SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

    公开(公告)号:US20250050385A1

    公开(公告)日:2025-02-13

    申请号:US18795296

    申请日:2024-08-06

    Abstract: A substrate processing apparatus includes one or more peeling gas nozzles that tears a polymer film by a pressure of a peeling gas such that a peeled portion peeled from an upper surface of a substrate and an adhering portion adhering to the upper surface are included in the polymer film by discharging the peeling gas at a first rate toward the upper surface, and then changes the adhering portion to the peeled portion with the peeling gas that has entered between the peeled portion and the substrate while discharging the peeling gas at a second rate slower than the first rate toward the upper surface, and a nozzle actuator that changes a distance from a hit position of the peeling gas with respect to the upper surface to a center of the substrate by moving the one or more peeling gas nozzles horizontally.

    ATTACHMENT TOOL FOR A CLEANING DEVICE

    公开(公告)号:US20250050384A1

    公开(公告)日:2025-02-13

    申请号:US18798619

    申请日:2024-08-08

    Applicant: Steven VANNI

    Abstract: An air blade tool operable as a surface and crevice cleaning tool is provided. The air blade tool includes a housing assembly, blade assembly, and air conduit assembly adapted for mounting to an air blower. The housing assembly includes a housing, a handle, a blade retainer seat, and openings for emitting air. The blade retainer seat may comprise one or more blade supports. The housing assemblies may include a fastener system for releasably securing interchangeable blades at predetermined positions along the length of the housing. The blade assembly includes at least a blade and in some embodiments a blade retainer. The air conduit assembly includes an air conduit and may include a swivel fitting for engagement with an air blower for enabling relative movement of the fitted blower to minimize hindrance of control of the air blade tool during use. The housing assembly may further include a damper within the housing and actuator to control the position of the damper and permit selection of the direction of air flow.

    COATING LANCE
    3.
    发明申请

    公开(公告)号:US20250010312A1

    公开(公告)日:2025-01-09

    申请号:US18348261

    申请日:2023-07-06

    Inventor: ANDREW P DUNBAR

    Abstract: A coating lance includes a body having first and second segments interconnected in a joint region. The first segment, which can be made from metal, includes an outer diameter reducing from a first outer diameter in a rearward portion through a transition portion to a second outer diameter in a main segment portion. The second body segment, which can be made from carbon fiber, is substantially uniform in outer diameter throughout. A coating tube extends within an interior of the body and a nozzle end part is attached to the coating tube. The lance can also include an insert received in a discharge end of the body, a discharge end clamp secured to the insert, and a charge end clamp secured to a charging end of the body. The clamps receive the coating tube and apply a clamping force to secure the coating tube in position.

    APPLICATION NOZZLE, APPLICATION UNIT AND METHOD

    公开(公告)号:US20240424519A1

    公开(公告)日:2024-12-26

    申请号:US18826298

    申请日:2024-09-06

    Abstract: An application nozzle, an application unit, and a method are used for applying a liquid or pasty coating medium onto a running surface, in particular onto a running surface in a machine for producing or processing a fibrous web. The application nozzle contains a fluid head which is configured to produce a film from a coating medium or a curtain from a coating medium, and the application also additionally contains a blowing head which is configured to generate a linear jet of gaseous medium. An impact line is additionally provided on which the linear jet of gaseous medium impacts the film or curtain made of the coating medium, thereby forming a spray curtain. The blowing head is arranged such that the spray curtain is oriented in the direction of the running surface.

    WET CLEANING METHOD
    6.
    发明申请

    公开(公告)号:US20240404844A1

    公开(公告)日:2024-12-05

    申请号:US18789694

    申请日:2024-07-31

    Abstract: A method includes: placing a semiconductor wafer in a chamber during a semiconductor fabrication process; providing a semiconductor cleaning apparatus, the semiconductor cleaning apparatus comprising: a first inlet configured to receive a carrier gas; a gas passageway connected to the first inlet; a second inlet configured to receive one or more fluids; and a fluid passageway connected to the second inlet; delivering the carrier gas from the first inlet to the at least one gas passage branch through the gas passageway; spraying the carrier gas onto the semiconductor wafer; delivering the one or more fluids from the second inlet to the at least one fluid passage branch through the fluid passageway; and spraying the one or more fluids onto the semiconductor wafer.

    COMPACT ADJUSTABLE SPRAY NOZZLE TO PRECISELY TARGET AREAS FOR RINSING, REMOVING PARTICLES, AND IMPROVE HARDWARE CLEANLINESS

    公开(公告)号:US20240326198A1

    公开(公告)日:2024-10-03

    申请号:US18128555

    申请日:2023-03-30

    CPC classification number: B24B57/02 B05B1/00

    Abstract: Embodiments of the present disclosure generally relate fluid nozzles used in semiconductor manufacturing. The fluid nozzle includes a nozzle body disposed between an inlet face and an outlet face. The body includes a threaded region, a central symmetric axis, and a port. The threaded region is disposed between the inlet face and the outlet face. The central symmetric axis extends along a port axis and through the nozzle body. The port extends along a port axis and through the nozzle body. The port axis extends through the nozzle body between the inlet face and the outlet face. A first angle is formed between the port axis and the central symmetric axis. A port outlet face is perpendicular to the port axis, adjacent to the outlet face, and at a second angle to the outlet face.

    SHOES CARE DEVICE
    10.
    发明公开
    SHOES CARE DEVICE 审中-公开

    公开(公告)号:US20240115110A1

    公开(公告)日:2024-04-11

    申请号:US18273227

    申请日:2022-12-06

    CPC classification number: A47L23/20 A47B61/04 B05B1/005 B05B15/652

    Abstract: A shoes care device includes an inner cabinet configured to accommodate shoes inside; a outlet configured to suck air inside the inner cabinet; a nozzle duct having one end hinge-coupled to the inner cabinet so as to protrude into the inner cabinet, and which forms a passage for air; a nozzle hinge-coupled to the other end of the nozzle duct so that the shoes can be inserted into the inner cabinet, and configured to inject air into the shoes; a nozzle connector, of which one end is hinge-coupled to the inner cabinet and of which the other end is hinge-coupled to the nozzle; a connection path from the suction to the nozzle; a blowing part in the connection path and configured to ventilate air from the outlet to the nozzle; and a dehumidifying part in the connection path and capable of dehumidifying the ventilated air.

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