弹簧的一端接触，每个扭转弹簧由其另一个 朝向框架的中心延伸到基板。 在操作中，磁力计使用差分电容测量来测量两个正交感测模式中的磁场。

公开(公告)号：US09562789B2

公开(公告)日：2017-02-07

申请号：US14408176

申请日：2013-06-14

申请人： Commissariat à l'énergie atomique et aux énergies alternatives

发明人： Robert Philippe ,  Dirk Ettelt ,  Arnaud Walther

IPC分类号： G01D5/12 ,  G01R33/028 ,  G01H11/00 ,  G01L1/00 ,  G01R33/038

CPC分类号： G01D5/12 ,  G01H11/00 ,  G01L1/00 ,  G01R33/0283 ,  G01R33/0286 ,  G01R33/038

摘要： A magnetic field sensor comprises a substrate and a moving part which is displaced when subjected to a Laplace force. There is a gauge for measuring the displacement of the moving part. There is a suspended lever that is rotationally displaced about an axis of rotation at right angles to the direction of displacement of the moving part. The lever is connected to the moving part to transmit displacement of the moving part to the lever to cause rotation of the lever about the axis of rotation. The lever is also connected to a first part of the gauge. The sensor comprises a hinge that connects the lever to the substrate. The hinge allows the rotation of the lever about its axis of rotation and is rigid to allow for a lever arm effect. The second part of the gauge is fixed with no degree of freedom to the substrate.

摘要翻译： 磁场传感器包括基板和当经受拉普拉斯力时被移位的移动部件。 有一个测量移动部件位移的量规。 有一个悬挂的杠杆，其围绕与运动部件的位移方向成直角的旋转轴线旋转移位。 杠杆连接到移动部分，以将移动部件的位移传递到杠杆，以使杆绕旋转轴线旋转。 杠杆还连接到量规的第一部分。 传感器包括将杠杆连接到基板的铰链。 铰链允许杠杆围绕其旋转轴线旋转并且是刚性的以允许杠杆臂效应。 量规的第二部分固定在基体上无自由度。

公开(公告)号：US20150123656A1

公开(公告)日：2015-05-07

申请号：US14408176

申请日：2013-06-14

申请人： Commissariatà I'énergie atomique et aux énergies alternatives

发明人： Robert Philippe ,  Dirk Ettelt ,  Arnaud Walther

IPC分类号： G01D5/12 ,  G01H11/00 ,  G01R33/038 ,  G01L1/00

CPC分类号： G01D5/12 ,  G01H11/00 ,  G01L1/00 ,  G01R33/0283 ,  G01R33/0286 ,  G01R33/038

摘要： A magnetic field sensor comprises a substrate and a moving part which is displaced when subjected to a Laplace force. There is a gauge for measuring the displacement of the moving part. There is a suspended lever that is rotationally displaced about an axis of rotation at right angles to the direction of displacement of the moving part. The lever is connected to the moving part to transmit displacement of the moving part to the lever to cause rotation of the lever about the axis of rotation. The lever is also connected to a first part of the gauge. The sensor comprises a hinge that connects the lever to the substrate. The hinge allows the rotation of the lever about its axis of rotation and is rigid to allow for a lever arm effect. The second part of the gauge is fixed with no degree of freedom to the substrate.

摘要翻译： 磁场传感器包括基板和当经受拉普拉斯力时被移位的运动部件。 有一个测量移动部件位移的量规。 有一个悬挂的杠杆，其围绕与运动部件的位移方向成直角的旋转轴线旋转移位。 杠杆连接到移动部分，以将移动部件的位移传递到杠杆，以使杆绕旋转轴线旋转。 杠杆还连接到量规的第一部分。 传感器包括将杠杆连接到基板的铰链。 铰链允许杠杆围绕其旋转轴线旋转并且是刚性的以允许杠杆臂效应。 量规的第二部分固定在基体上无自由度。

公开(公告)号：US08575926B2

公开(公告)日：2013-11-05

申请号：US13115995

申请日：2011-05-26

申请人： Shih-Chieh Chao ,  Chih-Wen Huang

发明人： Shih-Chieh Chao ,  Chih-Wen Huang

IPC分类号： G01R33/02

CPC分类号： G01R33/0283

摘要： A planar magnetic field probe is provided. The planar magnetic field probe increases the sensitivity of magnetic field intensity detection by using a left multi-sensor loop and a right multi-sensor loop formed by a first patterned metal layer and a second patterned metal layer, and decreases the electric field noise coupling by surrounding the left multi-sensor loop and the right multi-sensor loop with a symmetrical shielding metal structure formed by a first patterned shielding metal layer, a second patterned shielding metal layer and a plurality of through vias.

摘要翻译： 提供平面磁场探头。 平面磁场探测器通过使用由第一图案化金属层和第二图案化金属层形成的左多传感器环路和右多传感器环路来增加磁场强度检测的灵敏度，并且通过以下方式减小电场噪声耦合 围绕左多传感器回路和右多传感器回路，其具有由第一图案化屏蔽金属层，第二图案化屏蔽金属层和多个通孔形成的对称屏蔽金属结构。

公开(公告)号：US08236577B1

公开(公告)日：2012-08-07

申请号：US13007574

申请日：2011-01-14

申请人： George Hsu ,  Xiao “Charles” Yang

发明人： George Hsu ,  Xiao “Charles” Yang

IPC分类号： H01L21/00

CPC分类号： G01R33/0283 ,  B81C1/00238 ,  G01C17/28 ,  G01C25/00

摘要： A method for fabricating an integrated electronic compass and circuit system. The fabrication method begins with providing a semiconductor substrate comprising a surface region. One or more CMOS integrated circuits are then formed on one or more portions of the semiconductor substrate. Once the CMOS circuits are formed, a thickness of dielectric material is formed overlying the one or more CMOS integrated circuits. A substrate is then joined overlying the thickness of the dielectric material. Once joined, the substrate is thinned to a predetermined thickness. Following the thinning process, an electric compass device is formed within one or more regions of the predetermined thickness of the substrate. Other mechanical devices or MEMS devices can also be formed within one or more regions of the thinned substrate.

摘要翻译： 一种用于制造集成电子罗盘和电路系统的方法。 制造方法开始于提供包括表面区域的半导体衬底。 然后在半导体衬底的一个或多个部分上形成一个或多个CMOS集成电路。 一旦形成了CMOS电路，就形成了覆盖一个或多个CMOS集成电路的电介质材料的厚度。 然后将衬底接合在电介质材料的厚度上。 一旦接合，将基板减薄到预定厚度。 在薄化处理之后，在基板的预定厚度的一个或多个区域内形成电罗盘装置。 其他机械装置或MEMS装置也可以在薄化基板的一个或多个区域内形成。

公开(公告)号：US20110090937A1

公开(公告)日：2011-04-21

申请号：US12904632

申请日：2010-10-14

申请人： Vladimir MALYSHEV ,  Evgeni Sorkine

发明人： Vladimir MALYSHEV ,  Evgeni Sorkine

IPC分类号： G01K7/00 ,  G01R33/12

CPC分类号： G01K7/36 ,  G01K2207/02 ,  G01K2207/06 ,  G01R33/0283

摘要： A remote, noncontact temperature determination method and apparatus is provided, which is operable to determine the temperature of a conducting member forming a part of or in operative thermal communication with an object of interest. The method comprises the steps of first inducing a closed vortex eddy current (28) in a conducting member (16, 38, 44) by subjecting the member (16, 38, 44) to a magnetic field, such that the corresponding eddy current magnitude changes exponentially over time. A characteristic time constant of the exponential current magnitude changes is then determined, and this is used to calculate the temperature of the object. The apparatus (24) includes a field transmitting coil (14) coupled with a waveform generator (12) for inducing the eddy current (28), and a field receiving coil assembly (18) which detects the corresponding magnetic field induced by the eddy current (28). Using the invention, temperature determinations can be made which are substantially independent of the relative distance and/or angular orientation between the conducting member (16, 38, 44) and the field receiving coil assembly (18).

摘要翻译： 提供远程非接触式温度测定方法和装置，其可操作以确定形成感兴趣对象的一部分或与之有效热连通的导电构件的温度。 该方法包括以下步骤：首先通过对构件（16,38,44）施加磁场来引起导电构件（16,38,44）中的闭合涡流涡流（28），使得相应的涡流大小 随时间呈指数变化。 然后确定指数电流幅度变化的特征时间常数，并且这用于计算物体的温度。 装置（24）包括与用于感应涡流（28）的波形发生器（12）耦合的场发射线圈（14），以及一个场接收线圈组件（18），其检测由涡流引起的相应磁场 （28）。 使用本发明，可以进行基本上与导电构件（16,38,44）和场接收线圈组件（18）之间的相对距离和/或角度取向无关的温度测定。

公开(公告)号：US07508189B2

公开(公告)日：2009-03-24

申请号：US11733896

申请日：2007-04-11

申请人： Ertugrul Berkcan ,  Shankar Chandrasekaran ,  Christopher James Kapusta ,  Laura Jean Meyer ,  Glenn Scott Claydon ,  Debbie Gahaton Jones ,  Anis Zribi

发明人： Ertugrul Berkcan ,  Shankar Chandrasekaran ,  Christopher James Kapusta ,  Laura Jean Meyer ,  Glenn Scott Claydon ,  Debbie Gahaton Jones ,  Anis Zribi

IPC分类号： G01R31/00

CPC分类号： G01R15/207 ,  G01R15/148 ,  G01R33/0283 ,  G01R33/0286 ,  G01R35/005 ,  Y10T29/49002

摘要： A micro-electromechanical system current and magnetic field sensor is presented. The micro-electromechanical system current and magnetic field sensor is configured to sense a magnetic field produced by a current carrying conductor. The sensor includes a structural component comprising a substrate and a compliant layer, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field. The sensor further includes a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.

摘要翻译： 提出了一种微机电系统电流和磁场传感器。 微机电系统电流和磁场传感器被配置为感测由载流导体产生的磁场。 该传感器包括结构部件，其包括基板和柔性层，耦合到结构部件的磁 - 机械转换器，以提供磁场的机械指示。 传感器还包括耦合到结构部件的应变响应部件以感测机械指示并且响应于此而提供载流导体中的电流的指示。

公开(公告)号：US07495430B2

公开(公告)日：2009-02-24

申请号：US11506988

申请日：2006-08-18

申请人： Ertugrul Berkcan ,  Christopher James Kapusta ,  Glenn Scott Claydon ,  Anis Zribi ,  Laura Jean Meyer ,  Wei-Cheng Tian

发明人： Ertugrul Berkcan ,  Christopher James Kapusta ,  Glenn Scott Claydon ,  Anis Zribi ,  Laura Jean Meyer ,  Wei-Cheng Tian

IPC分类号： G01R33/00

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

摘要翻译： 微机电系统（MEMS）电流传感器被描述为包括第一导体，用于使由第一导体中的电流产生的磁场成形的磁场成形部件，以及包括磁 - 用于感测成形磁场的MEMS组件，并且响应于此，提供第一导体中的电流的指示。 还描述了一种用于感测使用MEMS的电流的方法，包括使用在第一导体中的电流产生的磁场成形，用具有磁MEMS组件磁场感测电路的基于MEMS的磁场感测部件感测成形的磁场 并且提供第一导体中的电流的指示。

公开(公告)号：US20080109190A1

公开(公告)日：2008-05-08

申请号：US11930160

申请日：2007-10-31

申请人： Scott BAUER ,  James BAAL

发明人： Scott BAUER ,  James BAAL

IPC分类号： G06F15/00

CPC分类号： G01R33/0283 ,  B60R21/0134 ,  B60R21/0136 ,  B60R2021/0006

摘要： First and second complementary voltage signals are operatively coupled across a series circuit comprising first and second sense resistors and a circuit element therebetween. An output signal responsive to the self-impedance of the circuit element is generated responsive at least one of a voltage across the first sense resistor and a voltage across the second sense resistor, and at least one of the first and second complementary voltage signals is controlled responsive to the output signal so as to provide for attenuating at least one noise signal having a frequency that is substantially different from a frequency of the first and second complementary voltage signals.

摘要翻译： 第一和第二互补电压信号跨越包括第一和第二检测电阻器的串联电路和它们之间的电路元件可操作地耦合。 产生响应于电路元件的自身阻抗的输出信号，其响应于第一检测电阻器两端的电压和第二检测电阻器两端的电压中的至少一个产生响应，并且第一和第二互补电压信号中的至少一个被控制 响应于输出信号，以便提供衰减至少一个具有与第一和第二互补电压信号的频率基本不同的频率的噪声信号。

公开(公告)号：US20070096729A1

公开(公告)日：2007-05-03

申请号：US10581308

申请日：2004-12-16

申请人： Kevin Brunson ,  David King

发明人： Kevin Brunson ,  David King

IPC分类号： G01R33/02

CPC分类号： G01R33/0286 ,  G01R33/022 ,  G01R33/0283

摘要： A magnetic field sensor device (2) is described that comprises an oscillatory member (8) and current control means (6). The current control means (6) is arranged to pass an alternating current (AC) along at least first (10) and second (12) current paths provided through the oscillatory member (8) and is arranged to provide magnetic gradiometer mode operation (i.e. to measure magnetic field gradient) in which current flow through the first current path (10) is in substantially the opposite direction to current flow through the second current path (12). The current control means (6) can also prove magnetometer mode operation (i.e. to measure magnetic field strength). The magnetic field sensor (2) may be used in a compass.

摘要翻译： 描述了包括振荡构件（8）和电流控制装置（6）的磁场传感器装置（2）。 电流控制装置（6）被布置成沿着穿过振荡构件（8）提供的至少第一（10）和第二（12）电流路径传递交流电（AC），并且被布置成提供磁梯度计模式操作 以测量磁场梯度），其中流过第一电流路径（10）的电流基本上与通过第二电流路径（12）的电流相反。 电流控制装置（6）还可以证明磁力计模式操作（即测量磁场强度）。 磁场传感器（2）可以用于罗盘。