TEMPERATURE ADJUSTMENT DEVICE
    1.
    发明公开

    公开(公告)号:US20240274492A1

    公开(公告)日:2024-08-15

    申请号:US18432134

    申请日:2024-02-05

    IPC分类号: H01L23/367 H01L23/38

    CPC分类号: H01L23/3675 H01L23/38

    摘要: A temperature adjustment device includes: a placement portion having a placement surface on which an object to be controlled temperature thereof is placed; a bottom portion facing the placement portion; a first support portion sandwiched between the placement portion and the bottom portion and supporting a center portion of the placement portion; a heat source portion disposed between the placement portion and the bottom portion and is allowed to heat and cool the object via the placement portion; a heat radiation portion disposed between the heat source portion and the bottom portion and exchanging heat with the heat source portion; and a second support portion disposed between the placement portion and the bottom portion and disposed close to the axis, wherein the second support portion supports an end portion of the heat radiation portion so as to separate the heat radiation portion from the bottom portion.