公开(公告)号：US20190022705A1

公开(公告)日：2019-01-24

申请号：US15708943

申请日：2017-09-19

申请人： Applied Materials, Inc.

发明人： Markus J. STOPPER ,  Asaf SCHLEZINGER

IPC分类号： B07C5/36

CPC分类号： B07C5/362 ,  B07C5/36 ,  B07C2501/0063 ,  H01L21/67763 ,  H01L21/67766

摘要： In one example, a sorting unit includes a sorting system and a plurality of bins into which substrates are sorted. The sorting unit includes a bin handler having a first end effector for receiving one bin of the plurality of bins, and second end effector for disposing an empty bin in the previous location of the received bin. In one example, a method of operating a sorting unit is also provided.

公开(公告)号：US20170301540A1

公开(公告)日：2017-10-19

申请号：US15515768

申请日：2015-07-06

申请人： SCREEN Holdings Co., Ltd.

发明人： Koji HASHIMOTO ,  Akito HATANO

IPC分类号： H01L21/02 ,  H01L27/12 ,  H01L21/67 ,  C03C15/00 ,  C23C16/458 ,  H01L29/66 ,  H01L21/677

CPC分类号： H01L21/02422 ,  B65G49/06 ,  B65G49/068 ,  C03C15/00 ,  C23C16/4581 ,  C23C16/4583 ,  H01L21/02 ,  H01L21/67265 ,  H01L21/67276 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/677 ,  H01L21/67763 ,  H01L21/67766 ,  H01L21/67772 ,  H01L21/67778 ,  H01L21/6779 ,  H01L27/1262 ,  H01L29/66757

摘要： A substrate treating apparatus including an unloading order changing unit. The unloading order changing unit reverses an order, in regard to unloading of substrates in a carrier from the top, between a poor inclined substrate and a substrate at least immediately above the poor inclined substrate when the poor inclined substrate is present whose inclination is determined larger than a pre-set threshold by a poor inclination determining unit. That is, the order is reversed such that the poor inclined substrate whose surface may be possibly be scratched with a hand is unloaded prior to the substrate immediately above the poor inclined substrate. Accordingly, this inhibits damages on the substrate caused by scratching a substrate surface with the hand of a substrate transport mechanism.

公开(公告)号：US08919563B2

公开(公告)日：2014-12-30

申请号：US13847345

申请日：2013-03-19

申请人： Entegris, Inc.

发明人： Barry Gregerson ,  Michael Shawn Adams ,  Jason Todd Steffens

IPC分类号： H01L21/673 ,  H01L21/677

CPC分类号： B65D25/103 ,  B65D25/28 ,  B65D43/02 ,  B65D85/70 ,  H01L21/6732 ,  H01L21/67369 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67763

摘要： A front semiconductor opening wafer container for large diameter wafers includes a container portion and a door. The container portion includes a left closed side, a right closed side, a closed back, an open front, and an open interior including a plurality of slots for receiving and containing the wafers. The door is attachable to the container portion to close the open front and selectively latchable to the container portion. The container portion can accommodate large diameter wafers, particularly 450 mm wafers. Optimized sag control is provided as well as enhanced structural rigidity, and wafer seating features.

摘要翻译： 用于大直径晶片的前半导体开口晶片容器包括容器部分和门。 容器部分包括左封闭侧，右封闭侧，闭合背部，开放前部和包括用于接收和容纳晶片的多个狭槽的开放内部。 门可附接到容器部分以封闭敞开的前部，并可选择性地闩锁到容器部分。 容器部分可以容纳大直径晶片，特别是450mm晶片。 提供优化的下垂控制以及增强的结构刚度和晶片座位功能。

公开(公告)号：US08275478B2

公开(公告)日：2012-09-25

申请号：US12403632

申请日：2009-03-13

申请人： Diwaskar Adhikari ,  Raymond G. Goss ,  Carmen A. Maxim ,  Jan Rothe

发明人： Diwaskar Adhikari ,  Raymond G. Goss ,  Carmen A. Maxim ,  Jan Rothe

IPC分类号： G06F19/00

CPC分类号： H01L21/67253 ,  H01L21/67276 ,  H01L21/67763 ,  H01L21/67778

摘要： A method includes designating a plurality of wafers as members of a group. A first subset of the wafers is housed in a first wafer pod and a second subset of the wafers is housed in a second wafer pod. The first wafer pod is routed to a first tool, and at least a first operation is performed on the wafers in the first subset using the first tool. The second wafer pod is routed to a second tool, and the first operation is performed on the wafers in the second subset using the second tool. The wafers in the first and second subsets are consolidated following the performing of the first operation.

摘要翻译： 一种方法包括将多个晶片指定为组的成员。 晶片的第一子集被容纳在第一晶片盒中，并且晶片的第二子集被容纳在第二晶片盒中。 第一晶片盒被路由到第一工具，并且使用第一工具对第一子集中的晶片执行至少第一操作。 第二晶片盒被路由到第二工具，并且使用第二工具在第二子集中的晶片上执行第一操作。 在执行第一操作之后，第一和第二子集中的晶片被合并。

公开(公告)号：US06848882B2

公开(公告)日：2005-02-01

申请号：US10404991

申请日：2003-03-31

申请人： Ho-Jen Chen ,  Fan-Lin Lu ,  Ko-Chin Chung ,  Yu-Tan Tseng

发明人： Ho-Jen Chen ,  Fan-Lin Lu ,  Ko-Chin Chung ,  Yu-Tan Tseng

IPC分类号： B65G49/07 ,  H01L21/677

CPC分类号： H01L21/67763 ,  H01L21/67775 ,  Y10S414/14

摘要： An apparatus and a method for positioning a cassette pod onto a loadport by an overhead hoist transport system are described. The apparatus includes a vertical front panel of a process machine equipped with a docking opening therein, a loadport stage extending horizontally from the vertical front panel, a loadport situated on the loadport stage, at least two back guiding plates situated on the back of the loadport, at least two side guiding plates with one situated on each side of the loadport, a front guiding plate situated on the front side of the loadport, and a clamp positioner for guiding the position of an OHT clamp during an unloading operation of the cassette pod. The two halves of the clamp positioner move sideways away from each other to allow the cassette pod to pass therethrough during a loading operation.

摘要翻译： 描述了一种用于通过架空式起重机输送系统将盒式吊架定位在承载端口上的装置和方法。 该装置包括一个在其中配备有对接开口的处理机械的垂直前面板，从垂直前面板水平延伸的装载口台，位于承载台上的装载口，位于装载口背面的至少两个后导向板 至少两个侧导板，其中一个位于装载口的每一侧上，前导向板位于装载口的前侧，夹紧定位器用于在盒式磁带盒的卸载操作期间引导OHT夹具的位置 。 夹紧定位器的两个半部彼此横向移动，以允许盒式盒在加载操作期间通过。

公开(公告)号：US20030178987A1

公开(公告)日：2003-09-25

申请号：US10380966

申请日：2003-03-21

发明人： Masaru Suzuki

IPC分类号： G01R001/00

CPC分类号： H01L21/67748 ,  B23Q7/1442 ,  G01R31/2887 ,  H01L21/67724 ,  H01L21/67736 ,  H01L21/67763 ,  H01L21/67775 ,  H01L21/67778

摘要： A probe card conveyor 10 comprises a probe card conveyor 10, a body 12 provided with the probe card conveyor 10, and coupling mechanisms 13 provided in a plurality of positions on that side of the body 12 which is opposed to the probe device 20 and coupled individually to four coupled fittings 22 of the probe device 20. Further, the probe card conveyor 10 comprises a probe card mounting mechanism 17 for transferring a probe card 21 in the Y-direction and a lift mechanism 18 for raising and lowering the probe card mounting mechanism 17.

摘要翻译： 探针卡输送机10包括探针卡输送机10，设置有探针卡输送机10的主体12和设置在本体12的与探针装置20相对的那侧上的多个位置中的耦合机构13， 单独地连接到探针装置20的四个联接配件22.此外，探针卡输送机10包括用于在Y方向上传送探针卡21的探针卡安装机构17和用于升高和降低探针卡安装的升降机构18 机制17。

公开(公告)号：US06623051B2

公开(公告)日：2003-09-23

申请号：US10022309

申请日：2001-12-13

申请人： Anthony C. Bonora

发明人： Anthony C. Bonora

IPC分类号： E05B3902

CPC分类号： H01L21/67373 ,  E05B17/0025 ,  E05B65/006 ,  E05C9/047 ,  H01L21/67763 ,  Y10S292/62 ,  Y10T70/7706 ,  Y10T292/522

摘要： A laterally floating latch hub assembly includes a latch key receptor translatably mounted within a rotatable latch actuation cam. Latch keys within a port door are received within the latch key receptor, which is capable of translating laterally to ensure a proper fit of the latch key within the receptor. Once received within the receptor, torque from the latch keys is transmitted to the latch actuation cam via the latch key receptor.

公开(公告)号：USRE38221E1

公开(公告)日：2003-08-19

申请号：US09943098

申请日：2001-08-30

申请人： Barry Gregerson ,  Gary Gallagher ,  Brian Wiseman

发明人： Barry Gregerson ,  Gary Gallagher ,  Brian Wiseman

IPC分类号： B65D8590

CPC分类号： H01L21/67369 ,  G11B33/0405 ,  G11B33/14 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67396 ,  H01L21/67763

摘要： A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.

公开(公告)号：US06528808B1

公开(公告)日：2003-03-04

申请号：US09381335

申请日：1999-09-20

申请人： Hideaki Takiguchi

发明人： Hideaki Takiguchi

IPC分类号： G01N2186

CPC分类号： H01L21/67265 ,  G01D5/32 ,  G01D5/34 ,  H01L21/67763

摘要： A plurality of sensing arms are provided at intervals on a sensor case so as to project outwardly of the case. A light-projecting element and a photoreceptor element forming a pair are provided in the sensor case so as to correspond to respective ones of the sensing arms. Projected light from the light-projecting element advances along the longitudinal direction of the respective sensing arm and is reflected by a reflecting surface so as to be directed toward the neighboring sensing arm through a sensing area. The projected light is reflected twice by reflecting surfaces on the neighboring sensing arm so as to return to the original sensing arm through the sensing area again. The light is reflected by the reflecting surface of this sensing arm, advances along the longitudinal direction of this sensing arm again and is received by the photoreceptor element.

摘要翻译： 多个传感臂间隔设置在传感器壳体上，以便向外突出。 形成一对的投光元件和感光体元件设置在传感器壳体中，以对应于各个传感臂。 来自投光元件的投影光沿着各个感测臂的纵向前进，并被反射表面反射，以便通过感测区域指向相邻的感测臂。 投影光通过相邻感测臂上的反射表面反射两次，以便再次通过感测区域返回原始感测臂。 光被该感测臂的反射面反射，再次沿着该感测臂的长度方向前进，并被感光体元件接收。

公开(公告)号：US20020149209A1

公开(公告)日：2002-10-17

申请号：US10022309

申请日：2001-12-13

发明人： Anthony C. Bonora

IPC分类号： E05B039/02

CPC分类号： H01L21/67373 ,  E05B17/0025 ,  E05B65/006 ,  E05C9/047 ,  H01L21/67763 ,  Y10S292/62 ,  Y10T70/7706 ,  Y10T292/522

摘要： A laterally floating latch hub assembly includes a latch key receptor translatably mounted within a rotatable latch actuation cam. Latch keys within a port door are received within the latch key receptor, which is capable of translating laterally to ensure a proper fit of the latch key within the receptor. Once received within the receptor, torque from the latch keys is transmitted to the latch actuation cam via the latch key receptor.

摘要翻译： 横向浮动的闩锁毂组件包括可转动地安装在可旋转闩锁致动凸轮内的闩锁键接收器。 端口门内的闩锁键被接收在闩锁键接收器内，其能够横向平移以确保闩锁键在接收器内的适当配合。 一旦接收到接收器，来自闩锁键的扭矩通过闩锁键接收器传递到闩锁致动凸轮。