公开(公告)号：US06544334B1

公开(公告)日：2003-04-08

申请号：US09682832

申请日：2001-10-23

申请人： Radislav Alexandrovich Potyrailo ,  Daniel Robert Olson ,  Michael Jarvath Brennan ,  Jay Raghunandan Akhave ,  Mark Anthony Licon ,  Ali Reza Mehrabi ,  Dennis Lee Saunders ,  Bret Ja Chisholm

发明人： Radislav Alexandrovich Potyrailo ,  Daniel Robert Olson ,  Michael Jarvath Brennan ,  Jay Raghunandan Akhave ,  Mark Anthony Licon ,  Ali Reza Mehrabi ,  Dennis Lee Saunders ,  Bret Ja Chisholm

IPC分类号： B05C914

CPC分类号： B01J19/0046 ,  B01J2219/0043 ,  B01J2219/00443 ,  B01J2219/00527 ,  B01J2219/00596 ,  B01J2219/00722 ,  B01J2219/00745 ,  B01J2219/00756 ,  C40B40/14 ,  C40B40/18 ,  C40B60/14

摘要： Systems and methods for creating a combinatorial coating library including a coating system operatively coupled to at least one of a plurality of materials suitable for forming at least one coating layer on a surface of one or more substrates. The systems and methods also including a curing system operative to apply at least one of a plurality of curing environments to each of a plurality of regions associated with the at least one coating layer, the curing system comprising a plurality of waveguides each having a first end corresponding to at least one of the plurality of regions and a second end associated with at least one curing source. The combinatorial coating library comprising a predetermined combination of at least one of the plurality of materials and at least one of the plurality of curing environments associated with each of the plurality of regions.

摘要翻译： 用于产生组合涂料库的系统和方法，其包括可操作地耦合到适于在一个或多个基材的表面上形成至少一个涂层的多种材料中的至少一种的涂层体系。 所述系统和方法还包括固化系统，其操作以将多个固化环境中的至少一个施加到与所述至少一个涂层相关联的多个区域中的每一个上，所述固化系统包括多个波导，每个波导具有第一端 对应于所述多个区域中的至少一个，以及与至少一个固化源相关联的第二端。 组合涂料库包括多个材料中的至少一种材料和与多个区域中的每一个相关联的多个固化环境中的至少一个的预定组合。

公开(公告)号：US06656273B1

公开(公告)日：2003-12-02

申请号：US09593948

申请日：2000-06-15

申请人： Takayuki Toshima ,  Nobuo Konishi ,  Yoji Mizutani

发明人： Takayuki Toshima ,  Nobuo Konishi ,  Yoji Mizutani

IPC分类号： B05C914

CPC分类号： H01L21/67178 ,  H01L21/6715

摘要： In an organic insulating film coating apparatus, an organic insulating film is applied onto a wafer by a spin coating. Thereafter, the wafer is subjected to heat processing and an inorganic insulating film is applied onto the wafer by a spin coating in an inorganic insulating film coating apparatus. After the coating of the inorganic insulating film, the wafer is subjected to aging processing and exchange-chemical coating processing. Thereafter, a solvent in the coating film is removed in a low-temperature heat processing apparatus and a low-oxygen and high-temperature heat processing apparatus, and thermal processing is performed for the wafer in a low-oxygen curing and cooling processing apparatus. The low-temperature heat processing apparatus, the low-oxygen and high-temperature heat processing apparatus, a delivery section for the wafer between the low-temperature heat processing apparatus and the low-oxygen and high-temperature heat processing apparatus, and a delivery section for the wafer between the low-oxygen and high-temperature heat processing apparatus and the low-oxygen curing and cooling processing apparatus are brought to low-oxygen atmospheres.

摘要翻译： 在有机绝缘膜涂覆装置中，通过旋涂将有机绝缘膜施加到晶片上。 此后，对晶片进行热处理，并且通过无机绝缘膜涂覆设备中的旋涂将无机绝缘膜施加到晶片上。 在无机绝缘膜的涂覆之后，对晶片进行老化处理和交换化学涂覆处理。 然后，在低温热处理装置和低氧高温加热装置中除去涂膜中的溶剂，在低氧固化和冷却处理装置中对晶片进行热处理。 低温热处理装置，低氧高温加热装置，低温加热装置与低氧高温加热装置之间的晶片输送部，输送部 在低氧和高温热处理装置和低氧固化和冷却处理装置之间的晶片的截面被带到低氧气氛。