DIMENSION MEASUREMENT APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS, AND SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM

    公开(公告)号:US20230114432A1

    公开(公告)日:2023-04-13

    申请号:US17432062

    申请日:2020-06-22

    摘要: A dimension measurement apparatus that automatically corrects a deviation of a contour without operator determination. The dimension measurement apparatus includes: a model learning unit that obtains a learning cross-sectional image and learning labels attached to different regions of the learning cross-sectional image and generates a deep learning model for image region division using the learning cross-sectional image and the learning labels; a model estimation unit that applies the model to a newly input target image and labels each independent region; a contour correction unit that detects a contour of each region using the target image and the labels, sets a representative point on the contour of the region, moves each representative point according to a movement rule, and repeats movement of the representative point until contour correction is that measures a dimension of a device complete; and a dimension measurement unit cross-sectional structure using the corrected contour.

    Systems and methods for measuring patterns on a substrate

    公开(公告)号:US11609088B2

    公开(公告)日:2023-03-21

    申请号:US16860943

    申请日:2020-04-28

    申请人: Sangu Chon

    发明人: Sangu Chon

    摘要: Disclosed herein is a method of measuring a pattern on a substrate comprising: preparing a substrate having a relief pattern comprising organic or inorganic material; directing an excitation light to the relief pattern on the substrate to emit a fluorescent light from the relief pattern; detecting an intensity of the fluorescent light emitted from the relief pattern; and determining a volume of the relief pattern on the substrate based on the detected intensity of the fluorescent light.

    Apparatus and method for contactless checking of the dimensions and/or shape of a complex-shaped body

    公开(公告)号:US11609083B2

    公开(公告)日:2023-03-21

    申请号:US17258907

    申请日:2019-07-08

    摘要: Apparatus (1) for checking the dimensions and/or shape of a complex-shaped body (3), comprising a checking support (5) on which the body to be checked is positioned, a robotic system (8) with an optical assembly (17) and a memory unit (19) for storing reference data relating to a reference shape of the body. A processing and control unit (18) controls movements of the optical assembly so as to obtain dimensional values relating to the body at predetermined measuring points, these dimensional values then being compared with the reference data stored in the memory unit. The apparatus further comprises reference elements (35) defined in the checking support in predetermined positions and a distance sensor (17) for acquiring actual positions of said reference elements. Local compensation parameters for correcting positioning errors of the robotic system are calculated for each of the reference elements on the basis of the predetermined positions and the actual positions acquired. A method for checking the dimensions and/or shape of a complex-shaped body by using the above described apparatus includes a calibration phase of the robotic system to calculate the local compensation parameters, a phase for collecting the reference data related to the predetermined measuring points and a dimensional checking phase of the body. The reference data collecting phase and the dimensional checking phase take into consideration the local compensation parameters.

    NON-CONTACT TOOL MEASUREMENT APPARATUS

    公开(公告)号:US20230046452A1

    公开(公告)日:2023-02-16

    申请号:US17975254

    申请日:2022-10-27

    申请人: RENISHAW PLC

    IPC分类号: B23Q17/24 G01B11/02 G01V8/12

    摘要: A non-contact tool measurement apparatus is used in a machine tool environment. The apparatus includes a transmitter including a first aperture and a laser for generating light that is emitted from the transmitter through the first aperture towards a tool-sensing region. A receiver includes an optical detector and is arranged to receive light from the tool-sensing region. A processor analyses the light detected by the optical detector to enable the measurement of tools in the tool-sensing region. The laser is capable of generating light having a wavelength of less than 590 nm thereby enabling the size of the first aperture to be reduced resulting in a reduction in contaminant ingress. In one embodiment, the laser generates blue light.

    TECHNIQUES FOR THREE-DIMENSIONAL ANALYSIS OF SPACES

    公开(公告)号:US20230046365A1

    公开(公告)日:2023-02-16

    申请号:US17886392

    申请日:2022-08-11

    IPC分类号: G06T7/70 G06T17/10 G01B11/02

    摘要: An example method includes receiving a 2D image of a 3D space from an optical camera, identifying, in the 2D image. A virtual image generated by an optical instrument refracting and/or reflecting the light is identified. The example method further includes identifying, in the 2D image, a first object depicting a subject disposed in the 3D space from a first direction extending from the optical camera to the subject and identifying, in the virtual image, a second object depicting the subject disposed in the 3D space from a second direction extending from the optical camera to the subject via the optical instrument, the second direction being different than the first direction. A 3D image depicting the subject based on the first object and the second object is generated. Alternatively, a location of the subject in the 3D space is determined based on the first object and the second object.

    Object recognition device and object recognition method

    公开(公告)号:US11555913B2

    公开(公告)日:2023-01-17

    申请号:US16650686

    申请日:2017-11-13

    发明人: Tomohiro Akiyama

    摘要: In this object recognition device, an association between a first object detection result and a second object detection result is taken in a region excluding an occlusion area. When the first object detection result and the second object detection result are determined to be detection results for an identical object, a recognition result of the surrounding object is calculated from the first object detection result and the second object detection result. Thus, occurrences of erroneous recognition of an object can be decreased as compared to a conventional object recognition device of a vehicle.

    Self-mixing interference device for sensing applications

    公开(公告)号:US11549799B2

    公开(公告)日:2023-01-10

    申请号:US16913645

    申请日:2020-06-26

    申请人: Apple Inc.

    摘要: Disclosed herein are self-mixing interferometry (SMI) sensors, such as may include vertical cavity surface emitting laser (VCSEL) diodes and resonance cavity photodetectors (RCPDs). Structures for the VCSEL diodes and RCPDs are disclosed. In some embodiments, a VCSEL diode and an RCPD are laterally adjacent and formed from a common set of semiconductor layers epitaxially formed on a common substrate. In some embodiments, a first and a second VCSEL diode are laterally adjacent and formed from a common set of semiconductor layers epitaxially formed on a common substrate, and an RCPD is formed on the second VCSEL diode. In some embodiments, a VCSEL diode may include two quantum well layers, with a tunnel junction layer between them. In some embodiments, an RCPD may be vertically integrated with a VCSEL diode.

    METHOD FOR DETERMINING FILM THICKNESS, METHOD FOR PRODUCING A FILM AND DEVICE FOR PRODUCING A FILM

    公开(公告)号:US20230003509A1

    公开(公告)日:2023-01-05

    申请号:US17757253

    申请日:2020-12-18

    申请人: Stora Enso OYJ

    摘要: The present document discloses a method of determining thickness of a wet film, in particular of microfibrillated cellulose. The method comprises conveying said film (20) in a wet state on a conveyor (10) having a conveyor width, the wet film having a film width which is less than the conveyor width, providing a laser projection (1511) across a film edge, acquiring a series of images, each depicting an area of the conveyor, wherein the laser projection, a portion of the film and a portion of an exposed conveyor surface are visible, and using at least some of said images to determine at least one of a film thickness and a film thickness distribution across the film width. The document also discloses a method of forming a film, in particular a microfibrillated cellulose film, and a device for producing such film.