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1.发明授权公开(公告)号：US11788908B2
公开(公告)日：2023-10-17
申请号：US17027606
申请日：2020-09-21
CPC分类号： G01M11/30 , G02B6/023 , G02B6/0288 , H01S3/11
摘要： Methods and apparatuses for quantitatively measuring strain in an optical fiber. An optical source comprising an optical beam generator and a pulse generator receives instructions from a controller and generates a pulsed optical beam in response to those instructions. The pulsed optical beam is directed into an optical fiber to generate a reflected beam from scattering centers within the optical fiber. A detector records a plurality of frames of data generated by the reflected beam, and the controller tracks an evolution of a speckle pattern carried by the reflected beam from the plurality of frames and calculates a strain induced in a section of the optical fiber from the evolution of the speckle pattern.
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公开(公告)号：US20230319959A1
公开(公告)日：2023-10-05
申请号：US17707109
申请日：2022-03-29
发明人： Matthew Partlow , Donald Smith , Matthew Besen , Akinori Asai
CPC分类号： H05B41/30 , H01S3/0602 , G02B27/141 , H01S3/1115 , H01S3/1623 , H01S3/1643 , H01J65/00 , H01J61/16
摘要： An electrodeless laser-driven light source includes a laser source that generates a CW sustaining light and a pump laser that generates a pump. An optical beam combiner combines the CW sustaining light and the pump such that the CW sustaining light and the pump propagate co-linearly. A Q-switched laser crystal generates pulsed light in response to the pump. A gas-filled bulb is configured such that the pulsed light ignites a pulse plasma in a breakdown region of the gas bulb and the sustaining light sustains a CW plasma in a CW plasma region of the gas bulb, thereby emitting a high brightness light from the gas bulb, where the gas-filled bulb is positioned between the output of the pump laser and the pump input of the Q-switched laser crystal such that the CW plasma absorbs the pump light quenching the pulsed light generated by the Q-switched laser crystal.
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公开(公告)号：US11737200B2
公开(公告)日：2023-08-22
申请号：US17228157
申请日：2021-04-12
发明人： Chun-Lin Louis Chang , Jen-Hao Yeh , Han-Lung Chang , Tzung-Chi Fu , Bo-Tsun Liu , Li-Jui Chen , Po-Chung Cheng
IPC分类号： H05G2/00 , G21K1/06 , H01S3/13 , H01S3/104 , H01S3/23 , H01S3/11 , H01S3/223 , H01S3/134 , H01S3/10
CPC分类号： H05G2/008 , G21K1/062 , H01S3/104 , H01S3/1305 , H05G2/005 , H01S3/10038 , H01S3/10069 , H01S3/11 , H01S3/134 , H01S3/2232 , H01S3/2316 , H01S3/2333 , H01S3/2383
摘要： A system includes a laser source operable to provide a laser beam, a laser amplifier having a gain medium operable to provide energy to the laser beam when the laser beam passes through the laser amplifier, and a residual gain monitor operable to provide a probe beam and operable to derive a residual gain of the laser amplifier from the probe beam when the probe beam passes through the laser amplifier while being offset from the laser beam in time or in path.
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公开(公告)号：US11588293B2
公开(公告)日：2023-02-21
申请号：US16165022
申请日：2018-10-19
发明人： Chun-Lin Louis Chang , Henry Tong Yee-Shian , Alan Tu , Han-Lung Chang , Tzung-Chi Fu , Bo-Tsun Liu , Li-Jui Chen , Po-Chung Cheng
IPC分类号： H01S3/10 , H01S3/23 , H01S3/04 , H01S3/11 , H01S3/223 , H01S3/041 , H01S3/00 , H05G2/00 , H01S3/104
摘要： The present disclosure provides a method for aligning a master oscillator power amplifier (MOPA) system. The method includes ramping up a pumping power input into a laser amplifier chain of the MOPA system until the pumping power input reaches an operational pumping power input level; adjusting a seed laser power output of a seed laser of the MOPA system until the seed laser power output is at a first level below an operational seed laser power output level; and performing a first optical alignment process to the MOPA system while the pumping power input is at the operational pumping power input level, the seed laser power output is at the first level, and the MOPA system reaches a steady operational thermal state.
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公开(公告)号：US20230052481A1
公开(公告)日：2023-02-16
申请号：US17962148
申请日：2022-10-07
申请人： RnD-ISAN, Ltd , ISTEQ B.V.
发明人： Dmitriy Borisovich ABRAMENKO , Robert Rafilevich GAYASOV , Denis Alexandrovich GLUSHKOV , Yurii Borisovich KIRYUKHIN , Vladimir Mikhailovich KRIVTSUN , Aleksandr Andreevich LASH
摘要： The light source contains a gas-filled chamber with a plasma sustained by a focused beam of a continuous wave laser. The means for plasma ignition is a solid-state laser system which generates two pulsed laser beams: in a free running mode and in a Q-switched mode. The solid-state laser system contains single active element and its optical cavity is equipped with a Q-switch overlapping only part of a cross section of the intracavity laser beam. One pulsed laser beam provides an optical breakdown after which another pulsed laser beam ignites the plasma, the volume and density of which are sufficient for stationary sustanance of the plasma by the focused beam of the continuous wave laser. EFFECT: simplification of the design of the light source, increase of its reliability and ease of use, creating on this basis of powerful electrode-free high-brightness broadband light sources with high spatial and energy stability.
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公开(公告)号：US11581693B2
公开(公告)日：2023-02-14
申请号：US16582478
申请日：2019-09-25
发明人： Shenglong Zhuo , Patrick Yin Chiang
摘要： The disclosure relates to a pulsed laser driver that utilizes a high-voltage switch transistor to support a high output voltage for a laser, and a low-voltage switch transistor that switches between an ON state and an OFF state to generate a pulsed current that is supplied to the laser to generate an output pulsed laser signal. The pulsed laser driver switches the low-voltage switch transistor between the ON state and the OFF state according to an input pulsed signal such that the output pulsed laser signal is modulated according to the input pulsed signal. The pulsed laser driver also utilizes a feedback control module to control the gate terminal voltage of the high-voltage switch transistor to improve the precision of the output pulsed laser signal.
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7.发明申请公开(公告)号：US20220393422A1
公开(公告)日：2022-12-08
申请号：US17817820
申请日：2022-08-05
申请人： Gigaphoton Inc.
发明人： Natsuhiko KOUNO , Masato MORIYA
摘要： A laser apparatus according to an aspect of the present disclosure includes a laser oscillator that outputs pulsed laser light, a deformable mirror including a deformer that deforms a reflective surface, a first processor that drives the deformer during the period for which the reflective surface reflects the pulsed laser light, a homogenizer that homogenizes the pulsed laser light reflected off the deformable mirror, and a spectrum measuring instrument that measures the spectrum of the pulsed laser light homogenized by the homogenizer.
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公开(公告)号：US20220387105A1
公开(公告)日：2022-12-08
申请号：US17886685
申请日：2022-08-12
申请人： CYNOSURE, LLC
摘要： Methods, systems and apparatus are disclosed for delivery of pulsed treatment radiation by employing a pump radiation source generating picosecond pulses at a first wavelength, and a frequency-shifting resonator having a lasing medium and resonant cavity configured to receive the picosecond pulses from the pump source at the first wavelength and to emit radiation at a second wavelength in response thereto, wherein the resonant cavity of the frequency-shifting resonator has a round trip time shorter than the duration of the picosecond pulses generated by the pump radiation source. Methods, systems and apparatus are also disclosed for providing beam uniformity and a sub-harmonic resonator.
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公开(公告)号：US20220373893A1
公开(公告)日：2022-11-24
申请号：US17817182
申请日：2022-08-03
申请人： Gigaphoton Inc.
发明人： Koichi FUJII , Osamu WAKABAYASHI
摘要： An exposure system according to an aspect of the present disclosure includes a laser apparatus emitting a pulse laser beam, an illumination optical system guiding the pulse laser beam to a reticle, a reticle stage moving the reticle, and a processor controlling emission of the pulse laser beam and movement of the reticle. The exposure system performs scanning exposure of a semiconductor substrate by irradiating the reticle with the pulse laser beam. The reticle has first and second regions. The processor instructs the laser apparatus about, based on proximity effect characteristics corresponding to the first and second regions, a value of a control parameter of the pulse laser beam corresponding to each region so that the laser apparatus emits the pulse laser beam with which a difference of the proximity effect characteristic of each region from a reference proximity effect characteristic is in an allowable range.
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公开(公告)号：US11486982B2
公开(公告)日：2022-11-01
申请号：US16784401
申请日：2020-02-07
发明人： Jungwon Kim , Yongjin Na
IPC分类号： G01S7/48 , G01S7/4865 , G01S7/484 , G01S17/88 , H01S3/11
摘要： A sensing system is provided. The sensing system includes an electrical pulse generator that receives first optical pulses output from a pulsed laser, through a first path, and photo-electrically converts the first optical pulses to generate an electrical pulses; and an optical phase detector that receives second optical pulses output from the pulsed laser, through a second path, and outputs an electrical signal that corresponds to a phase error between the electrical pulses and the second optical pulses based on electro-optic sampling.
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