Optical device including movable mirror and first light passage

    公开(公告)号:US12031863B2

    公开(公告)日:2024-07-09

    申请号:US16625688

    申请日:2018-07-06

    摘要: An optical device includes: a base which includes a main surface; a movable mirror which includes a mirror surface; a first and a second elastic support portions which support the movable mirror so as to be movable along a first direction perpendicular to the main surface; an actuator which moves the movable mirror; and a first optical function portion which is disposed at one side of the movable mirror in a second direction perpendicular to the first direction. The first elastic support portion includes a pair of first levers extending from the movable mirror toward both sides of the first optical function portion in a third direction perpendicular to the first and the second directions. A length of each of first levers in the second direction is larger than the shortest distance between an outer edge of the mirror surface and an edge of the first optical function portion.

    Optical MEMS based monitoring system

    公开(公告)号:US11999612B2

    公开(公告)日:2024-06-04

    申请号:US17525950

    申请日:2021-11-14

    申请人: Naiqian Han

    发明人: Naiqian Han

    摘要: Provided is an optical micro-electro-mechanical system (MEMS) based monitoring system, comprising: a broadband light source, a tunable optical filter (TOF), an optical etalon, a plurality of optical receivers, a plurality of optical couplers, and a plurality of optical MEM sensors; the TOF is configured to capture a transmission, reflection or interference spectrum of the optical MEMS sensors; wherein the peak or depression wavelength in the transmission, reflection or interference spectrum corresponds to a parameter of the pressure, temperature or stress, and the peak or depression wavelength can be obtained by comparing the spectrum with the periodic spectrum of the optical etalon, the optical etalon has an absolute wavelength mark; and the optical MEMS sensor comprises an optical MEMS resonator. The parameter of the pressure, temperature or stress can be obtained by the peak or depression wavelength in the transmission, the reflection or the interference spectrum of the optical MEMS sensor.

    LASER DEVICE, EVALUATION METHOD FOR LASER LIGHT SPECTRUM, AND ELECTRONIC DEVICE MANUFACTURING METHOD

    公开(公告)号:US20240003743A1

    公开(公告)日:2024-01-04

    申请号:US18467121

    申请日:2023-09-14

    申请人: Gigaphoton Inc.

    IPC分类号: G01J3/45

    CPC分类号: G01J3/45

    摘要: A laser device connectable to an exposure apparatus includes a spectrometer configured to generate a measurement waveform from an interference pattern of laser light output from the laser device; and a processor configured to calculate a first spectral waveform indicating a relationship between a wavelength and a light intensity using the measurement waveform, calculate a representative waveform included in a wavelength range of the first spectral waveform, and calculate an evaluation value of the first spectral waveform using a first integration value obtained by integrating, over the wavelength range, a product of a function of a wavelength deviation from the representative wavelength and the light intensity.

    Light detection device
    9.
    发明授权

    公开(公告)号:US11796391B2

    公开(公告)日:2023-10-24

    申请号:US17634280

    申请日:2020-10-06

    摘要: A light detection device includes: a first support part disposed on a mounting surface of the wiring board; a Fabry-Perot interference filter disposed in a first support region of the first support part; and a temperature detector, wherein the temperature detector is disposed on the mounting surface such that at least a part of the temperature detector overlaps a part of the Fabry-Perot interference filter when seen in a first direction perpendicular to the mounting surface and such that at least a part of the temperature detector overlaps a part of the first support part when seen in a second direction in which the first support part and the light detector are aligned with each other, and wherein a first distance between the temperature detector and the first support part in the second direction is smaller than a first width of the first support region in the second direction.