公开(公告)号：US09990737B2

公开(公告)日：2018-06-05

申请号：US14568681

申请日：2014-12-12

申请人： Carl Zeiss SMT GmbH

发明人： Dieter Weber ,  Markus Waiblinger

IPC分类号： G06K9/00 ,  G06T7/40 ,  H01J37/26 ,  G06T7/00 ,  G06T11/60 ,  G02B21/00 ,  G01Q30/02 ,  G01Q30/04 ,  G06K9/46

CPC分类号： G06T7/40 ,  G01Q30/02 ,  G01Q30/04 ,  G02B21/008 ,  G06K2009/4666 ,  G06T7/0008 ,  G06T11/60 ,  H01J37/26 ,  H01J2237/2583 ,  H01J2237/2817 ,  H01J2237/31744

摘要： An apparatus for correlating at least two images of a photolithographic mask that at least partially overlap, in which the apparatus includes a correlation unit that is provided to use at least one random variation, which is present in the at least two images, of at least one structural element of the photolithographic mask for the correlation of the at least two images.

公开(公告)号：US07804067B2

公开(公告)日：2010-09-28

申请号：US11951768

申请日：2007-12-06

申请人： Osamu Takaoka

发明人： Osamu Takaoka

IPC分类号： G01Q80/00 ,  G01Q40/00 ,  G01Q60/04 ,  G01Q60/02

CPC分类号： G01N23/2251 ,  G01Q60/38 ,  H01J2237/2583 ,  H01J2237/28

摘要： When a characterization of a tip of a diamond stylus for working is needed, the tip of the diamond stylus for working used is observed by a high resolution scanning electron microscope of a high acceleration voltage under a steam atmosphere. When the tip of the diamond stylus for working is worn or when a shape of the tip of the stylus needs to be changed, the tip of the diamond stylus for working is worked by selectively irradiating an electron beam only to a necessary region by increasing an amount of steam and an amount of a current of the electron beam. When a working chip is strongly adhered to the diamond stylus for working and needs to be removed, the electron beam is selectively irradiated only to the working chip adhered to the tip of the diamond stylus for working to be removed under a xenon fluoride atmosphere.

摘要翻译： 当需要用于工作的金刚石触针的尖端的表征时，用于工作的金刚石触针的尖端通过高蒸汽气氛下的高加速电压的高分辨率扫描电子显微镜观察。 当用于工作的金刚石触针的尖端被磨损时或者当需要改变触笔尖端的形状时，通过选择性地将电子束照射到所需区域来加工用于加工的金刚石触针的尖端， 蒸汽量和电子束的电流量。 当工作芯片牢固地粘附到用于工作的金刚石触针并且需要去除时，电子束被选择性地仅照射到粘附到金刚石触针的尖端的工作芯片上，以在氙氟化物气氛下去除。

公开(公告)号：US5559328A

公开(公告)日：1996-09-24

申请号：US283007

申请日：1994-07-29

申请人： Paul S. Weiss ,  Lloyd A. Bumm ,  Barry G. Willis ,  Richard L. Baer

发明人： Paul S. Weiss ,  Lloyd A. Bumm ,  Barry G. Willis ,  Richard L. Baer

IPC分类号： G01Q30/02 ,  G01Q30/10 ,  G01Q30/14 ,  G01Q30/16 ,  G01Q60/12 ,  G01Q60/16 ,  G01Q60/18 ,  G01Q60/60 ,  G11B9/00 ,  G11B11/00 ,  G11B11/08 ,  H01J37/20

CPC分类号： G01Q60/16 ,  B82Y10/00 ,  B82Y20/00 ,  B82Y35/00 ,  B82Y40/00 ,  G01Q30/10 ,  G01Q30/16 ,  G01Q60/12 ,  G01Q60/22 ,  G01Q60/60 ,  G11B11/002 ,  G11B11/08 ,  G11B9/14 ,  G11B9/149 ,  H01J37/20 ,  H01J2237/204 ,  H01J2237/2065 ,  H01J2237/2538 ,  H01J2237/2583 ,  H01J2237/31738 ,  Y10S977/86

摘要： A sample and the tip portion of an alternating current scanning tunneling microscope are electrically enclosed within a cavity with electrically conductive walls. The dimensions of the cavity are smaller than the wavelength of a component of the AC signal applied by the probe to the sample so that the output signal detected by the probe from the sample will not be contaminated by resonant effects of the cavity.

摘要翻译： 交流扫描隧道显微镜的样品和尖端部分电气封闭在具有导电壁的腔内。 腔的尺寸小于由探针施加到样品的AC信号的分量的波长，使得来自样品的探针检测的输出信号不会被空腔的共振效应污染。

公开(公告)号：US07960695B1

公开(公告)日：2011-06-14

申请号：US11383356

申请日：2006-05-15

申请人： Victor B. Kley

发明人： Victor B. Kley

IPC分类号： G01N13/16

CPC分类号： G01Q30/02 ,  G01Q60/38 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/1205 ,  H01J2237/1503 ,  H01J2237/2583 ,  H01J2237/2803

摘要： An e-beam or ion beam imaging and exposure system is built into the end of an AFM cantilever which images using the scanning capabilities built into the AFM. In one embodiment, a boron doped diamond cold cathode is formed into the cantilever with an associated accelerating electrode and secondary electron collection electrode. The assembly is brought within a few nanometers of the object to be imaged or exposed using the AFM. One or more gas channels built into the cantilever assembly provide a positive pressure of inert gas to prevent oxidative erosion of the cold cathode and can bleed any surface charge build up on the sample surface. After secondaries are collected the cantilever is moved to the next area to be exposed.

摘要翻译： 电子束或离子束成像和曝光系统内置在AFM悬臂的末端，使用内置于AFM中的扫描功能的图像。 在一个实施例中，硼掺杂的金刚石冷阴极与相关联的加速电极和二次电子收集电极形成为悬臂。 使用AFM将组件置于要成像或暴露的物体的几纳米内。 内置在悬臂组件中的一个或多个气体通道提供惰性气体的正压力，以防止冷阴极的氧化侵蚀，并且可能导致在样品表面上积累的任何表面电荷。 收集次级后，将悬臂移至下一个要暴露的区域。

公开(公告)号：US20080073533A1

公开(公告)日：2008-03-27

申请号：US11703154

申请日：2007-02-07

申请人： Hiroshi Makino ,  Masaki Hasegawa ,  Momoyo Enyama

发明人： Hiroshi Makino ,  Masaki Hasegawa ,  Momoyo Enyama

IPC分类号： G21K7/00

CPC分类号： G03F7/70616 ,  H01J37/20 ,  H01J37/222 ,  H01J37/265 ,  H01J37/29 ,  H01J2237/0048 ,  H01J2237/223 ,  H01J2237/226 ,  H01J2237/24578 ,  H01J2237/24592 ,  H01J2237/2583

摘要： There is a need for inspecting a heightwise variation in a sample. A holder holds a sample. A charge control unit charges the sample held by the holder. A retarding power supply applies a voltage to the sample held by the holder. An electro-optic system radiates an electron beam to the sample applied with a voltage by the retarding power supply and images a mirror electron returning near the surface of the sample. An image processing unit processes a mirror image resulting from imaging the mirror electron. The image processing unit outputs information corresponding to a difference between mirror images, i.e., a mirror image acquired by imaging the mirror electron and a mirror image for a prepared standard preparation, as a heightwise variation in a sample.

摘要翻译： 需要检查样品的高度变化。 持有人持有样本。 收费控制单元收取由持有人持有的样本。 延迟电源对由保持器保持的样品施加电压。 电光系统通过延迟电源将电子束辐射到施加有电压的样品，并对在样品表面附近返回的镜电子进行成像。 图像处理单元处理由镜电子成像产生的镜像。 图像处理单元输出与镜像相对应的信息，即通过将镜像电子成像获得的镜像和准备的标准品的镜像作为样品的高度变化。

公开(公告)号：US20040154744A1

公开(公告)日：2004-08-12

申请号：US10759354

申请日：2004-01-16

发明人： Takashi Kaito ,  Masatoshi Yasutake ,  Toshiaki Fujii ,  Shigeru Wakiyama ,  Osamu Takaoka ,  Kouji Iwasaki

IPC分类号： C23F001/00

CPC分类号： G01N1/32 ,  B23K26/389 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/2583

摘要： A system for surface or cross-sectional processing and observation and a method of surface or cross-sectional processing and observation using the system. The system has a unit for processing a sample surface to expose a target surface or cross section and a scanning probe microscope unit for observing the exposed surface or cross section. According to the system and method, a scanning probe microscope capable of providing different kinds of information is used to form at least one target surface or cross section in a sample surface and to observe the target surface or cross section. This offers the following advantages: a spatial resolution comparable to that of a transmission electron microscope can be achieved; and electric, magnetic, and mechanical information for a target sample plane, which couldn't be obtained by the known method, can be monitored in a shorter operating time.

摘要翻译： 一种用于表面或横截面加工和观察的系统，以及使用该系统进行表面或横截面加工和观察的方法。 该系统具有用于处理样品表面以暴露目标表面或横截面的单元和用于观察暴露表面或横截面的扫描探针显微镜单元。 根据该系统和方法，可以使用能够提供不同种类的信息的扫描探针显微镜在样品表面中形成至少一个目标表面或横截面并观察目标表面或横截面。 这提供了以下优点：可以实现与透射电子显微镜相当的空间分辨率; 并且可以在更短的操作时间内监视通过已知方法无法获得的目标样品平面的电，磁和机械信息。

公开(公告)号：US5619035A

公开(公告)日：1997-04-08

申请号：US577199

申请日：1995-12-22

申请人： Paul S. Weiss ,  Stephan J. Stranick

发明人： Paul S. Weiss ,  Stephan J. Stranick

IPC分类号： G01Q30/02 ,  G01Q30/10 ,  G01Q30/14 ,  G01Q30/16 ,  G01Q60/12 ,  G01Q60/16 ,  G01Q60/18 ,  G01Q60/60 ,  G11B9/00 ,  G11B11/00 ,  G11B11/08 ,  H01J37/20 ,  H01J37/28

CPC分类号： G01Q60/16 ,  B82Y10/00 ,  B82Y20/00 ,  B82Y35/00 ,  B82Y40/00 ,  G01Q30/10 ,  G01Q30/16 ,  G01Q60/12 ,  G01Q60/22 ,  G01Q60/60 ,  G11B11/002 ,  G11B11/08 ,  G11B9/14 ,  G11B9/149 ,  H01J37/20 ,  H01J2237/204 ,  H01J2237/2065 ,  H01J2237/2538 ,  H01J2237/2583 ,  H01J2237/31738 ,  Y10S977/86

摘要： A system for transporting in a vacuum chamber sample holders and samples between a holder tray and a location for use with a surface analytical instrument is disclosed. Also provided is a system including a microwave coaxial cable connecting the tip terminal of a scanning tunneling microscope to a microwave signal source and a system for clamping a heater to a sample holder in order to heat the sample.

摘要翻译： 公开了一种用于在真空室中运送样品保持器和样品在保持器托盘和用于表面分析仪器的位置之间的系统。 还提供了一种系统，其包括将扫描隧道显微镜的末端连接到微波信号源的微波同轴电缆和用于将加热器夹持到样品架以便加热样品的系统。

公开(公告)号：US09336983B2

公开(公告)日：2016-05-10

申请号：US14755264

申请日：2015-06-30

申请人： Carl Zeiss SMT GmbH

发明人： Michael Budach ,  Christof Baur ,  Dajana Cujas ,  Robert Heberlein ,  Marion Batz

IPC分类号： H01J37/00 ,  H01J37/26 ,  H01J37/28

CPC分类号： H01J37/265 ,  G01Q30/02 ,  H01J37/28 ,  H01J2237/2583 ,  H01J2237/2826

摘要： The invention refers to a scanning particle microscope comprising: (a) at least one reference object which is fixedly arranged at an output of the scanning particle microscope for a particle beam so that the reference object can at least partially be imaged by use of the electron beam; (b) at least one scanning unit operable to scan a particle beam of the scanning particle microscope across at least one portion of the reference object; and (c) at least one setting unit operable to change at least one setting of the scanning particle microscope.

摘要翻译： 本发明涉及一种扫描粒子显微镜，包括：（a）至少一个参考对象，其固定地布置在用于粒子束的扫描粒子显微镜的输出处，使得参考对象可以至少部分地通过使用电子 光束; （b）至少一个扫描单元，其可操作以跨所述参考物体的至少一部分扫描所述扫描粒子显微镜的粒子束; 和（c）至少一个设置单元，其可操作以改变扫描粒子显微镜的至少一个设置。

公开(公告)号：US20150168444A1

公开(公告)日：2015-06-18

申请号：US14108286

申请日：2013-12-16

申请人： DCG Systems, Inc.

发明人： Vladimir A. Ukraintsev ,  Richard Stallcup ,  Sergiy Pryadkin ,  Mike Berkmyre ,  John Sanders

IPC分类号： G01Q10/04 ,  G01Q30/02

CPC分类号： G01Q10/06 ,  H01J2237/2583

摘要： A system for analyzing a sample is described. The system for analyzing a sample includes a probe and a controller circuit. The controller circuit configured to control a movement of the probe to at least a first position and a second position on the sample based on navigation data. In response to the movement of the probe, the controller circuit is configured to adjust a force of the probe on the sample at the first position from a first force value to a second force value and the force of the probe on the sample from a third force value to a fourth force value at said second position on the sample. And, the controller circuit is configured to acquire sample data with the probe at the first position on the sample.

摘要翻译： 描述用于分析样品的系统。 用于分析样品的系统包括探针和控制器电路。 所述控制器电路被配置为基于导航数据来控制所述探针到所述样本上的至少第一位置和第二位置的移动。 响应于探针的移动，控制器电路被配置为将第一位置处的样品上的探针的力从第一力值调节到第二力值，并且探针从第三位置到样品上的力 在样品的所述第二位置处的力值达到第四力值。 并且，控制器电路被配置为在样品的第一位置处用探针获取样本数据。

公开(公告)号：US07755776B2

公开(公告)日：2010-07-13

申请号：US11703154

申请日：2007-02-07

申请人： Hiroshi Makino ,  Masaki Hasegawa ,  Momoyo Enyama

发明人： Hiroshi Makino ,  Masaki Hasegawa ,  Momoyo Enyama

IPC分类号： G01B11/28

CPC分类号： G03F7/70616 ,  H01J37/20 ,  H01J37/222 ,  H01J37/265 ,  H01J37/29 ,  H01J2237/0048 ,  H01J2237/223 ,  H01J2237/226 ,  H01J2237/24578 ,  H01J2237/24592 ,  H01J2237/2583

摘要： There is a need for inspecting a heightwise variation in a sample. A holder holds a sample. A charge control unit charges the sample held by the holder. A retarding power supply applies a voltage to the sample held by the holder. An electro-optic system radiates an electron beam to the sample applied with a voltage by the retarding power supply and images a mirror electron returning near the surface of the sample. An image processing unit processes a mirror image resulting from imaging the mirror electron. The image processing unit outputs information corresponding to a difference between mirror images, i.e., a mirror image acquired by imaging the mirror electron and a mirror image for a prepared standard preparation, as a heightwise variation in a sample.

摘要翻译： 需要检查样品的高度变化。 持有人持有样本。 收费控制单元收取由持有人持有的样本。 延迟电源对由保持器保持的样品施加电压。 电光系统通过延迟电源将电子束辐射到施加有电压的样品，并对在样品表面附近返回的镜电子进行成像。 图像处理单元处理由镜电子成像产生的镜像。 图像处理单元输出与镜像相对应的信息，即通过将镜像电子成像获得的镜像和准备的标准品的镜像作为样品的高度变化。