Micro electrostatic motor and micro mechanical force transfer devices

    公开(公告)号:US11296619B2

    公开(公告)日:2022-04-05

    申请号:US16418109

    申请日:2019-05-21

    申请人: Encite LLC

    发明人: Stephen A. Marsh

    IPC分类号: H02N2/12 H02K7/116 B81B5/00

    摘要: Disclosed is a force transfer device that includes a first body that has a first body frame that defines a first chamber and at least one gear element. The gear element has a central gear element region. A first membrane is affixed to a surface of the first body frame, the membrane covering the chamber and having an annular aperture enclosing a central region of the membrane that is affixed to the central gear element region of the gear element. The disclosed force transfer device can be axle or shaft based. Also disclosed in a micro electrostatic motor that includes a motor body having a first and a second face, the motor body defining a chamber and a rotor having a central region. A membrane is disposed over the first face of the motor body, the membrane supporting a pair of spaced electrodes that are electrically isolated by a gap, the membrane having an annular aperture that defines a central region of the membrane that is coupled to the central region of the rotor. The force transfer device can be driven by the electrostatic motor.

    MEMS device and electronic apparatus

    公开(公告)号:US11262376B2

    公开(公告)日:2022-03-01

    申请号:US16078213

    申请日:2016-06-02

    申请人: GOERTEK INC.

    发明人: Quanbo Zou

    摘要: The present invention discloses a MEMS device and electronic apparatus. The MEMS device comprises: a micro-LED; and a movable member, wherein the micro-LED is mounted on the movable member and is configured for moving with the movable member. According to an embodiment of this invention, the signal detection of a MEMS device can be simplified and/or the contents of signals produced by the MEMS device can be enriched.

    Methods and system for microelectromechanical packaging

    公开(公告)号:US11125948B2

    公开(公告)日:2021-09-21

    申请号:US16658884

    申请日:2019-10-21

    申请人: AEPONYX INC.

    摘要: Hybrid optical integration places very strict manufacturing tolerances and performance requirements upon the multiple elements to exploit passive alignment techniques as well as having additional processing requirements. Alternatively, active alignment and soldering/fixing where feasible is also complex and time consuming with 3, 4, or 6-axis control of each element. However, microelectromechanical (MEMS) systems can sense, control, and activate mechanical processes on the micro scale. Beneficially, therefore the inventors combine silicon MEMS based micro-actuators with silicon CMOS control and drive circuits in order to provide alignment of elements within a silicon optical circuit either with respect to each other or with other optical elements hybridly integrated such as compound semiconductor elements. Such inventive MEMS based circuits may be either maintained as active during deployment or powered off once the alignment has been “locked” through an attachment/retention/latching process.

    Component especially for horology with surface topology and method for manufacturing the same

    公开(公告)号:US10981783B2

    公开(公告)日:2021-04-20

    申请号:US16441068

    申请日:2019-06-14

    申请人: Nivarox-FAR S.A.

    摘要: A system including two components intended to be in friction contact with each other in a given direction, wherein the friction occurs in a functional area, wherein the system is at least one of the two components including, on a surface in the functional area, a texture formed of a series of troughs of rounded shape separated by peaks or a series of bumps of rounded shape separated by troughs, the troughs extending parallel in the given direction and allowing for the evacuation of debris produced by friction and serving as a reservoir for a lubricant. A method for manufacturing at least one component or a mold by the DRIE (deep reactive ion etching) process, wherein surface defects on the sidewalls machined by the DRIE process are used to form the troughs.