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公开(公告)号：US20230139746A1
公开(公告)日：2023-05-04
申请号：US18075589
申请日：2022-12-06
摘要： An optical source for a photolithography tool includes a source configured to emit a first beam of light and a second beam of light, the first beam of light having a first wavelength, and the second beam of light having a second wavelength, the first and second wavelengths being different; an amplifier configured to amplify the first beam of light and the second beam of light to produce, respectively, a first amplified light beam and a second amplified light beam; and an optical isolator between the source and the amplifier, the optical isolator including: a plurality of dichroic optical elements, and an optical modulator between two of the dichroic optical elements.
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公开(公告)号：US11641090B2
公开(公告)日：2023-05-02
申请号：US16947109
申请日：2020-07-17
申请人： Raytheon Company
发明人： Aaron B. Potter , Kalin Spariosu
摘要： A system includes a planar waveguide that includes an active gain medium configured to receive pump light from a pump source and amplify stimulated emission light. The planar waveguide has a fast axis and a slow axis and is configured to operate in single mode in the fast axis and multimode in the slow axis. The system also includes a hybrid spatial filter configured to receive the amplified stimulated emission light from the planar waveguide and output laser light. The hybrid spatial filter includes a physical slit having a narrower dimension corresponding to the slow axis of the planar waveguide. The physical slit is configured to reduce an intensity of the amplified stimulated emission light received from the planar waveguide. The hybrid spatial filter also includes a Volume Bragg Grating (VBG) configured to constrain an angle of the amplified stimulated emission light and enable compact geometry intra-cavity beam expanding/collimating optics.
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公开(公告)号：US20230124587A1
公开(公告)日：2023-04-20
申请号：US18081971
申请日：2022-12-15
申请人： Cymer, LLC
发明人： Eric Anders Mason
IPC分类号： G02B27/42 , G01J3/06 , G01J3/14 , G01J3/18 , G03F7/20 , H01S3/08 , G02B26/00 , H01L21/027 , H01S3/00 , H01S3/23
摘要： A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.
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公开(公告)号：US11609380B2
公开(公告)日：2023-03-21
申请号：US17423986
申请日：2020-03-11
申请人： Fujikura Ltd.
IPC分类号： G02B6/02 , G02B6/14 , G02B6/255 , H01S3/00 , H01S3/23 , G02B6/028 , G02B6/036 , G02B6/245 , H01S5/40
摘要： A laser device includes: a laser unit that outputs laser light; an output end that launches the laser light; a first fusion splice portion; and a second fusion splice portion. In each of the first fusion splice portion and the second fusion splice portion, two multi-mode fibers are fusion-spliced. Each of the two multi-mode fibers include a core through which the laser light propagates and a cladding that surrounds the core. The first fusion splice portion is disposed closer to the laser unit than is the second fusion splice portion. At least a part of the core in the first fusion splice portion contains a dopant that is the same type as a dopant contained in the cladding in the first fusion splice portion for decreasing a refractive index.
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公开(公告)号：US11586032B2
公开(公告)日：2023-02-21
申请号：US16435986
申请日：2019-06-10
申请人： Gigaphoton Inc.
发明人： Hiroyuki Ito , Hiroshi Tanaka
IPC分类号： H05G2/00 , H01S3/00 , G02B26/08 , G02B27/10 , G02B27/14 , H01S3/223 , H01S3/23 , H01S3/10 , B23K26/00
摘要： A laser apparatus may include: a mirror configured to reflect a laser beam; an actuator configured to operate the mirror; and a controller configured to transmit a movement instruction to the actuator, wherein the controller predicts a movement completion time of the actuator, and transmits a polling signal so that the actuator receives the polling signal after expiration of the predicted movement completion time.
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公开(公告)号：US11553582B2
公开(公告)日：2023-01-10
申请号：US16840714
申请日：2020-04-06
摘要： An optical source for a photolithography tool includes a source configured to emit a first beam of light and a second beam of light, the first beam of light having a first wavelength, and the second beam of light having a second wavelength, the first and second wavelengths being different; an amplifier configured to amplify the first beam of light and the second beam of light to produce, respectively, a first amplified light beam and a second amplified light beam; and an optical isolator between the source and the amplifier, the optical isolator including: a plurality of dichroic optical elements, and an optical modulator between two of the dichroic optical elements.
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公开(公告)号：US20230006412A1
公开(公告)日：2023-01-05
申请号：US17902406
申请日：2022-09-02
申请人： BNNT, LLC
摘要： Orbital debt is removal (ODR) systems under the present approach may use a ground- or surface-based FEL and mirror system with sufficient power and both spatial and temporal resolution to both locate Category II OD (1 cm to 10 cm diameter) in low Earth orbit (LEO, 160 to 2000 km altitude) and remove these objects from orbit. Locating the Category II OD is performed by having, the light beam from an FEL and its beam director scan a volume of space of interest and then observing the light reflected from the OD. Removing the OD may include heating the OD to a sufficiently high temperature to evaporate the OD, changing the orbit of the OD such as to lower the perigee, or both. Megawatt-class MOPA FELs for, inter alia, removing OD, are described.
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公开(公告)号：US11526083B2
公开(公告)日：2022-12-13
申请号：US16980467
申请日：2019-03-01
申请人： Cymer, LLC
摘要： A method includes driving, while producing a burst of pulses at a pulse repetition rate, a spectral feature adjuster among a set of discrete states at a frequency correlated with the pulse repetition rate; and in between the production of the bursts of pulses (while no pulses are being produced), driving the spectral feature adjuster according to a driving signal defined by a set of parameters. Each discrete state corresponds to a discrete value of a spectral feature. The method includes ensuring that the spectral feature adjuster is in one of the discrete states that corresponds to a discrete value of the spectral feature of the amplified light beam when a pulse in the next burst is produced by adjusting one or more of: an instruction to the lithography exposure apparatus, the driving signal to the spectral feature adjuster, and/or the instruction to the optical source.
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公开(公告)号：US11522331B2
公开(公告)日：2022-12-06
申请号：US17029915
申请日：2020-09-23
申请人： Raytheon Company
发明人： Gerald P. Uyeno , Sean D. Keller , Benn H. Gleason
摘要： A tip/tilt/piston (“TTP”) MEMS MMA is used to provide coherent beam combination (CBC) such that the combined beam behaves as if it were emitted from a single aperture laser, but with higher brightness than can be obtained from an individual laser. Piston actuation of the mirrors is used to adjust the phase of individual amplified laser beams and maintain a zero phase difference across all of the amplified laser beams. Tip/Tilt actuation of the mirrors is used to steer the phase-adjusted amplified laser beams to form a coherent output laser beam. Additional TTP actuation can be used to oversample and superimpose Adaptive Optics correction or focusing/defocusing on the beam. A multi-spectral system may be implemented with a common MEMS MMA to produce a spectrally beam combined, multi-channel coherent laser beam.
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公开(公告)号：US20220360036A1
公开(公告)日：2022-11-10
申请号：US17863420
申请日：2022-07-13
申请人： TRUMPF Laser GmbH
发明人： Daniel Flamm , Andreas Heimes , Maike Prossotowicz
摘要： An apparatus for combining a plurality of coherent laser beams includes a splitting device configured to split an input laser beam into the plurality of coherent laser beams, a plurality of phase setting devices configured to adjust a respective phase of one of the plurality of coherent laser beams, and a beam combining device configured to combine the plurality of coherent laser beams, which emanate from a plurality of grid positions of a grid arrangement. The beam combining device includes a microlens arrangement having at least two microlens arrays. The apparatus further includes a controller configured to adjust a respective phase of a respective one of the plurality of coherent laser beams and/or vary a respective phase of a respective one of the plurality of coherent laser beams.
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