METHODS AND SYSTEMS FOR CONTROLLABLY MOVING MULTIPLE MOVEABLE STAGES IN A DISPLACEMENT DEVICE

    公开(公告)号:US20170179806A1

    公开(公告)日:2017-06-22

    申请号:US15370987

    申请日:2016-12-06

    发明人: Xiaodong LU

    摘要: Aspects of the invention provide methods and systems for moving a plurality of movable stages relative to a stator. The stator comprises a plurality of coils shaped to provide pluralities of coil trace groups where each coil trace group comprises a corresponding plurality of generally linearly elongated coil traces which extend across a stator tile. Each movable stage comprises a plurality of magnet arrays. Methods and apparatus are provided for moving the movable stages relative to the stator, where a magnet array from a first movable stage and a magnet array from a second movable stage both overlap a shared group of coil traces. For at least a portion of the time that the magnet arrays from the first and second movable stages overlap the shared group of coil traces, currents are controllably driven in the shared coil trace group based on the positions of both the first and second movable stages. The positions of the first and second movable stages may be ascertained by feedback.

    DISPLACEMENT DEVICES, MOVEABLE STAGES FOR DISPLACEMENT DEVICES AND METHODS FOR FABRICATION, USE AND CONTROL OF SAME

    公开(公告)号:US20170163140A1

    公开(公告)日:2017-06-08

    申请号:US15378825

    申请日:2016-12-14

    发明人: Xiaodong LU

    IPC分类号: H02K41/03 H02P25/064

    摘要: A displacement device comprises a stator comprising non-parallel stator-x and stator-y elongated traces. The device comprises a moveable stage comprising a first magnet array comprising first magnetization segments linearly elongated in a stage-x direction and having magnetization directions generally orthogonal to the stage-x direction. The first magnet array comprises a first pair of adjacent first magnetization segments comprising two first magnetization segments adjacent to one another in a stage-y direction non-parallel to the stage-x direction. Each first magnetization segment in the first pair has a corresponding magnetization direction oriented at a corresponding angle αn about a corresponding stage-x axis as measured from a positive stage-z direction that is generally orthogonal to both the stator-x and stator-y directions. The corresponding angle αn is one of 45°+n90° where n is any integer. Each first magnetization segment in the first pair has a different magnetization direction.

    X-Y STAGE WITH ROTATION
    4.
    发明申请

    公开(公告)号:US20170294827A1

    公开(公告)日:2017-10-12

    申请号:US15479054

    申请日:2017-04-04

    申请人: Kim Rubin

    发明人: Kim Rubin

    IPC分类号: H02K41/03 H02P25/066 B23Q1/26

    摘要: An X-Y movable stage with rotation is described. A fixed base comprises a magnetic bed with a checkerboard pattern of alternating north and south poles on a grid. A movable puck moves and rotates on the base. The puck comprises three or more nodes where each node may be energized for a north, south, or off magnetic field, with varying field strength. The nodes are arranged on an X-Y motion grid on the puck that are rotated 45° from the magnetic base grid. A first set of node locations on the puck may be each centered between a pair of opposite poles on the magnetic base. One arrangement of nodes is at the corners of a rectangle aligned with the motion grid. An optional second set of one node locations on the puck may be each centered between a pair of opposite poles on the magnetic base, when the first set of nodes is aligned over poles. Methods of mapping node locations, controllers, and applications are described.

    Shaft Type Linear Motor, Mounting Head and Component Mounting Device With the Linear Motor, and Position Detection Method for Shaft for Driving the Linear Motor
    5.
    发明申请
    Shaft Type Linear Motor, Mounting Head and Component Mounting Device With the Linear Motor, and Position Detection Method for Shaft for Driving the Linear Motor 审中-公开
    轴式直线电机,带线性电机的安装头和部件安装装置以及用于驱动线性电机的轴的位置检测方法

    公开(公告)号:US20080309260A1

    公开(公告)日:2008-12-18

    申请号:US11658447

    申请日:2005-07-06

    IPC分类号: H02K41/03 H02P6/16 B23P19/04

    摘要: A shaft type linear motor including a stator in which plural hollow cylindrical coils are disposed so that the center through holes thereof are arranged linearly so as to form a shaft insertion hole; a driving shaft including permanent magnets, the same magnetic poles, the north or south magnetic poles, being disposed in the axial direction so as to be opposed to each other, and movably inserted into the stator; sensor units disposed in the axial direction of the stator so as to have a predetermined clearance therebetween and equipped with plural magnetic pole detection sensors that detect the magnetic field intensities of the permanent magnets and output magnetic field intensity signals; and a detection section for receiving the magnetic field intensity signals output from the magnetic pole detection sensors and for detecting the position of the driving shaft on the basis of the plural magnetic field intensity signals.

    摘要翻译: 一种轴型直线电动机,其包括定子,多个中空圆柱形线圈被布置成使得其中心通孔线性地布置以形成轴插入孔; 包括永磁体,相同磁极,北或南磁极的驱动轴,其轴向设置成彼此相对并且可移动地插入到定子中; 传感器单元,其设置在定子的轴向方向上,以便在其间具有预定间隙,并配备有多个磁极检测传感器,其检测永磁体的磁场强度并输出磁场强度信号; 以及检测部分,用于接收从磁极检测传感器输出的磁场强度信号,并且用于基于多个磁场强度信号检测驱动轴的位置。

    Methods and systems for controllably moving multiple moveable stages in a displacement device

    公开(公告)号:US10056816B2

    公开(公告)日:2018-08-21

    申请号:US15370987

    申请日:2016-12-06

    发明人: Xiaodong Lu

    摘要: Aspects of the invention provide methods and systems for moving a plurality of movable stages relative to a stator. The stator comprises a plurality of coils shaped to provide pluralities of coil trace groups where each coil trace group comprises a corresponding plurality of generally linearly elongated coil traces which extend across a stator tile. Each movable stage comprises a plurality of magnet arrays. Methods and apparatus are provided for moving the movable stages relative to the stator, where a magnet array from a first movable stage and a magnet array from a second movable stage both overlap a shared group of coil traces. For at least a portion of the time that the magnet arrays from the first and second movable stages overlap the shared group of coil traces, currents are controllably driven in the shared coil trace group based on the positions of both the first and second movable stages. The positions of the first and second movable stages may be ascertained by feedback.

    METHODS AND SYSTEMS FOR CONTROLLABLY MOVING MULTIPLE MOVEABLE STAGES IN A DISPLACEMENT DEVICE

    公开(公告)号:US20180234002A1

    公开(公告)日:2018-08-16

    申请号:US15881719

    申请日:2018-01-26

    发明人: Xiaodong LU

    摘要: Aspects of the invention provide methods and systems for moving a plurality of moveable stages relative to a stator. The stator comprises a plurality of coils shaped to provide pluralities of coil trace groups where each coil trace group comprises a corresponding plurality of generally linearly elongated coil traces which extend across a stator tile. Each moveable stage comprises a plurality of magnet arrays. Methods and apparatus are provided for moving the moveable stages relative to the stator, where a magnet array from a first moveable stage and a magnet array from a second moveable stage both overlap a shared group of coil traces. For at least a portion of the time that the magnet arrays from the first and second moveable stages overlap the shared group of coil traces, currents are controllably driven in the shared coil trace group based on the positions of both the first and second moveable stages. The positions of the first and second moveable stages may be ascertained by feedback.

    DISPLACEMENT DEVICES AND METHODS FOR FABRICATION, USE AND CONTROL OF SAME

    公开(公告)号:US20170179805A1

    公开(公告)日:2017-06-22

    申请号:US15365767

    申请日:2016-11-30

    发明人: Xiaodong LU

    摘要: A displacement device comprise a stator having a plurality of electrically conductive coils shaped to provide: a first plurality of coil traces generally elongated in a stator-x direction and distributed over at least a first portion of a first layer; a second plurality of coil traces generally elongated in a stator-y direction and distributed over at least a second portion of a second layer. The first and second portions of the first and second layers overlapping one another in a stator-z direction. The displacement device also comprises a moveable stage having one or more magnet arrays. The moveable stage is moveable relative to the stator within a two-dimensional working region. The one or more magnet arrays include a first magnet array comprising a plurality of first magnetization segments, each having a corresponding first magnetization direction. The displacement device comprises one or more amplifiers connected to drive a plurality of currents in the plurality of electrically conductive coils; and a controller configured to control the currents driven by the one or more amplifiers and to thereby cause the moveable stage to track a desired position, (xr,yr), within the working region.