公开(公告)号：US20240280905A1

公开(公告)日：2024-08-22

申请号：US18440906

申请日：2024-02-13

申请人： Brewer Science, Inc.

发明人： Si Li ,  Ming Luo ,  Ruimeng Zhang ,  Kelsey Brakensiek ,  Xue Wang ,  Yichen Liang ,  Xinlin Lu ,  Pengtao Lu

IPC分类号： G03F7/11 ,  C07D301/00 ,  C07F7/08 ,  C08G77/26 ,  C08G77/50 ,  C09D183/04 ,  C09D183/14

CPC分类号： G03F7/11 ,  C07D301/00 ,  C07F7/0834 ,  C08G77/26 ,  C08G77/50 ,  C09D183/04 ,  C09D183/14

摘要： Novel lithographic compositions for use as an EUV underlayer are disclosed. The invention includes methods of fabricating microelectronics structures using those compositions as well as structures formed by those methods. The method involves utilizing an underlayer immediately below the photoresist layer. The underlayer can either be directly applied to the substrate, or it can be applied to any intermediate layer(s) that may be applied to the substrate. The preferred underlayers are formed from spin-coatable, monomeric, oligomeric, and/or polymeric compositions and exhibit uniform thicknesses and low roughness. The disclosed method enables a 14/28 nm pattern using EUV lithography and better depth of focus (DOF) than standard EUV underlayers.

公开(公告)号：US11891341B2

公开(公告)日：2024-02-06

申请号：US16888724

申请日：2020-05-30

申请人： HRL Laboratories, LLC

发明人： Zak C. Eckel ,  Andrew P. Nowak ,  Ashley M. Dustin ,  April R. Rodriguez ,  Phuong Bui ,  Tobias A. Schaedler

IPC分类号： C04B35/571 ,  B33Y70/00 ,  B33Y80/00 ,  C08G77/50 ,  B28B1/00

CPC分类号： C04B35/571 ,  B28B1/001 ,  B33Y70/00 ,  B33Y80/00 ,  C08G77/50 ,  C04B2235/5252 ,  C04B2235/665

摘要： This disclosure provides resin formulations which may be used for 3D printing and thermally treating to produce a ceramic material. The disclosure provides direct, free-form 3D printing of a preceramic polymer, followed by converting the preceramic polymer to a 3D-printed ceramic composite with potentially complex 3D shapes. A wide variety of chemical compositions is disclosed, and several experimental examples are included to demonstrate reduction to practice. For example, preceramic resin formulations may contain a carbosilane in which there is at least one functional group selected from vinyl, allyl, ethynyl, unsubstituted or substituted alkyl, ester group, amine, hydroxyl, vinyl ether, vinyl ester, glycidyl, glycidyl ether, vinyl glycidyl ether, vinyl amide, vinyl triazine, vinyl isocyanurate, acrylate, methacrylate, alkacrylate, alkyl alkacrylate, phenyl, halide, thiol, cyano, cyanate, or thiocyanate. The resin formulations may contain a solid-phase filler, to provide high thermal stability and mechanical strength (e.g., fracture toughness) in the final ceramic material.

公开(公告)号：US11820666B2

公开(公告)日：2023-11-21

申请号：US17396687

申请日：2021-08-07

申请人： Pallidus, Inc.

发明人： Douglas M. Dukes ,  Andrew R. Hopkins ,  Walter J. Sherwood ,  Ashish P. Diwanji ,  Glenn Sandgren ,  Mark S. Land ,  Brian L. Benac

IPC分类号： C01B33/00 ,  C01B32/956 ,  C04B35/571 ,  C08G77/50 ,  C04B35/56 ,  C08L83/04 ,  C08G77/20 ,  C01B32/40 ,  C01B32/50 ,  C01B32/977 ,  C04B35/80 ,  C08G77/12 ,  C09K8/80 ,  C08G77/00

CPC分类号： C01B32/956 ,  C01B32/40 ,  C01B32/50 ,  C01B32/977 ,  C04B35/56 ,  C04B35/5603 ,  C04B35/571 ,  C04B35/80 ,  C08G77/20 ,  C08G77/50 ,  C08L83/04 ,  C04B2235/3418 ,  C04B2235/3826 ,  C04B2235/44 ,  C04B2235/48 ,  C04B2235/483 ,  C04B2235/528 ,  C04B2235/5427 ,  C04B2235/5436 ,  C04B2235/6581 ,  C04B2235/72 ,  C04B2235/77 ,  C04B2235/96 ,  C08G77/12 ,  C08G77/80 ,  C09K8/80 ,  C08L83/00

摘要： Organosilicon chemistry, polymer derived ceramic materials, and methods. Such materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Processes and articles utilizing such high purity SiOC and SiC.

公开(公告)号：US20230227612A1

公开(公告)日：2023-07-20

申请号：US18098553

申请日：2023-01-18

申请人： DAIKIN INDUSTRIES, LTD.

发明人： Yoshiaki HONDA

IPC分类号： C08G77/46 ,  C08G77/50 ,  C08K5/057 ,  C08K5/5419 ,  C08K5/57 ,  C08G65/336

CPC分类号： C08G77/46 ,  C08G77/50 ,  C08K5/057 ,  C08K5/5419 ,  C08K5/57 ,  C08G65/336

摘要： A curable composition including a perfluoro(poly)ether group-containing silane compound having two or more Si atoms each bonding to at least one of a hydroxyl and hydrolyzable group, and a perfluoro(poly)ether group represented by: —(OC6F12)a—(OC5F10)b—(OC4F8)c—(OC3X106)d—(OC2F4)e—(OCF2)f—, wherein a, b, c and d are each independently an integer of 0 to 30, e and f are each independently an integer of 1 to 200, the sum of a, b, c, d, e and f is at least 5, the occurrence order of respective repeating units with the subscript a, b, c, d, e or f is not limited, a ratio of e to f is less than 1.0, and each X10 is independently a hydrogen, fluorine or chlorine atom; an organosilicon compound having at least two —O—Rg3(s) each bonding to a Si atom, wherein each Rg3 is independently a hydrogen atom or a monovalent organic group; and a catalyst.

公开(公告)号：US11685660B2

公开(公告)日：2023-06-27

申请号：US17000552

申请日：2020-08-24

申请人： Pallidus, Inc.

发明人： Mark S. Land

IPC分类号： C23C14/06 ,  C01B32/977 ,  C01B32/956 ,  C30B25/02 ,  C30B29/36 ,  C04B35/571 ,  C08G77/20 ,  C08G77/50 ,  C04B35/56 ,  C08L83/04 ,  C04B35/515 ,  C04B35/80 ,  C08G77/12 ,  C08G77/00

CPC分类号： C01B32/956 ,  C01B32/977 ,  C04B35/515 ,  C04B35/56 ,  C04B35/5603 ,  C04B35/571 ,  C04B35/80 ,  C08G77/20 ,  C08G77/50 ,  C08L83/04 ,  C23C14/0635 ,  C30B25/02 ,  C30B29/36 ,  C04B2235/3418 ,  C04B2235/3826 ,  C04B2235/3895 ,  C04B2235/44 ,  C04B2235/48 ,  C04B2235/483 ,  C04B2235/528 ,  C04B2235/5427 ,  C04B2235/5436 ,  C04B2235/6581 ,  C04B2235/72 ,  C04B2235/77 ,  C04B2235/94 ,  C04B2235/96 ,  C08G77/12 ,  C08G77/80 ,  C08L83/04 ,  C08L83/00

摘要： Organosilicon chemistry, polymer derived ceramic materials, and methods. Such materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Vapor deposition processes and articles formed by those processes utilizing such high purity SiOC and SiC.

公开(公告)号：US20230183919A1

公开(公告)日：2023-06-15

申请号：US17997140

申请日：2021-04-29

申请人： TIAX LLC

发明人： Lauren M. Ziemba ,  William S. Barney ,  Kezi Cheng ,  Michael J. Jakubowski ,  John F. Martin ,  Bradford A. Pindzola ,  John R. Powell

IPC分类号： D06N3/12 ,  C09D5/00 ,  C09D183/14 ,  C08G77/50 ,  C09D7/45 ,  C09D7/65 ,  C09D7/20 ,  D06N3/00

CPC分类号： D06N3/128 ,  C09D5/00 ,  C09D183/14 ,  C08G77/50 ,  C09D7/45 ,  C09D7/65 ,  C09D7/20 ,  D06N3/0006 ,  D06N3/0011 ,  D06N3/0088 ,  D06N2209/16 ,  D06N2205/16 ,  D06N2203/066 ,  D06N2201/042

摘要： Coated articles include a substrate and a periodic mesoporous organosilica layer adhered to a surface of the substrate. The coated articles may further include a secondary silane layer covalently attached the periodic mesoporous organosilica layer. Depending on the compositions of the layers, the combination of the periodic mesoporous organosilica layer and the secondary silane layer renders the surface of the substrate superhydrophobic or omniphobic. Methods for coating a surface of a substrate include contacting the surface with a mixture of a hydrolyzed organosilane and a poloxamer and curing the mixture on the surface to form a PMO-coated substrate. The methods may further include contacting the PMO-coated article with a secondary silane coating solution of one or more silanes, then curing the secondary silane coating solution to form a dual-coated article comprising a secondary alkylsilane layer covalently attached to the periodic mesoporous organosilica layer on the surface of the substrate.

公开(公告)号：US11643506B2

公开(公告)日：2023-05-09

申请号：US17277593

申请日：2019-12-04

申请人： Dow Silicones Corporation

发明人： Gang Lu ,  Nanguo Liu ,  Zhenbin Niu ,  David Rich ,  Michael Telgenhoff ,  Michael Wang

IPC分类号： C08G77/50 ,  C08G77/08 ,  C09J183/14 ,  C09D183/14 ,  C08G77/12 ,  C08L83/14

CPC分类号： C08G77/50 ,  C08G77/08 ,  C08G77/12 ,  C08L83/14 ,  C09D183/14 ,  C09J183/14

摘要： Polyorganosiloxanes and methods for their preparation are disclosed. The polyorganosiloxanes are useful in curable compositions. The polyorganosiloxanes may have up to 9 silicon bonded hydrogen atoms, or other curable groups, per molecule.

公开(公告)号：US11643505B2

公开(公告)日：2023-05-09

申请号：US17203341

申请日：2021-03-16

申请人： DOW TORAY CO., LTD.

发明人： Seiji Hori ,  Yasue Kanzaki ,  Hiroko Taniguchi ,  Mari Wakita

IPC分类号： C08G77/50 ,  A61K8/891 ,  A61Q1/12 ,  A61Q19/00 ,  A61Q1/02 ,  A61Q17/04 ,  C08G77/08 ,  C08L83/14 ,  C09D7/65 ,  C09D7/40

CPC分类号： C08G77/50 ,  A61K8/891 ,  A61Q1/02 ,  A61Q1/12 ,  A61Q17/04 ,  A61Q19/00 ,  C08G77/08 ,  C08L83/14 ,  A61K2800/412 ,  C08L2312/08 ,  C09D7/65 ,  C09D7/69

摘要： Silicone particles having excellent dispersibility are provided via the method herein. A cosmetic material having excellent feeling of use, and a highly functional paint and an electronic material are also provided. The silicone particles include a siloxane as a component. A content of a hydrogen atom bonded to a silicon atom per unit mass is 300 ppm or less, or optionally is 20 ppm or less. In addition, the silicon atom in the siloxane as a component for the silicone particles is crosslinked with another silicon atom via an alkylene group having a carbon number of 4 to 20.

公开(公告)号：US20230090632A1

公开(公告)日：2023-03-23

申请号：US17844041

申请日：2022-06-19

申请人： Palllidus, Inc.

发明人： Douglas M. Dukes ,  Ashish P. Diwanji ,  Andrew R. Hopkins ,  Walter J. Sherwood ,  Mark S. Land ,  Glenn Sandgren ,  Brian L. Benac

IPC分类号： C01B32/956 ,  C30B23/00 ,  C30B23/02 ,  C30B29/36 ,  C30B29/06 ,  H01L29/16 ,  H01L29/66 ,  H01L21/02 ,  C04B35/56 ,  C04B35/571 ,  C08G77/20 ,  C08G77/50 ,  C08L83/04 ,  C01B32/977 ,  C04B35/80 ,  C08L83/00

摘要： Organosilicon chemistry, polymer derived ceramic materials, and methods. Such materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Processes and articles utilizing such high purity SiOC and SiC.

公开(公告)号：US11518855B2

公开(公告)日：2022-12-06

申请号：US16634800

申请日：2018-08-23

申请人： KYOTO UNIVERSITY

发明人： Kazuki Nakanishi ,  Kazuyoshi Kanamori ,  Guoqing Zu

IPC分类号： C08G77/42 ,  C08G77/50 ,  C08J9/28

摘要： A low-density gel product of the present disclosure has a skeleton containing a polysiloxane chain and an organic polymer chain. In the skeleton, the polysiloxane chain and the organic polymer chain are bonded to each other by covalent bonds at a plurality of positions on both of the chains with silicon atoms of the polysiloxane chain as bonding points. The organic polymer chain may be an aliphatic hydrocarbon chain. The polysiloxane chain may be a polyorganosiloxane chain. The low-density gel product of the present disclosure is a novel low-density gel product with improved mechanical properties including bending flexibility.