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    SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
    2.
    发明申请
    SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS 有权

    公开(公告)号：US20230101475A1

    公开(公告)日：2023-03-30

    申请号：US17947747

    申请日：2022-09-19

    申请人： SCREEN Holdings Co., Ltd.

    发明人： Takashi IZUTA ,  Hiroki TAJIRI ,  Masayuki ORISAKA

    IPC分类号： B05D1/18 ,  B05C3/04 ,  B05C11/10

    摘要： A substrate processing method is executed by a substrate processing apparatus. The substrate processing apparatus includes a processing tank, and a bubble supply pipe disposed in the processing tank. In the substrate processing method, a substrate holding section immerses a substrate in an alkaline processing liquid stored in the processing tank. A bubble supply section supplies bubbles to the alkaline processing liquid from below the substrate with the substrate immersed in the alkaline processing liquid, the bubbles being supplied from a plurality of bubble holes provided in the bubble supply pipe.

    MONOLAYER DEPOSITION OF NANOPARTICLES
    3.
    发明申请
    MONOLAYER DEPOSITION OF NANOPARTICLES 有权

    公开(公告)号：US20230095274A1

    公开(公告)日：2023-03-30

    申请号：US17794429

    申请日：2021-01-21

    申请人： NanoClear Technologies, Inc.

    发明人： Harold Frank GREER ,  Rehan KAPADIA ,  Angelica SAENZ ,  David WEBBER

    IPC分类号： B05D1/18 ,  C09D7/40 ,  B05D3/12 ,  B05D7/00

    摘要： Methods of forming a monolayer of nanoparticles are described. The method may include forming an activated surface on a substrate. Methods may also include contacting the activated surface with a fluid including nanoparticles. Methods may further include forming a plurality of monolayers in the liquid on the activated surface. The plurality of nanoparticles may include a first monolayer of nanoparticles bonded to the activated surface. The plurality of nanoparticles may include a second monolayer of nanoparticles bonded to the first monolayer of nanoparticles. The bond strengths between a nanoparticle and the underlying substrate, between adjacent nanoparticles, and between nanoparticles of adjacent monolayers may be related by a specific relationship. The method may also include removing monolayers of the plurality of monolayers while retaining the first monolayer to form the substrate with the first monolayer. Systems for performing the methods and substrates resulting from the methods are also described.

    Method for producing silica aerogel blanket and apparatus for producing same
    8.
    发明授权
    Method for producing silica aerogel blanket and apparatus for producing same 有权

    公开(公告)号：US11554962B2

    公开(公告)日：2023-01-17

    申请号：US16627564

    申请日：2018-08-21

    申请人： LG CHEM, LTD.

    发明人： Kyung Seok Min ,  Je Kyun Lee

    IPC分类号： C01B33/152 ,  C01B33/146 ,  B05D1/18

    摘要： Provided is a method for producing a silica aerogel blanket and an apparatus for producing the same, which are capable of easily controlling the physical properties of a silica aerogel blanket by separately injecting silica sol and a gelation catalyst to control gelation time, improving aerogel pore structure to be uniform and improving thermal insulation performance by sufficiently and uniformly impregnating the silica sol and the gelation catalyst into a blanket, reducing the loss of silica sol and gelation catalyst by allowing the silica sol and the gelation catalyst to pass on an ascending slope before gelation to remove any excessive silica sol and gelation catalyst exceeding an appropriate impregnation amount, and providing a silica aerogel blanket having less process trouble, and less dust.

    ROBOT-CENTERED COATING SYSTEM AND METHOD
    9.
    发明申请
    ROBOT-CENTERED COATING SYSTEM AND METHOD 有权

    公开(公告)号：US20220388025A1

    公开(公告)日：2022-12-08

    申请号：US17338348

    申请日：2021-06-03

    申请人： SST Systems, Inc.

    发明人： Robert G. Rock ,  Chad Martin Andreae

    IPC分类号： B05D1/18 ,  B05C13/00 ,  B05C3/10 ,  B05D3/00 ,  B05D3/02 ,  B05C3/08 ,  B25J17/02 ,  B25J15/00 ,  B25J11/00

    摘要： A coating system includes a plurality of liquid immersion workstations positioned along an arcuate path, the plurality of liquid immersion workstations defining a single complete coating process for a sequence of objects. A plurality of curing workstations are configured to independently receive objects of the sequence of objects exiting the plurality of liquid immersion workstations. An articulated robotic arm has a base positioned inside the arcuate path in top plan view such that the robotic arm is operable to carry each object of the sequence of objects through each of the plurality of liquid immersion workstations and to exactly one of the plurality of curing workstations. An articulated robotic hand is provided at a distal end of the robotic arm and configured to grasp and hold each of the objects and to oscillate the object while submerged in each of the plurality of liquid immersion workstations.