SEMICONDUCTOR PHOTODETECTOR
    6.
    发明公开

    公开(公告)号:US20230411542A1

    公开(公告)日:2023-12-21

    申请号:US17954002

    申请日:2022-09-27

    摘要: A semiconductor photodetector includes: a substrate; a light-receiving mesa structure, on a first surface of the substrate, including semiconductor layers that includes an absorption layer; an insulating film overlapping with the light-receiving mesa structure in a transverse direction, the insulating film surrounding a side surface of the light-receiving mesa structure; a first electrode, on the first surface, including a mesa electrode electrically connected to and in contact with a top surface of a top layer of the semiconductor layers, the first electrode including a protruding electrode on the insulating film, the protruding electrode being electrically continuous to the mesa electrode, extending outward, and overlapping with the light-receiving mesa structure in the transverse direction, the protruding electrode being smaller in width than the mesa electrode; and a second electrode, on the first surface, electrically connected to a bottom surface of a bottom layer of the semiconductor layers.