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公开(公告)号：US20230130678A1
公开(公告)日：2023-04-27
申请号：US17906267
申请日：2020-12-28
申请人： MAXIS-01 CORPORATION
摘要： The present invention is able to reduce a CI value without requiring precise processing of a crystal blank.
An electrode structure of a crystal unit (1) according to the present invention includes driven electrodes (21, 22) arranged at least at a center on main surfaces (11, 12) of a crystal blank (10). The driven electrodes (21, 22) have a structure in which vibration energy of thickness shear vibration of the crystal blank (10) is concentrated in a central region of the crystal blank (10).-
公开(公告)号：US11563406B2
公开(公告)日：2023-01-24
申请号：US16265444
申请日：2019-02-01
发明人： Hirofumi Kawashima
IPC分类号： H03B5/30 , H03B1/04 , G04B17/00 , H01L41/08 , H01L41/053 , H03H9/215 , H03H9/10 , H03H9/05 , H03H9/02 , H03B5/36 , G01C19/5607 , H03H9/24 , H03H9/19
摘要： A quartz crystal unit comprising a quartz crystal resonator having a base portion, and first and second tuning fork arms connected to the base portion, the base portion having a length less than 0.5 mm and greater than a spaced-apart distance between the first and second tuning fork arms, each of the first and second tuning fork arms having a width less than 0.1 mm and a length less than 1.56 mm, and a plurality of different widths including a first width and a second width greater than the first width, at least one groove being formed in at least one of opposite main surfaces of each of the first and second tuning fork arms so that a length of the at least one groove is within a range of 0.3 mm to 0.79 mm, the quartz crystal resonator being housed in a case, and a lid being connected to the case.
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公开(公告)号：US11444595B2
公开(公告)日：2022-09-13
申请号：US15334459
申请日：2016-10-26
发明人： Matthew Ryder , Rio Rivas , Thayne Edwards
IPC分类号： H03B5/30 , H03H9/02 , G01N29/02 , G01N29/036 , G01N33/536 , H03H3/02 , H03H9/13 , H03H9/17 , H03H9/15
摘要： A micro-electrical-mechanical system (MEMS) resonator device includes at least one functionalization material arranged over at least a central portion, but less than an entirety, of a top side electrode. For an active region exhibiting greatest sensitivity at a center point and reduced sensitivity along its periphery, omitting functionalization material over at least one peripheral portion of a resonator active region prevents analyte binding in regions of lowest sensitivity. The at least one functionalization material extends a maximum length in a range of from about 20% to about 95% of an active area length and extends a maximum width in a range of from about 50% to 100% of an active area width. Methods for fabricating MEMS resonator devices are also provided.
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公开(公告)号：US11226241B1
公开(公告)日：2022-01-18
申请号：US17083706
申请日：2020-10-29
申请人： SiTime Coporation
发明人： Michael H. Perrott , Shungneng Lee
摘要： The temperature-dependent resistance of a MEMS structure is compared with an effective resistance of a switched CMOS capacitive element to implement a high performance temperature sensor.
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公开(公告)号：US20210344302A1
公开(公告)日：2021-11-04
申请号：US16861647
申请日：2020-04-29
IPC分类号： H03B5/30
摘要： An oscillator system includes a first oscillator structure configured to oscillate about a first rotation axis at a first oscillation frequency; a second oscillator structure configured to oscillate about a second rotation axis at a second oscillation frequency; a driver circuit configured to generate a first driving signal to drive an oscillation of the first oscillator structure with a first oscillation phase and the first oscillation frequency and generate a second driving signal to drive an oscillation of the second oscillator structure with a second oscillation phase and the second oscillation frequency. The first oscillation frequency and the second oscillation frequency have a variable frequency ratio with respect to each other that varies over time. The driver circuit is configured to modulate at least one of the first oscillation phase or the second oscillation phase to modulate the variable frequency ratio.
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公开(公告)号：US10985762B2
公开(公告)日：2021-04-20
申请号：US16240357
申请日：2019-01-04
发明人： Arnel Tagatac
摘要： Systems, methods, and devices of the present disclosure relate, generally, to compensating for frequency error of a reference signal supplied to a clock-tracking-loop due to temperature. Error characteristics of a crystal oscillator that supplies the reference signal are used to compensate for possible frequency errors. Other systems, methods and devices are disclosed.
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公开(公告)号：US10578661B2
公开(公告)日：2020-03-03
申请号：US16142802
申请日：2018-09-26
IPC分类号： G01R27/26 , G01R23/16 , G01R31/317 , G01R23/00 , B81C99/00 , H03B5/30 , G01C19/5656 , G01C19/5684
摘要： A method for determining a quality factor of an electrostatically actuated oscillator, the oscillator having a resonance frequency, the method including generating an excitation voltage defined as being the sum of a sinusoidal voltage and a voltage pulse; applying the excitation voltage at the input of the oscillator; acquiring in the time domain a response voltage present at the output of the oscillator after having ceased applying the excitation voltage at the input of the oscillator; determining the quality factor of the oscillator from the response voltage acquired at the output of the oscillator.
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公开(公告)号：US20190296690A1
公开(公告)日：2019-09-26
申请号：US16437001
申请日：2019-06-11
摘要： An integrated circuit includes first and second coils, a first pad connected to the first coil and to a resonator, a second pad connected to the second coil and to the resonator, and first and second output terminals. The first pad is arranged to provide signals between the resonator and the first coil. The second pad is arranged to provide signals between the resonator and the second coil. A distance between the first pad and the first coil is less than a distance between the first coil and the first output terminal and a distance between the first coil and the second output terminal. A distance between the second pad and the second coil is less than a distance between the second coil and the first output terminal and a distance between the second coil and the second output terminal.
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公开(公告)号：US10284142B2
公开(公告)日：2019-05-07
申请号：US15260493
申请日：2016-09-09
发明人： Marcus Rinkiö
IPC分类号： B81B3/00 , G01P3/14 , H03B5/30 , G01P15/08 , G01P15/125 , G01C19/5712
摘要： A microelectromechanical device structure comprises a supporting structure wafer. A cavity electrode is formed within a cavity in the supporting structure wafer. The cavity electrode forms a protruding structure from a base of the cavity towards the functional layer, and the cavity electrode is connected to a defined electrical potential. The cavity electrode comprises a silicon column within the cavity in the supporting structure wafer, which is partially or entirely surrounded by a cavity. One or more cavity electrodes may be utilized for adjusting a frequency of an oscillation occurring within the functional layer.
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公开(公告)号：US10243569B2
公开(公告)日：2019-03-26
申请号：US14981264
申请日：2015-12-28
摘要： An apparatus includes a temperature measuring device within a thermally conductive package. A crystal within the package is thermally coupled to the temperature measuring device and subjected to a same temperature as the temperature measuring device. A controller external to the package is configured to receive a signal from the crystal and a temperature measurement from the temperature measuring device. The controller is configured to estimate a frequency error of the crystal based on the temperature measurement and to provide a frequency error estimate to an external system.
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