公开(公告)号：US06466123B1

公开(公告)日：2002-10-15

申请号：US09196130

申请日：1998-11-20

申请人： Kaoru Kuzuoka ,  Kozo Takamura

发明人： Kaoru Kuzuoka ,  Kozo Takamura

IPC分类号： H01C304

CPC分类号： H01C1/028 ,  G01K7/22 ,  Y10T29/49082

摘要： A temperature sensor has a sensing element (13) consisting of a thermistor (11) and leads (12) and a sheath pin (15) containing core wires (14), to accurately detect temperature. A method of manufacturing such a temperature sensor includes the steps of connecting the leads to the core wires, arranging an insulator (130) around the sensing element, filling the insulator with an inorganic adhesive (135) to fix the sensing element in the insulator, arranging a metal cover (16) around the insulator, and joining an end of the metal cover to an end of the sheath pin.

摘要翻译： 温度传感器具有由热敏电阻（11）和引线（12）组成的检测元件（13）和包含芯线（14）的护套引脚（15），以精确地检测温度。 制造这种温度传感器的方法包括以下步骤：将引线连接到芯线，在感测元件周围布置绝缘体（130），用无机粘合剂（135）填充绝缘体以将感测元件固定在绝缘体中， 在绝缘体周围布置金属盖（16），并且将金属盖的端部接合到护套销的端部。

公开(公告)号：US06437680B1

公开(公告)日：2002-08-20

申请号：US09588482

申请日：2000-06-06

申请人： Karlheinz Wienand ,  Gerhard Damaschke

发明人： Karlheinz Wienand ,  Gerhard Damaschke

IPC分类号： H01C304

CPC分类号： H01C17/28 ,  G01K7/16 ,  Y10T29/49082

摘要： For manufacturing of sensors, especially temperature sensors, respectively two connection bridges spaced in the grid of a continuous carrier strip with contact pads for later electrical and mechanical connection with respectively one sensor element in the continuous carrier strip are at least partially injection molded around with plastic, such that on the connection bridges at least two plastic bodies arise arranged at a distance to each other. Between plastic bodies of respectively adjacent connection bridges, spacer elements made of plastic are formed in the same injection operation, while contact pads and ends of the connection bridges remain free of plastic. In connection with the injection operation, the edges of the carrier strip are separated from the connection bridges by punching. On the respective connection areas of two connection bridges, held together in pairs by means of plastic bodies, the actual sensor elements are installed and connected electrically and mechanically firmly with the contact pads by soldering. Subsequently, there follows a separation of sensors by detaching the spacer elements from the respective plastic bodies. A comparatively simple manufacturing process, as well as a function test, in the form of a multi-unit preform proves to be advantageous. Furthermore, by bending along the connection bridges, an adaptation to a customer-specific housing shape can be brought about.

摘要翻译： 为了制造传感器，特别是温度传感器，分别在具有接触垫的连续载体带格栅中间隔开的两个连接桥，用于在连续载带中分别具有一个传感器元件的电和机械连接，至少部分地用塑料 ，使得在连接桥上，至少两个塑料体相互间隔一定距离地排列。 在分别相邻的连接桥的塑料体之间，由塑料制成的间隔元件在相同的注入操作中形成，而接触垫和连接桥的端部保持不含塑料。 结合注射操作，载体带的边缘通过冲压与连接桥分离。 在通过塑料体成对保持在一起的两个连接桥的相应连接区域上，实际的传感器元件通过焊接与接触垫电连接并机械地牢固地连接。 随后，通过将间隔元件与相应的塑料体分开来进行传感器的分离。 多单元预制件形式的相对简单的制造工艺以及功能试验证明是有利的。 此外，通过沿着连接桥弯曲，可以实现对客户特定外壳形状的适应。

公开(公告)号：US06198377B1

公开(公告)日：2001-03-06

申请号：US08765961

申请日：1997-01-10

申请人： Tadataka Yamazaki ,  Masahiko Ito ,  Kazuyuki Kohara

发明人： Tadataka Yamazaki ,  Masahiko Ito ,  Kazuyuki Kohara

IPC分类号： H01C304

CPC分类号： G01K7/22 ,  H01C7/049

摘要： A plastic thermistor comprising a polyamide composition which comprises 100 wt. parts of a polyamide and 5.3 to 30 wt. parts of zinc iodide, or a polyamide composition which comprises a polyamide, an iodine-containing compound, and a metal oxide such as zinc oxide. Ion carrier properties of a metal iodide greatly increases temperature dependence of impedance, and the metal oxide such as zinc iodide functions as a receptor for iodide ions and prevents the formation of a metal iodide on the surfaces of metal electrodes. Furthermore, a linked cycle can be established that zinc oxide forms zinc iodide and then formed zinc iodide functions to increase the stability of half-wave current passage. Accordingly, the thermal stability of the plastic thermistor is improved for a long time, and the heat resistance stability of temperature sensors or thermosensitive heaters comprising the plastic thermistor is improved greatly.

摘要翻译： 包括聚酰胺组合物的塑料热敏电阻，其包含100重量％ 聚酰胺的一部分和5.3〜30wt。 碘化锌的部分或者包含聚酰胺，含碘化合物和金属氧化物如氧化锌的聚酰胺组合物。金属碘化物的载流子特性大大增加了阻抗的温度依赖性，并且诸如锌的金属氧化物 碘化物作为碘离子的受体发挥作用，防止在金属电极表面形成金属碘化物。 此外，可以确定氧化锌形成碘化锌，然后形成碘化锌的连接循环，以增加半波电流通过的稳定性。 因此，塑料热敏电阻的热稳定性长时间得到改善，并且包括塑料热敏电阻的温度传感器或热敏加热器的耐热稳定性大大提高。

公开(公告)号：US06794981B2

公开(公告)日：2004-09-21

申请号：US10150851

申请日：2002-05-16

申请人： Aravind Padmanabhan ,  Jay G. Schwichtenberg ,  Cleopatra Cabuz ,  Ernest Satren

发明人： Aravind Padmanabhan ,  Jay G. Schwichtenberg ,  Cleopatra Cabuz ,  Ernest Satren

IPC分类号： H01C304

CPC分类号： G01F1/6842 ,  G01F1/6845 ,  G01F5/00 ,  G01N1/2247 ,  G01N25/18 ,  G01N25/488 ,  G01N33/0014 ,  G01N2001/2285

摘要： An integratable fluid flow and property microsensor assembly is configured to be operably embedded in a microfluidic cartridge of the type used in lab-on-a-chip systems. The assembly is a robust package having a microstructure flow sensor contained within a housing in order to achieve a robust sensing device. The cartridge provides a flow path to the assembly, which directs the fluid across the flow sensor and returns the fluid to the cartridge flow path. The flow sensor monitors the controlled flow of fluid and transmits signals indicative of that flow. The assembly structure provides a robust sensor that is operable and accurate in many different applications.

摘要翻译： 可整合的流体流动和性质微传感器组件被配置为可操作地嵌入在芯片实验室系统中使用的类型的微流体盒中。 该组件是具有包含在壳体内的微结构流量传感器的鲁棒封装，以便实现鲁棒的感测装置。 墨盒提供到组件的流动路径，其引导流体穿过流量传感器并将流体返回到墨盒流动路径。 流量传感器监测流体的受控流动并传输指示该流量的信号。 组装结构提供了一个鲁棒的传感器，在许多不同的应用中可操作和准确。

公开(公告)号：US06762672B2

公开(公告)日：2004-07-13

申请号：US10700637

申请日：2003-11-05

申请人： Motohisa Taguchi ,  Masahiro Kawai

发明人： Motohisa Taguchi ,  Masahiro Kawai

IPC分类号： H01C304

CPC分类号： G01K1/16

摘要： A supporting film is formed over an entire front surface of a base material, a heating resistor composed of a platinum film having a predetermined pattern is formed on the supporting film, and a protecting film is formed over an entire surface of the supporting film so as to cover the heating resistor. A heating structure having a diaphragm construction is constructed by forming a cavity under a region where the heating resistor is formed by removing a portion of the base material so as to extend to the supporting film from the rear surface side of the base material. The supporting film and the protecting film are each constituted by a silicon nitride film having an index of refraction of less than 2.25.

公开(公告)号：US06259350B1

公开(公告)日：2001-07-10

申请号：US08784660

申请日：1997-01-21

申请人： Roland Mueller-Fiedler ,  Christoph Treutler ,  Michael Gundlach ,  Manfred Moellendorf ,  Steffen Schmidt ,  Franz Laermer ,  Christoph Kampshoff ,  Klaus Heyers ,  Joerg Buth

发明人： Roland Mueller-Fiedler ,  Christoph Treutler ,  Michael Gundlach ,  Manfred Moellendorf ,  Steffen Schmidt ,  Franz Laermer ,  Christoph Kampshoff ,  Klaus Heyers ,  Joerg Buth

IPC分类号： H01C304

CPC分类号： C04B41/009 ,  C04B41/52 ,  C04B41/89 ,  C04B2111/00844 ,  G01F1/6845 ,  G01K7/18 ,  C04B41/4558 ,  C04B41/5071 ,  C04B41/5122 ,  C04B35/00

摘要： With a sensor and method, it is possible for platinum resistor elements to be used advantageously as heating elements, temperature sensors, printed circuit traces, or as chemically resistant electron beam sensitive layers. To ensure a long-lasting adhesion of the platinum resistance layer to a dielectric substrate, even during exposure to temperatures which are elevated over ambient temperature and under dry and most atmospheric conditions, a thin adhesion layer of platinum silicide, for example, is deposited between the platinum resistance layer and the dielectric substrate. Resistor elements patterned from the platinum layer can advantageously be used in temperature sensors, mass flow sensors, chemical sensors, gas sensors, or humidity sensors.

摘要翻译： 利用传感器和方法，可以将铂电阻元件有利地用作加热元件，温度传感器，印刷电路迹线或化学抗性电子束敏感层。 为了确保铂电阻层与电介质基板的长时间粘附，即使在暴露于环境温度升高的环境温度和干燥和大气环境条件下的温度下，例如，将诸如硅化钛的薄粘附层沉积在 铂电阻层和电介质基板。 从铂层图案化的电阻元件可有利地用于温度传感器，质量流量传感器，化学传感器，气体传感器或湿度传感器。

公开(公告)号：US06819217B2

公开(公告)日：2004-11-16

申请号：US10387016

申请日：2003-03-11

申请人： Karl-Heinz Wienand ,  Thomas Loose

发明人： Karl-Heinz Wienand ,  Thomas Loose

IPC分类号： H01C304

CPC分类号： G01K7/183

摘要： A temperature sensor is provided with a temperature-sensitive element on a surface of a monocrystalline substrate, wherein the temperature-sensitive element is made of a platinum thin-film resistor and is produced as an epitaxial layer. The monocrystalline substrate can be an electrically insulating material, preferably &agr;-Al2O3 or MgO. Alternatively, the substrate may be an electrically conducting material, such as silicon, with an electrically insulating epitaxial layer arranged between the substrate and the platinum thin-film resistor. The platinum thin-film resistor epitaxial layer is preferably deposited by physical vapor deposition (PVD), chemical vapor deposition (CVD), or molecular beam epitaxy (MBE).

摘要翻译： 温度传感器在单晶衬底的表面上设置有温度敏感元件，其中温度敏感元件由铂薄膜电阻器制成并被制造为外延层。 单晶衬底可以是电绝缘材料，优选为α-Al 2 O 3或MgO。 或者，衬底可以是诸如硅的导电材料，其中布置在衬底和铂薄膜电阻器之间的电绝缘外延层。 铂薄膜电阻器外延层优选通过物理气相沉积（PVD），化学气相沉积（CVD）或分子束外延（MBE）沉积。

公开(公告)号：US06744346B1

公开(公告)日：2004-06-01

申请号：US09032184

申请日：1998-02-27

申请人： Salman Akram ,  David R. Hembree

发明人： Salman Akram ,  David R. Hembree

IPC分类号： H01C304

CPC分类号： G01K1/026 ,  H01L22/12 ,  H01L2224/48091 ,  H01L2224/48464 ,  H01L2224/8592 ,  H01L2924/15156 ,  H01L2924/00014

摘要： The present invention includes electronic device workpieces, methods of semiconductor processing and methods of sensing temperature of an electronic device workpiece. In one aspect, the invention provides an electronic device workpiece including: a substrate having a surface; a temperature sensing device borne by the substrate; and an electrical interconnect formed upon the surface of the substrate, the electrical interconnect being electrically coupled with the temperature sensing device. In another aspect, a method of sensing temperature of an electronic device workpiece includes: providing an electronic device workpiece; supporting a temperature sensing device using the electronic device workpiece; providing an electrical interconnect upon a surface of the electronic device workpiece; electrically coupling the electrical interconnect with the temperature sensing device; and sensing temperature of the electronic device workpiece using the temperature sensing device.

公开(公告)号：US06639505B2

公开(公告)日：2003-10-28

申请号：US10104071

申请日：2002-03-25

申请人： Shigeru Murata ,  Atsushi Kurano

发明人： Shigeru Murata ,  Atsushi Kurano

IPC分类号： H01C304

CPC分类号： G01K7/22 ,  H01C1/02 ,  H01C1/028 ,  H01C1/148

摘要： A temperature sensor which features improved response characteristics and in which a thermistor element is contained in a metal enclosure in a state where a pair of electrode wires for taking out signals are connected in an exposed manner at two opposing end surfaces thereof. The temperature sensor comprises a metal enclosure 2, a thermistor element 3 contained in the metal enclosure, and a pair of electrode wires 4 connected to the two opposing end surfaces of the thermistor element in a form being exposed over the thermistor element in the metal enclosure to take out thermistor signals, wherein a distance H between the thermistor element and the metal enclosure is not smaller than 0 but is not larger than 0.3 mm.

公开(公告)号：US06543102B1

公开(公告)日：2003-04-08

申请号：US09647255

申请日：2000-12-13

申请人： Heinrich Zitzmann

发明人： Heinrich Zitzmann

IPC分类号： H01C304

CPC分类号： G01F1/692 ,  G01F1/6845 ,  G01K7/183 ,  H01L2224/73104 ,  Y10T29/49085

摘要： A sensor component comprises a ceramic support (12) with a metal film (14) applied thereto. At least one connecting wire (16) is electrically connected to the metal film (14) in a contact area (18). A fixing glaze (20) is applied to the metal film (14) and the at least one connecting wire (16) in the contact area (18). The ceramic support (12) has at least one recess (24) in the area of the fixing glaze (20).

摘要翻译： 传感器部件包括其上施加有金属膜（14）的陶瓷支撑件（12）。 至少一个连接线（16）在接触区域（18）中与金属膜（14）电连接。 将固定釉（20）施加到接触区域（18）中的金属膜（14）和至少一个连接线（16）。 陶瓷支撑件（12）在固定釉（20）的区域中具有至少一个凹部（24）。