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    Piezoelectric actuator and method for producing piezoelectric actuator
    2.
    发明授权
    Piezoelectric actuator and method for producing piezoelectric actuator 有权

    公开(公告)号：US11458729B2

    公开(公告)日：2022-10-04

    申请号：US16658346

    申请日：2019-10-21

    Applicant: BROTHER KOGYO KABUSHIKI KAISHA

    Inventor： Rui Wang

    IPC: B41J2/14 ,  H01L41/00 ,  H01L41/083 ,  H01L41/318

    Abstract: A piezoelectric actuator includes: a vibration plate: a first piezoelectric body arranged on one side in a thickness direction of the vibration plate; a second piezoelectric body arranged on a side, of the first piezoelectric body, opposite to the vibration plate in the thickness direction; a first electrode arranged between the vibration plate and the first piezoelectric body; a second electrode arranged between the first and second piezoelectric bodies in the thickness direction, and overlapping with the first electrode in the thickness direction; and a third electrode arranged on a side, of the second piezoelectric body, opposite to the first piezoelectric body in the thickness direction, and overlapping with the second electrode in the thickness direction. The second piezoelectric body covers at least a part of a first end surface, of the first piezoelectric body, which is an end surface in a first direction orthogonal to the thickness direction.

    Piezoelectric element
    4.
    发明授权
    Piezoelectric element 有权

    公开(公告)号：US11289642B2

    公开(公告)日：2022-03-29

    申请号：US16122392

    申请日：2018-09-05

    Applicant: ROHM CO., LTD.

    Inventor： Koji Nomura ,  Nobufumi Matsuo ,  Tomohiro Date

    IPC: H01L41/08 ,  H01L41/047 ,  H01L41/187 ,  H01L41/319 ,  H01L41/297 ,  H01L41/318

    Abstract: A piezoelectric element 10 includes a lower electrode, constituted of a Pt/Ti laminated film, a PLT seed layer, formed on the lower electrode, a PZT piezoelectric film, formed on the PLT seed layer, and an upper electrode, formed on the PZT piezoelectric film. A curve Q1 is a curve drawn such as to pass through a plurality of plotted points, each expressing a PLT (100) peak intensity with respect to a Pt (111) peak intensity according to a substrate setting temperature during forming of the Pt/Ti laminated film. A relationship of the PLT (100) peak intensity with respect to the Pt (111) peak intensity is within a range in the curve Q1 until the PLT (100) peak intensity decreases by 5% from a peak point P, at which the PLT (100) peak intensity is the maximum, and a (100) orientation rate of PLT constituting the seed layer is not less than 85%.

    Piezoelectric transformer
    7.
    发明授权
    Piezoelectric transformer 有权

    公开(公告)号：US11195984B2

    公开(公告)日：2021-12-07

    申请号：US16243171

    申请日：2019-01-09

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Shinsuke Ikeuchi ,  Yoichi Mochida ,  Kansho Yamamoto ,  Takuo Hada ,  Hideya Horiuchi

    IPC: H01L41/107 ,  H01L41/187 ,  H01L41/047 ,  H01L41/053 ,  H01L41/293 ,  H01L41/314 ,  H01L41/318 ,  H01L41/332

    Abstract: A piezoelectric transformer that includes a base and an upper layer supported by the base. The upper layer includes a first piezoelectric layer that includes the portion of the upper layer that is interposed between an output electrode and an intermediate electrode, and a second piezoelectric layer that is superposed with the first piezoelectric layer and includes the portion of the upper layer interposed between the intermediate electrode and an input electrode in at least n vibration portions. Moreover, the input electrode includes multiple input electrode pieces and the output electrode includes multiple output electrode pieces. In addition, wiring lines are routed such that voltages of opposite phases can be respectively applied to a first input electrode piece group and a second input electrode piece group with the potential of the intermediate electrode serving as a reference.

    Piezoelectric element and method for producing the same, liquid ejection head, and printer
    8.
    发明授权
    Piezoelectric element and method for producing the same, liquid ejection head, and printer 有权

    公开(公告)号：US11107970B2

    公开(公告)日：2021-08-31

    申请号：US16583467

    申请日：2019-09-26

    Applicant: Seiko Epson Corporation

    Inventor： Kazuya Kitada ,  Tsutomu Asakawa

    IPC: B41J2/14 ,  H01L41/08 ,  H01L41/047 ,  H01L41/083 ,  H01L41/297 ,  H01L41/318 ,  H01L41/09

    Abstract: A piezoelectric element including a first electrode provided above a base body, a first piezoelectric layer provided so as to be in contact with the base body and cover the first electrode, a second piezoelectric layer provided above the first piezoelectric layer, and a second electrode provided above the second piezoelectric layer, wherein the first piezoelectric layer includes a composite oxide that contains potassium and niobium and that has a perovskite-type structure containing potassium as a main component at an A-site, the second piezoelectric layer includes a composite oxide that contains potassium, sodium, and niobium and that has a perovskite-type structure, and the first piezoelectric layer has a higher potassium atomic concentration (atm %) than the second piezoelectric layer.

    Method for producing film and liquid ejection head
    9.
    发明授权
    Method for producing film and liquid ejection head 有权

    公开(公告)号：US11104136B2

    公开(公告)日：2021-08-31

    申请号：US16199664

    申请日：2018-11-26

    Applicant: CANON KABUSHIKI KAISHA

    Inventor： Masanori Sato

    IPC: B41J2/16 ,  H01L41/35 ,  H01L41/27 ,  B41J2/14 ,  B41J2/045 ,  H01L41/09 ,  H01L41/318 ,  H01L41/08

    Abstract: A method of producing a film including repeating a cycle comprised of an application step, a coat removal step and a sintering step N times (N≥2), wherein relative to a liquid supply position in the (n)th (1≤n≤N−1) cycle coat removal step, a liquid supply position in the (n+1)th cycle coat removal step is the same or shifted in a direction approaching the center of a substrate for all n(s) and at the same time, shifted in a direction approaching the center of the substrate for at least one of the (n)s; or is the same or shifted in a direction away from the center of the substrate for all n(s) and at the same time, shifted in a direction away from the center of the substrate for at least one of the (n)s.

    LIQUID COMPOSITION FOR FORMING KNN FILM AND METHOD FOR FORMING KNN FILM USING SAID LIQUID COMPOSITION
    10.
    发明申请
    LIQUID COMPOSITION FOR FORMING KNN FILM AND METHOD FOR FORMING KNN FILM USING SAID LIQUID COMPOSITION 有权

    公开(公告)号：US20210188657A1

    公开(公告)日：2021-06-24

    申请号：US17252432

    申请日：2019-06-07

    Applicant: MITSUBISHI MATERIALS CORPORATION

    Inventor： Naoto Tsujiuchi ,  Toshihiro Doi ,  Nobuyuki Soyama

    IPC: C01G33/00 ,  C09D1/00 ,  C09D5/24 ,  H01L41/187 ,  H01L41/318

    Abstract: This liquid composition for forming a KNN film includes an organic metal compound including an organic potassium compound, an organic sodium compound, and an organic niobium compound, and a solvent. In this liquid composition for forming a KNN film, the organic potassium compound and the sodium compound are each metal salts of a carboxylic acid represented by General Formula CnH2n+1COOH (here, 4≤n≤8), the organic niobium compound is a niobium alkoxide or a metal salt of a carboxylic acid represented by General Formula CnH2n+1COOH (here, 4≤n≤8), and a main solvent is a carboxylic acid represented by General Formula CnH2n+1COOH (here, 4≤n≤8) and is included in an amount of 50% by mass to 90% by mass with respect to 100% by mass of the liquid composition for forming a KNN film.

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