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公开(公告)号：US20230136163A1
公开(公告)日：2023-05-04
申请号：US17975691
申请日：2022-10-28
发明人： Satoru TANAKA
IPC分类号： G01P15/125 , G01P15/135 , G01P15/18
摘要： A physical quantity sensor includes first and second fixed electrode sections on a substrate, a first movable electrode section having a movable electrode opposite a fixed electrode of the first fixed electrode section, a second movable electrode section having a movable electrode opposite a fixed electrode of the second fixed electrode section, first and second fixed sections fixed to the substrate, a first support beam having one end coupled to the first fixed section, a first coupling section coupling the other end of the first support beam and the first movable electrode section, a second support beam having one end coupled to the second fixed section, and a second coupling section coupling the other end of the second support beam and the second movable electrode section. The first movable electrode section, the second fixed section, the first fixed section, and the second movable electrode section are disposed side by side.
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公开(公告)号：US20230128205A1
公开(公告)日：2023-04-27
申请号：US17509247
申请日：2021-10-25
发明人： Marco GARBARINO , Davy CHOI , Francesco RIZZINI , Yamu HU
IPC分类号： G01P21/00 , G01P1/00 , G01P15/125
摘要： A microelectromechanical system (MEMS) accelerometer sensor has a mobile mass and a sensing capacitor. To self-test the sensor, a test signal having a variably controlled excitation voltage and a fixed pulse width is applied to the sensing capacitor. The leading and trailing edges of the test signal are aligned to coincide with reset phases of a sensing circuit coupled to the sensing capacitor. The variably controlled excitation voltage of the test signal is configured to cause an electrostatic force which produces a desired physical displacement of the mobile mass. During a read phase of the sensing circuit, a variation in capacitance of sensing capacitor due to the actual physical displacement of the mobile mass is sensed for comparison to the desired physical displacement.
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公开(公告)号：US20230083632A1
公开(公告)日：2023-03-16
申请号：US18056203
申请日：2022-11-16
IPC分类号： G01P15/03 , B81B3/00 , G01P15/08 , G01P15/125 , G01P15/18
摘要： A MEMS inertial sensor includes a supporting structure and an inertial structure. The inertial structure includes at least one inertial mass, an elastic structure, and a stopper structure. The elastic structure is mechanically coupled to the inertial mass and to the supporting structure so as to enable a movement of the inertial mass in a direction parallel to a first direction, when the supporting structure is subjected to an acceleration parallel to the first direction. The stopper structure is fixed with respect to the supporting structure and includes at least one primary stopper element and one secondary stopper element. If the acceleration exceeds a first threshold value, the inertial mass abuts against the primary stopper element and subsequently rotates about an axis of rotation defined by the primary stopper element. If the acceleration exceeds a second threshold value, rotation of the inertial mass terminates when the inertial mass abuts against the secondary stopper element.
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4.发明授权公开(公告)号：US11603310B2
公开(公告)日：2023-03-14
申请号：US16736485
申请日：2020-01-07
IPC分类号： B81B7/00 , G01P15/02 , G01P15/08 , G01P15/125 , G01C19/5712
摘要： A MEMS device with teeter-totter structure includes a mobile mass having an area in a plane and a thickness in a direction perpendicular to the plane. The mobile mass is tiltable about a rotation axis extending parallel to the plane and formed by a first and by a second half-masses arranged on opposite sides of the rotation axis. The first and the second masses have a first and a second centroid, respectively, arranged at a first and a second distance b1, b2, respectively, from the rotation axis. First through openings are formed in the first half-mass and, together with the first half-mass, have a first total perimeter p1 in the plane. Second through openings are formed in the second half-mass and, together with the second half-mass, have a second total perimeter p2 in the plane, where the first and the second perimeters p1, p2 satisfy the equation: p1×b1=p2×b2.
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公开(公告)号：US20230028797A1
公开(公告)日：2023-01-26
申请号：US17866378
申请日：2022-07-15
IPC分类号： G01P15/125 , G01P1/00
摘要： A closed-loop microelectromechanical accelerometer includes a substrate of semiconductor material, an out-of-plane sensing mass and feedback electrodes. The out-of-plane sensing mass, of semiconductor material, has a first side facing the supporting body and a second side opposite to the first side. The out-of-plane sensing mass is also connected to the supporting body to oscillate around a non-barycentric fulcrum axis parallel to the first side and to the second side and perpendicular to an out-of-plane sensing axis. The feedback electrodes are capacitively coupled to the sensing mass and are configured to apply opposite electrostatic forces to the sensing mass.
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公开(公告)号：US20230026178A1
公开(公告)日：2023-01-26
申请号：US17785615
申请日：2020-12-10
发明人： Philippe ULLAH , Vincent RAGOT , Nicolas BIGOURIE
IPC分类号： G01P15/125 , G01P15/13
摘要： An accelerometer sensor includes a casing, a pendulum fixed to the casing, a movable electrode carried by the pendulum and connected to a detection circuit, a first electrode and a second electrode rigidly attached to the casing to form, with the moving electrode, two capacitors of variable capacitance depending on a distance between the electrodes. The accelerometer sensor further includes a control unit that carries out detection operations to measure the variable capacitances of the capacitors. The control unit also performs a control operation of the movable electrode depending on the capacitances measured by applying a logic signal for controlling a switch for selective connection of the fixed electrodes to an excitation circuit delivering a control signal to the fixed electrodes in order to keep the pendulum in a predetermined position.
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公开(公告)号：US20220413003A1
公开(公告)日：2022-12-29
申请号：US17894077
申请日：2022-08-23
申请人： INVENSENSE, INC.
发明人： Joseph Seeger , Pradeep Shettigar
IPC分类号： G01P1/00 , G01P15/00 , H03F3/45 , G01P15/125
摘要： Reducing a sensitivity of an electromechanical sensor is presented herein. The electromechanical sensor comprises a sensitivity with respect to a variation of a mechanical-to-electrical gain of a sense element of the electromechanical sensor; and a voltage-to-voltage converter component that minimizes the sensitivity by coupling, via a defined feedback capacitance, a positive feedback voltage to a sense electrode of the sense element—the sense element electrically coupled to an input of the voltage-to-voltage converter component. In one example, the voltage-to-voltage converter component minimizes the sensitivity by maintaining, via the defined feedback capacitance, a constant charge at the sense electrode. In another example, the electromechanical sensor comprises a capacitive sense element comprising a first node comprising the sense electrode. Further, a bias voltage component can apply a bias voltage to a second node of the electromechanical sensor. In yet another example, the electromechanical sensor comprises a piezoelectric sense element.
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公开(公告)号：US20220390483A1
公开(公告)日：2022-12-08
申请号：US17342484
申请日：2021-06-08
申请人： Analog Devices, Inc.
发明人： Jianglong Zhang , Xin Zhang
IPC分类号： G01P15/125 , G01P15/18 , B81B3/00
摘要： Disclosed herein are aspects of a multiple-mass, multi-axis microelectromechanical systems (MEMS) accelerometer sensor device with a fully differential sensing design that applies differential drive signals to movable proof masses and senses differential motion signals at sense fingers coupled to a substrate. In some embodiments, capacitance signals from different sense fingers are combined together at a sensing signal node disposed on the substrate supporting the proof masses. In some embodiments, a split shield may be provided, with a first shield underneath a proof mass coupled to the same drive signal applied to the proof mass and a second shield electrically isolated from the first shield provided underneath the sense fingers and biased with a constant voltage to provide shielding for the sense fingers.
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公开(公告)号：US20220326275A1
公开(公告)日：2022-10-13
申请号：US17851292
申请日：2022-06-28
发明人： Thoralf KAUTZSCH , Steffen BIESELT , Heiko FROEHLICH , Andre ROETH , Maik STEGEMANN , Mirko VOGT , Bernhard WINKLER
IPC分类号： G01P15/125 , G01P15/08 , H01L21/02 , H01L21/768 , B81C1/00
摘要： A capacitive microelectromechanical device is provided. The capacitive microelectromechanical device includes a semiconductor substrate, a support structure, an electrode element, a spring element, and a seismic mass. The support structure, for example, a pole, suspension or a post, is fixedly connected to the semiconductor substrate, which may comprise silicon. The electrode element is fixedly connected to the support structure. Moreover, the seismic mass is connected over the spring element to the support structure so that the seismic mass is displaceable, deflectable or movable with respect to the electrode element. Moreover, the seismic mass and the electrode element form a capacitor having a capacitance which depends on a displacement between the seismic mass and the electrode element.
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公开(公告)号：US11435377B2
公开(公告)日：2022-09-06
申请号：US17233601
申请日：2021-04-19
发明人： Kazuyuki Nagata
IPC分类号： G01P15/125 , G01P15/18 , G01P15/08 , G01P21/00
摘要： The inertial sensor includes a substrate, stationary electrodes provided to the substrate, an element section including a movable body which is displaceable with respect to the stationary electrodes, and which has electrodes in a first portion and a second portion opposed to the stationary electrodes, a protrusion which limits a displacement of the movable body, and which has a detection electrode in a portion opposed to the first portion of the movable body, a drive circuit for outputting a drive signal to the element section, a contact detection circuit for outputting a detection signal due to a contact between the electrode in the first portion of the movable body and the detection electrode of the protrusion, a self-diagnostic circuit for outputting a test signal to the element section when receiving the detection signal from the contact detection circuit, and a determination circuit for determining whether or not a level of a signal output by the element section in response to the test signal is out of a threshold value.
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