摘要:
Various methods, systems and apparatus are provided for imaging and sensing using interferometry. In one example, a system includes an interferometer; a light source that can provide light to the interferometer at multiple wavelengths (λi); and optical path delay (OPD) modifying optics that can enhance contrast in an interferometer output associated with a sample. The light can be directed to the sample by optics of the interferometer. The interferometer output can be captured by a detector (e.g., a camera) at each of the multiple wavelengths (λi). In another example, an apparatus includes an add-on unit containing OPD that can enhance contrast in an interferometer output associated with a sample illuminated by light at a defined wavelength (λi). A detector can be attached to the add-on unit to record the interferometer output at the defined wavelength (λi).
摘要:
A measurement apparatus is configured to measure a position of an object based on a first phase signal and a second phase signal whose phases are different from each other and includes a compensator configured to compensate for a fluctuation in a phase difference between the first phase signal and the second phase signal based on a frequency of at least one of the first phase signal and the second phase signal.
摘要:
A surface wave assisted system having an aperture layer with a surface and an aperture, and a plurality of grooves around the aperture. The plurality of grooves is configured to generate an optical transfer function at the aperture by inducing a surface wave for interfering with transmission of light of a range of spatial frequency.
摘要:
A device for phase detection testing any kind of optical system, in particular an ophthalmic lens, comprises, along an optical path, an emission device which constitutes a light source, a holding station which receives the optical system under test, an array, a receiving device which receives the image observable downstream of the array, and a data processing device which exploits this image by phase detection. Between the light source and the holding station is a separator element which constitutes on the axis of the optical path a semi-reflecting surface. The receiving device is disposed to the side, in line with the separator element. The data processing device includes a ray plotting program and a calibration system allowing for theoretical and manufacturing aberrations due to the separator element.
摘要:
Variable focus optical system in which a light beam is projected through a transparent flat cell of electro-optic material coated on both sides with a layer of transparent conductive material. The layer on one side of the cell is divided into a central disc region and a ring shaped region which surrounds the central region. A lens focuses the light transmitted through the cell at a predetermined distance from the lens. An AC voltage is applied between one of the regions and the layer on the opposite side of the cell to vary the phase of the light passing through that region and focus that portion of the light at a distance which varies periodically with the AC voltage. A reflective surface is positioned at the distance from the lens where the unshifted light is focused, and a detector receives the light reflected from the reflective surface and provides an output signal indicative of the position of the surface.
摘要:
A projection optical apparatus comprises illuminating means providing for an illuminating light beam, a projection optical system including optical elements disposed across the illuminating light beam and having an imaging plane, and detecting mean including temperature sensor means provided on at least one of the optical elements and producing an output corresponding to the temperature of the one optical element.
摘要:
An enhanced single particle interferometric reflectance imaging system includes an illumination source configured to produce illumination light along an illumination path toward a target substrate. The target substrate can be configured to reflect the illuminating light along one or more collection paths toward one or more imaging sensors. The target substrate includes a base substrate having a first reflecting surface and a transparent spacer layer having a first surface in contact with the first reflecting surface and a second reflecting surface on a side opposite to the first surface. The transparent spacer layer has a predefined thickness that is determined as a function of a wavelength of the illuminating light and produces a predefined radiation pattern of optical scattering when nanoparticles are positioned on or near the second reflective surface. In addition, one or more of the collection paths can also include an amplitude mask selected to match the radiation pattern.
摘要:
An achromatic phase-contrast imaging apparatus for examining an object of interest is provided which comprises two different phase gratings which have different pitches. Thus, the imaging apparatus yields phase-contrast information for two different energies. Thus, phase-information over a wider energy band can be used.
摘要:
A lithographic projection apparatus is disclosed in which measures are taken to prevent or reduce the presence of bubbles in liquid through which the projection beam radiates. This may be done, for example, by ensuring that a gap between a substrate and a substrate table is filled with immersion liquid or by causing a localized flow radially outwardly from the optical axis in the vicinity of the edge of the substrate.
摘要:
A method and system for synthesizing controllable light beams includes a spatially modulated light source that generates electromagnetic radiation with a set of replicas of a predetermined symbol, s, positioned at desired positions (xs, ys) in an object plane o(x, y) intersecting, preferably perpendicular to, the direction of propagation of the electromagnetic radiation, and having spatial amplitudes a(x-xs, y-ys), spatial phases φ(x-xs, y-ys), and spatial polarisation vectors p(x-xs, y-ys), a Fourier transforming lens for Fourier transforming the electromagnetic radiation, a first spatial light modulator for phase shifting the transformed electromagnetic radiation with the phase −Φ(u, v) of S*, S* the complex conjugate of the transformed symbol, a Fourier transforming lens for Inverse Fourier transforming the spatially modulated radiation, a set of light beams are formed propagating through the inverse Fourier plane (x′, y′) at desired positions (x′s, y′s), and a controller for controlling the position of a replica of the symbol, for movement of the light beam.