公开(公告)号：US20120192320A1

公开(公告)日：2012-07-26

申请号：US13388504

申请日：2010-08-06

申请人： Hitoshi Asakawa ,  Takeshi Fukuma

发明人： Hitoshi Asakawa ,  Takeshi Fukuma

IPC分类号： G01Q70/00 ,  H01L41/22 ,  H01L41/053

CPC分类号： G01Q30/14 ,  G01Q60/32 ,  G01Q70/04 ,  Y10T29/42

摘要： Provided is a cantilever excitation device capable of preventing complication of resonance characteristics by a simple configuration. A cantilever excitation device (1) is provided with a cantilever (7), a cantilever holder (3) for holding the cantilever (7), and a piezoelectric vibrator (5) attached to the cantilever holder (3). The cantilever holder (3) includes a holder main part (11) (first part) having an acoustic impedance different from that of the piezoelectric vibrator (5) for transmitting vibration of the piezoelectric vibrator by elastic deformation and an attachment piece (13) (second part) having the acoustic impedance different from that of the first part for forming a material boundary to block propagation of an acoustic wave between the same and the first part. The first and second parts are interposed between the piezoelectric vibrator (5) and the cantilever (7).

摘要翻译： 提供了能够通过简单的结构来防止谐振特性的复杂化的悬臂激励装置。 悬臂激励装置（1）设置有悬臂（7），用于保持悬臂（7）的悬臂支架（3）和附接到悬臂支架（3）的压电振动器（5）。 悬臂支架（3）包括具有与用于通过弹性变形传递压电振动器的振动的压电振动器（5）的声阻抗不同的保持器主体部（11）（第一部分）和安装件（13）（ 第二部分）具有不同于用于形成材料边界的第一部分的声阻抗以阻止声波在其与第一部分之间的传播。 第一和第二部分介于压电振动器（5）和悬臂（7）之间。

公开(公告)号：US20120117696A1

公开(公告)日：2012-05-10

申请号：US12942403

申请日：2010-11-09

申请人： Michael Hatzistergos ,  Christopher M. Molella ,  Paul Ronsheim ,  Matthew F. Stanton

发明人： Michael Hatzistergos ,  Christopher M. Molella ,  Paul Ronsheim ,  Matthew F. Stanton

IPC分类号： G01Q70/00 ,  G01Q70/16

CPC分类号： H01J37/20 ,  B82Y35/00 ,  H01J37/285 ,  H01J2237/201 ,  H01J2237/2855

摘要： An integrated coupon structure for atom probe tomography (APT) analysis includes a base portion and an array of microtip posts protruding from the base portion. Both the base portion and the microtip posts formed from a same metal material, and the microtip posts being shaped at an apex thereof so as to be adapted to receive a sample attached thereto.

摘要翻译： 用于原子探针断层摄影（APT）分析的综合优惠券结构包括基部和从基部突出的微尖柱阵列。 基座部分和微销支柱都由相同的金属材料形成，并且微尖柱在其顶点成形，以适于接收附着于其上的样品。

公开(公告)号：US20100122386A1

公开(公告)日：2010-05-13

申请号：US12532926

申请日：2007-03-30

申请人： Jun Suzuki

发明人： Jun Suzuki

IPC分类号： G01Q70/00

CPC分类号： G11B9/1436 ,  B82Y10/00 ,  G11B9/02

摘要： A driving apparatus (100a) is provided with: a base portion (110); a stage portion (130) on which a driven object (12) is mounted and which can be displaced; an elastic portion (120) which connects the base portion and the stage portion and which has elasticity to displace the stage portion in one direction (Y axis); and a first applying device (141, 142, 22) for intermittently applying an excitation force for displacing the stage portion such that the stage portion is resonated in the one direction at a resonance frequency determined by the stage portion and the elastic portion, the excitation force being caused by a piezoelectric element.

摘要翻译： 驱动装置（100a）具有：基部（110）; 其中安装有被驱动物体（12）并能够移动的台部部分（130） 弹性部（120），其连接所述基部和所述台部，并且具有弹性以使所述台部沿一个方向（Y轴）移位; 以及第一施加装置（141,142,22），用于间歇地施加用于使所述载物台部分移位的激励力，使得所述载物台部分以由所述载物台部分和所述弹性部分确定的共振频率沿所述一个方向共振，所述激发 力由压电元件引起。

公开(公告)号：US06943574B2

公开(公告)日：2005-09-13

申请号：US10942875

申请日：2004-09-17

申请人： Stephan Maximilian Altmann ,  Johann Karl Heinrich Hörber

发明人： Stephan Maximilian Altmann ,  Johann Karl Heinrich Hörber

IPC分类号： G01Q20/02 ,  G01Q70/00 ,  G01R31/02

CPC分类号： G01Q20/02 ,  G01Q40/00 ,  G01Q70/06 ,  Y10S977/863 ,  Y10S977/869 ,  Y10S977/874 ,  Y10S977/875

摘要： The invention provides a local probe measuring device for effecting local measurements referring to a sample, having a first local probe for local measurements with respect to a sample, a second local probe for local measurements with respect to the sample, a measurement condition adjustment arrangement adapted to commonly adjust a first measurement condition of the first local probe with respect to the sample and a second measurement condition of the second local probe with respect to the sample, a detection arrangement having a first detection arrangement associated with the first local probe adapted to independently detect first measurement data referring to local measurements reflected by the first local probe and a second detection arrangement associated with the second local probe adapted to independently detect second measurement data referring to local measurements effected by the second local probe. Further, methods for effecting local measurements and local manipulations using multiple local probes are provided.

摘要翻译： 本发明提供了一种本地探针测量装置，用于参照样品进行局部测量，该样品具有用于相对于样品进行局部测量的第一局部探针，用于相对于样品进行局部测量的第二局部探针，适于 相对于样本共同地调整第一局部探针的第一测量条件和第二局部探针的第二测量条件，具有与第一局部探针相关联的第一检测装置的检测装置适于独立地 检测第一测量数据，参考由第一本地探针反射的局部测量值和与第二局部探针相关联的第二检测装置，其适于独立地检测第二测量数据，参考由第二局部探针实施的局部测量。 此外，提供了使用多个局部探针进行局部测量和局部操纵的方法。

公开(公告)号：US20050103994A1

公开(公告)日：2005-05-19

申请号：US11001038

申请日：2004-12-02

申请人： Toru Murashita

发明人： Toru Murashita

IPC分类号： G01Q60/20 ,  G01Q70/00 ,  G01Q70/10 ,  G01Q70/14 ,  G21K7/00

CPC分类号： G01Q60/20 ,  Y10S977/86

摘要： A conductive transparent probe used in a probe control apparatus for adjusting a distance between the apex of the probe and a sample by vibrating the probe with an vibrator in a direction perpendicular to the axis of the probe is provided. The conductive transparent probe includes: an optical fiber having a taper part at one end; a conductive transparent film formed on the surface of the taper part; a first metal film formed on the surface of the optical fiber other than the taper part; wherein the conductive transparent film and the first metal film are electrically connected, and length and thickness of the first metal film are determined such that the conductive transparent probe vibrates while contacting with the vibrator.

公开(公告)号：US06865927B1

公开(公告)日：2005-03-15

申请号：US10370088

申请日：2003-02-18

申请人： Victor B. Kley

发明人： Victor B. Kley

IPC分类号： G01Q70/00 ,  G01B11/02 ,  G01J1/24

CPC分类号： G01B11/02 ,  Y10T29/49826 ,  Y10T29/49901 ,  Y10T29/53078 ,  Y10T29/53996

摘要： A micro-object having a desired sharp point or edge may be optically tested during fabrication. This is accomplished by applying a known force to the workpiece against an optically opaque layer disposed on a transparent substrate, passing light down the workpiece toward the opaque layer, and determining whether the shaped portion of the workpiece has sufficiently penetrated the opaque layer so that light passed through the workpiece can be detected on the remote side of the transparent substrate. If the light is not detected, the shaped portion of the workpiece is considered to be insufficiently sharp, and the workpiece can be subjected to further shaping operations. In another arrangement, after the force is applied to cause penetration of the opaque layer by the shaped portion of the workpiece, the substrate and the workpiece are moved laterally with respect to one another so as to form a scratch on the opaque layer. The workpiece can be removed from the vicinity of the opaque layer and the amount of light transmitted through the scratch can be measured. If the amount of light is sufficient, the shaped portion of the workpiece is considered to be sufficiently sharp.

摘要翻译： 具有期望的尖点或边缘的微物体可以在制造期间进行光学测试。 这是通过将已知的力施加到工件上而不是设置在透明基板上的光学不透明层，使工件朝向不透明层通过光，并且确定工件的成形部分是否已经充分地穿透不透明层，使得光 通过工件可以在透明基板的远端检测。 如果没有检测到光，则认为工件的成形部分不够锋利，并且可以对工件进行进一步的成型操作。 在另一种布置中，在施加力以引起不透明层通过工件的成形部分的穿透之后，基板和工件相对于彼此横向移动，以在不透明层上形成划痕。 可以从不透明层的附近去除工件，并且可以测量透过划痕的光量。 如果光量足够，则认为工件的成形部分足够锋利。

公开(公告)号：US5844803A

公开(公告)日：1998-12-01

申请号：US801565

申请日：1997-02-17

申请人： Raymond J. Beffa

发明人： Raymond J. Beffa

IPC分类号： G01Q30/04 ,  G01Q70/00 ,  G01Q90/00 ,  G01R31/319 ,  G06F11/00 ,  G06F19/00 ,  G06G7/64

CPC分类号： G01R31/2894 ,  G01R31/31718 ,  G01R31/319 ,  H01L22/20 ,  G06F11/006 ,  H01L21/67271 ,  H01L22/14 ,  H01L2223/5444

摘要： A method for sorting integrated circuit (IC) devices of the type having a fuse identification (ID) into those devices requiring enhanced reliability testing and those requiring standard testing includes storing fabrication deviation data, probe data, and test data in association with the fuse ID of each of the devices indicating each of the devices requires either enhanced reliability testing or standard testing. The fuse ID of each of the devices is then automatically read before, during, or after standard testing of the devices. The testing process requirement data stored in association with the fuse ID of each of the devices is then accessed, and the devices are sorted in accordance with the accessed data into those devices requiring enhanced reliability testing and those requiring standard testing. The method thus directs those devices needing enhanced reliability testing to such testing without the need for all devices from the same wafer or wafer lot to proceed through special testing.

公开(公告)号：US5730940A

公开(公告)日：1998-03-24

申请号：US340866

申请日：1994-11-15

申请人： Tohru Nakagawa

发明人： Tohru Nakagawa

IPC分类号： C12M1/34 ,  C12M1/40 ,  C12Q1/68 ,  G01B7/34 ,  G01B21/30 ,  G01N27/416 ,  G01Q60/10 ,  G01Q60/24 ,  G01Q60/38 ,  G01Q60/42 ,  G01Q60/44 ,  G01Q70/00

CPC分类号： G01Q60/60 ,  B82Y35/00 ,  G01Q60/42 ,  B82Y30/00 ,  Y10S977/728 ,  Y10S977/849 ,  Y10S977/852 ,  Y10S977/853 ,  Y10S977/86 ,  Y10S977/877 ,  Y10S977/879 ,  Y10S977/881 ,  Y10S977/924 ,  Y10S977/958

摘要： This invention relates to a scanning probe microscope which examines or processes directly the structure of substance surfaces at the molecular or atomic level, and a method for processing molecules using a scanning probe microscope and a method for detecting DNA base arrangement. A scanning probe microscope has a probe approaching or contacting the substance surface to detect a physical quantity between the substance surface and the probe, wherein the physical quantity is what is interacted or chemically reacted between the substance surface and the molecules or atom groups which act as a sensor and are fixed on the probe, scanning at an atomic level of precision. Therefore, surface structure within a microscopic region can be examined or processed at the molecular or atomic level. A method for detecting DNA base arrangement with any one of three or four kinds of probes fixed with any one of four different kinds of molecules interacting four kinds of bases consisting of DNA, by approaching single stranded DNA fixed on a substrate, measuring the force and scanning by an atomic force microscope at an atomic level of precision.

摘要翻译： 本发明涉及一种扫描探针显微镜，该扫描探针显微镜直接检查分子或原子水平的物质表面的结构，以及使用扫描探针显微镜处理分子的方法和检测DNA碱基排列的方法。 扫描探针显微镜具有接近或接触物质表面的探针以检测物质表面和探针之间的物理量，其中物理量是物质表面与作为的物质表面和分子或原子团之间的相互作用或化学反应的物质 传感器并固定在探头上，以原子级精度扫描。 因此，微观区域内的表面结构可以在分子或原子水平进行检查或处理。 用四种不同种类的分子中的任何一种分离的任何一种探针中的任何一种探测DNA的检测方法，其通过接近固定在基底上的单链DNA，测量力和与 用原子力显微镜以原子精度扫描。

公开(公告)号：US5698071A

公开(公告)日：1997-12-16

申请号：US636143

申请日：1996-04-22

申请人： Hideaki Kawamoto

发明人： Hideaki Kawamoto

IPC分类号： C23F4/00 ,  G01Q30/16 ,  G01Q70/00 ,  G03F7/42 ,  H01L21/02 ,  H01L21/027 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/311 ,  H01L21/3205 ,  H01L21/3213 ,  H01L21/00

CPC分类号： H01L21/02071 ,  G03F7/427 ,  H01L21/31138

摘要： A wafer (11) is conveyed in a vacuum from an Al etching chamber after the Al etching and is fed into an ashing chamber (15) without coming into contact with the atmosphere. After the wafer (11) was conveyed, CH.sub.3 OH gas of 200 sccm is first introduced by a valve (30a) and a pressure is adjusted to 1.2 Torr. Subsequently, a microwave current of 450 mA is supplied, thereby forming a plasma. The wafer (11) is processed by a down-flow system of a CH.sub.3 OH plasma. The supply of the CH.sub.3 OH gas is stopped by closing the valve (30a). Next, oxygen gas of 400 sccm is introduced by opening a valve (30b). A microwave current of 450 mA is supplied at a pressure of 1.2 Torr, thereby forming a plasma. A resist on the wafer 11 is ashed and eliminated by a down-flow process of an oxygen plasma. By those processes, the corrosion prevention and the resist ashing can be perfectly executed.

摘要翻译： 在Al蚀刻之后，晶片（11）在真空中从Al蚀刻室输送，并且进入灰化室（15）而不与大气接触。 在输送晶片（11）之后，首先通过阀（30a）引入200sccm的CH 3 OH气体，并将压力调节至1.2Torr。 随后，提供450mA的微波电流，从而形成等离子体。 晶片（11）由CH3OH等离子体的下流系统处理。 通过关闭阀（30a）来停止供应CH 3 OH气体。 接下来，通过打开阀（30b）引入400sccm的氧气。 在1.2Torr的压力下供给450mA的微波电流，从而形成等离子体。 通过氧等离子体的下流过程，将晶片11上的抗蚀剂灰化并消除。 通过这些工艺，可以完美地执行防腐蚀和抗蚀剂灰化。

公开(公告)号：US5512746A

公开(公告)日：1996-04-30

申请号：US309660

申请日：1994-09-21

申请人： Tsuyoshi Saito

发明人： Tsuyoshi Saito

IPC分类号： G01B15/00 ,  G01Q60/40 ,  G01Q70/00 ,  H01J37/28 ,  H01L21/66 ,  G01N23/225

CPC分类号： G01B15/00 ,  H01J37/28 ,  H01J2237/2814

摘要： A scanning electron microscope scans a sample with an electron beam in a transverse direction, to measure the size of the sample. The microscope has an electron gun for emitting an electron beam, a scan coil and an electron lens for periodically deflecting the electron beam, a detector for detecting a secondary electron signal, a unit for measuring the size of the sample according to the secondary electron signal and displaying the sample, and a probe for catching charged electrons on the sample. This microscope correctly measures the size of a sample that is made of easily-charged material such as photoresist or insulation material.

摘要翻译： 扫描电子显微镜在横向扫描电子束样品，测量样品的大小。 显微镜具有用于发射电子束的电子枪，用于周期性地偏转电子束的扫描线圈和电子透镜，用于检测二次电子信号的检测器，用于根据二次电子信号测量样品的尺寸的单元 并显示样品，以及用于在样品上捕获带电电子的探针。 该显微镜正确地测量由容易充电的材料如光致抗蚀剂或绝缘材料制成的样品的尺寸。