公开(公告)号：US09755612B2

公开(公告)日：2017-09-05

申请号：US14367803

申请日：2012-12-20

申请人： The Swatch Group Research and Development Ltd

发明人： Thierry Hessler ,  Silvio Dalla Piazza

IPC分类号： B44C1/22 ,  H03H9/19 ,  B81C1/00 ,  G04C3/12 ,  G04F5/06 ,  G04G17/02 ,  G04B17/06 ,  G04B17/34 ,  B23K26/00 ,  F21V17/02 ,  H01L41/047 ,  H01L41/332 ,  H03H9/215

CPC分类号： H03H9/19 ,  B23K26/53 ,  B81B2201/0271 ,  B81B2203/0118 ,  B81C1/00595 ,  B81C2201/0143 ,  F21V17/02 ,  G04B17/066 ,  G04B17/345 ,  G04C3/12 ,  G04F5/063 ,  G04G17/02 ,  H01L41/0475 ,  H01L41/332 ,  H03H9/215

摘要： A method for manufacturing a resonator in a substrate, including: a) modifying a structure of at least one region of the substrate to make the at least one region more selective; b) etching the at least one region to selectively manufacture the resonator.

公开(公告)号：US09143114B2

公开(公告)日：2015-09-22

申请号：US14258026

申请日：2014-04-22

申请人： NIHON DEMPA KOGYO CO., LTD.

发明人： Hidenori Harima

IPC分类号： G04F5/06 ,  H03B5/32 ,  H03H9/10 ,  H03H9/17 ,  H03H9/05

CPC分类号： H03H9/10 ,  G04F5/063 ,  H03B5/32 ,  H03H9/0509 ,  H03H9/0519 ,  H03H9/0547 ,  H03H9/0561 ,  H03H9/1014 ,  H03H9/17

摘要： A bonding type crystal controlled oscillator includes a crystal package and a circuit package bonded by two-tier bonding. An anisotropy conductive adhesive is interposed between back surface of the crystal package facing the circuit package and an upper surface of the circuit package facing the crystal package. The anisotropy conductive adhesive includes a thermosetting resin containing solder micro particles dispersed in the thermosetting resin. Assuming that a thickness of the output terminal formed at the crystal package is C μm, a thickness of the external terminal formed at the circuit package is D μm, and an average outside diameter of the solder micro particles dispersed in the anisotropy conductive adhesive is E μm, the dimensional relation is set to (C+D)>E.

摘要翻译： 键合型晶体振荡器包括晶体封装和通过双层结合键合的电路封装。 各向异性导电粘合剂介于面向电路封装的晶体封装的背面与面向晶体封装的电路封装的上表面之间。 各向异性导电粘合剂包括含有分散在热固性树脂中的焊料微粒的热固性树脂。 假设晶体封装上形成的输出端的厚度为Cμm，则形成在电路封装处的外部端子的厚度为Dμm，分散在各向异性导电粘合剂中的焊料微粒的平均外径为E μm，尺寸关系设定为（C + D）> E。

公开(公告)号：US20140361842A1

公开(公告)日：2014-12-11

申请号：US14296470

申请日：2014-06-05

申请人： NIHON DEMPA KOGYO CO., LTD.

发明人： WEN JEN CHEN ,  CHISATO ISHIMARU

IPC分类号： H03B5/36 ,  H03B1/02

CPC分类号： H03B5/36 ,  G04F5/063 ,  H01L41/053 ,  H01L41/083 ,  H01L41/0913 ,  H03B1/02 ,  H03B5/32 ,  H03H9/0547 ,  H03H9/19 ,  H03L7/18

摘要： A dual-mode crystal oscillator includes a single AT-cut quartz crystal piece, a package, and an integrated circuit. The integrated circuit includes an oscillation circuit configured to cause the AT-cut quartz crystal piece to oscillate at a frequency in the MHz band, a dividing circuit configured to divide the frequency in the MHz band to generate a frequency of 32.768 kHz, a selection circuit configured to select one of a pause state where the frequency in the MHz band is not output and an active state where the frequency in the MHz band is output. The mounting surface includes three electrodes arranged in a direction along the long side and two electrodes arranged in a direction along the short side. The electrode to output the frequency of 32.768 kHz and the electrode to output the frequency in the MHz band are arranged not adjacent to one another.

摘要翻译： 双模晶体振荡器包括单个AT切割石英晶片，封装和集成电路。 集成电路包括：振荡电路，被配置为使得AT切割石英晶片以MHz频带的频率振荡;分频电路，被配置为将频率在MHz频带内分频以产生32.768kHz的频率;选择电路 被配置为选择不输出MHz频带中的频率的暂停状态之一，并且输出频率在MHz频带中的激活状态。 安装面包括沿长边方向排列的三个电极和沿着短边方向排列的两个电极。 输出频率为32.768kHz的电极和输出频率在MHz频带的电极彼此不相邻。

公开(公告)号：US20140016443A1

公开(公告)日：2014-01-16

申请号：US13939737

申请日：2013-07-11

申请人： ETA SA Manufacture Horlogere Suisse

发明人： Francois KLOPFENSTEIN

IPC分类号： G04B17/00

CPC分类号： G04B17/00 ,  G04F5/06 ,  G04F5/063 ,  G04F5/066 ,  G04G17/06 ,  H03B5/36

摘要： The electronic module (1) includes a quartz or MEMS resonator (3), which is confined within a resonator case (5), which is provided with electrical contact pads (15) over at least one external surface for the electrical connection of the resonator. A printed circuit board (6) is also provided for carrying the resonator case (5) and it includes electrical connection terminals (18) for connection to the electrical connection pads (15) of the resonator case. The resonator case (5) is fixedly held inside a case structure (6, 9) of the electronic module (1), via at least one mechanical shock damping element (7). The damping element 7) may be an elastomer element, which includes metal wires (17) for the electrical connection of the resonator case (5) across the printed circuit board (6).

摘要翻译： 电子模块（1）包括石英或MEMS谐振器（3），其被限制在谐振器壳体（5）内，该谐振器壳体（5）在至少一个外表面上设置有电接触焊盘（15），用于谐振器 。 还提供用于承载谐振器壳体（5）的印刷电路板（6），并且其包括用于连接到谐振器壳体的电连接焊盘（15）的电连接端子（18）。 谐振器壳体（5）经由至少一个机械减震元件（7）固定地保持在电子模块（1）的壳体结构（6,9）内。 阻尼元件7）可以是弹性体元件，其包括用于谐振器壳体（5）穿过印刷电路板（6）的电连接的金属线（17）。

公开(公告)号：US08436515B2

公开(公告)日：2013-05-07

申请号：US12842643

申请日：2010-07-23

申请人： Junya Fukuda

发明人： Junya Fukuda

IPC分类号： H01L41/053

CPC分类号： H03H3/04 ,  G04F5/063 ,  G04R20/10 ,  H03H9/1021 ,  H03H9/21 ,  H03H2003/026 ,  H03H2003/0492 ,  Y10T29/42

摘要： Provide a highly efficient manufacturing method of a piezoelectric vibrator and to provide a piezoelectric vibrator manufactured by this manufacturing method. A method for manufacturing a piezoelectric vibrator 1 including: a base board 2 and a lid board 3 which are superimposed on each other so as to form a cavity therebetween; a piezoelectric vibrating reed 4 which is accommodated in the cavity and bonded to the base board; a bonding film 35 which is formed on the entire surface of the lid board on the opposite side to the base board so as to bond both boards to each other at a portion thereof being in contact with the base board, wherein the piezoelectric vibrating reed includes a pair of vibrating arms 10 and 11 and a weight metal film 21 formed on a tip end of each of the vibrating arms, wherein the bonding film is formed of a material which is capable of absorbing surrounding gas by being activated with laser irradiation, and wherein the method includes a laser irradiation step of simultaneously irradiating the weight metal film and the bonding film with a laser beam.

摘要翻译： 提供压电振动器的高效制造方法，并提供通过该制造方法制造的压电振动器。 一种制造压电振动器1的方法，包括：基板2和盖板3，它们彼此重叠以在它们之间形成空腔; 压电振动片4，其容纳在空腔中并结合到基板; 接合膜35，其形成在与基板相反的一侧的盖板的整个表面上，以便在与基板接触的部分处将两个板彼此接合，其中压电振动片包括 一对振动臂10和11以及形成在每个振动臂的前端的重量金属膜21，其中接合膜由能够通过激光照射激活而吸收周围气体的材料形成;以及 其特征在于，所述方法包括用激光束同时照射所述重量金属膜和所述接合膜的激光照射工序。

公开(公告)号：US06339276B1

公开(公告)日：2002-01-15

申请号：US09431772

申请日：1999-11-01

申请人： Bradley Paul Barber ,  Yiu-Huen Wong

发明人： Bradley Paul Barber ,  Yiu-Huen Wong

IPC分类号： H01L4104

CPC分类号： H03H9/131 ,  G04F5/063 ,  H03H3/04 ,  H03H9/175 ,  H03H2003/0428 ,  H04R15/02 ,  H04R17/10 ,  H04R31/00 ,  Y10S29/016 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49004 ,  Y10T29/49005

摘要： The present invention is a method for adjusting the resonant frequency of a mechanical resonator whose frequency is dependent on the overall resonator thickness. Alternating selective etching is used to remove distinct adjustment layers from a top electrode. One of the electrodes is structured with a plurality of stacked adjustment layers, each of which has distinct etching properties from any adjacent adjustment layers. Also as part of the same invention is a resonator structure in which at least one electrode has a plurality of stacked layers of a material having different etching properties from any adjacent adjustment layers, and each layer has a thickness corresponding to a calculated frequency increment in the resonant frequency of the resonator.

摘要翻译： 本发明是一种用于调节机械谐振器的谐振频率的方法，该机械谐振器的频率取决于整个谐振器厚度。 使用交替选择性蚀刻来从顶部电极去除不同的调节层。 其中一个电极由多个堆叠的调整层构成，每个层都具有与任何相邻的调整层不同的蚀刻特性。 同样的发明的一部分也是一种共振器结构，其中至少一个电极具有与任何相邻的调整层具有不同蚀刻性能的材料的多个堆叠层，并且每个层的厚度对应于计算出的 谐振器的谐振频率。

公开(公告)号：US4450377A

公开(公告)日：1984-05-22

申请号：US306558

申请日：1981-09-28

申请人： Wolfgang Briese

发明人： Wolfgang Briese

IPC分类号： G04F5/06 ,  H03B5/32 ,  H03H9/02 ,  H03H9/05 ,  H03H9/54 ,  H01L41/08 ,  H01L41/04

CPC分类号： H03H9/0514 ,  G04F5/063 ,  H03B5/32 ,  H03H9/0542

摘要： In an assembly of a piezoelectric crystal and an IC on a substrate, additional capacitors, such as load capacitors of a crystal oscillator, are designed as blocks for mounting the crystal on the substrate at its vibration nodes.

摘要翻译： 在基板上的压电晶体和IC的组装中，将诸如晶体振荡器的负载电容器的附加电容器设计为用于在其振动节点处将晶体安装在基板上的块。

公开(公告)号：US4447753A

公开(公告)日：1984-05-08

申请号：US323487

申请日：1981-11-20

申请人： Osamu Ochiai

发明人： Osamu Ochiai

IPC分类号： G04F5/06 ,  H03H3/04 ,  H03H9/02 ,  H03H9/05 ,  H03H9/19 ,  H01L41/04

CPC分类号： H03H9/02023 ,  G04F5/063 ,  H03H3/04 ,  H03H9/02102 ,  H03H9/19 ,  H03H2003/0428

摘要： The GT-cut quartz resonator resonated by two longitudinal modes and provided with the masses for frequency-temperature characteristics adjustment and frequency adjustment. The frequency-temperature characteristics and the frequency of the GT-cut quartz resonator are adjusted by eliminating the masses. Consequently, the quartz resonator adjusted to the normal frequency and having the excellent frequency-temperature characteristics is attained. Further the GT-cut quartz resonator of small and thin size is attained by making the resonant portion and the supporting portions in one piece by photolithographic technique.

摘要翻译： GT切割石英谐振器由两个纵向模式谐振，并具有用于频率温度特性调整和频率调整的质量。 通过消除质量来调整GT切割石英谐振器的频率温度特性和频率。 因此，实现了调整到正常频率并且具有优异的频率 - 温度特性的石英谐振器。 此外，通过光刻技术将谐振部分和支撑部分一体化制成小而薄的GT切割石英谐振器。

公开(公告)号：US4253036A

公开(公告)日：1981-02-24

申请号：US925936

申请日：1978-07-19

申请人： Shigeru Kizaki

发明人： Shigeru Kizaki

IPC分类号： G04F5/06 ,  H03H9/13 ,  H03H9/19 ,  H03H9/21 ,  H03H9/215 ,  H01L41/08

CPC分类号： H03H9/215 ,  G04F5/063 ,  H03H2003/026

摘要： A subminiature flexural mode quartz crystal vibrator comprises a tuning fork formed by photolithographic techniques from a thin quartz crystal plate obtained by rotating an X-cut plate around the X-axis by an angle of 0.degree. to 10.degree. and further rotating the X-cut plate around the Y'-axis by an angle of 70.degree. to 90.degree., the plate having a thickness of less than 0.2 mm. Electrodes formed on sides of the tines are of a different metallic material from planar electrodes formed on at least one of the top and bottom surfaces of the tines. A side electrode of one tine is electrically connected by an overlapping joint with a planar electrode of the other tine.

摘要翻译： 一种超小型弯曲模式石英晶体振子包括通过光刻技术形成的音叉，该音叉通过将X切割板围绕X轴旋转0°至10°的角度而获得的薄的石英晶体板形成，并进一步旋转X切割 将Y'轴围绕70度至90度的角度放置，该板的厚度小于0.2mm。 形成在齿的侧面上的电极与形成在尖端的顶表面和底表面中的至少一个上的平面电极不同的金属材料。 一个齿的侧面电极通过与另一个齿的平面电极的重叠接头电连接。

公开(公告)号：US4216402A

公开(公告)日：1980-08-05

申请号：US576173

申请日：1975-05-09

申请人： Jean Engdahl

发明人： Jean Engdahl

IPC分类号： H03H9/19 ,  G04F5/06 ,  H03H9/02 ,  H03H9/05 ,  H03H9/17 ,  H01L41/10

CPC分类号： H03H9/1035 ,  G04F5/063 ,  H03H9/0595 ,  H03H9/17

摘要： A piezoelectric resonator assembly comprises a single integral plate which is cut to form a peripheral region for supporting a resonator, a central resonating region for resonating in the longitudinal mode, surface-shear mode, or bending mode, and at least two oppositely positioned arms for fastening the peripheral region to the central region at opposite points on the central resonating region. The arms are positioned at nodal zones of the central resonating region. There is a single gap between the peripheral region and the central resonating region at each position about the central resonating region except at the positions of the arms. The entire upper and lower surfaces of the plate are continuous and have metal plates formed thereon for forming the excitation electrodes of the central resonating region. The metallized plates are attached to leads at the peripheral region. Upper and lower cover elements are also attached to the metallized plates at the peripheral region for covering the central resonating region.

摘要翻译： 压电谐振器组件包括单个整体板，其被切割以形成用于支撑谐振器的外围区域，用于在纵向模式下谐振的中心谐振区域，表面剪切模式或弯曲模式，以及至少两个相对定位的臂，用于 将周边区域紧固在中心区域的中央谐振区域的相对点处。 臂位于中心谐振区域的节点区域。 在围绕中央谐振区域的各个位置处的外围区域和中心谐振区域之间除了在臂的位置之外存在单个间隙。 板的整个上表面和下表面是连续的，并且在其上形成有金属板以形成中心谐振区域的激励电极。 金属化板在周边区域连接到引线。 上覆盖元件和下覆盖元件也在外围区域附接到金属化板以覆盖中心谐振区域。