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    Plasma source apparatus and methods for generating charged particle beams
    2.
    发明授权
    Plasma source apparatus and methods for generating charged particle beams 有权
    用于产生带电粒子束的等离子体源装置和方法

    公开(公告)号：US09076626B2

    公开(公告)日：2015-07-07

    申请号：US14406012

    申请日：2013-05-20

    申请人： The Welding Institute

    发明人： Colin Ribton ,  Allan Sanderson

    IPC分类号： H05H1/00 ,  H01J49/10 ,  H01J37/077 ,  H01J37/30

    CPC分类号： H01J37/077 ,  H01J27/18 ,  H01J37/3002 ,  H01J2237/061 ,  H01J2237/063 ,  H01J2237/0817 ,  H01J2237/083 ,  H01J2237/31 ,  H01J2237/3104

    摘要： A plasma source apparatus for generating a beam of charged particles is disclosed. The apparatus comprises: a plasma chamber provided with an inlet for the ingress of gas and an aperture for the extraction of charged particles from the plasma chamber; a radio frequency (RF) plasma generation unit for generating a plasma inside the plasma chamber, the radio frequency plasma generation unit comprising first and second resonant circuits each tuned to resonate at substantially the same resonant frequency, the first resonant circuit comprising a first antenna and a first, RF power source adapted to drive the first resonant circuit at substantially its resonant frequency, and the second resonant circuit comprising a second antenna, whereby in use an RF signal is induced in the second antenna by the first resonant circuit due to resonant coupling, the second resonant circuit being configured to apply the induced RF signal to the plasma chamber to generate a plasma therein; and a particle accelerating unit for extracting charged particles from the plasma and accelerating the charged particles to form a beam, the particle accelerating unit comprising a second power source configured to apply potential between the plasma chamber and an accelerating electrode, the region between the plasma chamber and the accelerating electrode constituting an acceleration column. The second power source is adapted to output a high voltage relative to that output by the first, RF power source.

    摘要翻译： 公开了一种用于产生带电粒子束的等离子体源装置。 该装置包括：等离子体室，其具有用于进入气体的入口和用于从等离子体室抽出带电粒子的孔; 用于在等离子体室内产生等离子体的射频（RF）等离子体产生单元，所述射频等离子体产生单元包括第一和第二谐振电路，每个谐振电路被调谐以基本相同的谐振频率谐振，所述第一谐振电路包括第一天线和 第一RF电源，其适于以基本上其谐振频率驱动第一谐振电路，并且第二谐振电路包括第二天线，由此在使用中由于谐振耦合由第一谐振电路在第二天线中感应RF信号 所述第二谐振电路被配置为将所述感应RF信号施加到所述等离子体室以在其中产生等离子体; 以及用于从等离子体中提取带电粒子并加速带电粒子以形成束的粒子加速单元，所述粒子加速单元包括构造成在等离子体室和加速电极之间施加电位的第二电源，等离子体室 加速电极构成加速柱。 第二电源适于通过第一RF电源输出相对于该输出的高电压。

    Electron flood apparatus and ion implantation system
    3.
    发明申请
    Electron flood apparatus and ion implantation system 有权
    电子洪水装置和离子注入系统

    公开(公告)号：US20050116156A1

    公开(公告)日：2005-06-02

    申请号：US10942619

    申请日：2004-09-16

    申请人： Hiroyuki Ito ,  Yasuhiko Matsunaga ,  Hiroji Hanawa

    发明人： Hiroyuki Ito ,  Yasuhiko Matsunaga ,  Hiroji Hanawa

    IPC分类号： C23C14/48 ,  H01J37/077 ,  H01J37/08 ,  H01J37/20 ,  H01J37/317 ,  H01L21/265

    CPC分类号： H01J37/077 ,  H01J37/3171 ,  H01J2237/0044 ,  H01J2237/06375

    摘要： An electron flood apparatus 1 of the present invention comprises a chamber 22 having a first part 22a made of conductive material and a second part 22b made of insulating material, and extending along a predefined closed curve Ax. A coil 18 is provided outside the first part 22a to generate a magnetic field in a direction intersecting with the surface formed by the predefined closed curve Ax. The coil 18 and the chamber 22 are inductively coupled by the magnetic field. Since the inert gas plasma is generated in the chamber 22 mainly by inductive coupling, electrons contained in the plasma have a low energy. Here, by applying voltage to an electrode 21, electrons having a low energy in the chamber 22 are emitted from an opening 14.

    摘要翻译： 本发明的电子洪水装置1包括具有由导电材料制成的第一部分22a和由绝缘材料制成并沿预定的闭合曲线Ax延伸的第二部分22b的腔室22。 线圈18设置在第一部分22a外部，以在与由预定闭合曲线Ax形成的表面相交的方向上产生磁场。 线圈18和腔室22通过磁场感应耦合。 由于主要通过电感耦合在室22中产生惰性气体等离子体，因此包含在等离子体中的电子具有低能量。 这里，通过向电极21施加电压，在室22中具有低能量的电子从开口14发射。

    Broad-beam electron source
    5.
    发明授权
    Broad-beam electron source 失效
    宽射束电子源

    公开(公告)号：US4684848A

    公开(公告)日：1987-08-04

    申请号：US787665

    申请日：1985-10-15

    申请人： Harold R. Kaufman ,  Raymond S. Robinson

    发明人： Harold R. Kaufman ,  Raymond S. Robinson

    IPC分类号： H01J3/02 ,  H01J37/077 ,  H01J7/24 ,  H05B31/26

    CPC分类号： H01J37/077 ,  H01J3/025

    摘要： A broad-beam electron source has a chamber into which is introduced an ionizing gas. Electrons are emitted between a cathode and an anode assembly to ionize that gas. The electrons within the plasma are drawn outwardly from the chamber through an apertured wall, which constitutes a screen, and thereafter are accelerated toward a target in a well-directed beam. A comparatively copious supply of electrons is developed, while yet requiring only low voltages in connection with its generation and resulting in correspondingly low electron energies. Ions produced external to the electron source itself are utilized to assist in neutralizing the charge density of the electron beam in order to help maintain its definition. For insulative targets, secondarily emitted electrons permit conservation of surface charge.

    摘要翻译： 宽束电子源具有引入离子化气体的室。 电子在阴极和阳极组件之间发射以使该气体电离。 等离子体内的电子通过孔壁向外从室中向外拉出，该多孔壁构成屏幕，然后在良好定向的光束中向目标加速。 开发了相当丰富的电子供应，同时仅需要与其产生相关的低电压并导致相应的低电子能量。 在电子源外部产生的离子本身被用于帮助中和电子束的电荷密度，以帮助维持其定义。 对于绝缘目标，次要发射的电子可以保持表面电荷。

    Ion plasma electron gun
    8.
    发明授权
    Ion plasma electron gun 失效
    离子等离子体电子枪

    公开(公告)号：US3970892A

    公开(公告)日：1976-07-20

    申请号：US578551

    申请日：1975-05-19

    申请人： George Wakalopulos

    发明人： George Wakalopulos

    IPC分类号： H01J3/02 ,  H01J33/00 ,  H01J37/077 ,  H05H1/24 ,  H05H7/08 ,  H01J7/24

    CPC分类号： H05H1/24 ,  H01J3/021 ,  H01J33/00

    摘要： In the disclosed electron gun positive ions generated by a hollow cathode plasma discharge in a first chamber are accelerated through control and shield grids into a second chamber containing a high voltage cold cathode. These positive ions bombard a surface of the cathode causing the cathode to emit secondary electrons which form an electron beam having a distribution adjacent to the cathode emissive surface substantially the same as the distribution of the ion beam impinging upon the cathode. After passing through the grids and the plasma discharge chamber, the electron beam exits from the electron gun via a foil window. Control of the generated electron beam is achieved by applying a relatively low control voltage between the control grid and the electron gun housing (which resides at ground potential) to control the density of the positive ions bombarding the cathode.

    摘要翻译： 在所公开的电子枪中，通过第一室中的空心阴极等离子体放电产生的正离子通过控制和屏蔽栅加速到包含高压冷阴极的第二室中。 这些正离子轰击阴极的表面，导致阴极发射二次电子，其形成具有与阴极发射表面相邻的分布的电子束，其基本上与入射到阴极上的离子束的分布相同。 通过栅格和等离子体放电室后，电子束通过箔窗从电子枪射出。 通过在控制栅极和电子枪壳体之间施加相对较低的控制电压（位于地电位）来控制所产生的电子束的控制，以控制轰击阴极的正离子的密度。

    Non-thermionic glow discharge devices
    9.
    发明授权
    Non-thermionic glow discharge devices 失效
    非THERMIONIC GLOW放电器件

    公开(公告)号：US3678334A

    公开(公告)日：1972-07-18

    申请号：US3678334D

    申请日：1969-09-02

    申请人： ATOMIC ENERGY AUTHORITY UK

    发明人： DUGDALE RONALD ARTHUR ,  FORD STANLEY DENIS ,  MASKREY JOHN THOMAS

    IPC分类号： H01J17/44 ,  H01J37/077 ,  H05H1/24 ,  H01J37/06

    CPC分类号： H01J17/44 ,  H01J37/077 ,  H01J2893/0068 ,  H05H1/48

    摘要： A glow discharge device comprising an enclosure and means to maintain a suitable gas in the enclosure at a predetermined pressure. An electrode arrangement is either at least partly disposed within the enclosure or forms part of a wall of the enclosure. The electrode arrangement includes one or more anodes, a cathode, and a control electrode. Power supply means are provided to apply a electrical potentials to the anode or anodes said cathode and said control electrode to maintain a first potential difference between an anode and said cathode to generate a first glow discharge, and to maintain a second potential difference between an anode and said control electrode to generate a second glow discharge. The combined first and second glow discharges produces a beam of charged particles, the power intensity of which is controlled by varying the potential applied to the control electrode to vary the glow discharge independently of the potential applied to the cathode.

    摘要翻译： 一种辉光放电装置，包括外壳和在预定压力下将外壳中合适气体保持的装置。 电极装置至少部分地设置在外壳内或形成外壳壁的一部分。 电极装置包括一个或多个阳极，阴极和控制电极。 提供电源装置以将电位施加到所述阴极和所述控制电极的阳极或阳极，以维持阳极和所述阴极之间的第一电位差，以产生第一辉光放电，并且保持阳极之间的第二电位差 并且所述控制电极产生第二辉光放电。 组合的第一和第二辉光放电产生带电粒子束，其功率强度通过改变施加到控制电极的电位来控制，以独立于施加到阴极的电位来改变辉光放电。