公开(公告)号：US06270688B1

公开(公告)日：2001-08-07

申请号：US08224211

申请日：1994-04-07

申请人： James F. Belcher ,  Howard R. Beratan ,  Paul O. Johnson

发明人： James F. Belcher ,  Howard R. Beratan ,  Paul O. Johnson

IPC分类号： B44C122

CPC分类号： B24B37/04 ,  C04B41/5353 ,  Y10S505/728

摘要： A method of polishing ferroelectric materials and specifically perovskite materials and still more specifically barium strontium titanate (1) wherein the surface (5) to be polished is initially partially smoothened or planarized by mechanical abrading with final smoothening or planarization provided by a chemical polishing with a polishing wheel using an acidic solution containing essentially the acid, hydrogen peroxide and water. Preferred acids are perchloric acid, acetic acid, nitric acid and combinations thereof.

摘要翻译： 抛光铁电材料和特别是钙钛矿材料的方法，更具体地说是钛酸钡锶（1），其中待抛光的表面（5）通过机械研磨初步部分平滑化或平面化，最终的平滑化或平面化通过化学抛光提供， 抛光轮使用基本上含有酸，过氧化氢和水的酸性溶液。 优选的酸是高氯酸，乙酸，硝酸及其组合。

公开(公告)号：US5621223A

公开(公告)日：1997-04-15

申请号：US515701

申请日：1995-08-16

申请人： Takao Nakamura ,  Hiroshi Inada ,  Michitomo Iiyama

发明人： Takao Nakamura ,  Hiroshi Inada ,  Michitomo Iiyama

IPC分类号： H01L39/14 ,  H01L29/06

CPC分类号： H01L39/146 ,  Y10S505/702 ,  Y10S505/728

摘要： A superconducting device includes first and second oxide superconducting regions of a relatively thick thickness, formed directly on a principal surface of a substrate to be separate from each other, and a third oxide superconducting region of an extremely thin thickness which is formed directly on the principal surface of the substrate so as to bridge the first and second oxide superconducting regions. A barrier layer and a diffusion source layer are formed on the third oxide superconducting region, and an isolation region is formed to cover an upper portion or both side surfaces of the diffusion source layer. The first, second and third oxide superconducting regions and the isolation region are formed of the same oxide superconductor material, and the isolation region is diffused with a material of the diffusion source layer, so that the isolation region does not show superconductivity. Therefore, a superconducting current can flow between the first and second oxide superconducting regions through only the third oxide superconducting region. For formation of the superconducting device, a first oxide superconductor thin film having a very thin thickness is formed on the principal surface of the substrate, and a barrier layer and a diffusion source layer are formed on a portion of the first oxide superconductor thin film. A second oxide superconductor thin film is grown on an exposed surface of the first oxide superconductor thin film until the two layers are embedded in the second oxide superconductor thin film, so that a material of the diffusion source layer is diffused into the second oxide superconductor thin film on an upper portion or both side surfaces of the diffusion source layer.

摘要翻译： 超导装置包括直接形成在彼此分离的基板的主表面上的相对较厚厚度的第一和第二氧化物超导区域，以及直接形成在主体上的极薄厚度的第三氧化物超导区域 表面以便桥接第一和第二氧化物超导区域。 在第三氧化物超导区域上形成阻挡层和扩散源层，形成隔离区以覆盖扩散源层的上部或两侧表面。 第一，第二和第三氧化物超导区域和隔离区域由相同的氧化物超导体材料形成，并且隔离区域与扩散源层的材料扩散，使得隔离区域不显示超导性。 因此，超导电流可以仅通过第三氧化物超导区域在第一和第二氧化物超导区域之间流动。 为了形成超导装置，在基板的主表面上形成具有非常薄的厚度的第一氧化物超导体薄膜，并且在第一氧化物超导体薄膜的一部分上形成阻挡层和扩散源层。 在第一氧化物超导体薄膜的暴露表面上生长第二氧化物超导体薄膜，直到两层嵌入到第二氧化物超导体薄膜中，使得扩散源层的材料扩散到第二氧化物超导体薄膜 膜在扩散源层的上部或两侧表面上。

公开(公告)号：US5411937A

公开(公告)日：1995-05-02

申请号：US62672

申请日：1993-05-17

申请人： Joel R. Wendt ,  Thomas A. Plut ,  Jon S. Martens

发明人： Joel R. Wendt ,  Thomas A. Plut ,  Jon S. Martens

IPC分类号： H01L39/24 ,  H01L21/00

CPC分类号： B82Y10/00 ,  H01L39/2496 ,  Y10S505/702 ,  Y10S505/728

摘要： A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination with aqueous etchants. In particular, a method is described for manufacturing planar Josephson junctions from high temperature superconducting material.

摘要翻译： 描述了一种用于制造纳米几何电子器件的新颖方法。 这样的约瑟夫逊结可以使用光刻和直接写入电子束光刻技术与水性蚀刻剂组合来精确和可重复地制造。 特别地，描述了用于制造来自高温超导材料的平面约瑟夫逊结的方法。

公开(公告)号：US5304535A

公开(公告)日：1994-04-19

申请号：US604981

申请日：1990-10-29

申请人： Mark A. Harmer ,  Bruce A. Parkinson

发明人： Mark A. Harmer ,  Bruce A. Parkinson

IPC分类号： G01Q10/04 ,  G01Q60/00 ,  G01Q80/00 ,  H01L39/24 ,  H01L21/00

CPC分类号： B82Y15/00 ,  H01L39/2467 ,  Y10S505/701 ,  Y10S505/702 ,  Y10S505/728 ,  Y10S977/856

摘要： A process for etching with a scanning tunneling microscope on both a single crystal and a thin film of high temperature superconductor is disclosed.

摘要翻译： 公开了使用扫描隧道显微镜在单晶和高温超导体薄膜上进行蚀刻的工艺。

公开(公告)号：US5280013A

公开(公告)日：1994-01-18

申请号：US968280

申请日：1992-10-29

申请人： Nathan Newman ,  Aharon Kapitulnik ,  Brady F. Cole ,  Randy W. Simon

发明人： Nathan Newman ,  Aharon Kapitulnik ,  Brady F. Cole ,  Randy W. Simon

IPC分类号： H01L39/24

CPC分类号： H01L39/2422 ,  Y10S505/701 ,  Y10S505/702 ,  Y10S505/728 ,  Y10S505/731 ,  Y10S505/732 ,  Y10S505/866

摘要： A superconducting electronic circuit device, useful when impedance matching is desired, especially suited to microwave frequencies, consisting of a thin dielectric layer with superconducting layers on both sides. A superconductor such as Yttrium Barium Copper Oxide (YBCO) is formed on a first substrate such as lanthanum aluminate. A protective layer like gold is deposited on the YBCO and a second carrier substrate is bonded to the protected YBCO. The first substrate is then thinned into a thin dielectric film and a second layer of superconductor is epitaxially grown thereon to create the desired circuits.

摘要翻译： 一种超导电子电路装置，当需要阻抗匹配时尤其适用于微波频率，当两面具有超导层的薄电介质层时，这是有用的。 在诸如铝酸镧的第一衬底上形成诸如钇钡氧化铜（YBCO）的超导体。 在YBCO上沉积如金的保护层，第二载体衬底与受保护的YBCO结合。 然后将第一衬底减薄成薄的电介质膜，并在其上外延生长第二层超导体以产生所需的电路。

公开(公告)号：US5278140A

公开(公告)日：1994-01-11

申请号：US945760

申请日：1992-09-16

申请人： Praveen Chaudhari ,  Cheng-Chung J. Chi ,  Duane B. Dimos ,  Jochen D. Mannhart ,  Chang C. Tsuei

发明人： Praveen Chaudhari ,  Cheng-Chung J. Chi ,  Duane B. Dimos ,  Jochen D. Mannhart ,  Chang C. Tsuei

IPC分类号： B32B18/00 ,  C01G1/00 ,  C04B41/87 ,  H01B13/00 ,  H01L39/22 ,  H01L39/24 ,  B05D5/12 ,  H01B12/00

CPC分类号： H01L39/2496 ,  H01L39/225 ,  Y10S505/701 ,  Y10S505/702 ,  Y10S505/728

摘要： A method is disclosed for fabricating grain boundary junction devices, which comprises preparing a crystalline substrate containing at least one grain boundary therein, epitaxially depositing a high Tc superconducting layer on the substrate, patterning the superconducting layer to leave at least two superconducting regions on either side of the grain boundary and making electrical contacts to the superconducting regions so that bias currents can be produced across the grain boundary.

摘要翻译： 公开了一种用于制造晶界结器件的方法，其包括制备其中含有至少一个晶界的晶体衬底，在衬底上外延沉积高Tc超导层，对超导层进行构图以在两侧留下至少两个超导区 的晶界并且与超导区域电接触，使得跨晶界产生偏置电流。

公开(公告)号：US5219826A

公开(公告)日：1993-06-15

申请号：US569434

申请日：1990-08-20

申请人： Aharon Kapitulnik

发明人： Aharon Kapitulnik

IPC分类号： H01L39/24

CPC分类号： H01L39/2496 ,  Y10S505/702 ,  Y10S505/728

摘要： A superconducting Josephson junction is created in high T.sub.c superconducting film, with a bridge connecting two superconducting banks, by subjecting the bridge to a tunneling electron current from a sharp electrode close to the bridge. The tunneling current alters the structure over atomic dimensions to create a weak link of length comparable to high T.sub.c coherence lengths so as to permit phase coherent Cooper pair current flow across the weak link.

摘要翻译： 在高Tc超导膜中形成超导约瑟夫逊结，通过使桥接受来自靠近桥的尖锐电极的隧穿电子电流，连接两个超导体的桥。 隧道电流改变了原子尺寸上的结构，以产生与高Tc相干长度相当的长度的弱连接，以允许跨越弱链路的相位相干Cooper对电流。

公开(公告)号：US5212147A

公开(公告)日：1993-05-18

申请号：US700671

申请日：1991-05-15

申请人： James R. Sheats

发明人： James R. Sheats

IPC分类号： C04B41/45 ,  C04B41/52 ,  C04B41/81 ,  C04B41/89 ,  H01L39/24

CPC分类号： C04B41/009 ,  C04B41/4572 ,  C04B41/4594 ,  C04B41/52 ,  C04B41/81 ,  C04B41/89 ,  H01L39/2464 ,  Y10S505/728 ,  Y10S505/73 ,  Y10S505/732

摘要： A method of forming a patterned in-situ photoconductive film on a substrate including providing a patterned photoresist layer on upper and lower metallic layers formed on a substrate. The patterned photoresist layer is used to form an opening in the upper layer. The pattern in the upper layer thereby has an opening having a geometry substantially similar to a desired pattern of photoconductive material to be formed on the substrate. A portion of the lower layer is removed to form cantilevered regions of the upper layer adjacent to the opening. Superconductive material is then deposited on the substrate by directing the material through the opening at an angle generally perpendicular to the substrate. The superconductive film on the substrate within the lower layer is coated with a polymer. The upper and lower layers and all superconductive material on those layers are removed to leave the polymer-encapsulated superconductive material on the substrate. The polymer is removed by plasma etching that does not adversely affect the superconductive material. Thus, the superconductive material on the substrate is subjected only to post-deposition process steps of depositing the polymer and removing the polymer.

摘要翻译： 在衬底上形成图案化的原位光电导膜的方法，包括在形成在衬底上的上金属层和下金属层上提供图案化的光致抗蚀剂层。 图案化的光致抗蚀剂层用于在上层中形成开口。 因此，上层中的图案具有开口，该开口的几何形状基本上类似于要在衬底上形成的光导材料的期望图案。 下层的一部分被去除以形成与开口相邻的上层的悬臂区域。 然后通过以大致垂直于衬底的角度引导材料穿过开口而将超导材料沉积在衬底上。 下层中的基底上的超导膜被聚合物涂覆。 去除上层和下层以及这些层上的所有超导材料，以使基板上的聚合物封装的超导材料留下。 通过不影响超导材料的等离子体蚀刻除去聚合物。 因此，基板上的超导材料仅经受沉积聚合物并除去聚合物的后沉积工艺步骤。

公开(公告)号：US4957900A

公开(公告)日：1990-09-18

申请号：US174503

申请日：1988-03-28

申请人： Shumpei Yamazaki

发明人： Shumpei Yamazaki

IPC分类号： C01G1/00 ,  C04B35/00 ,  C04B35/45 ,  C04B41/80 ,  H01B12/06 ,  H01B13/00 ,  H01F6/06 ,  H01F41/04 ,  H01L39/24

CPC分类号： H01L39/2454 ,  H01F41/048 ,  H01F6/06 ,  H01L39/2464 ,  Y10S428/93 ,  Y10S505/701 ,  Y10S505/703 ,  Y10S505/704 ,  Y10S505/705 ,  Y10S505/728 ,  Y10S505/731 ,  Y10S505/742 ,  Y10T428/24926

摘要： A superconducting ceramic film is deposited on a substrate sputtering. In virtue of the low thermal conductivity of ceramic, a laser beam is radiated to the ceramic film in order to remove the irradiated portion by sublimation and produce a pattern on the ceramic film.

公开(公告)号：US20070179063A1

公开(公告)日：2007-08-02

申请号：US11490779

申请日：2006-07-21

申请人： Alexis Malozemoff ,  Martin Rupich ,  Douglas Folts

发明人： Alexis Malozemoff ,  Martin Rupich ,  Douglas Folts

IPC分类号： H01L39/22

CPC分类号： H01L39/24 ,  H01L39/143 ,  H01L39/2425 ,  H01L39/2451 ,  H01L39/2464 ,  H01L39/248 ,  H01P11/00 ,  Y10S505/728 ,  Y10S505/93 ,  Y10T29/49014

摘要： A method of making a laminated superconductor wire includes providing an assembly, where the assembly includes a substrate; a superconductor layer overlaying a surface of the substrate, the superconductor layer having a defined pattern; and a cap layer; and slitting the assembly in accordance with the defined pattern of the superconductor layer to form a sealed wire. Slitting the assembly in accordance with the defined pattern may form multiple sealed wires, and the substrate may be substantially wider than the sealed wires.

摘要翻译： 制造层压超导体线的方法包括提供组件，其中组件包括基底; 超导体层，覆盖基板的表面，超导体层具有限定的图案; 和盖层; 并根据超导体层的限定图案切割组件以形成密封的线。 根据限定的图案分割组件可以形成多个密封的线，并且基底可以比密封的线大得多。