公开(公告)号：US06674073B2

公开(公告)日：2004-01-06

申请号：US09842442

申请日：2001-04-26

申请人： Koichi Mukasa ,  Masayuki Ikeda ,  Kazuhisa Sueoka ,  Masakazu Mutoh ,  Hisao Kadono ,  Eisuke Ueda

发明人： Koichi Mukasa ,  Masayuki Ikeda ,  Kazuhisa Sueoka ,  Masakazu Mutoh ,  Hisao Kadono ,  Eisuke Ueda

IPC分类号： H01J37252

CPC分类号： H01J37/20 ,  H01J37/295

摘要： A scattering target constituting an electron spin analyzer is supported by a scattering target-holding member made of a conductive material from the outside of the space formed by an accelerating electrode and an electrode supporter. Then, the scattering target-holding member is supported in insulation by an insulation supporting member made of an insulating material. Moreover, a guiding member is provided so as to cover the periphery of the insulation supporting member for guiding the scattering target, the scattering target-holding member and the insulation supporting member.

摘要翻译： 构成电子自旋分析装置的散射体由由加速电极和电极支撑体形成的空间的外部由导电材料制成的散射体保持部件支撑。 然后，通过由绝缘材料制成的绝缘支撑构件将散射物体保持构件绝缘地支撑。 此外，引导构件被设置成覆盖用于引导散射体，散射体保持构件和绝缘支撑构件的绝缘支撑构件的周边。

公开(公告)号：US06639218B2

公开(公告)日：2003-10-28

申请号：US09843445

申请日：2001-04-26

申请人： Koichi Mukasa ,  Masayuki Ikeda ,  Kazuhisa Sueoka ,  Masakazu Mutoh ,  Hisao Kadono ,  Eisuke Ueda

发明人： Koichi Mukasa ,  Masayuki Ikeda ,  Kazuhisa Sueoka ,  Masakazu Mutoh ,  Hisao Kadono ,  Eisuke Ueda

IPC分类号： H01J37252

CPC分类号： H01J37/252 ,  H01J2237/04735 ,  H01J2237/24557

摘要： A hemisphere accelerating electrode has a double structure composed of an inner accelerating electrode and an outer accelerating electrode. The inner accelerating electrode has an inner introducing inlet and an inner opening, and the outer accelerating electrode has an outer introducing inlet and an outer opening. The aperture angle of the inner introducing inlet is preferably larger than that of the outer introducing inlet by 0.1-5 degrees. Then, the aperture angle of the inner opening is preferably larger than that of the outer opening by 0.1-5 degrees. Moreover, scattered electron detectors have correcting electrodes, respectively, and are arranged in the shifted directions from the introducing direction of electrons by 100-140 degrees.

公开(公告)号：US06803570B1

公开(公告)日：2004-10-12

申请号：US10618078

申请日：2003-07-11

申请人： Charles E. Bryson, III ,  Frank J. Grunthaner ,  Paula J. Grunthaner

发明人： Charles E. Bryson, III ,  Frank J. Grunthaner ,  Paula J. Grunthaner

IPC分类号： H01J37252

CPC分类号： H01J33/04

摘要： A vacuum window transmitting keV electrons and usable for high-pressure electron analysis such as XPS and AES in which the sample is positioned outside the UHV analyzer chamber, possibly in a controlled gas environment, relatively close to the window. The window includes a grid formed from a support layer and a thin window layer supported between the ribs and having a thickness preferably of 2 to 3 nm. The window and support layers may be deposited on a silicon wafer and the support layer is lithographically defined into the grid. The wafer is backside etched to expose the back of the grid and its supported window layer. Such a window enables compact and easily used electron analyzers and further allows control of the gas environment at the sample surface during analysis.

摘要翻译： 传输keV电子并可用于高压电子分析的真空窗口，例如XPS和AES，其中样品位于特高压分析器室外，可能在相对靠近窗口的受控气体环境中。 窗口包括由支撑层形成的格栅和支撑在肋之间的薄窗层，其厚度优选为2至3nm。 窗口和支撑层可以沉积在硅晶片上，并且支撑层被光刻地限定在栅格中。 晶片被背面蚀刻以暴露网格的背面及其支撑的窗口层。 这样的窗口使得能够紧凑且易于使用的电子分析器，并且还允许在分析期间控制样品表面处的气体环境。

公开(公告)号：US06448554B1

公开(公告)日：2002-09-10

申请号：US09321853

申请日：1999-05-28

申请人： Masakazu Aono ,  Takane Kobayashi

发明人： Masakazu Aono ,  Takane Kobayashi

IPC分类号： H01J37252

CPC分类号： H01J49/40

摘要： From an ion source and accelerator an ion beam is generated, this ion beam is let go through a circular hole bored in the center of a detector and orifices to irradiate a sample in a sample chamber. The detector detects particles scattered from the sample and arrived at the detector through the orifices. With exhaust units and orifices, the region surrounding the detector is exhausted to be a prescribed degree of vacuum of higher vacuum than the inside of the sample chamber.

摘要翻译： 从离子源和加速器产生离子束，该离子束通过在检测器中心钻孔的孔，并且孔口照射样品室中的样品。 检测器检测从样品散射的颗粒，并通过孔抵达检测器。 利用排气单元和孔口，检测器周围的区域被排出为比样品室内部更高真空度的规定的真空度。

公开(公告)号：US06657193B2

公开(公告)日：2003-12-02

申请号：US10274029

申请日：2002-10-21

申请人： Yukari Dan ,  Ryuichiro Tamochi ,  Mitsugu Sato

发明人： Yukari Dan ,  Ryuichiro Tamochi ,  Mitsugu Sato

IPC分类号： H01J37252

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/004 ,  H01J2237/2605

摘要： A scanning electron microscope is provided which is capable of efficiently detecting ions, such as primary electron excitation ions, reflection electron excitation ions or secondary electron excitation ions caused by a bias electric field, thereby obtaining an absorption current. A scanning electron microscope irradiates an electron beam to a sample while keeping a sample chamber pressure at 1 Pa or higher, to detect generated ions and display a sample image. An ion detecting electrode is provided exclusively for detecting ions. The ion detecting electrode is arranged nearby a path for accelerating ions by a bias electrode.

摘要翻译： 提供一种扫描电子显微镜，其能够有效地检测由偏置电场引起的一次电子激发离子，反射电子激发离子或二次电子激发离子等离子，从而获得吸收电流。 扫描电子显微镜在将样品室压力保持在1Pa以上的同时将电子束照射到样品，以检测产生的离子并显示样品图像。 离子检测电极专门用于检测离子。 离子检测电极设置在用于通过偏置电极加速离子的路径附近。

公开(公告)号：US06452172B1

公开(公告)日：2002-09-17

申请号：US09313118

申请日：1999-05-17

申请人： Masamichi Oi

发明人： Masamichi Oi

IPC分类号： H01J37252

CPC分类号： H01J37/28 ,  H01J37/3005

摘要： A method of controlling a magnetic field in the path of a focused charged particle beam of a composite charged particle beam apparatus having at least one focused ion beam lens barrel and at least one electron beam lens barrel comprises the steps of measuring a residual magnetic field within a sample chamber housing the lens barrels, and controlling the magnetic field in the path of the focused charged particle beam so that the magnetic field is maintained at a previously measured value.

摘要翻译： 一种控制具有至少一个聚焦离子束透镜镜筒和至少一个电子束透镜镜筒的复合带电粒子束装置的聚焦带电粒子束路径中的磁场的方法包括以下步骤：测量在 容纳透镜桶的样品室，并控制聚焦的带电粒子束的路径中的磁场，使得磁场维持在先前测量的值。

公开(公告)号：US06313461B1

公开(公告)日：2001-11-06

申请号：US09272289

申请日：1999-03-19

申请人： Gary Miles McClelland ,  Charles Thomas Rettner ,  Mahesh Govind Samant ,  Dieter Klaus Weller

发明人： Gary Miles McClelland ,  Charles Thomas Rettner ,  Mahesh Govind Samant ,  Dieter Klaus Weller

IPC分类号： H01J37252

CPC分类号： B82Y15/00 ,  H01J37/285 ,  H01J2237/045

摘要： A scanning-aperture electron microscope system and method in which a radiation source generates a radiation beam that is incident upon a surface of a sample material causing electrons to be ejected from the surface. When magnetic imaging is being performed, a polarization rotator polarization-modulates the radiation beam. A scanning-aperture probe having an aperture is positioned in proxiity to the surface of the sample material so that photoelectrons ejected from the surface of the sample material pass through the aperture. A detector detects the electrons passing through the aperture. The electron detector outputs a signal in response to the detected electrons that is used for imaging magnetic and/or spectroscopic features of the surface of the sample material. The resolution of the imaged features is about equal to a size of the aperture.

摘要翻译： 一种扫描孔径电子显微镜系统和方法，其中辐射源产生入射在样品材料的表面上的辐射束，导致电子从表面喷出。 当进行磁性成像时，偏振旋转器对辐射束进行偏振调制。 具有孔径的扫描孔径探针定位在样品材料的表面上，使得从样品材料的表面喷射的光电子通过孔。 检测器检测穿过孔的电子。 电子检测器响应于用于对样品材料的表面的磁性和/或光谱特征进行成像的检测到的电子输出信号。 成像特征的分辨率大约等于孔径的大小。

公开(公告)号：US06483118B2

公开(公告)日：2002-11-19

申请号：US09908158

申请日：2001-07-19

申请人： Ichiro Fujiwara ,  Yoshiko Ito ,  Ren Iwata ,  Toshio Hyodo ,  Yasushige Yano ,  Akira Goto ,  Yuji Ikegami ,  Yoshio Nomiya

发明人： Ichiro Fujiwara ,  Yoshiko Ito ,  Ren Iwata ,  Toshio Hyodo ,  Yasushige Yano ,  Akira Goto ,  Yuji Ikegami ,  Yoshio Nomiya

IPC分类号： H01J37252

CPC分类号： G21G1/10

摘要： The present invention provides a positron source essentially consisting of a carbon member having 18F bound onto the surface thereof, a method of a preparing the same, and an automated system for supplying the same. In the present invention, the positron source is prepared by irradiating a solution 35 containing both H218O and a small amount of natural fluorine ions with a beam of charged particles to generate 18F, and then passing an electric current through the solution 35 using a carbon member 40 as an anode to cause to bind the generated 18F onto the surface of the carbon member 40.

摘要翻译： 本发明提供了一种正电子源，其基本上由具有18F结合到其表面上的碳构件，其制备方法和用于供给它的自动化系统组成。 在本发明中，通过用含有粒子的束照射含有H 2 18 O和少量天然氟离子的溶液35以产生18F，然后使用碳成员使电流通过溶液35来制备正电子源 40作为负极将所生成的18F结合到碳构件40的表面上。

公开(公告)号：US06201241B1

公开(公告)日：2001-03-13

申请号：US09461826

申请日：1999-12-15

申请人： Hirotami Koike

发明人： Hirotami Koike

IPC分类号： H01J37252

CPC分类号： H01J37/252 ,  H01J2237/2445

摘要： An organic substance analyzer, which comprises a irradiating unit for irradiating a specimen containing organic substances with an electron beam, a spectrum detecting unit for detecting spectrum of fluorescent light emitted from said specimen, a storage unit for storing a shape of a reference spectrum of fluorescent light of each specific type of organic substance when the electron beam is irradiated on said specific type of organic substance, and a searching unit for classification and identifying organic substances in the specimen by comparing the shape of said stored reference spectrum with that of said detected spectrum, whereby the electron beam having higher energy than light is irradiated the specimen for analysis, fluorescent light with spectrum in wider range is emitted from the specimen even in ultraviolet range, and organic substances in the specimen are discriminated and identified by comparing shapes of the measured spectral pattern obtained from the fluorescent light with a reference spectral pattern stored in memory in advance.

摘要翻译： 一种有机物质分析装置，其特征在于，包括：用电子束照射含有有机物质的检体的照射单元，检测从上述样本发出的荧光的光谱的光谱检测单元，存储荧光基准光谱的形状的存储单元 当电子束照射在所述特定类型的有机物质上时，每种特定类型的有机物质的光;以及搜索单元，用于通过将所述存储的参考光谱的形状与所述检测光谱的形状进行比较来分类和鉴定样品中的有机物质 由此，对于具有比光更高的能量的电子束照射用于分析的试样，即使在紫外线范围内也从试样发射具有更宽范围的光谱的荧光，并且通过比较测定的样品的形状来鉴别和鉴定样品中的有机物质 从荧光灯获得的光谱图案 提前存储在存储器中的参考光谱图。

公开(公告)号：US06184526B2

公开(公告)日：2001-02-06

申请号：US09362099

申请日：1999-07-28

申请人： Yoshiaki Kohama ,  Muneki Hamashima ,  Shigeru Takemoto

发明人： Yoshiaki Kohama ,  Muneki Hamashima ,  Shigeru Takemoto

IPC分类号： H01J37252

CPC分类号： H01J37/28 ,  H01J2237/24435 ,  H01J2237/2817 ,  H01J2237/30438

摘要： This invention concerns an apparatus and a method for observing and inspecting a predetermined area in a surface of a sample by use of an electron beam. The apparatus according to this invention comprises an MCP for multiplying a secondary beam emerging from the surface of the sample. The apparatus and method employ a CCD TDI array in order to increase the lifetime of the MCP, and special scan control is carried out in the observation and inspection operation. In addition, the apparatus according to this invention has various structures for enabling correction for positional deviation of the sample and high-speed processing.

摘要翻译： 本发明涉及通过使用电子束来观察和检查样品表面中的预定区域的装置和方法。 根据本发明的装置包括用于乘以从样品表面出射的次级光束的MCP。 该装置和方法采用CCD TDI阵列以增加MCP的寿命，并且在观察和检查操作中进行特殊的扫描控制。 此外，根据本发明的装置具有用于能够校正样品的位置偏差和高速处理的各种结构。