Measuring apparatus
    2.
    发明授权

    公开(公告)号:US11879717B2

    公开(公告)日:2024-01-23

    申请号:US17645089

    申请日:2021-12-20

    申请人: DISCO CORPORATION

    IPC分类号: G01B11/28 G01B11/06

    CPC分类号: G01B11/0608

    摘要: A measuring apparatus includes a holding unit and a measuring unit. The measuring unit includes a first optical fiber for transmitting light emitted from a light source, a branching member for branching the light transmitted through the first optical fiber to at least two measuring optical fibers, a plurality of heads including respective beam condensers for converging the light branched by the branching member onto a measurand, a shutter device for shifting timings of application of the light applied from the heads to the measurand, a second optical fiber branched from the branching member and transmitting returning light reflected from the measurand, a spectroscopic unit having a light detector for detecting the returning light, and a controller for controlling the shutter device to control the timings of application of the light applied from the heads to the measurand and controlling the light detector to detect the returning light individually.

    Method for measuring characteristic of thin film

    公开(公告)号:US11835447B1

    公开(公告)日:2023-12-05

    申请号:US18366835

    申请日:2023-08-08

    发明人: Tae Dong Kang

    IPC分类号: G01B11/28 G01N21/21

    摘要: A method for measuring a characteristic of a thin film is disclosed. The method includes a) obtaining a measured spectrum from a target region on the substrate by using a spectroscopic ellipsometer, b) obtaining a physical model capable of obtaining an estimated parameter value related to the characteristic of the thin film through regression analysis of the measured spectrum, c) obtaining a machine learning model capable of obtaining a reference parameter value related to the characteristic of the thin film by using the measured spectrum, and d) obtaining an integrated model which uses an integrated error function capable of considering both of a first error function and a second error function, and obtaining an optimum parameter value through regression analysis of the integrated model.

    Methods and apparatus for using range data to predict object features

    公开(公告)号:US11624606B2

    公开(公告)日:2023-04-11

    申请号:US16796726

    申请日:2020-02-20

    IPC分类号: G01B11/06 G01B11/14 G01B11/28

    摘要: Embodiments relate to predicting height information for an object. First distance data is determined at a first time when an object is at a first position that is only partially within the field-of-view. Second distance data is determined at a second, later time when the object is at a second, different position that is only partially within the field-of-view. A distance measurement model that models a physical parameter of the object within the field-of-view is determined for the object based on the first and second distance data. Third distance data indicative of an estimated distance to the object prior to the object being entirely within the field-of-view of the distance sensing device is determined based on the first distance data, the second distance data, and the distance measurement model. Data indicative of a height of the object is determined based on the third distance data.

    Systems and methods for monitoring one or more characteristics of a substrate

    公开(公告)号:US11474028B2

    公开(公告)日:2022-10-18

    申请号:US17037050

    申请日:2020-09-29

    摘要: A substrate inspection system is provided to monitor characteristics of a substrate, while the substrate is disposed within (or being transferred into/out of) a processing unit of a liquid dispense substrate processing system. The inspection system is integrated within a liquid dispense substrate processing system and includes one or more optical sensors of a reflectometer (such as a spectrometer or laser-based transceiver) configured to obtain spectral data from a substrate. A controller is coupled to receive the spectral data from the optical sensors(s). The one or more optical sensors (or one or more optical fibers coupled to the rest of the optical sensor hardware) are coupled at locations within the substrate processing system. The controller analyzes the spectral data received from the optical sensors(s) to detect characteristic(s) of the substrate including, but not limited to, film thickness (FT), refractive index changes, and associated critical dimension (CD) changes.

    Method to compute density of fractures from image logs

    公开(公告)号:US10947841B2

    公开(公告)日:2021-03-16

    申请号:US15883700

    申请日:2018-01-30

    摘要: A method for performing a formation-related physical action includes: receiving image data of a wall of a borehole penetrating a formation, the image data having image data of fractures intersecting the wall of the borehole; and defining a volume surrounding the borehole. The method also includes determining a surface area of each fracture intersecting the volume at each defined depth in a plurality of depths and calculating a fracture density for each defined depth based on the surface area of each fracture intersecting the volume at each defined depth in a plurality of depths and a size of the volume. The method further includes performing the formation-related physical action based on the fracture density for each defined depth using apparatus configured to perform the formation-related physical action.