VALVE PULSING TO CONTROL PRECURSOR PRESSURE
    2.
    发明公开

    公开(公告)号:US20240240323A1

    公开(公告)日:2024-07-18

    申请号:US18411900

    申请日:2024-01-12

    摘要: A reactor system configured to use valve pulsing to control precursor pressure as part of substrate or other processing. A controller in the reactor system runs a pressure control module to process pressure signals from a pressure sensor sensing pressure within an accumulator disposed between a reaction chamber and a precursor source vessel. Based on a pressure set point for the accumulator and the sensed pressure feedback, the controller generates valve control or valve pulsing signals to operate one or more fill valves used to control fill of the accumulator with gas (e.g., precursor) from the precursor source vessel. The fill valves may be high-speed diaphragm valves configured for operation in high temperature applications to be fully opened or fully closed, and the control signals cause the valves to rapidly pulse open and closed to adjust the pressure within the accumulator.

    Endoscope gripping device
    3.
    发明授权

    公开(公告)号:US11350814B2

    公开(公告)日:2022-06-07

    申请号:US16205492

    申请日:2018-11-30

    申请人: Ronald Yamada

    发明人: Ronald Yamada

    摘要: A gripping device for an endoscope insertion tube utilizing first and second arms that are hingedly attached to one another. Each arm includes an opening to accommodate the insertion tube of an endoscope such that the endoscope insertion tube spans both arms. First and second jaws are associated with first and second arms and are positioned in opposition to one another. The movement of the arms toward one another causes the jaws to engage the insertion tube which is guided through the arms by the apertures found in the arms.

    Preloaded piezo actuator and gas valve employing the actuator

    公开(公告)号:US11079035B2

    公开(公告)日:2021-08-03

    申请号:US16510671

    申请日:2019-07-12

    发明人: Timothy R. Brown

    IPC分类号: F16K31/00 F16K27/02 F16K7/00

    摘要: A valve arrangement for controlling gas flow. A gas block includes a gas inlet, a gas outlet, and a gas cavity fluidly connecting the gas inlet to the gas outlet. A diaphragm is configured for controlling gas flow between the gas inlet and the gas outlet. An actuator is configured to vary the position of the diaphragm so as to control the gas flow. The actuator comprises a tubular housing; a plunger positioned inside the housing and having an actuating extension extending outside of the housing and coupled to the diaphragm, the plunger configured to be slidable inside the housing; a piezoelectric body positioned inside the plunger; and a pre-loader applying force to the plunger so as to press the plunger against the piezoelectric body.

    Diaphragm valve and flow rate control device for semiconductor manufacturing apparatus

    公开(公告)号:US11047490B2

    公开(公告)日:2021-06-29

    申请号:US16097995

    申请日:2017-08-17

    发明人: Chokuto Kou

    摘要: A diaphragm valve and a flow rate control device for a semiconductor manufacturing apparatus are configured so as to allow an increase of a valve flow rate while avoiding an increase in size of the valve. The diaphragm valve includes a diaphragm with an outer periphery being pressed and a valve seat part in a valve chamber of a body having an inflow path and an outflow path, with the diaphragm being configured to open and close the valve chamber by an ascending/descending motion of a stem. The diaphragm has a substantially-flat cross sectional form having a substantially-planar center region and a boundary region. The boundary region is on an outer peripheral side of the center region and has a radius of curvature smaller than that of the center region, and the boundary region is positioned near an outer peripheral side of the valve seat part.

    PRELOADED PIEZO ACTUATOR AND GAS VALVE EMPLOYING THE ACTUATOR

    公开(公告)号:US20210010608A1

    公开(公告)日:2021-01-14

    申请号:US16510671

    申请日:2019-07-12

    发明人: Timothy R. Brown

    IPC分类号: F16K31/00 F16K7/00 F16K27/02

    摘要: A valve arrangement for controlling gas flow. A gas block includes a gas inlet, a gas outlet, and a gas cavity fluidly connecting the gas inlet to the gas outlet. A diaphragm is configured for controlling gas flow between the gas inlet and the gas outlet. An actuator is configured to vary the position of the diaphragm so as to control the gas flow. The actuator comprises a tubular housing; a plunger positioned inside the housing and having an actuating extension extending outside of the housing and coupled to the diaphragm, the plunger configured to be slidable inside the housing; a piezoelectric body positioned inside the plunger; and a pre-loader applying force to the plunger so as to press the plunger against the piezoelectric body.

    Electronic cigarette
    8.
    发明授权

    公开(公告)号:US10674769B2

    公开(公告)日:2020-06-09

    申请号:US15943121

    申请日:2018-04-02

    摘要: An electronic cigarette includes a power supply device, a sensing unit, an atomizer, a liquid storage structure and a fluid transportation device. The atomizer includes an electric heater and a liquid conduit. The liquid conduit has an input port at one end and plural perforations at the other end, and the electric heater is disposed around the liquid conduit. The liquid storage structure includes a passageway and a liquid container. A cigarette liquid is stored in the liquid container. The fluid transportation device includes an input channel and an output channel. The input channel is in communication with the liquid container. The output channel is in communication with the liquid conduit of the atomizer. The cigarette liquid is transferred to the atomizer at a certain amount. Consequently, an atomized vapor is generated.

    Pressure assisted rotary pinch valve

    公开(公告)号:US10378662B2

    公开(公告)日:2019-08-13

    申请号:US15730353

    申请日:2017-10-11

    申请人: John Eric Chapman

    发明人: John Eric Chapman

    摘要: A pinch valve has an upper casing support the entire pinch assembly and the lower casing. In a particular embodiment, a quarter-turn actuator is deployed and the sleeve may be removed without moving the actuator. The body may be open or closed to retain an external air pressure used to help close the sleeve and reduce actuator forces.

    VALVE, GAS CONTROL DEVICE, AND SPHYGMOMANOMETER

    公开(公告)号:US20180368704A1

    公开(公告)日:2018-12-27

    申请号:US16118959

    申请日:2018-08-31

    摘要: A gas control device includes a pump, a valve, a cuff, and a controller. The valve includes a first plate having a first vent hole and a first vent hole, a channel forming plate having an exhaust hole and an exhaust channel, a second plate having a second vent hole, and an edge separation plate. A manchette rubber tube in the cuff is joined to the periphery of the second vent hole in the second plate by an adhesive, and thus the valve is connected to the cuff. The exhaust hole is opened to the atmosphere. The pump includes a pump housing having a discharge hole and a discharge hole. The upper surface of the pump housing is joined to the bottom surface of the edge separation plate.