OPTICAL APPARATUS
    7.
    发明公开
    OPTICAL APPARATUS 审中-公开

    公开(公告)号:US20240342825A1

    公开(公告)日:2024-10-17

    申请号:US18292112

    申请日:2022-06-09

    IPC分类号: B23K26/042 B23K26/08

    CPC分类号: B23K26/042 B23K26/0876

    摘要: In order to implement a stage device for an optical instrument capable of accurately directing the optical instrument to a desired target position on an object supported by a moving stage, a stage device 2 for an optical instrument includes a table 22 configured to support an object and to move together with the object to cause an optical instrument 1 to be directed to any portion of the object; and a detection mechanism configured to detect a deviation between a target position to which the optical instrument 1 is to be directed on the object supported by the table 22 and a position to which the optical instrument 1 is actually directed.