公开(公告)号：US06254793B1

公开(公告)日：2001-07-03

申请号：US09112770

申请日：1998-07-10

申请人： Kia Silverbrook

发明人： Kia Silverbrook

IPC分类号： G01D1500

CPC分类号： H04N5/2628 ,  B41J2/14427 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2/1648 ,  B41J2/16585 ,  B41J2/17596 ,  B41J2002/041 ,  B41J2002/14346 ,  B82Y30/00 ,  G06K1/121 ,  G06K7/14 ,  G06K7/1417 ,  G06K19/06037 ,  G11C11/56 ,  H04N5/225

摘要： A method of manufacturing a thermally actuated ink jet printhead includes the step of initially providing a wafer having a circuitry layer including the electrical circuitry necessary for the operation of a thermal actuator. A first sacrificial layer is deposited on the wafer and is etched. A Young's modulus layer is deposited to form a first layer of a thermal actuator and a portion of a nozzle chamber wall. A conductive heater material layer is provided and has a portion interconnected to the circuitry layer. A second sacrificial layer is deposited and etched in preparation for nozzle chamber walls. A nozzle wall material layer is deposited to form the walls of the nozzle chamber. The nozzle wall material layer is etched to define a nozzle port for the ejection of ink. The sacrificial layers are etched away to release the thermal actuator. The nozzle chamber walls are formed to define a fulcrum for the thermal actuator.

摘要翻译： 制造热致动喷墨打印头的方法包括首先提供具有电路层的晶片的步骤，该电路层包括热致动器的操作所需的电路。 第一牺牲层沉积在晶片上并被蚀刻。 沉积杨氏模量层以形成热致动器的第一层和喷嘴室壁的一部分。 提供导电加热器材料层并且具有与电路层互连的部分。 沉积和蚀刻第二牺牲层以准备喷嘴室壁。 沉积喷嘴壁材料层以形成喷嘴室的壁。 蚀刻喷嘴壁材料层以限定用于喷射墨水的喷嘴端口。 牺牲层被蚀刻掉以释放热致动器。 喷嘴室壁形成为限定热致动器的支点。

公开(公告)号：US06733684B2

公开(公告)日：2004-05-11

申请号：US10052449

申请日：2002-01-23

申请人： Kia Silverbrook

发明人： Kia Silverbrook

IPC分类号： G01D1500

CPC分类号： B41J2/015 ,  B41J2/04 ,  B41J2/14 ,  B41J2/1433 ,  B41J2/14427 ,  B41J2/145 ,  B41J2/16 ,  B41J2/1614 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2/1648 ,  B41J2/16505 ,  B41J29/12 ,  B41J2002/14435 ,  B41J2002/14443 ,  G01D15/00 ,  G11B5/127 ,  Y10T29/49401

摘要： A printhead for an ink jet printer with an array 14 of ink ejection nozzles 22 formed from MEMS techniques. To protect the delicate nozzle structures, a nozzle guard 80 covers the exterior surface of the array 14. A corresponding array of apertures 84 is formed in the guard 80. To attach the guard 80 to the silicon substrate 16 carrying the nozzles 22, alignment formations 148 configured for engagement with complementary formations on a nozzle guard 86. For precise registration between the nozzles 22 and the respective apertures 86 in the guard 80, the alignment formations 148 may be formed using the same etching and deposition techniques used to form the nozzles 22. To protect the fragile nozzle structures 22 from inadvertent contact with the struts 86 during assembly, the nozzles 22 are reinforced by sacrificial material 152 which subsequently removed by an oxygen plasma etch 154.

摘要翻译： 用于具有由MEMS技术形成的喷墨喷嘴22的阵列14的喷墨打印机的打印头。 为了保护精细的喷嘴结构，喷嘴护罩80覆盖阵列14的外表面。在防护罩80中形成相应的孔阵列84.为了将防护罩80附接到承载喷嘴22的硅基板16上， 148，被配置为与喷嘴保护罩86上的互补结构接合。为了精确对准喷嘴22和防护罩80中的各个孔86，可以使用用于形成喷嘴22的相同的蚀刻和沉积技术来形成对准结构148 为了保护脆弱的喷嘴结构22在组装期间不会与支柱86意外接触，喷嘴22被牺牲材料152加强，随后通过氧等离子体蚀刻154去除。

公开(公告)号：US06800902B2

公开(公告)日：2004-10-05

申请号：US10067904

申请日：2002-02-08

申请人： Mineo Shimotsusa

发明人： Mineo Shimotsusa

IPC分类号： G01D1500

CPC分类号： H01L27/0922 ,  B41J2/14072 ,  B41J2202/13 ,  H01L21/823814 ,  H01L27/088

摘要： In a semiconductor device in which a switching element for allowing a current to flow to a load and a circuit for driving the switching element are formed on a common substrate, the switching element is formed of a DMOS transistor, and the circuit for driving the switching element includes an MOS transistor having a characteristic different from that of the DMOS transistor.

摘要翻译： 在公共基板上形成有用于使电流流向负载的开关元件和用于驱动开关元件的电路的半导体装置中，开关元件由DMOS晶体管构成，驱动开关用电路 元件包括具有与DMOS晶体管不同的特性的MOS晶体管。

公开(公告)号：US06787050B2

公开(公告)日：2004-09-07

申请号：US10242993

申请日：2002-09-13

申请人： George Keith Parish

发明人： George Keith Parish

IPC分类号： G01D1500

CPC分类号： B41J2/14072 ,  B41J2/1408 ,  B41J2/1601 ,  B41J2/1628 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1646

摘要： A heater chip for use in an inkjet printer which includes a single conductive layer to provide electrical connectivity between power and ground inputs. Wherein the unique power distribution architecture is possible by the formation of a plurality of ink vias in the heater chip which provides for an increase in the chip surface area available for electrical connectivity.

摘要翻译： 一种用于喷墨打印机的加热器芯片，其包括单个导电层以提供电力和地面输入之间的电连接。 其中通过在加热器芯片中形成多个墨通孔可以实现独特的配电架构，其提供可用于电连接的芯片表面积的增加。

公开(公告)号：US06767473B2

公开(公告)日：2004-07-27

申请号：US10088685

申请日：2002-03-21

申请人： Hiroyuki Fujita ,  Yoshio Mita ,  Ryoichi Ohigashi ,  Katsunori Tsuchiya

发明人： Hiroyuki Fujita ,  Yoshio Mita ,  Ryoichi Ohigashi ,  Katsunori Tsuchiya

IPC分类号： G01D1500

CPC分类号： B05C5/027 ,  B05C11/1034 ,  B41J2/02 ,  H01L51/0005 ,  Y10T29/49401

摘要： There are provided an apparatus for fine pattern formation, which can form a fine pattern with high accuracy by direct writing with ink, a production process of fine nozzles provided in the apparatus for fine pattern formation, and a method for fine pattern formation. Fine pattern formation with high accuracy could have been realized by the apparatus for fine pattern formation, comprising: a silicon substrate; a plurality of fine holes which extend through the silicon substrate from the surface of the silicon substrate to the back surface of the silicon substrate and have a silicon oxide layer on the wall surface thereof; fine nozzles which are protruded, integrally with the silicon oxide layer, on the back surface side of the silicon substrate from each opening of the fine holes; a silicon nitride layer provided on the surface and side of the silicon substrate; a support member provided on the surface side of the silicon substrate; an ink passage for supplying ink to the opening of each fine hole on the surface side of the silicon substrate; and an ink supplying device connected to the ink passage.

摘要翻译： 提供了一种用于精细图案形成的装置，其可以通过直接书写油墨，高精度地形成精细图案，在精细图案形成装置中提供精细喷嘴的制造工艺，以及精细图案形成方法。 用于精细图案形成的装置可以实现高精度的精细图案形成，包括：硅衬底; 多个细孔，从硅衬底的表面延伸穿过硅衬底到硅衬底的背面，并在其表面上具有氧化硅层; 与所述硅氧化物层一体地突出于所述硅衬底的所述背面侧的细小喷嘴从所述细孔的每个开口排出; 设置在硅衬底的表面和侧面上的氮化硅层; 设置在所述硅衬底的表面侧的支撑构件; 用于向硅衬底的表面侧的每个细孔的开口供墨的墨通道; 以及连接到墨通道的供墨装置。

公开(公告)号：US06780339B2

公开(公告)日：2004-08-24

申请号：US10025363

申请日：2001-12-19

申请人： Constantine N. Anagnostopoulos ,  John A. Lebens ,  Christopher N. Delametter

发明人： Constantine N. Anagnostopoulos ,  John A. Lebens ,  Christopher N. Delametter

IPC分类号： G01D1500

CPC分类号： B41J2/105 ,  B41J2/03 ,  B41J2/09 ,  B41J2002/032 ,  B41J2202/13 ,  B41J2202/16 ,  B41J2202/22

摘要： A continuous ink jet print head is formed using a combination of traditional CMOS technology to form the various controlling electrical circuits on a silicon substrate having insulating layer(s) which provide electrical connections and a MEMS technology for forming nozzle openings. A blocking structure is formed in the insulating layer(s) between a first ink channel formed in the silicon substrate and a second ink channel formed in the insulating layer(s). The blocking structure causes ink to flow around the blocking structure and thereby develop lateral flow components to the liquid entering the second channel so that, for droplets selected for printing, as the stream of droplets emanates from the bore of the nozzle, there is provided a reduced amount of heat needed for operating a heating element adjacent each nozzle opening.

摘要翻译： 使用传统CMOS技术的组合形成连续喷墨打印头，以在具有提供电连接的绝缘层的硅基板上形成各种控制电路，以及用于形成喷嘴开口的MEMS技术。 在形成在硅衬底中的第一油墨通道和形成在绝缘层中的第二油墨通道之间的绝缘层中形成阻挡结构。 阻挡结构使油墨绕阻塞结构流动，从而向进入第二通道的液体形成横向流动分量，使得当液滴从喷嘴的孔发出时，为了选择用于印刷的液滴，提供了一种 在每个喷嘴开口附近操作加热元件所需的减少的热量。

公开(公告)号：US06770211B2

公开(公告)日：2004-08-03

申请号：US10232077

申请日：2002-08-30

申请人： Michael J. DeBar ,  Gilbert A. Hawkins ,  James M. Chwalek

发明人： Michael J. DeBar ,  Gilbert A. Hawkins ,  James M. Chwalek

IPC分类号： G01D1500

CPC分类号： B41J2/16 ,  B41J2/14314 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1642 ,  Y10T29/49401

摘要： A liquid emission device includes a chamber having a nozzle orifice. Separately addressable dual electrodes are positioned on opposite sides of a central electrode. The three electrodes are aligned with the nozzle orifice. A rigid electrically insulating coupler connects the two addressable electrodes. To eject a drop, an electrostatic charge is applied to the addressable electrode nearest to the nozzle orifice, which pulls that electrode away from the orifice, drawing liquid into the expanding chamber. The other addressable electrode moves in conjunction, storing potential energy in the system. Subsequently the addressable electrode nearest to the nozzle is de-energized and the other addressable electrode is energized, causing the other electrode to be pulled toward the central electrode in conjunction with the release of the stored elastic potential energy. This action pressurizes the liquid in the chamber behind the nozzle orifice, causing a drop to be ejected from the nozzle orifice.

摘要翻译： 液体排放装置包括具有喷嘴孔的室。 单独寻址的双电极位于中心电极的相对侧上。 三个电极与喷嘴孔对齐。 刚性电绝缘耦合器连接两个可寻址电极。 为了喷射液滴，静电电荷施加到最接近喷嘴孔的可寻址电极，该电极将该电极拉离孔口，将液体引入扩张室。 其他可寻址电极一起移动，将势能存储在系统中。 随后，最接近喷嘴的可寻址电极被断电，另一个可寻址电极通电，使另一个电极与存储的弹性势能的释放一起被拉向中心电极。 这种作用使喷嘴孔后面的腔中的液体加压，导致从喷嘴口喷出的液滴。

公开(公告)号：US06701562B2

公开(公告)日：2004-03-09

申请号：US10222408

申请日：2002-08-16

申请人： Daniel Burke ,  Emilie Becq-Giraudon

发明人： Daniel Burke ,  Emilie Becq-Giraudon

IPC分类号： G01D1500

CPC分类号： E01D15/08

摘要： A span lock system for a double-leaf drawbridge. A guide housing mounted at the tip of one leaf includes an opening with vertically opposed cushioned shoes slidably supporting an elongate lock bar reciprocative lengthwise in a direction along the length of the drawbridge. A receiver housing mounted at the tip of the other leaf is positioned to interlock with the guide housing and includes a like opening slidably receiving the lock bar between vertically opposed cushioned shoes. A pair of vertical guide columns project from both side of the guide housing opening with the upper and lower edges of the distal sides beveled inwardly, and another pair of vertical guide columns project from both side of the receiver housing opening with the upper and lower edges of the proximal sides beveled outwardly. Within a specified maximum limit of misalignment, the guide and receiver columns interengage causing their openings to closely align and facilitate insertion of the lock bar into the opening of the receiver housing with limited horizontal bending and shear. The distance between the proximal sides of the receiver housing exceeds the distance between the distal sides of the guide housing by an amount corresponding to the specified maximum misalignment for a particular bridge design. The housings are secured to the bridge trusses by vertical columns of bolts and the cushioned shoes are biased by disc springs mounted on guide pins.

摘要翻译： 双叶吊桥的跨度锁系统。 安装在一个叶片的尖端处的引导壳体包括具有垂直相对的缓冲鞋的开口，其可滑动地支撑在沿着吊桥长度的方向上纵向往复运动的细长锁杆。 安装在另一叶片的尖端处的接收器壳体被定位成与引导壳体互锁，并且包括在垂直相对的缓冲鞋之间可滑动地接收锁定杆的类似的开口。 一对垂直引导柱从引导壳体开口的两侧突出，远侧的上边缘和下边缘向内倾斜，另一对垂直引导柱从接收器壳体开口的两侧突出，上边缘和下边缘 的近侧向外倾斜。 在指定的最大不对中极限范围内，引导柱和接收器柱互相联系，使其开口紧密对准，并有助于将锁定杆以有限的水平弯曲和剪切方式插入接收器壳体的开口中。 接收器壳体的近侧之间的距离超过了导向壳体的远侧之间的距离，其量对应于针对特定桥设计的规定的最大不对准。 外壳通过垂直的螺栓柱固定到桥桁架上，并且缓冲的鞋被安装在引导销上的盘形弹簧偏置。

公开(公告)号：US06780340B2

公开(公告)日：2004-08-24

申请号：US10296629

申请日：2002-11-26

申请人： Renato Conta

发明人： Renato Conta

IPC分类号： G01D1500

CPC分类号： B41J2/16 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1646 ,  F02M51/06 ,  F02M51/0603 ,  F02M53/06 ,  F02M61/1853 ,  Y10T29/49401

摘要： A method for manufacturing an ejection head (10) or ejector suitable for ejecting in the form of droplets (16) a liquid (14) conveyed inside the ejection head (10), comprising a step of producing, from a silicon wafer, a nozzle plate (12) having at least one ejection nozzle (13); a step of producing, from another silicon wafer, a substrate (11) having at least one actuator (15) for activating the ejection of the droplets of liquid through the nozzle (13); and a step of joining the nozzle plate (12) and the substrate (11) together to form the ejection head, wherein this joining step comprises the production of a junction (25), made by means of the anodic bonding technology, between the substrate (11) and the nozzle plate (12), in such a way that, in the area of this junction (25), the ejection head (10) does not present structural discontinuities, and also possesses a resistance to chemical corrosion by the liquid (14) contained in the ejection head (10) at least equal to that of the silicon constituting both the substrate (11) and the nozzle plate (12). The method of the invention may be applied for manufacturing an ink jet printhead (110), having one or more nozzles (113a, 113b, etc.), which has the advantage, with respect to the known printheads, of also being suitable for working with special inks characterized by high level chemical aggressiveness. In general, the ejection head of the invention, thanks to its structure which is globally highly robust and also chemically inert in the area of the junction (25), can be used advantageously with various types of liquids, even with marked chemical aggressiveness, in different sectors of the art, for example for ejecting paints on various types of media, generally not paper, in the industrial marking sector; or for ejecting in a controlled way droplets of fuel, such as petrol, in an internal combustion engine.

公开(公告)号：US06521137B2

公开(公告)日：2003-02-18

申请号：US09780395

申请日：2001-02-12

申请人： Masahiko Kubota ,  Masanori Takenouchi ,  Kiyomitsu Kudo ,  Ryoji Inoue

发明人： Masahiko Kubota ,  Masanori Takenouchi ,  Kiyomitsu Kudo ,  Ryoji Inoue

IPC分类号： G01D1500

CPC分类号： B41J2/14048 ,  B41J2/1603 ,  B41J2/1604 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/13 ,  Y10T29/49346

摘要： A first gap formation member and a fixed portion are provided on an element substrate, a movable member is formed on the first gap formation member and the fixing member, and a second gap formation member is formed thereon. The first gap formation member is removed, a wall material is coated and exposed at a pattern mask. The wall material is patterned to form the liquid flow path walls and the liquid supply ports altogether, and removing the second gap formation member, hence making it easier to form the side stopper that supports the movable member stably in a state where the displacement of the movable member is regulated to close the liquid supply port, as well as the minute gap between the movable member and the side stopper in higher precision.

摘要翻译： 第一间隙形成构件和固定部设置在元件基板上，可动构件形成在第一间隙形成构件和固定构件上，并且第二间隙形成构件形成在其上。 去除第一间隙形成构件，将壁材料涂覆并以图案掩模暴露。 图案化的壁材料一起形成液体流动通道壁和液体供应口，并且移除第二间隙形成构件，从而使得更容易形成侧挡块，该侧挡块能够稳定地支撑可动构件， 可动件被调节以更高精度关闭液体供应口以及可动件和侧挡块之间的微小间隙。