公开(公告)号：US07406860B2

公开(公告)日：2008-08-05

申请号：US11413579

申请日：2006-04-28

申请人： Lin Zhou ,  Huiwen Liu ,  Dale Egbert ,  Jonathan A. Nelson ,  Jianxin Zhu

发明人： Lin Zhou ,  Huiwen Liu ,  Dale Egbert ,  Jonathan A. Nelson ,  Jianxin Zhu

IPC分类号： G01B6/28

CPC分类号： G01Q40/00 ,  B82Y35/00 ,  G01Q30/06

摘要： A topographic profile of a structure is generated using atomic force microscopy. The structure is scanned such that an area of interest of the structure is scanned at a higher resolution than portions of the structure outside of the area of interest. An profile of the structure is then generated based on the scan. To correct skew and tilt of the profile, a first feature of the profile is aligned with a first axis of a coordinate system. The profile is then manipulated to align a second feature of the profile with a second axis of the coordinate system.

摘要翻译： 使用原子力显微镜产生结构的形貌。 扫描该结构使得结构的感兴趣区域以比目标区域外的结构的部分更高的分辨率被扫描。 然后基于扫描生成结构的轮廓。 为了校正轮廓的偏斜和倾斜，轮廓的第一特征与坐标系的第一轴对齐。 然后对该轮廓进行操纵以将轮廓的第二特征与坐标系的第二轴对齐。