TEACHING DEVICE AND TEACHING METHOD
    4.
    发明申请

    公开(公告)号:US20170285609A1

    公开(公告)日:2017-10-05

    申请号:US15474158

    申请日:2017-03-30

    申请人: EBARA CORPORATION

    发明人: Hidetatsu ISOKAWA

    IPC分类号: G05B19/402

    摘要: A teaching apparatus is provided with an arm-side position sensor attached to arms, a dummy wafer placed on a stage, a dummy-wafer-side position sensor attached to the dummy wafer, and a signal receiver configured to receive a position signal from the arm-side position sensor to determine a position coordinate of the arm-side position sensor, and receive a position signal from the dummy-wafer-side position sensor to determine a position coordinate of the dummy-wafer-side position sensor. A control part, based on the position coordinate of the dummy-wafer-side position sensor, calculates a position coordinate of the arm-side position sensor when the arms hold the wafer, and moves the arms such that the arm-side position sensor moves to the calculated position coordinate.