Crown capacitor and method for fabricating the same

    公开(公告)号:US11910588B2

    公开(公告)日:2024-02-20

    申请号:US17643411

    申请日:2021-12-08

    CPC classification number: H10B12/00 H01L28/40 H01L28/92 H01L29/92

    Abstract: A method for fabricating a crown capacitor includes: forming a first supporting layer over a substrate; forming a second supporting layer above the first supporting layer; alternately stacking first and second sacrificial layers between the first and second supporting layers to collectively form a stacking structure; forming a recess extending through the stacking structure; performing an etching process to the first sacrificial layers at a first etching rate and the second sacrificial layers at a second etching rate greater than the first etching rate, such that each second sacrificial layer and immediately-adjacent two of the first sacrificial layers collectively define a concave portion; forming a first electrode layer over a surface of the recess in which the first electrode layer has a wavy structure; removing the first and second sacrificial layers; and forming a dielectric layer and a second electrode layer over the first electrode layer.

    3-dimensional arrays of NOR-type memory strings

    公开(公告)号:US11315645B2

    公开(公告)日:2022-04-26

    申请号:US16820209

    申请日:2020-03-16

    Inventor: Eli Harari

    Abstract: Multi-gate NOR flash thin-film transistor (TFT) string arrays are organized as 3-dimensional stacks of active strips. Each active strip includes a shared source sublayer and a shared drain sublayer that is connected to substrate circuits. Data storage in the active strip is provided by charge-storage elements between the active strip and a multiplicity of control gates provided by adjacent local word-lines. The parasitic capacitance of each active strip is used to eliminate hard-wire ground connection to the shared source making it a semi-floating, or virtual source. Pre-charge voltages temporarily supplied from the substrate through a single port per active strip provide the appropriate voltages on the source and drain required during read, program, program-inhibit and erase operations. TFTs on multiple active strips can be pre-charged separately and then read, programmed or erased together in a massively parallel operation.

    RC SNUBBER
    8.
    发明申请

    公开(公告)号:US20220085601A1

    公开(公告)日:2022-03-17

    申请号:US17019746

    申请日:2020-09-14

    Abstract: An apparatus includes a unipolar power transistor and an RC snubber. The RC snubber has a capacitor between a poly silicon structure and a semiconductor substrate. The capacitor has a p-n junction. The RC snubber has a resistor between a source of the unipolar power transistor and a first layer forming the capacitor. The unipolar transistor and the RC snubber are coupled in parallel. The RC snubber and the unipolar power transistor are formed monolithically on the semiconductor substrate.

    CAPACITOR STRUCTURE HAVING VERTICAL DIFFUSION PLATES

    公开(公告)号:US20200243692A1

    公开(公告)日:2020-07-30

    申请号:US16294944

    申请日:2019-03-07

    Inventor: Liang Chen

    Abstract: A capacitor structure includes a semiconductor substrate, a first vertical diffusion plate in the semiconductor substrate, a first STI structure in the semiconductor substrate and surrounding the first vertical diffusion plate, a second vertical diffusion plate in the semiconductor substrate and surrounding the first STI structure, and an ion well in the semiconductor substrate. The ion well is disposed directly under the first vertical diffusion plate, the first STI structure and the second vertical diffusion plate. The second vertical diffusion plate is electrically coupled to an anode of the capacitor structure. The first vertical diffusion plate is electrically coupled to a cathode of the capacitor structure.

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