Tilt and rotate dispenser having strain wave gear system

    公开(公告)号:US11246249B2

    公开(公告)日:2022-02-08

    申请号:US16849249

    申请日:2020-04-15

    摘要: A dispensing system includes a dispensing unit assembly configured to dispense viscous material and a gantry coupled to the frame. The gantry is configured to support the dispensing unit assembly and to move the dispensing unit assembly in x-axis and y-axis directions. The dispensing unit assembly includes a support bracket secured to the gantry and a movable bracket rotatably coupled to the support bracket by a first strain wave gear system configured to enable the rotation of the movable bracket with respect to the support bracket about a first axis. The dispensing unit assembly further includes a dispensing unit rotatably coupled to the movable bracket by a second strain wave gear system configured to enable the rotation of the dispensing unit with respect to the movable bracket about a second axis generally perpendicular to the first axis.

    Processing tool having a monitoring device

    公开(公告)号:US10957565B2

    公开(公告)日:2021-03-23

    申请号:US16941405

    申请日:2020-07-28

    摘要: Embodiments include systems, devices, and methods for monitoring etch or deposition rates, or controlling an operation of a wafer fabrication process. In an embodiment, a processing tool includes a processing chamber having a liner wall around a chamber volume, and a monitoring device having a sensor exposed to the chamber volume through a hole in the liner wall. The sensor is capable of measuring, in real-time, material deposition and removal rates occurring within the chamber volume during the wafer fabrication process. The monitoring device can be moved relative to the hole in the liner wall to selectively expose either the sensor or a blank area to the chamber volume through the hole. Accordingly, the wafer fabrication process being performed in the chamber volume may be monitored by the sensor, and the sensor may be sealed off from the chamber volume during an in-situ chamber cleaning process. Other embodiments are also described and claimed.

    Display panel manufacturing device

    公开(公告)号:US10714687B2

    公开(公告)日:2020-07-14

    申请号:US15459485

    申请日:2017-03-15

    发明人: Hyea-Weon Shin

    摘要: A display panel manufacturing device including a stage slider, a first stage configured to slide on the stage slider and to receive a test substrate, a second stage on the stage slider and configured to receive a main substrate, and a patterning unit located at a distance from the stage slider and configured to discharge organic drops onto the test substrate, configured to analyze patterns of the organic drops, configured to modify the patterns of the discharged organic drops according to an analysis of the patterns of the organic drops, and configured to discharge the organic drops onto the main substrate.

    Device and method for coating objects

    公开(公告)号:US10589310B2

    公开(公告)日:2020-03-17

    申请号:US15502886

    申请日:2015-08-12

    摘要: The invention relates to a device for arranging objects in particular tableware, in a system for coating including a base element, an adapter element and a support element, each of which are designed in such a manner that they can be plugged together in a direction (z). In the plugged-together state, the adapter element is arranged between the base element and the support element with the object disposed in a predetermined position on the adapter element. The adapter element, the base element and the support element are locked relative to one another with the object in such a manner that only a relative movement in the direction (z) is possible amongst each other. The invention further relates to a method for the arrangement of objects, in particular tableware with the device, in a system for coating.