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    Threshold fluorescence detection for protection of laser systems
    1.
    发明授权
    Threshold fluorescence detection for protection of laser systems 有权

    公开(公告)号：US09997889B1

    公开(公告)日：2018-06-12

    申请号：US14626901

    申请日：2015-02-19

    申请人： LOCKHEED MARTIN COHERENT TECHNOLOGIES, INC.

    发明人： Bruce G. Tiemann

    IPC分类号： H01S3/30 ,  H01S3/14 ,  H01S3/094 ,  H01S3/067 ,  H01S3/11 ,  H01S3/00

    CPC分类号： H01S3/1312 ,  H01S3/0014 ,  H01S3/10084 ,  H01S3/106 ,  H01S3/11 ,  H01S3/1305

    摘要： A laser device includes a gain medium configured to receive an excitation light and emit a fluorescence signal based on an amount of stored excitation light accumulated in the gain medium. The laser device includes a pump source configured to pump the excitation light to the gain medium using a supply voltage. The laser device includes one or more photodetectors configured to detect the fluorescence signal. The laser device also includes a comparator configured to generate an alert signal indicating an intensity of the detected fluorescence signal is greater than a threshold. The alert signal can trigger certain actions to occur for disrupting a destructive lasing action including one or more of ceasing output of the supply voltage to the pump source, spoiling an optical cavity to obstruct lasing action through the gain medium, or inserting a seed light to extract gain from the gain medium in a non-destructive manner.

    183NM Laser And Inspection System
    6.
    发明申请
    183NM Laser And Inspection System 有权
    183NM激光检测系统

    公开(公告)号：US20160099540A1

    公开(公告)日：2016-04-07

    申请号：US14872890

    申请日：2015-10-01

    申请人： KLA-Tencor Corporation

    发明人： Yung-Ho Alex Chuang ,  J. Joseph Armstrong ,  Yujun Deng ,  Vladimir Dribinski ,  John Fielden ,  Jidong Zhang

    IPC分类号： H01S3/109 ,  H01S3/108 ,  H01S5/40 ,  G01N21/88 ,  H01S5/00 ,  G02B21/10 ,  G02B21/16 ,  G02B21/36 ,  H01S3/10 ,  H01S5/06

    CPC分类号： H01F17/0006 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/95676 ,  G02B21/10 ,  G02B21/16 ,  G02B21/361 ,  G02F1/353 ,  G02F2001/3507 ,  G02F2001/354 ,  H01F17/04 ,  H01F27/292 ,  H01S3/0092 ,  H01S3/10007 ,  H01S3/10084 ,  H01S3/1083 ,  H01S3/109 ,  H01S5/0071 ,  H01S5/0085 ,  H01S5/0604 ,  H01S5/4012

    摘要： A laser assembly for generating laser output light at an output wavelength of approximately 183 nm includes a fundamental laser, an optical parametric system (OPS), a fifth harmonic generator, and a frequency mixing module. The fundamental laser generates fundamental light at a fundamental frequency. The OPS generates a down-converted signal at a down-converted frequency. The fifth harmonic generator generates a fifth harmonic of the fundamental light. The frequency mixing module mixes the down-converted signal and the fifth harmonic to produce the laser output light at a frequency equal to a sum of the fifth harmonic frequency and the down-converted frequency. The OPS generates the down-converted signal by generating a down-converted seed signal at the down-converted frequency, and then mixing the down-converted seed signal with a portion of the fundamental light. At least one of the frequency mixing, frequency conversion or harmonic generation utilizes an annealed, deuterium-treated or hydrogen-treated CLBO crystal.

    摘要翻译： 用于在大约183nm的输出波长处产生激光输出光的激光组件包括基本激光器，光学参数系统（OPS），五次谐波发生器和频率混合模块。 基本激光器产生基频的基本光。 OPS以降频转换的频率产生降频转换的信号。 五次谐波发生器产生基波的五次谐波。 频率混合模块混合下变频信号和第五谐波，以产生等于五次谐波频率和下变频频率之和的频率的激光输出光。 OPS通过在下变频的频率处产生下变频的种子信号，然后将下变频的种子信号与基本光的一部分混合来产生下变频信号。 频率混合，频率转换或谐波产生中的至少一种利用退火，氘处理或氢处理的CLBO晶体。

    Regenerative laser amplifier
    9.
    发明授权
    Regenerative laser amplifier 有权
    再生激光放大器

    公开(公告)号：US08891162B2

    公开(公告)日：2014-11-18

    申请号：US13164506

    申请日：2011-06-20

    申请人： Stephen W. McCahon ,  Samvel Sarkisyan ,  Paul B. Lundquist

    发明人： Stephen W. McCahon ,  Samvel Sarkisyan ,  Paul B. Lundquist

    IPC分类号： H01S3/30 ,  H01S3/10 ,  H01S3/23 ,  H01S3/067 ,  H01S3/094

    CPC分类号： H01S3/235 ,  H01S3/06754 ,  H01S3/094003 ,  H01S3/094015 ,  H01S3/094084 ,  H01S3/10084 ,  H01S3/302 ,  H01S3/305

    摘要： A laser amplifier system is presented including a pump regenerative amplifier. The amplifier generally has a cavity defined by a pair of end cavity mirrors between which an amplified pump pulse oscillates. The amplifier also includes an interaction cell with a tunable gain medium amplifies laser pulses (e.g., Raman gain). The interaction cell may be positioned within the pump amplifier cavity and an input pulse may be injected into the cavity of the amplifier to transit through the tunable gain medium of the interaction cell. A pump pulse transfers energy via interaction with the input pulse (e.g., Raman interaction) as the pulses counter-propagate through the gain medium of the interaction cell. Amplification of output laser pulses, however, is generally achieved according to the wavelength of the pump laser pulses thereby providing a wavelength dependent, or “tunable”, means for amplifying laser pulses.

    摘要翻译： 提出了一种包括泵再生放大器的激光放大器系统。 放大器通常具有由一对端腔反射镜限定的空腔，放大的泵浦脉冲在其之间振荡。 放大器还包括具有可调增益介质的相互作用单元放大激光脉冲（例如，拉曼增益）。 相互作用单元可以位于泵浦放大器空腔内，并且输入脉冲可以被注入到放大器的空腔中，以便穿过相互作用单元的可调增益介质。 当脉冲通过相互作用单元的增益介质反向传播时，泵浦脉冲通过与输入脉冲（例如，拉曼相互作用）的相互作用传递能量。 然而，输出激光脉冲的放大通常根据泵浦激光脉冲的波长来实现，从而提供用于放大激光脉冲的波长依赖性或“可调谐”装置。