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公开(公告)号：US20230119602A1
公开(公告)日：2023-04-20
申请号：US18067256
申请日：2022-12-16
发明人： Masakazu FUKUMITSU , Takashi UEDA
摘要： A resonance device that includes a MEMS substrate including a resonator having a vibrating portion, a holding portion configured to hold the vibrating portion, and an isolation groove that surrounds the vibrating portion in a plan view of the resonance device; and an upper lid facing the MEMS substrate with the resonator interposed therebetween and that includes a connection wiring electrically connected to the vibrating portion.
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公开(公告)号：US11632096B2
公开(公告)日：2023-04-18
申请号：US17542300
申请日：2021-12-03
发明人： Neal Fenzi , Ryo Wakabayashi , Bryant Garcia , Greg Dyer
摘要： Acoustic resonator devices are disclosed. An acoustic resonator device includes a plurality of cells electrically connected in parallel. Each cell includes an interdigital transducer (IDT) on a piezoelectric plate, the IDT having at least 15 and not more than 35 interleaved fingers.
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公开(公告)号：US20230115592A1
公开(公告)日：2023-04-13
申请号：US17938114
申请日：2022-10-05
摘要： An electronic device package comprises an electrical device disposed on a base substrate, a conductive column in electrical communication with the electrical device and having a first end bonded to the base substrate, a cap substrate disposed over the electrical device and bonded to a second end of the conductive column, a layer of dielectric material disposed on the lower surface of the base substrate, a through substrate via in electrical communication with the conductive column and passing through the base substrate and the layer of dielectric material, a redistribution layer disposed on the layer of dielectric material, and a contact pad formed on the redistribution layer and in electrical communication with the through substrate via through the redistribution layer, the contact pad being horizontally displaced from a position directly below the through substrate via.
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公开(公告)号：US11581871B1
公开(公告)日：2023-02-14
申请号：US16269499
申请日：2019-02-06
申请人： FemtoDx, Inc.
发明人： Pritiraj Mohanty
摘要： Nonlinear acoustic media and related methods are described herein. The nonlinear acoustic media are configured to generate higher harmonic output signals from a single-frequency input signal. The higher harmonic output signals can be generated through the coupling of an acoustic dielectric medium to a nonlinear piezoelectric medium having four ports.
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公开(公告)号：US20230014350A1
公开(公告)日：2023-01-19
申请号：US17954892
申请日：2022-09-28
发明人： Ville KAAJAKARI , Ryota KAWAI , Yoshiyuki HIGUCHI
摘要： A resonator may include a vibrating portion that includes a plurality of vibrating arms to numbering in three or more, each having a fixed end, and including at least two vibrating arms to bend out of plane with different phases and a base portion having a fore end portion to which the fixed end of each of the plurality of vibrating arms to is connected and a rear end portion opposed to the fore end portion; a holding portion configured to hold the vibrating portion; and a support arm having one end connected to the holding portion and the other end connected to the rear end portion of the base portion. The support arm is asymmetric with respect to a center line of the vibrating portion with respect to a longitudinal direction in plan view.
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公开(公告)号：US11538981B2
公开(公告)日：2022-12-27
申请号：US16911437
申请日：2020-06-25
发明人： Kenichi Kurokawa , Yukio Kitahara , Kazuo Tanaka
IPC分类号： H01L41/083 , H01L41/09 , H01L41/18 , H01L41/257 , H03H9/13 , H03H9/21 , H03H9/125 , H03H9/24
摘要： A vibration element includes: a base; a first arm continuous with the base; a second arm that is continuous with the base and is adjacent to the first arm; a first electrode disposed on the first arm, the second arm, and the base; a first piezoelectric layer that has a first polarity and that is disposed on the first electrode on the first arm; a second piezoelectric layer that has a second polarity different from the first polarity and that is disposed on the first electrode on the second arm; an insulating layer disposed on the first electrode on the base; and a second electrode disposed on the first piezoelectric layer, the second piezoelectric layer, and the insulating layer.
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公开(公告)号：US11479460B2
公开(公告)日：2022-10-25
申请号：US16369757
申请日：2019-03-29
发明人： Vamsy Chodavarapu , George Xereas
摘要： MEMS based sensors, particularly capacitive sensors, potentially can address critical considerations for users including accuracy, repeatability, long-term stability, ease of calibration, resistance to chemical and physical contaminants, size, packaging, and cost effectiveness. Accordingly, it would be beneficial to exploit MEMS processes that allow for manufacturability and integration of resonator elements into cavities within the MEMS sensor that are at low pressure allowing high quality factor resonators and absolute pressure sensors to be implemented. Embodiments of the invention provide capacitive sensors and MEMS elements that can be implemented directly above silicon CMOS electronics.
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公开(公告)号：US20220337218A1
公开(公告)日：2022-10-20
申请号：US17847438
申请日：2022-06-23
申请人： SiTime Coporation
摘要： A moveable micromachined member of a microelectromechanical system (MEMS) device includes an insulating layer disposed between first and second electrically conductive layers. First and second mechanical structures secure the moveable micromachined member to a substrate of the MEMS device and include respective first and second electrical interconnect layers coupled in series, with the first electrically conductive layer of the moveable micromachined member and each other, between first and second electrical terminals to enable conduction of a first joule-heating current from the first electrical terminal to the second electrical terminal through the first electrically conductive layer of the moveable micromachined member.
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公开(公告)号：US11444600B1
公开(公告)日：2022-09-13
申请号：US17199275
申请日：2021-03-11
申请人： SiTime Coporation
摘要： A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing signal in response to the mechanical resonance of the resonant semiconductor structure. The electrically conductive shielding structure is disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.
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公开(公告)号：US11283422B2
公开(公告)日：2022-03-22
申请号：US16860196
申请日：2020-04-28
发明人： Wakana Hirota , Toshio Nishimura , Ville Kaajakari
摘要： A resonator that includes a substrate, an insulating film that is formed on the substrate, and vibration regions each of which is formed on the insulating film and includes lower electrodes that are formed on the insulating film, a piezoelectric film that is formed on the lower electrodes, and an upper electrode that is formed on the piezoelectric film. At least one lower electrode of the lower electrodes that are formed on the insulating film has an electric potential that differs from an electric potential of another lower electrode such that at least one vibration region vibrates in antiphase with another vibration region. Moreover, a package seals a resonator and includes the substrate, the insulating film, and the vibration regions and includes a ground terminal for grounding the substrate.
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