公开(公告)号：US06197391B1

公开(公告)日：2001-03-06

申请号：US08971258

申请日：1997-11-17

申请人： Noboru Kimura ,  Takuma Kushihashi ,  Kazuhiro Yamaguchi ,  Akira Satoh

发明人： Noboru Kimura ,  Takuma Kushihashi ,  Kazuhiro Yamaguchi ,  Akira Satoh

IPC分类号： B01L304

CPC分类号： C04B35/583 ,  C23C14/243 ,  C23C16/342 ,  C30B23/06 ,  Y10T428/131 ,  Y10T428/1317 ,  Y10T428/24479 ,  Y10T428/24595 ,  Y10T428/24628 ,  Y10T428/24942 ,  Y10T428/261 ,  Y10T428/266 ,  Y10T428/268 ,  Y10T428/31678

摘要： There is disclosed a pyrolytic boron nitride container for accommodating a material serving as a source of molecular beams for molecular beam epitaxy, wherein the transmissivity of the pyrolytic boron nitride container with respect to light having a wave number of 2600 cm−1 to 6500 cm−1 has a profile such that the transmissivity changes in the height direction of the container. The pyrolytic boron nitride container can be manufactured through a simple process and at low cost. The pyrolytic boron nitride container can prevent material melt from rising along the inner wall surface and prevent splashed material melt from adhering to the upper portion of the container. Further, the pyrolytic boron nitride container can stabilize molecular beam epitaxial growth and improve the quality of epitaxial film.

摘要翻译： 公开了一种用于容纳用作分子束外延的分子束源的材料的热解氮化硼容器，其中热解氮化硼容器相对于波数为2600cm -1至6500cm -1的光的透射率， 1具有使得容器的高度方向上的透射率变化的轮廓。 热解氮化硼容器可以通过简单的工艺和低成本制造。 热解氮化硼容器可以防止材料熔体沿内壁表面上升，并防止溅射的材料熔体粘附到容器的上部。 此外，热解氮化硼容器可以稳定分子束外延生长并提高外​​延膜的质量。