公开(公告)号：US20180197828A1

公开(公告)日：2018-07-12

申请号：US15863133

申请日：2018-01-05

申请人： University of Florida Research Foundation, Incorporated

发明人： Swarup Bhunia ,  Haoting Shen ,  Mark M. Tehranipoor ,  Domenic J. Forte ,  Navid Asadizanjani

IPC分类号： H01L23/00 ,  B81B7/00 ,  H01L23/522 ,  H01L23/525 ,  H01L23/528 ,  H01L23/532 ,  H01H59/00 ,  H01H29/02

CPC分类号： H01L23/573 ,  B81B7/0012 ,  B81B2201/01 ,  B81B2201/014 ,  B81B2201/018 ,  B81B2207/07 ,  H01H29/02 ,  H01H59/0009 ,  H01L23/5228 ,  H01L23/525 ,  H01L23/5252 ,  H01L23/528 ,  H01L23/53238

摘要： A semiconductor device can include a first metal trace, a first via disposed on the first metal trace, a second metal trace disposed on the first via, and an insulator interposed between the first metal trace and the first via. The insulator can be configured to lower an energy barrier or redistribute structure defects or charge carriers, such that the first metal trace and the first via are electrically connected to each other when power is applied. The semiconductor device can further include a dummy via disposed on the first metal trace.

公开(公告)号：US09378907B2

公开(公告)日：2016-06-28

申请号：US13717479

申请日：2012-12-17

申请人： Broadcom Corporation

发明人： Ahmadreza Rofougaran

IPC分类号： H01H29/00 ,  H01H29/02 ,  B81B3/00 ,  H01G5/013 ,  H01H1/00

CPC分类号： H01H29/004 ,  B81B3/0032 ,  B81B2201/018 ,  H01G5/0132 ,  H01H1/0036 ,  H01H2029/008

摘要： A liquid micro-electro-mechanical system (MEMS) component includes a board, a channel frame, a flexible channel side, a liquid droplet, and one or more conductive elements. The channel frame is within the board and mates with the flexible channel side to form a channel within the board. The liquid droplet is contained within the channel. When a pressure is applied to the flexible side, the shape of the liquid droplet is changed with respect to the one or more conductive elements thereby changing an operational characteristic of the liquid MEMS component.

摘要翻译： 液体微电子机械系统（MEMS）部件包括板，通道框架，柔性通道侧，液滴和一个或多个导电元件。 通道框架在板内，并与柔性通道侧配合，以在板内形成通道。 液滴包含在通道内。 当向柔性侧施加压力时，相对于一个或多个导电元件改变液滴的形状，从而改变液体MEMS部件的操作特性。

公开(公告)号：US09251979B2

公开(公告)日：2016-02-02

申请号：US14010945

申请日：2013-08-27

申请人： GLOBALFOUNDRIES INC.

发明人： Qing Cao ,  Kangguo Cheng ,  Zhengwen Li ,  Fei Liu ,  Zhen Zhang

IPC分类号： G01N27/404 ,  H01H29/02 ,  G01N33/00 ,  G01N15/10 ,  G01N27/327 ,  G01N27/447

CPC分类号： H01H29/02 ,  G01N15/1031 ,  G01N27/3278 ,  G01N27/404 ,  G01N27/44795 ,  G01N33/0009 ,  Y10T29/49117

摘要： Electromechanical sensors that employ Janus micro/nano-components and techniques for the fabrication thereof are provided. In one aspect, a method of fabricating an electromechanical sensor includes the following steps. A back gate is formed on a substrate. A gate dielectric is deposited over the back gate. An intermediate layer is formed on the back gate having a micro-fluidic channel formed therein. Top electrodes are formed above the micro-fluidic channel. One or more Janus components are placed in the micro-fluidic channel, wherein each of the Janus components has a first portion having an electrically conductive material and a second portion having an electrically insulating material. The micro-fluidic channel is filled with a fluid. The electrically insulating material has a negative surface charge at a pH of the fluid and an isoelectric point at a pH less than the pH of the fluid.

公开(公告)号：US06946775B2

公开(公告)日：2005-09-20

申请号：US10412916

申请日：2003-04-14

申请人： Arthur Fong ,  Marvin Glenn Wong

发明人： Arthur Fong ,  Marvin Glenn Wong

IPC分类号： G02B26/02 ,  B81B5/00 ,  G02B6/35 ,  H01H19/00 ,  H01H29/02 ,  H01H57/00 ,  H01L41/08

CPC分类号： G02B6/3538 ,  G02B6/3552 ,  G02B6/3578 ,  G02B6/358 ,  H01H2057/006

摘要： A method and structure for an optical switch. A channel is housed within a solid material. Contacts coupled to the channel are further coupled to the solid material, while a plurality of piezoelectric elements are coupled to chamber and further coupled to a slug. Optical waveguides are coupled to the channel. The contacts are coupled to a plurality of liquid metal globules, wherein one or more of the plurality of liquid metal globules are coupled to a slug. One or more piezoelectric elements are actuated, causing the slug to be moved within the channel. The motion of the slug is operable to block or unblock one or more of the plurality of optical waveguides.

摘要翻译： 一种光开关的方法和结构。 通道容纳在固体材料中。 耦合到通道的触点进一步耦合到固体材料，而多个压电元件耦合到腔室并进一步耦合到芯块。 光波导耦合到通道。 触点耦合到多个液体金属球，其中多个液态金属球中的一个或多个耦合到芯块。 一个或多个压电元件被致动，使得插槽在通道内移动。 芯块的运动可操作以阻挡或解除多个光波导中的一个或多个。

公开(公告)号：US3458677A

公开(公告)日：1969-07-29

申请号：US3458677D

申请日：1967-12-11

申请人： GEN ELECTRIC

发明人： LEFTIN JOSEPH P

IPC分类号： B01D19/04 ,  G01C9/18 ,  H01H29/00 ,  H01B1/00 ,  H01H29/02

CPC分类号： B01D19/0409 ,  G01C9/18

公开(公告)号：US20070144881A1

公开(公告)日：2007-06-28

申请号：US11318995

申请日：2005-12-27

申请人： Youfa Wang ,  Thiam Tay ,  Soo Ho ,  Roy Tan ,  Patrick Lau

发明人： Youfa Wang ,  Thiam Tay ,  Soo Ho ,  Roy Tan ,  Patrick Lau

IPC分类号： H01H29/00 ,  H01H29/02

CPC分类号： H01H1/0036 ,  H01H29/28 ,  H01H61/02 ,  H01H2029/008 ,  H01H2061/006 ,  Y10T307/937

摘要： A circuit for actuating a switch includes a conductive liquid switch comprising a conductive liquid droplet and a control processor configured to receive a switching signal and configured to provide at least one actuation pulse to the conductive liquid droplet to initiate movement of the conductive liquid droplet based on a duration of a time period between the switching signal and a preceding switching signal.

摘要翻译： 用于致动开关的电路包括导电液体开关，该导电液体开关包括导电液滴和控制处理器，该控制处理器被配置为接收切换信号，并被配置为向导电液滴提供至少一个致动脉冲以基于 切换信号和前一切换信号之间的时间段的持续时间。

公开(公告)号：US07012354B2

公开(公告)日：2006-03-14

申请号：US10413098

申请日：2003-04-14

申请人： Marvin Glenn Wong

发明人： Marvin Glenn Wong

IPC分类号： H01L41/08 ,  H01H29/02 ,  H01H57/00

CPC分类号： H01H57/00 ,  H01H29/28 ,  H01H2029/008 ,  H01H2057/006

摘要： A method and structure for an electrical switch. According to the structure of the present invention, a liquid-filled chamber is housed within a solid material. A plurality of switch contacts within the liquid-filled chamber are coupled to the solid material, while a plurality of piezoelectric elements are coupled to a plurality of membranes. The plurality of membranes are coupled to the liquid-filled chamber. The plurality of switch contacts are coupled to a plurality of liquid metal globules. According to the method, a piezoelectric element is actuated, causing a membrane element to be deflected. The deflection of the membrane element increases pressure of actuator liquid and the increase in pressure of the actuator liquid breaks a liquid metal connection between a first contact and a second contact of the electrical switch.

摘要翻译： 一种电气开关的方法和结构。 根据本发明的结构，将液体填充室容纳在固体材料内。 在液体填充室内的多个开关触点耦合到固体材料，而多个压电元件耦合到多个膜。 多个膜耦合到充满液体的腔室。 多个开关触点耦合到多个液态金属球。 根据该方法，致动压电元件，导致膜元件偏转。 膜元件的偏转增加致动器液体的压力，并且致动器液体的压力的增加破坏了电气开关的第一触点和第二触点之间的液态金属连接。

公开(公告)号：US06924444B2

公开(公告)日：2005-08-02

申请号：US10964440

申请日：2004-10-12

申请人： Marvin Glenn Wong ,  Paul Thomas Carson

发明人： Marvin Glenn Wong ,  Paul Thomas Carson

IPC分类号： B81C99/00 ,  H01H1/00 ,  H01H11/02 ,  H01H29/02 ,  H01H29/28 ,  H01H29/00

CPC分类号： H01H29/28 ,  H01H1/0036 ,  H01H2001/0073 ,  H01H2029/008

摘要： Disclosed herein is a channel plate for a fluid-based switch. The channel plate is produced by 1) forming a plurality of channel plate layers in ceramic green sheet, 2) forming at least one channel plate feature in at least one of the channel plate layers, and 3) laminating the channel plate layers to form the channel plate. A method for making a switch with a ceramic channel plate is also disclosed.

公开(公告)号：US06909059B2

公开(公告)日：2005-06-21

申请号：US10900507

申请日：2004-07-27

申请人： Marvin Glenn Wong

发明人： Marvin Glenn Wong

IPC分类号： H01H11/02 ,  H01H1/00 ,  H01H29/02 ,  H01H29/28 ,  H01H61/02 ,  H01H29/00

CPC分类号： H01H29/28 ,  H01H1/0036 ,  H01H61/02 ,  H01H2029/008 ,  H01H2061/006

摘要： In one embodiment, a switch is assembled by depositing a liquid switching element on a substrate. A channel plate is then positioned adjacent the substrate. The channel plate has a main channel and a waste chamber, and the main channel is positioned over the liquid switching element. The channel plate is then moved toward the substrate to cause a portion of the liquid switching element that overfills the main channel to be isolated from the main channel in the waste chamber. A method of switch production is also disclosed.

公开(公告)号：US06894424B2

公开(公告)日：2005-05-17

申请号：US10413100

申请日：2003-04-14

申请人： Marvin Glenn Wong ,  Arthur Fong

发明人： Marvin Glenn Wong ,  Arthur Fong

IPC分类号： H01L41/12 ,  H01H1/08 ,  H01H29/02 ,  H01H55/00 ,  H01H57/00 ,  H01L41/09 ,  H01L41/08

CPC分类号： H01H55/00 ,  H01H57/00 ,  H01H2029/008 ,  H01H2057/006

摘要： An electrical relay that uses a conducting liquid in the switching mechanism. In the relay, a pair of moveable switching contacts is positioned between a pair of fixed electrical contact pads. A surface of each contact supports a droplet of a conducting liquid, such as a liquid metal. An actuator is energized to move the pair of switching contacts, closing the gap between one of the fixed contact pads and one of the switching contacts, thereby causing conducting liquid droplets to coalesce and form an electrical circuit. At the same time, the gap between the other fixed contact pad and the other switching contact is increased, thereby causing conducting liquid droplets to separate and break an electrical circuit. The actuator is then de-energized and the switching contacts return to their starting positions. The volume of liquid metal is chosen so that liquid metal droplets remain coalesced or separated because of surface tension in the liquid. The relay is amenable to manufacture by micro-machining techniques.

摘要翻译： 在开关机构中使用导电液体的继电器。 在继电器中，一对可移动开关触点位于一对固定电接触垫之间。 每个接触件的表面支撑诸如液体金属的导电液体的液滴。 致动器被通电以移动该对开关触点，闭合固定触点焊盘中的一个与开关触点中的一个之间的间隙，由此导致液滴聚结并形成电路。 同时，另一个固定接触焊盘和另一个开关触点之间的间隙增加，从而导致液滴分离和断开电路。 然后致动器被断电，并且开关触点返回到其起始位置。 选择液体金属的体积，使得液体金属液滴由于液体中的表面张力而保持聚结或分离。 继电器适用于通过微加工技术制造。