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公开(公告)号：US20250044603A1
公开(公告)日：2025-02-06
申请号：US18647577
申请日：2024-04-26
Applicant: Ameranth, Inc.
Inventor： Keith R. McNally
Abstract: Systems, methods, software and a framework are disclosed for an improved, adaptable, intelligent, real time, machine learning, AI/Robot integrated, large scale, cloud computing based synchronous communications/computing network enabled with adaptive intelligent ‘4D spherical scaling’ of databases, servers, and/or virtual servers and/or server clusters and elastically with their directly associated computer caches/storage and linked and ‘intra-scalable microservices’ and with external resources and with ‘tech stack awareness’, and ‘tech stack integration’ functionality.
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公开(公告)号：US12166329B2
公开(公告)日：2024-12-10
申请号：US17396928
申请日：2021-08-09
Inventor： Weihua Jiang , Hiroshi Umeda , Koji Kakizaki
IPC: H01S3/13 , H01S3/091 , H01S3/097 , H01S3/0971 , H01S3/0973 , H01S3/0975 , H01S3/131 , G03F7/00 , G03F7/20 , H01F27/24 , H01F27/28 , H01S3/225
Abstract: A high voltage pulse generation device includes n transformer cores configuring a transformer, n being a natural number of 2 or more, each of the n transformer cores being configured to form a magnetic circuit along a first plane and to have a width in a first direction parallel to the first plane larger than a width in a second direction parallel to the first plane and perpendicular to the first direction; n primary electric circuits of the transformer connected in parallel to each other, each of the n primary electric circuits including at least one primary coil, and m pulse generation units connected in parallel to the at least one primary coil, m being a natural number equal to or more than 2; and a secondary electric circuit of the transformer including a secondary coil and connected to a pair of discharge electrodes.
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公开(公告)号：US12160085B2
公开(公告)日：2024-12-03
申请号：US17220993
申请日：2021-04-02
Applicant: Gigaphoton Inc.
Inventor： Taisuke Miura , Takashi Onose , Osamu Wakabayashi
IPC: H01S5/0687 , H01S3/225 , H01S3/23 , H01S5/00 , H01S5/042 , H01S5/0683 , H01S5/40 , H01S3/067 , H01S5/50
Abstract: A laser system according to one aspect of the present disclosure includes a wavelength-variable first solid-state laser device configured to output a first pulse laser beam; a wavelength conversion system including a first nonlinear crystal configured to wavelength-convert the first pulse laser beam and a first rotation stage configured to change a first incident angle of the first pulse laser beam on the first nonlinear crystal; an excimer amplifier configured to amplify a pulse laser beam wavelength-converted by the wavelength conversion system; and a control unit configured to receive, from an external device, data of a target center wavelength of an excimer laser beam output from the excimer amplifier, control a wavelength of the first pulse laser beam in accordance with the instructed target center wavelength, and control the first incident angle on the first nonlinear crystal in accordance with an average value of the target center wavelength.
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公开(公告)号：US20240219846A1
公开(公告)日：2024-07-04
申请号：US18606012
申请日：2024-03-15
Applicant: Gigaphoton Inc.
Inventor： Koichi FUJII
CPC classification number: G03F7/70633 , G03F7/70358 , H01S3/08009 , H01S3/225
Abstract: An electronic device manufacturing method includes performing scanning exposure in which plural scan fields of a first photosensitive substrate are exposed to pulse laser light having a reference wavelength, measuring overlay errors at plural positions in each of the plural scan fields, calculating the average of the overlay errors at each of the plural positions in scan fields scanned in the same scan direction out of the plural scan fields, calculating the amount of wavelength adjustment with respect to the reference wavelength in such a way that a first overlay error parameter calculated from the averages and distortions produced when the wavelength of the pulse laser light is changed from the reference wavelength is smaller than a second overlay error parameter calculated from the averages, causing a laser apparatus to generate the pulse laser light having a wavelength controlled by using the amount of wavelength adjustment, outputting the pulse laser light to an exposure apparatus, and exposing a second photosensitive substrate to the pulse laser light in the exposure apparatus to manufacture electronic devices.
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公开(公告)号：US20240170905A1
公开(公告)日：2024-05-23
申请号：US18552634
申请日：2022-03-07
Applicant: ASML Netherlands B.V.
Inventor： Herman Philip GODFRIED
CPC classification number: H01S3/0057 , G02B27/48 , G03F7/70025 , G03F7/70041 , G03F7/7015 , H01S3/225
Abstract: A laser system comprising: a laser operable to generate a laser beam; an optical system comprising a first optical element and a second optical element; and an output through which the laser beam exits the laser system; the laser, optical system and output arranged such that the laser beam travels to the first optical element, the second optical element and the output sequentially; wherein the first optical element has a first focal length, the second optical element has a second focal length equal to the first focal length, and the second optical element is spaced from the first optical element by a distance of two times the first focal length.
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Patent Agency Ranking
公开(公告)号：US20240128701A1
公开(公告)日：2024-04-18
申请号：US18531771
申请日：2023-12-07
Applicant: Gigaphoton Inc.
Inventor： Atsushi FUCHIMUKAI
CPC classification number: H01S3/0064 , G02F1/0136 , G02F1/09 , G03F7/2006 , G03F7/70025 , G03F7/70566 , H01S3/0014 , H01S3/225 , H01S3/2308 , H01S2302/00
Abstract: An ultraviolet laser device includes an oscillation stage laser outputting linearly polarized pulse laser light having an ultraviolet wavelength, an optical isolator arranged on an optical path between the oscillation stage laser and an amplifier, and a processor. The optical isolator includes a first polarizer, a first Faraday rotator rotating a polarization direction of the pulse laser light transmitted through the first polarizer in a first rotation direction, a second polarizer arranged so that the pulse laser light output from the first Faraday rotator is transmitted therethrough, a first actuator relatively moving the first magnet and the first Faraday material in an optical axis direction, and a first sensor measuring a power of pulse laser light reflected by the second polarizer among the pulse laser light output from the oscillation stage laser. The processor controls the first actuator based on a measurement result of the first sensor.
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公开(公告)号：US20240079844A1
公开(公告)日：2024-03-07
申请号：US18504532
申请日：2023-11-08
Applicant: Gigaphoton Inc.
Inventor： Takashi SHIGA
CPC classification number: H01S3/1301 , G03F7/70025 , H01S3/10069 , H01S3/225 , H01S3/2316
Abstract: A laser device includes a master oscillator outputting pulse laser light at a first discharge timing synchronized with a repetition frequency; an amplifier amplifying the pulse laser light by exciting, at a second discharge timing, a laser medium through which the pulse laser light passes; and a processor setting the second discharge timing by adding a delay time to the first discharge timing, holding a first value as a command value of the delay time corresponding to a first repetition frequency, holding a second value as the command value of the delay time corresponding to a second repetition frequency, and outputting the command value of the second value after outputting the command value of a third value between the first value and the second value when the repetition frequency is changed from the first repetition frequency to the second repetition frequency after outputting the command value of the first value.
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公开(公告)号：US20230378713A1
公开(公告)日：2023-11-23
申请号：US18363602
申请日：2023-08-01
Applicant: Gigaphoton Inc. , Inter-University Research Institute Corporation, National Institutes of Natural Sciences
Inventor： Yuki TAMARU , Taisuke MIURA , Ryo YASUHARA
CPC classification number: H01S3/10061 , H01S3/0064 , H01S3/2251 , H01S3/2256 , H01S3/0071 , H01S3/0014 , H01S3/2325 , G03F7/70025 , G03F7/70191
Abstract: An ultraviolet laser apparatus includes an oscillation-stage laser, an amplifier that amplifies the pulse laser light, and an optical isolator. The optical isolator includes a first Faraday rotator that rotates the polarization direction of the pulse laser light output from the oscillation-stage laser by a first angle in a first rotation direction, a first polarizer so disposed to transmit the pulse laser light that exits out of the first Faraday rotator at normalized transmittance greater than or equal to 0.9, a second Faraday rotator that rotates the polarization direction of the pulse laser light passing through the first polarizer by a second angle in the opposite direction to the first rotation direction, and a second polarizer so disposed to transmit the pulse laser light that exits out of the second Faraday rotator at the normalized transmittance greater than or equal to 0.9.
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9.发明公开公开(公告)号：US20230375847A1
公开(公告)日：2023-11-23
申请号：US18363651
申请日：2023-08-01
Applicant: Gigaphoton Inc. , Inter-University Research Institute Corporation, National Institutes of Natural Sciences
Inventor： Yuki TAMARU , Taisuke MIURA , Ryo YASUHARA
CPC classification number: G02B27/28 , H01S3/0401 , H01S3/2251 , H01S3/2256 , H01S3/23
Abstract: An optical isolator includes a first polarizer arranged such that a transmission axis thereof is set to cause a normalized transmittance with respect to incident light having a wavelength of ultraviolet and linear polarization to be 0.9 or more, a Faraday rotator using a Faraday material configured to rotate a polarization direction of light having transmitted through the first polarizer in a first rotation direction by a first rotation amount by a magnetic field and rotate the polarization direction in a second rotation direction opposite to the first rotation direction by a second rotation amount by optical activity or birefringence, and a second polarizer arranged such that a transmission axis thereof is set to cause a normalized transmittance with respect to the incident light having transmitted through the Faraday rotator to be 0.9 or more.
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10.发明公开公开(公告)号：US20230375846A1
公开(公告)日：2023-11-23
申请号：US18363279
申请日：2023-08-01
Applicant: Gigaphoton Inc. , Inter-University Research Institute Corporation, National Institutes of Natural Sciences
Inventor： Yuki TAMARU , Taisuke MIURA , Ryo YASUHARA
CPC classification number: G02B27/28 , H01S3/0401 , H01S3/2256 , H01S3/2251 , H01S3/23
Abstract: An optical isolator according to an aspect of the present disclosure includes a first polarizer through which incident light transmits, a Faraday rotator configured to rotate the polarization direction of the light, and a second polarizer through which the light transmits. The Faraday rotator includes a calcium fluoride crystal. When a, b, and c axes are the [001], [100], and [010] crystallographic axes, respectively, and x, y, and z axes are obtained by rotating the three axes by a first angle of 40° to 50° about the c axis and by a second angle of 45° to 75° about the b axis rotated by the first angle, the z axis is parallel to the propagation direction of the light, and the calcium fluoride crystal is disposed such that the transmission axis of the first polarizer and the x axis have an angle difference of 0° to 45°.
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