Banded Cooling Fan Band having Knit-Line Strength Improvement

    公开(公告)号:US20230130411A1

    公开(公告)日:2023-04-27

    申请号:US17915752

    申请日:2021-04-06

    申请人: Robert Bosch GmbH

    发明人: Ray Cote

    IPC分类号: F04D29/32 F04D29/02 F04D29/38

    摘要: A fan includes a hub configured to be driven by motor to rotate about a fan rotational axis, blades that protrude radially from the hub and a band that surrounds the rotational axis and connects the tips of the blades. The band includes structurally-reinforcing thickened regions that protrude from outer surface of the band in a direction away from the hub. A thickened region is disposed between respective tips of each pair of adjacent blades. Each thickened portion bridges a knit-line of the band.

    VACUUM PUMP, VACUUM PUMP SET FOR EVACUATING A SEMICONDUCTOR PROCESSING CHAMBER AND METHOD OF EVACUATING A SEMICONDUCTOR PROCESSING CHAMBER

    公开(公告)号:US20230042886A1

    公开(公告)日:2023-02-09

    申请号:US17790843

    申请日:2021-01-07

    申请人: Edwards Limited

    摘要: A vacuum pump, vacuum pump set and method for evacuating a semiconductor processing chamber is disclosed. The vacuum pump is configured for mounting to a semiconductor processing chamber to evacuate the chamber to pressures between 1 mbar and 5×10−2 mbar. The vacuum pump comprises: a rotor rotatably mounted within a stator. The rotor comprises a plurality of angled blades arranged along a helical path from an inlet to an outlet. The stator comprises a plurality of perforated elements arranged to intersect the helical path, the perforations allowing gas molecules travelling along the helical path to pass through the perforated elements. The rotor mounted on a magnetically levitated bearing; and the perforated elements located towards an inlet of the vacuum pump comprise a transparency of more than 40% and the perforated elements located towards an outlet of the vacuum pump comprise a transparency of more than 30%.

    LIQUID PUMPING UNITS, AND RELATED SYSTEMS AND METHODS

    公开(公告)号:US20220354025A1

    公开(公告)日:2022-11-03

    申请号:US17867457

    申请日:2022-07-18

    摘要: A pump tray has a liquid pump with an inlet and outlet. A blindly matable liquid coupler fluidicly couples with the pump inlet and a blindly matable liquid coupler fluidicly couples with the pump outlet. A chassis of the pump tray has an alignment member configured to removably engage with another device and to restrict, to a limited number of degrees-of-freedom, movement of the chassis relative to the other device (e.g., a liquid pumping unit). The blindly matable liquid couplers are so physically coupled with the chassis as to inhibit movement of them relative to the chassis. A liquid pumping unit also has a chassis defining a bay configured to receive a pump tray, a liquid inlet coupler and a liquid outlet coupler, and a reservoir fluidicly coupled with the liquid inlet coupler. A blindly-matable liquid coupler fluidicly couples with the reservoir outlet and a blindly-matable liquid coupler fluidicly couples with the liquid outlet coupler. An alignment member is configured to removably engage with the pump tray and to restrict, to a limited number of degrees-of-freedom, movement of the pump tray relative to the chassis of the liquid pumping unit.