FORMING APPARATUS AND ARTICLE MANUFACTURING METHOD

    公开(公告)号:US20240300165A1

    公开(公告)日:2024-09-12

    申请号:US18668382

    申请日:2024-05-20

    发明人: TAKAHIRO SATO

    摘要: A forming apparatus forms a formable material using a mold including a contact region to be brought into contact with the formable material on a substrate. The apparatus includes a controller configured to perform processing of bringing the contact region and the formable material on the substrate into contact with each other. The controller controls the processing so as to bring the mold and the substrate close to each other at a first relative speed and then bring the mold and the substrate close to each other at a second relative speed lower than the first relative speed, and controls switching from the first relative speed to the second relative speed so as to compensate a manufacturing error of the mold.

    Position detection apparatus, imprint apparatus, and article manufacturing method

    公开(公告)号:US12023850B2

    公开(公告)日:2024-07-02

    申请号:US17859366

    申请日:2022-07-07

    IPC分类号: B29C59/00 B29C59/02 B29C37/00

    摘要: A position detection apparatus comprises an obtaining unit that obtains an image of a moiré that occurs due to first and second diffraction gratings overlapping; and a processor configured to perform a periodic analysis of a luminance distribution of the obtained image of the moiré, obtain a phase measurement value of the luminance distribution, and obtain a relative positioning between the first and second diffraction gratings, wherein the processor determines a phase shift amount for making the obtained phase measurement value be a value outside of a predetermined range including a discontinuous part of the phase, and performs a phase shift to shift the obtained phase measurement value by the determined phase shift amount, and obtains the relative positioning based on the phase-shifted phase measurement value.

    Pneumatic system, imprint apparatus and use thereof

    公开(公告)号:US11981052B2

    公开(公告)日:2024-05-14

    申请号:US17291639

    申请日:2019-11-08

    摘要: A method of imprinting a substrate (180), comprising affixing a flexible stamp (104) carrying an imprinting pattern (106) to a first carrier (102) comprising an array of apertures (112) which, by gas pressure, either pull the flexible stamp towards the first carrier or push it away; pushing it to a second carrier (170) carrying a substrate (180) with a resist layer (182), leaving a gap (190) for creating a controllable contact area between the flexible stamp and the substrate and space (196) between the first carrier and the flexible stamp; progressively pushing areas of the flexible stamp into the resist layer to imprint it; developing the resist layer; and progressively releasing the flexible stamp by applying suction through successive apertures whilst controlling the inward flow of gas to the space (196) through the apertures that are not yet under suction in order to maintain the space (196) there above ambient but below a predetermined maximum pressure.

    DEVICE AND METHOD FOR EMBOSSING A COMPONENT
    9.
    发明公开

    公开(公告)号:US20240083100A1

    公开(公告)日:2024-03-14

    申请号:US18221846

    申请日:2023-07-13

    IPC分类号: B29C59/02 B29C59/00

    摘要: A device, e.g., a heat exchanger, is disclosed. The device includes a first component and a second component. The first component has at least a first surface portion and a second surface portion. The first surface portion and the second surface portion are located opposite to one another and are spaced apart from one another. The first component includes a first support groove provided at the first surface portion and a functional groove provided at the first surface portion. The functional groove is arranged spaced apart from the first support groove at least in some sections. The functional groove is structured and arranged for partially receiving a second component for a substance-to-substance bond.