公开(公告)号：US20240360542A1

公开(公告)日：2024-10-31

申请号：US18765683

申请日：2024-07-08

申请人： Universal Display Corporation

发明人： Matthew KING ,  Gregg KOTTAS ,  Gregory MCGRAW ,  William E. QUINN

IPC分类号： C23C14/24 ,  B05B1/00 ,  B05B1/24 ,  B05B1/28 ,  B41J2/005 ,  B41J2/14 ,  C23C14/12 ,  H10K50/11 ,  H10K71/00 ,  H10K71/18 ,  H10K101/10

CPC分类号： C23C14/24 ,  B05B1/005 ,  B05B1/24 ,  B05B1/28 ,  B41J2/005 ,  B41J2/14 ,  B41J2/14145 ,  C23C14/12 ,  H10K71/00 ,  H10K50/11 ,  H10K71/18 ,  H10K2101/10

摘要： Embodiments of the disclosed subject matter provide an apparatus having a device with a micronozzle array disposed on a micro-fabricated fluidic die. The device may include a first gas distribution plate and a second opposing plate, where the micro-fabricated fluidic die is disposed between the first gas distribution plate and the second opposing plate, wherein the first gas distribution plate is irreversibly joined to the micronozzle array with a seal that is gas-tight, and where the first gas distribution plate includes a plurality of sealed flow paths. A manifold may be reversibly joined to the first gas distribution plate, where the micro-fabricated fluidic die and the first gas distribution plate and the second opposing plate are disposed between the manifold. A thermally conductive plate may have at least one window that provides a clearance fit for the device across a range of motion relative to the thermally conductive plate.

公开(公告)号：US12057299B2

公开(公告)日：2024-08-06

申请号：US17486210

申请日：2021-09-27

申请人： Applied Materials, Inc.

发明人： Tuck Foong Koh ,  John Leonard Sudijono

IPC分类号： H01L21/3065 ,  C23C2/02 ,  C23C14/02 ,  C23C14/12 ,  C23C14/54 ,  H01J37/32

CPC分类号： H01J37/32816 ,  C23C2/024 ,  C23C14/021 ,  C23C14/12 ,  C23C14/541 ,  H01J37/32082 ,  H01J37/32449 ,  H01J2237/332 ,  H01J2237/334 ,  H01J2237/335

摘要： A method for cleaning contacts on a substrate incorporates ion control to selectively remove oxides. The method includes exposing the substrate to ions of an inert gas, supplying a first RF frequency of a first bias power supply to a substrate support, supplying a second RF frequency of a second bias power supply to a substrate support, and adjusting a first power level of the first RF frequency and a second power level of the second RF frequency to selectively remove oxide from at least one contact on the substrate while inhibiting sputtering of polymer material wherein the oxide removal is selective over removal of polymer material surrounding the at least one contact.

公开(公告)号：US12057297B2

公开(公告)日：2024-08-06

申请号：US16823046

申请日：2020-03-18

申请人： Richard DeVito

发明人： Richard DeVito

IPC分类号： H01J37/32 ,  C23C14/00 ,  C23C14/12 ,  C23C14/14 ,  C23C14/50 ,  C23C14/54 ,  H01J37/34

CPC分类号： H01J37/32458 ,  C23C14/0047 ,  C23C14/0063 ,  C23C14/0078 ,  C23C14/12 ,  C23C14/14 ,  C23C14/50 ,  C23C14/541 ,  H01J37/321 ,  H01J37/32192 ,  H01J37/32733 ,  H01J37/3405 ,  H01J2237/20214 ,  H01J2237/3321

摘要： In one aspect, a system for depositing a film on a substrate is disclosed, which comprises at least one metallization source for generating metal atoms, and at least one reactive source for generating at least one reactive species. The system further includes an inner cooling cylinder and a substrate cylinder, where the inner cooling cylinder is fixedly positioned relative to the substrate cylinder, and the substrate cylinder at least partially surrounds the inner cooling cylinder. At least one mount is coupled to the substrate cylinder for mounting one or more substrates to the substrate cylinder.

公开(公告)号：US20240229227A1

公开(公告)日：2024-07-11

申请号：US18559484

申请日：2022-03-09

申请人： 3M INNOVATIVE PROPERTIES COMPANY

发明人： Sean M. Sweetnam ,  Stephen P. Maki ,  Timothy J. Hebrink ,  Daniel M. Pierpont ,  Mark D Weigel ,  David J Rowe ,  Brandon R Pietz ,  Christopher S. Lyons ,  Kevin D. Hagen

IPC分类号： C23C14/35 ,  C08J7/04 ,  C23C14/00 ,  C23C14/06 ,  C23C14/08 ,  C23C14/12 ,  C23C14/24 ,  C23C14/58

CPC分类号： C23C14/35 ,  C08J7/0423 ,  C23C14/0036 ,  C23C14/0676 ,  C23C14/08 ,  C23C14/12 ,  C23C14/24 ,  C23C14/5833 ,  C08J2323/28 ,  C08J2433/08 ,  C08J2467/02

摘要： Barrier films including a (co)polymeric substrate, at least one dyad on the substrate, each dyad made of a (co)polymer layer and an oxide layer overlaying the (co)polymer layer, and an outer (co)polymer layer overlaying the dyads. Optionally, at least one outer oxide layer overlays the outer (co)polymer layer. The barrier films transmit visible light and transmits, at an incident light angle of at least one of 0°, 30°, 45°, 60°, or 75°, at most 70 percent of incident ultraviolet light at a wavelength range from at least 100 nanometers to 400 nanometers or in a wavelength range from at least 100 nm to 350 nm. The barrier films exhibit atomic oxygen degradation of less than 1×10−20 mg/atom. The barrier films may be applied to decorative objects or electronic devices, (e.g., light receiving or emitting devices, in a satellite or aircraft. Methods of making the barrier films also are disclosed.

公开(公告)号：US20240093349A1

公开(公告)日：2024-03-21

申请号：US18525005

申请日：2023-11-30

申请人： Wuhan Tianma Micron-Electronics Co., Ltd. ,  Wuhan Tianma Micro-Electronics Co., Ltd. Shanghai Branch

发明人： Naichao MU ,  Yuan LI ,  Yu XIN ,  Jun MA ,  Lijing HAN

IPC分类号： C23C14/04 ,  C23C14/12 ,  H10K71/00

CPC分类号： C23C14/042 ,  C23C14/12 ,  H10K71/00 ,  H10K71/166

摘要： A mask module includes a framework, a first strip plate fixed on the framework and extending along a first direction, and a first mask. The first mask is located on a side, deviating from the framework, of the first strip plate. The first mask includes at least one preset area, and the preset area includes at least one opening area. The first strip plate is provided with a first concave-convex structure on one side edge along the first direction. At least one convex structure is provided in a middle of the first concave-convex structure along the first direction. In a direction perpendicular to a surface of the first mask, the first concave-convex structure and the convex structure cover at least a part of area of the at least one opening of the preset area. The convex structure and the first stripe plate are integrally formed.

公开(公告)号：US11864447B2

公开(公告)日：2024-01-02

申请号：US17417709

申请日：2020-09-30

申请人： CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. ,  BOE TECHNOLOGY GROUP CO., LTD.

发明人： Tong Niu ,  Ming Hu ,  Chang Luo ,  Jianpeng Wu ,  Benlian Wang ,  Fengli Ji ,  Peng Xu ,  Qian Xu ,  Guomeng Zhang ,  Yan Huang

IPC分类号： H01L27/32 ,  H10K59/35 ,  C23C14/04 ,  H10K59/122 ,  C23C14/12

CPC分类号： H10K59/353 ,  C23C14/042 ,  H10K59/352 ,  C23C14/12 ,  H10K59/122

摘要： Display substrate, display device, high-precision metal mask are provided. Display substrate includes: first, second, and third sub-pixels; in first direction, first and third sub-pixels are alternately arranged to form first sub-pixel rows, second sub-pixels form second sub-pixel rows; in second direction, first and second sub-pixel rows are alternately arranged; two first and two third sub-pixels in two adjacent rows and two adjacent columns form 2*2 array; in the array, two first sub-pixels are in different rows and in different columns, so are the two third sub-pixels, connection lines of centers of two first and two third sub-pixels form virtual quadrilateral, second sub-pixel is within virtual quadrilateral; for multiple distances from centers of two first and two third sub-pixels corresponding to same virtual quadrilateral to center of second sub-pixel, at least two distances are different. Brightness centers of virtual pixels have more uniform distribution.

公开(公告)号：US20230408461A1

公开(公告)日：2023-12-21

申请号：US18216064

申请日：2023-06-29

申请人： Waters Technologies Corporation

发明人： Kerri M. Smith ,  Paul Rainville

IPC分类号： G01N30/72 ,  C23C14/04 ,  C23C14/12

CPC分类号： G01N30/72 ,  C23C14/046 ,  C23C14/12 ,  G01N2030/027

摘要： The present disclosure discusses a method of separating a sample (e.g., small organic acid metabolite) including coating a flow path of a chromatographic system. The coating along the flow path is vapor deposited and prevents or severely decreases metal interactions between the metallic chromatographic system and the sample.

公开(公告)号：US20230393103A1

公开(公告)日：2023-12-07

申请号：US18206989

申请日：2023-06-07

申请人： Waters Technologies Corporation

发明人： Matthew A. Lauber ,  Mathew H. DeLano ,  Scott A. McCall ,  Jonathan Belanger ,  Theodore A. Dourdeville ,  Kerri Smith ,  Paul Rainville ,  Dimple Shah ,  Stephen J. Shiner ,  Catalin Doneanu ,  Michael Donegan

IPC分类号： G01N30/56 ,  B01J20/32 ,  B05D1/00 ,  B01J20/291 ,  C23C16/04 ,  C23C16/30 ,  C23C14/04 ,  C23C14/12 ,  C23C14/24 ,  G01N30/60

CPC分类号： G01N30/56 ,  B01J20/3272 ,  B05D1/60 ,  B01J20/291 ,  C23C16/045 ,  C23C16/30 ,  C23C14/046 ,  C23C14/12 ,  C23C14/24 ,  G01N30/6052 ,  B05D2518/10 ,  G01N30/7266

摘要： A device for separating analytes is disclosed. The device has a sample injector, sample injection needle, sample reservoir container in communication with the sample injector, chromatography column downstream of the sample injector, and fluid conduits connecting the sample injector and the column. The interior surfaces of the fluid conduits, sample injector, sample reservoir container, and column form a flow path having wetted surfaces. A portion of the wetted surfaces of the flow path are coated with an alkylsilyl coating that is inert to at least one of the analytes. The alkylsilyl coating has the Formula I:






R1, R2, R3, R4, R5, and R6 are each independently selected from (C1-C6)alkoxy, —NH(C1-C6)alkyl, —N((C1-C6)alkyl)2, OH, ORA, and halo. RA represents a point of attachment to the interior surfaces of the fluidic system. At least one of R1, R2, R3, R4, R5, and R6 is ORA. X is (C1-C20)alkyl, —O[(CH2)2O]1-20, -(C1-C10)[NH(CO)NH(C1-C10)]1-20-, or -(C1-C10)[alkylphenyl(C1-C10)alkyl]1-20-.

公开(公告)号：US11800779B2

公开(公告)日：2023-10-24

申请号：US17566213

申请日：2021-12-30

申请人： HON HAI PRECISION INDUSTRY CO., LTD.

发明人： Ying-Chieh Chen

IPC分类号： H10K71/16 ,  C23C14/24 ,  C23C14/12 ,  H10K50/11 ,  H10K59/00 ,  H10K71/00 ,  H10K71/10 ,  H10K59/10 ,  H10K59/12

CPC分类号： H10K71/164 ,  C23C14/12 ,  C23C14/24 ,  C23C14/243 ,  H10K50/11 ,  H10K59/00 ,  H10K71/00 ,  H10K71/10 ,  H10K59/10 ,  H10K59/1201

摘要： A source to facilitate precise vapor deposition in processes to obtain organic light emitting diodes (OLEDs) in a display panel, includes forming a plurality of grooves on a first substrate; in filling organic light emitting materials into the grooves and providing a second substrate to receive the vaporized organic light emitting materials. The first substrate is aligned with the second substrate and the first substrate is heated to vaporize the organic light emitting materials in the grooves. The vapor deposition regions of the second substrate form an organic light emitting material layer after the deposition, the layer can then be used in an OLED display panel. The shadow effect is greatly reduced, a method for the procedure is also disclosed.

公开(公告)号：US20230256483A1

公开(公告)日：2023-08-17

申请号：US18139246

申请日：2023-04-25

申请人： Applied Materials, Inc.

发明人： Jose Manuel DIEGUEZ-CAMPO ,  Stefan KELLER ,  Jae Won LEE ,  Takashi ANJIKI ,  Dieter HAAS

IPC分类号： B08B7/04 ,  B08B3/08 ,  B08B7/00 ,  B08B9/08 ,  C23C14/12 ,  C23C14/24 ,  C23C14/56 ,  H10K71/00 ,  H10K71/16

CPC分类号： B08B7/04 ,  B08B3/08 ,  B08B7/0035 ,  B08B9/08 ,  C23C14/12 ,  C23C14/24 ,  C23C14/566 ,  H10K71/00 ,  H10K71/164 ,  H10K71/166 ,  B08B2209/08

摘要： The present disclosure provides a method for cleaning a vacuum system used in the manufacture of OLED devices. The method includes performing pre-cleaning for cleaning at least a portion of the vacuum system, and performing plasma cleaning using a remote plasma source.