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42 条记录 (耗时 0.011 秒)

    SLURRY DISPERSION SYSTEM WITH REAL TIME CONTROL
    1.
    发明申请
    SLURRY DISPERSION SYSTEM WITH REAL TIME CONTROL 审中-公开
    具有实时控制的浆液分散系统

    公开(公告)号：US20160089765A1

    公开(公告)日：2016-03-31

    申请号：US14502917

    申请日：2014-09-30

    申请人： TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

    发明人： I-Chen CHIANG ,  Hwai-Te CHIU ,  Yi-Tsang CHEN ,  Chih-Chiang TSENG ,  Yung-Long CHEN

    IPC分类号： B24B57/04

    摘要： A slurry dispersion system is provided, and includes a slurry source system, an in-line analyzer and a controller. The slurry source system provides a slurry for a chemical mechanical polishing (CMP) process. The in-line analyzer measures at least one parameter of a sampled slurry sampled from the slurry dispersion system, and generates an indication signal based on the parameter, in which the indication signal indicates at lease one characteristic of the slurry. The controller receives the indication signal, and generates a control signal based on the indication signal for performing a real time control on the slurry dispersion system for controlling quality of the slurry.

    摘要翻译： 提供了浆料分散系统，包括浆料源系统，在线分析仪和控制器。 浆料源系统提供用于化学机械抛光（CMP）工艺的浆料。 在线分析仪测量从浆料分散系统取样的采样浆料的至少一个参数，并且基于参数产生指示信号，其中指示信号至少表示浆料的一个特征。 控制器接收指示信号，并根据指示信号产生一个控制信号，用于对泥浆分散系统进行实时控制，以控制浆料的质量。

    AUTOMATIC SHEET GRINDING APPARATUS
    2.
    发明申请
    AUTOMATIC SHEET GRINDING APPARATUS 有权
    自动裁片机

    公开(公告)号：US20150298276A1

    公开(公告)日：2015-10-22

    申请号：US14577877

    申请日：2014-12-19

    申请人： KOREA INSTITUTE OF GEOSCIENCE AND MINERAL RESOURCES

    发明人： Rae-Hee HAN ,  Ki-Sung SUNG ,  Jeong-Chan KIM

    IPC分类号： B24B7/07 ,  B24B57/04 ,  B24B49/02

    CPC分类号： B24B7/07 ,  B24B7/02 ,  B24B7/22 ,  B24B49/02 ,  B24B57/02 ,  B24B57/04

    摘要： An automatic sheet grinding apparatus includes a stationary stage positioned at a lower portion of the automatic sheet grinding apparatus, a sheet holder positioned on the stationary stage to grip the sheet, and a grinding head part having a chuck assembly fixed to the grinding head part through a spindle, spaced apart from the sheet holder, positioned on the stationary stage, and having a grinding disc attached to the chuck assembly to grind the sheet provided in the sheet holder. The grinding head part includes a thickness measuring unit to measure a thickness of the sheet, and a hardness measuring unit to measure hardness of the sheet. The automatic sheet grinding apparatus further includes rails positioned on the stationary stage and extending in parallel to each other. In this case, the sheet holder is securely and movably provided on the rails positioned on the stationary stage to grip the sheet.

    摘要翻译： 一种自动平板磨削装置，包括位于自动碾磨装置的下部的固定台，定位在固定台上的片材夹持器，用于夹紧片材;以及磨头部件，其具有固定在磨头部件上的卡盘组件 与片保持器间隔开的定位在固定台上的主轴，并且具有附接到卡盘组件的研磨盘，以研磨设置在片保持器中的片材。 磨头部分包括测量片材厚度的厚度测量单元和用于测量片材硬度的硬度测量单元。 自动平板磨削装置还包括定位在固定台上并彼此平行延伸的轨道。 在这种情况下，片保持器被牢固且可移动地设置在位于固定台上的轨道上以夹持片材。

    Method of honing a knife blade
    4.
    发明授权
    Method of honing a knife blade 失效
    刨刀刀的方法

    公开(公告)号：US5645470A

    公开(公告)日：1997-07-08

    申请号：US559715

    申请日：1995-11-15

    申请人： Andre Ludwig

    发明人： Andre Ludwig

    IPC分类号： B24B3/52 ,  B24B37/00 ,  B24B47/10 ,  B24B57/04 ,  B24B1/00

    CPC分类号： B24B47/10 ,  B24B3/52 ,  B24B37/00 ,  B24B57/04

    摘要： A honing process for a long knife blade such as that used in chipping wood products comprises two honing bodies each formed by a shaft carrying three honing discs with the shafts spaced by a distance less than the radius of the discs so the discs interleave and are spaced along each shaft by a distance substantially equal to the width of the discs so that the side edges of the discs lie immediately adjacent. The discs are rotated in directions so they move into the cusp formed between the discs. The long knife blade is inserted into the line of the cusp which lies parallel to the axes of rotation of the honing bodies and is moved back and forth along that line in a honing action. The length of the knife blade is greater than the width of the discs and generally significantly greater than at least two of the discs so that the knife blade remains bridged across the discs during the movement.

    摘要翻译： 用于切割木制品的长刀片的珩磨过程包括两个珩磨体，每个珩磨体由承载三个珩磨盘的轴形成，轴的间隔距离小于盘的半径，使得盘交错并间隔开 沿着每个轴大致等于盘的宽度的距离，使得盘的侧边缘紧邻。 盘沿方向旋转，使得它们移动到形成在盘之间的尖端。 长刀片插入到平行于珩磨体的旋转轴线的尖端的线中，并且在珩磨动作中沿着该线前后移动。 刀片的长度大于盘的宽度，并且通常显着大于至少两个盘，使得刀片在移动期间保持桥接跨越盘。

    SLURRY DISPERSION SYSTEM WITH REAL TIME CONTROL
    6.
    发明申请
    SLURRY DISPERSION SYSTEM WITH REAL TIME CONTROL 审中-公开

    公开(公告)号：US20200298371A1

    公开(公告)日：2020-09-24

    申请号：US16894649

    申请日：2020-06-05

    申请人： TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

    发明人： I-Chen CHIANG ,  Hwai-Te CHIU ,  Yi-Tsang CHEN ,  Chih-Chiang TSENG ,  Yung-Long CHEN

    IPC分类号： B24B57/04

    摘要： A slurry dispersion system is provided, and includes a slurry source system, an in-line analyzer and a controller. The slurry source system provides a slurry for a chemical mechanical polishing (CMP) process. The in-line analyzer measures at least one parameter of a sampled slurry sampled from the slurry dispersion system, and generates an indication signal based on the parameter, in which the indication signal indicates at lease one characteristic of the slurry. The controller receives the indication signal, and generates a control signal based on the indication signal for performing a real time control on the slurry dispersion system for controlling quality of the slurry.

    Control of particle supply of blasting apparatus
    7.
    发明授权
    Control of particle supply of blasting apparatus 有权

    公开(公告)号：US10513010B2

    公开(公告)日：2019-12-24

    申请号：US15539794

    申请日：2016-01-21

    申请人： SENTENSO GmbH

    发明人： Volker Schneidau

    IPC分类号： B24C7/00 ,  B24B57/04

    摘要： The invention relates to a method for adjusting or operating a particle-metering system for a particle blasting installation, in particular a blasting installation for the working of surfaces, the abrasive throughput of which is preset by means of a passing-through opening that can be varied on the basis of time and/or variables and is determined by means of a downstream throughput sensor as a throughput sensor signal (DS), wherein the throughput sensor signal (DS) is used for controlling a manipulated variable (SG) for the degree of setting of the passing-through opening, wherein to adjust the metering system for at least one value of the manipulated variable (SG) the actual throughput (D) through the passing-through opening is determined by means of a measurement of the weight of abrasive material (M) allowed through within a defined time period (Dt), and the manipulated variable (SG), the actual throughput (D) and the corresponding throughput sensor signal (DS) are stored in an assignment table, wherein the relations between the actual throughput (D), the manipulated variable (SG) and the throughput sensor signal (DS) are used during subsequent operation.

    Pivotable slurry arm
    8.
    发明申请
    Pivotable slurry arm 审中-公开
    透视浆臂

    公开(公告)号：US20050164603A1

    公开(公告)日：2005-07-28

    申请号：US10763469

    申请日：2004-01-22

    申请人： Colby House ,  Herng Liu

    发明人： Colby House ,  Herng Liu

    IPC分类号： B24B37/04 ,  B24B57/04 ,  B24B49/00

    CPC分类号： B24B37/04 ,  B24B37/042 ,  B24B57/04

    摘要： Embodiments of methods and apparatus of the present invention provide a chemical mechanical planarization (CMP) apparatus including a pivotable slurry arm for dispensing slurry.

    摘要翻译： 本发明的方法和装置的实施例提供了一种化学机械平面化（CMP）装置，其包括用于分配浆料的可枢转的浆液臂。