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公开(公告)号：US5793785A
公开(公告)日：1998-08-11
申请号：US509695
申请日：1995-07-31
Applicant: Hideyuki Nakanishi , Akio Yoshikawa , Hirokazu Shimizu
Inventor： Hideyuki Nakanishi , Akio Yoshikawa , Hirokazu Shimizu
CPC classification number: H01S5/02292 , H01S5/02252 , H01S5/02296 , H01S5/0683 , H01S5/3202
Abstract: Radiating light from a semiconductor laser element is radiated in a direction normal to the surface of a photodetector substrate. The semiconductor laser element and photodetector are disposed on the same plane. Specifically, a reflecting mirror surface formed of a slanting surface of (111) lattice plane having a ridge line of direction is disposed on a silicon substrate of (100) lattice plane having an off-angle of 4.degree. to 14.degree. about an axis of direction or on a silicon substrate of (511) lattice plane having an off-angle of 1.degree. to 11.degree. about an axis of direction. The semiconductor laser chip is disposed at a position opposing to the reflecting mirror surface.
Abstract translation: 来自半导体激光元件的散射光沿着与光检测器基板的表面垂直的方向辐射。 半导体激光元件和光电检测器设置在同一平面上。 具体地说，在具有<110>方向的棱线的（111）晶格面倾斜表面形成的反射镜表面设置在离开角度为4°至14°的（100）晶格面的硅衬底上 （511）晶格面的硅基板上，沿着<110>方向的轴线偏离为1°至11°。 半导体激光芯片设置在与反射镜表面相对的位置。
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公开(公告)号：US5327442A
公开(公告)日：1994-07-05
申请号：US944447
申请日：1992-09-14
Applicant: J. Michael Yarborough , Gerald M. Mitchell , Kenneth J. Bossie
Inventor： J. Michael Yarborough , Gerald M. Mitchell , Kenneth J. Bossie
CPC classification number: H01S3/042 , H01S3/0407
Abstract: An optically-pumped solid state laser system having separate subsystems for cooling its gain medium and optical pumping assembly. The invention permits the operating temperatures of the gain medium and optical pumping assembly to be independently controlled, and permits a substantial increase in cooling efficiency as a result of independent control of coolant flow rates in the two cooling subsystems. In a class of preferred embodiments, the gain medium cooling subsystem includes a first channel through which coolant flows with relatively high flow rate and relatively low temperature (to maintain the gain medium at a desired low operating temperature), and the other cooling subsystem includes a second channel through which coolant flows with a relatively low flow rate and relatively high temperature. In one embodiment, the gain medium is a Holmium:YAG rod, and a Cerium doped glass tube surrounds the rod. Three to four gallons per minute of coolant flows through the tube to maintain the rod at an operating temperature in the range from about + 10 to - 15 degrees Celsius. The optical pumping assembly includes a set of flash lamps, and a Cerium doped glass tube surrounds each lamp. A total of no more than two gallons per minute of coolant flows through the tubes around the lamps, to maintain the lamps at a relatively high (but controlled) temperature.
Abstract translation: 具有用于冷却其增益介质和光泵装置的单独子系统的光泵浦固态激光系统。 本发明允许独立地控制增益介质和光泵装置的操作温度，并且由于独立控制两个冷却子系统中的冷却剂流量，可以显着提高冷却效率。 在一些优选实施例中，增益介质冷却子系统包括第一通道，冷却剂以相对较高的流速和相对低的温度流动（以将增益介质保持在期望的低工作温度），另一个冷却子系统包括 冷却剂以相对低的流速和较高的温度流过的第二通道。 在一个实施例中，增益介质是钬：YAG棒，并且掺杂铈的玻璃管围绕该棒。 每分钟三到四加仑的冷却剂流过管子，以将棒保持在约+ 10至-15摄氏度的工作温度范围内。 光学泵组件包括一组闪光灯，并且掺杂有铈的玻璃管围绕每个灯。 总共不超过2加仑/分钟的冷却剂流过灯管周围的管道，以保持灯处于相对较高（但受控）的温度。
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3.发明授权Solid-state laser device capable of stably producing an output laser beam at high power 失效能够在高功率下稳定地产生输出激光束的固态激光装置
公开(公告)号：US5311528A
公开(公告)日：1994-05-10
申请号：US937511
申请日：1992-08-28
Applicant: Masashi Fujino
Inventor： Masashi Fujino
IPC: H01S3/04 , H01S3/042 , H01S3/0941 , H01S5/024 , H01S3/045
CPC classification number: H01S3/0941 , H01S3/025 , H01S3/0401 , H01S3/0405 , H01S3/0407 , H01S3/042 , H01S3/09408 , H01S5/0243
Abstract: In a solid-state laser device comprising a solid-state laser medium disposed in a laser resonator and a semiconductor laser device for exciting the solid-state laser medium, the solid-state laser device comprises a vessel for receiving the solid-state laser medium and the semiconductor laser device. The vessel is filled with a refrigerant so that the refrigerant is contact with at least one part of the semiconductor laser device and at least one of the solid-state laser medium. Connected to the vessel, a temperature controlling device controls temperature of the refrigerant to maintain a predetermined desired temperature so that the excitation laser beam has an excitation wavelength which coincides with an absorption wavelength of the solid-state laser medium. The refrigerant may composed of an insulated transparent liquid or an inert gas. Preferably, the temperature controlling device is a circulating temperature controlling device which has an inlet port for introducing a part of the refrigerant from the vessel and an outlet port for returning the part of the refrigerant to the vessel after keeping the part of the refrigerant at the desired temperature.
Abstract translation: 在包括设置在激光谐振器中的固态激光介质和用于激发固态激光介质的半导体激光器件的固态激光器件中，固态激光器件包括用于接收固态激光介质的容器 和半导体激光装置。 容器用制冷剂填充，使得制冷剂与半导体激光装置的至少一部分和固态激光介质中的至少一个接触。 温度控制装置连接到容器，控制制冷剂的温度以保持预定的期望温度，使得激发激光束具有与固体激光介质的吸收波长一致的激发波长。 制冷剂可以由绝缘的透明液体或惰性气体组成。 优选地，温度控制装置是循环温度控制装置，其具有用于从容器引入一部分制冷剂的入口和用于将制冷剂的一部分保持在容器之后将部分制冷剂返回到容器的出口 所需温度。
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公开(公告)号：US4594716A
公开(公告)日：1986-06-10
申请号：US775088
申请日：1985-09-12
Applicant: Steve Guch, Jr.
Inventor： Steve Guch, Jr.
CPC classification number: H01S3/093 , H01S3/042 , H01S3/025 , H01S3/0405 , H01S3/0407 , H05K1/05 , H05K2201/209
Abstract: The exterior surfaces of a laser rod and pump lamp are covered with a highly reflective metal foil to prevent light leakage from the rod and lamp. The laser rod and pump lamp operate within a cavity inside a heat sink. Between the metal foil and the housing is a thermally conductive fluidic material selected to provide a tailored thermal impedance between the heat sink and the rod and pump to optimize the steady state temperatures of these components. The conductive fluid is not circulated but is contained to act as a simple heat conductor. The optically reflective and the heat transfer functions of the laser pumping operation are essentially separate from each other, enabling selection of materials for these respective functions to enhance performance of the laser and substantially simplify its construction.
Abstract translation: 激光棒和泵灯的外表面被高度反光的金属箔覆盖，以防止光和棒的光泄漏。 激光棒和泵灯在散热器内部的腔内工作。 在金属箔和壳体之间是导热流体材料，其被选择为在散热器和棒和泵之间提供定制的热阻抗，以优化这些部件的稳态温度。 导电流体不会循环而被包含以用作简单的导热体。 激光泵送操作的光反射和热传递功能基本上彼此分离，使得能够选择用于这些相应功能的材料以增强激光器的性能并且基本上简化其结构。
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公开(公告)号：US4571728A
公开(公告)日：1986-02-18
申请号：US753364
申请日：1985-07-08
Applicant: Shoji Yoshikawa
Inventor： Shoji Yoshikawa
CPC classification number: H01S5/02415 , H01S5/06804
Abstract: A temperature control device for a semiconductor laser comprises a temperature sensitive resistor for detecting the temperature of a semiconductor laser and a Peltier element connected to the semiconductor laser and controlled, with regard to the direction of its heat transmission, in accordance with the resistance value of the temperature sensitive resistor. A single power source of a single polarity low voltage is used as a power source for the Peltier element. The current generated from the single polarity power source has its polarity changed by a bridging amplifier controlled by the resistance value of the temperature sensitive resistor and is supplied to the Peltier element.
Abstract translation: 一种用于半导体激光器的温度控制装置包括用于检测半导体激光器的温度的温度敏感电阻器和连接到半导体激光器的珀耳帖元件，并且根据其传热方向根据电阻值 温敏电阻。 使用单极性低电压的单个电源作为珀耳帖元件的电源。 从单极性电源产生的电流的极性由通过温度敏感电阻器的电阻值控制的桥接放大器改变，并被提供给珀尔帖元件。
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公开(公告)号：US5748656A
公开(公告)日：1998-05-05
申请号：US583302
申请日：1996-01-05
Applicant: Tom A. Watson , William N. Partlo , Donald G. Larson , Igor V. Fomenkov , Anthony J. de Ruyter , Palash P. Das
Inventor： Tom A. Watson , William N. Partlo , Donald G. Larson , Igor V. Fomenkov , Anthony J. de Ruyter , Palash P. Das
CPC classification number: H01S3/036 , H01S3/04 , H01S3/041 , F28D2021/0077 , H01S3/225
Abstract: Disclosed is a laser useful in, e.g., photolithography or medical surgery. In one embodiment, the laser comprises a discharge chamber and heat-generating electronics that are enclosed in a baffled enclosure that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger, thereby providing a continuously variable rate of heat exchange through the heat exchanger to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam are disclosed, as are photolithography methods utilizing a laser and method of this invention.
Abstract translation: 公开了一种可用于例如光刻或医疗手术中的激光。 在一个实施例中，激光器包括放电室和发热电子器件，其封闭在挡板外壳中，其需要较少的冷却空气以可靠地冷却外壳中的部件比先前的未封闭的外壳。 还提供了减少调节空气量的方法。 在另一个实施例中，激光器具有热交换系统，其响应于激光气体温度的变化而快速作用，通过调节调节通过热交换器的水流的流量比例阀，由此通过所述热交换系统提供连续可变的热交换速率 热交换器保持激光温度恒定。 公开了提供激光束并提高激光束的均匀性的方法，以及利用激光的光刻方法和本发明的方法。
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公开(公告)号：US5706302A
公开(公告)日：1998-01-06
申请号：US616051
申请日：1996-03-14
Applicant: Haruhito Shimizu
Inventor： Haruhito Shimizu
IPC: G02B6/32 , F25B21/02 , G02B6/42 , H01L35/00 , H01S5/00 , H01S5/022 , H01S5/024 , H01S5/068 , H01S3/045
CPC classification number: H01S5/02284 , H01S5/02415
Abstract: A Peltier cooler includes a plurality of Peltier elements, first and second ceramic substrates that are disposed to hold the Peltier elements through metallized electrodes formed inside the ceramic substrates and to electrically connect the Peltier elements in series, and first and second metal substrates respectively fixed to the first and second ceramic substrates by brazing, so as to hold them. The metal substrates are fixable to a substrate on which optical components are mounted and a semiconductor laser package, by yttrium-aluminum-garnet (YAG) laser welding. The YAG laser welding and the brazing operation eliminate the use of low-temperature solder, where creeps may occur.
Abstract translation: 珀尔帖冷却器包括多个珀耳帖元件，第一和第二陶瓷基板被设置成通过形成在陶瓷基板内部的金属化电极来保持珀耳帖元件并将珀耳帖元件串联电连接，第一和第二金属基板分别固定到 第一和第二陶瓷基板通过钎焊，以便保持它们。 通过钇 - 铝 - 石榴石（YAG）激光焊接，金属基板可固定到其上安装有光学部件的基板和半导体激光器封装。 YAG激光焊接和钎焊操作消除了使用可能发生蠕变的低温焊料。
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公开(公告)号：US5546417A
公开(公告)日：1996-08-13
申请号：US330309
申请日：1994-10-27
Applicant: Vladimir Gorelik
Inventor： Vladimir Gorelik
IPC: G02B6/42 , G02B6/43 , G06E3/00 , G06F1/20 , H01L21/02 , H01L23/473 , H01L27/15 , H01L31/12 , H01S5/00 , H01S5/02 , H01S5/024 , H01S5/026 , H01S5/40 , H01S5/42 , H04N5/335 , H01S3/19 , H01S3/045
CPC classification number: H04N5/335 , G02B6/43 , H01L2924/0002 , H01S5/02248 , H01S5/02284 , H01S5/4025
Abstract: A new technology in semiconductor electronics is provided wherein basic semiconductor elements (BSEs) are fabricated on the surfaces of hollow, cone-shaped and/or other planar or non-planar substrata. Photosensitive and photoemitting elements are included within each BSE capable of transmitting and receiving signals to and from external sources in a direction that is non-parallel (oblique) to the silicon surface and circuitry plane. Inter-BSE communication are also achieved via fiber optic connectors. In one embodiment, the BSEs may be assembled in an efficient arrangement whereby some number of BSEs (for example, six (6)) are located adjacent and surrounding another "polar" BSE, thereby providing for short opto-electronic connections between the polar BSE and its neighbors. In additional embodiments, a power supply may reside within the internal space of the BSE, and the interior and exterior of the BSEs are designed as opposite electrical poles, thereby providing power to the BSEs. A highly effective method of cooling may also be provided by transferring coolant within conduits into the interior of each BSE, through the power supply and between the exterior of the internal power supply and the substrata. The present invention may also be applied, in one embodiment, to accept visual information in much the same way as the eye of an animal.
Abstract translation: 提供了半导体电子学中的新技术，其中在中空，锥形和/或其他平面或非平面基底的表面上制造基本半导体元件（BSE）。 每个BSE中都包括光敏和光发射元件，能够在与硅表面和电路平面不平行（倾斜）的方向上向外部源发送和接收信号。 BSE通信也通过光纤连接器实现。 在一个实施例中，BSE可以以有效的布置组装，由此一些数量的BSE（例如，六（6））定位成邻近并围绕另一“极性”BSE，从而提供极性BSE之间的短的光电连接 及其邻国。 在另外的实施例中，电源可以驻留在BSE的内部空间内，并且BSE的内部和外部被设计为相对的电极，从而向BSE提供电力。 还可以通过将导管内的冷却剂传送到每个BSE的内部，通过电源以及在内部电源和基板的外部之间提供高效的冷却方法。 在一个实施例中，本发明也可以应用于以与动物的眼睛相同的方式接受视觉信息。
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公开(公告)号：US5299213A
公开(公告)日：1994-03-29
申请号：US26100
申请日：1993-03-04
Applicant: Kazuki Kuba , Takashi Yamamoto , Shigenori Yagi
Inventor： Kazuki Kuba , Takashi Yamamoto , Shigenori Yagi
CPC classification number: H01S3/025 , H01S3/042 , H01S3/093 , H01S3/0407 , H01S3/0606 , H01S3/08072
Abstract: A solid state laser apparatus comprises a laser medium having a pair of optically flat surfaces confronting to each other, and side surfaces intersecting the optically flat surfaces along an optical axis, the laser medium having a rectangular cross section; heat insulators adhered to the side surfaces of the laser medium; and reflective films for shielding the thermal insulators from pumping light. A solid state laser apparatus may comprise heat conductors bonded to the side surfaces of the laser medium, the heat conductors removing heat which occurs at bonding surfaces, the amount of removed heat from the side surfaces being smaller than that from the optically flat surfaces.
Abstract translation: 固体激光装置包括具有彼此面对的一对光学平面的激光介质和沿着光轴与光学平坦表面相交的侧表面，激光介质具有矩形横截面; 绝热体粘附到激光介质的侧表面; 以及用于屏蔽热绝缘体而不是泵浦光的反射膜。 固体激光装置可以包括结合到激光介质的侧表面的热导体，去除在结合表面处发生热量的热导体，从侧面移除的热量比从光学平面表面移除的热量少。
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公开(公告)号：US4805177A
公开(公告)日：1989-02-14
申请号：US185706
申请日：1988-04-25
Applicant: Danny W. Martin , Rodney J. Osterhage , Kenneth M. Summa
Inventor： Danny W. Martin , Rodney J. Osterhage , Kenneth M. Summa
IPC: H01S3/04 , H01S3/042 , H01S3/06 , H01S3/0941 , H01S3/045
CPC classification number: H01S3/0606 , H01S3/042 , H01S3/0941 , H01S3/025 , H01S3/0405 , H01S3/0602 , H01S3/094084
Abstract: A laser device having apparatus for increasing the pump energy from a laser diode array pump source that is available to be absorbed by the laser medium, the device also includes a heat sink apparatus having portions associated with the laser medium and with the pump source for dissipating the heat generated therein efficiently enough so that the device can be operated effectively even in a continuous wave mode.
Abstract translation: 一种激光装置，其具有用于增加可由激光介质吸收的激光二极管阵列泵浦源的泵浦能量的装置，该装置还包括散热装置，其具有与激光介质相关联的部分以及用于耗散的泵浦源 在其中产生的热量足够有效，使得即使在连续波模式下也能有效地操作该装置。
