Diffraction based overlay metrology tool and method of diffraction based overlay metrology

    公开(公告)号:US11953450B2

    公开(公告)日:2024-04-09

    申请号:US18056073

    申请日:2022-11-16

    IPC分类号: G01N21/956 G03F7/00 G06F7/20

    摘要: Systems, methods, and apparatus are provided for determining overlay of a pattern on a substrate with a mask pattern defined in a resist layer on top of the pattern on the substrate. A first grating is provided under a second grating, each having substantially identical pitch to the other, together forming a composite grating. A first illumination beam is provided under an angle of incidence along a first horizontal direction. The intensity of a diffracted beam from the composite grating is measured. A second illumination beam is provided under the angle of incidence along a second horizontal direction. The second horizontal direction is opposite to the first horizontal direction. The intensity of the diffracted beam from the composite grating is measured. The difference between the diffracted beam from the first illumination beam and the diffracted beam from the second illumination beam, linearly scaled, results in the overlay error.

    Method for classifying an unmanaged dataset

    公开(公告)号:US11734233B2

    公开(公告)日:2023-08-22

    申请号:US17455068

    申请日:2021-11-16

    摘要: A computer implemented method for classifying at least one source dataset of a computer system. The method may include providing a plurality of associated reference tables organized and associated in accordance with a reference storage model in the computer system. The method may also include calculating, by a data classifier application of the computer system, a first similarity score between the source dataset and a first reference table of the reference tables based on common attributes in the source dataset and a join of the first reference table with at least one further reference table of the reference tables having a relationship with the first reference table. The method may further include classifying, by the data classifier application, the source dataset by determining using at least the calculated first similarity score whether the source dataset is organized as the first reference table in accordance to the reference storage model.

    Methods and systems for identifying a level of similarity between a plurality of data representations

    公开(公告)号:US11714602B2

    公开(公告)日:2023-08-01

    申请号:US17539264

    申请日:2021-12-01

    申请人: cortical.io AG

    摘要: A reference map generator clusters, into a semantic map, a set of data documents selected according to at least one criterion and associated with a medical diagnosis. A parser generates an enumeration of measurements occurring in the set of data documents. A representation generator generates for each measurement in the enumeration, a sparse distributed representation (SDR). The method includes storing, by a processor on a second computing device, in each of a plurality of memory cells on the second computing device, one of the generated SDRs. A diagnosis support module receives a document comprising a plurality of measurements. The representation generator generates a compound SDR for the document. Each of the plurality of bitwise comparison circuits determine a level of overlap between the compound SDR and the stored generated SDR. The diagnosis support module provides an identification of the medical diagnosis associated with a stored SDR.

    Fuzzy string alignment
    4.
    发明授权

    公开(公告)号:US11615243B1

    公开(公告)日:2023-03-28

    申请号:US17827633

    申请日:2022-05-27

    申请人: iNTUIT iNC.

    发明人: Michael Livshits

    摘要: A method includes computing multiple term distances between pairs of multiple first string terms in a first string and multiple second string terms in a second string, generating a cost matrix based on the term distances, and selecting a set of candidate alignments based on the cost matrix. The method further includes generating multiple alignment scores for the set of candidate alignments, and selecting, from the set of candidate alignments, an alignment between the first string and the second string based on the alignment scores. The method further includes outputting a match identifier based on the alignment.

    Sorting networks using unary processing

    公开(公告)号:US11475288B2

    公开(公告)日:2022-10-18

    申请号:US16674488

    申请日:2019-11-05

    摘要: Various implementations of sorting networks are described that utilize time-encoded data signals having encoded values. In some examples, an electrical circuit device includes a sorting network configured to receive a plurality of time-encoded signals. Each time-encoded signal of the plurality of time-encoded signals encodes a data value based on a duty cycle of the respective time-encoded signal or based on a proportion of data bits in the respective time-encoded signal that are high relative to the total data bits in the respective time-encoded signal. The sorting network is also configured to sort the plurality of time-encoded signals based on the encoded data values of the plurality of time-encoded signals.

    Auto tuning data anomaly detection

    公开(公告)号:US11442941B2

    公开(公告)日:2022-09-13

    申请号:US16709715

    申请日:2019-12-10

    申请人: AirWatch LLC

    摘要: Automatic tuning anomaly detection is described. The context metric keys are established during a training phase based on the surrounding context of data received from devices over time. Anomaly and tuning windows are also established for metric ranges of the context metric keys. After the training phase, incoming data is correlated against the keys to identify sets of the data associated with certain context metric keys. For any given context metric key, metric data values in the associated set of data fall either within or outside the metric range of the context metric key. If they fall outside the range for longer than the anomaly window, an alarm is raised. If they fall outside the range for longer than the tuning window, boundaries for the metric range are updated. Additionally, the contextual parameters of the context metric keys are also updated over time, as new data contexts appear.

    File activity feed for smartly grouping activities into distinct modules

    公开(公告)号:US10649623B2

    公开(公告)日:2020-05-12

    申请号:US14942525

    申请日:2015-11-16

    摘要: Aspects of the present disclosure relate to systems and methods for creating a file activity feed for display on a user interface of a client computing device. In one aspect, data comprising a plurality of activities associated with a file may be obtained. Two or more activities from the plurality of activities may be grouped into a single module of work for display within the file activity feed. The file activity feed may be displayed on the user interface of the client computing device. In some cases, the file activity feed includes one or more file activity elements including at least the single module of work. In some cases, the file activity feed includes a filter icon and a query feature. The filter icon may provide one or more filter preferences for filtering the file activity feed. The query feature may facilitate querying the file activity feed.

    Switching matrix representation for an incremental algorithm computing connected components

    公开(公告)号:US10558429B2

    公开(公告)日:2020-02-11

    申请号:US15245463

    申请日:2016-08-24

    摘要: Techniques for determining connected components of a graph via incremental graph analysis algorithms are provided. In one example, a computer-implemented method comprises analyzing, by a system operatively coupled to a processor, a first differential value representing an initial incremental difference of elements between selected initial elements of an initial vector and selected input elements of an input vector associated with a graph. The method further comprises recurringly analyzing, by the system, a second differential value representing a subsequent incremental difference of elements between selected updated elements of an updated initial vector and selected additional elements of another input vector associated with the graph until the second differential value is zero.

    Compiled file normalization
    9.
    发明授权

    公开(公告)号:US10409572B2

    公开(公告)日:2019-09-10

    申请号:US14194116

    申请日:2014-02-28

    申请人: Red Hat, Inc.

    摘要: A method performed by a computing system includes, with the computing system, extracting non-compiler specific components from a first compiled file, the first compiled file being compiled from a piece of source code, and with the computing system, rearranging the extracted non-compiler specific components into a normalized order, the normalized order being used to consistently arrange a plurality of compiled files.

    System and method for clustering data

    公开(公告)号:US10282168B2

    公开(公告)日:2019-05-07

    申请号:US15058506

    申请日:2016-03-02

    申请人: SLYCE CANADA INC.

    IPC分类号: G06F17/30 G06F7/20 G06K9/62

    摘要: A system for clustering data comprises a database for storing a plurality of data items, a clustering unit comprising components operable to receive and cluster the plurality of data items, and output clustered data items. A method of clustering data comprises receiving a plurality of data items from a database; computing distances between each pair of data items in the plurality of data items; until a stopping criterion is reached, identifying key elements, merging data items not identified as key elements with the nearest key elements, updating the computed distances; once the stopping criterion is reached, outputting cluster identities of the plurality of data items.